VERTICALLY SPACED ELECTRODE STRUCTURE
    77.
    发明申请
    VERTICALLY SPACED ELECTRODE STRUCTURE 有权
    垂直间距电极结构

    公开(公告)号:US20150257260A1

    公开(公告)日:2015-09-10

    申请号:US14198658

    申请日:2014-03-06

    Abstract: A vertically separated electrode structure includes a polymeric material post on a substrate. An inorganic material cap covers the top of the post and extends beyond an edge of the post in at least a width dimension to define a first reentrant profile. A first electrode is located over the cap. A second electrode is located over the substrate and not over the post. The second electrode is adjacent to the edge of the post in the reentrant profile such that a distance between the first electrode and second electrode is greater than zero when measured orthogonally to the substrate surface. The first electrode and second electrode have the same material composition and layer thickness.

    Abstract translation: 垂直分离的电极结构包括在基底上的聚合物材料柱。 无机材料盖覆盖柱的顶部并且在至少一个宽度尺寸上延伸超出柱的边缘以限定第一凹槽轮廓。 第一电极位于盖上。 第二电极位于衬底上并且不在柱上。 第二电极在折返轮廓中与柱的边缘相邻,使得当与衬底表面正交测量时,第一电极和第二电极之间的距离大于零。 第一电极和第二电极具有相同的材料组成和层厚度。

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