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公开(公告)号：KR1020050007873A
公开(公告)日：2005-01-21
申请号：KR1020030047490
申请日：2003-07-12
Applicant: 한국과학기술원
IPC: H01L41/04
Abstract: PURPOSE: A translational and rotational motion stage is provided to obtain the precise operation according to the amplified or diminished motion using a bridge mechanism. CONSTITUTION: A plurality of moving parts(2) having a leaf spring guide(5) are symmetrically formed in a main body(1). A piezo-electric element(10) connects a fixed part(3) of the main body with the each moving part. A plurality of bridge mechanisms(20) have an end part of each side and a flat part bent toward the end part. A flat plate(30) is attached to the center point formed by crossing of center lines of a plurality of flat parts.
Abstract translation: 目的：提供平移和旋转运动级，以使用桥接机构根据放大或减少的运动获得精确的操作。 构成：具有片簧引导件（5）的多个移动部件（2）在主体（1）中对称地形成。 压电元件（10）将主体的固定部（3）与每个移动部连接。 多个桥机构（20）具有每侧的端部和朝向端部弯曲的平坦部。 平板（30）安装在由多个平坦部分的中心线交叉形成的中心点上。
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公开(公告)号：KR1020040011628A
公开(公告)日：2004-02-11
申请号：KR1020020044442
申请日：2002-07-27
Applicant: 한국과학기술원
IPC: H01L21/60
CPC classification number: C25D5/18 , C25D5/12 , C25D7/123 , H01L21/2885 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/0401 , H01L2224/05147 , H01L2224/05155 , H01L2224/05647 , H01L2224/05655 , H01L2224/11462 , H01L2224/1147 , H01L2224/13099 , H01L2224/131 , H01L2924/0001 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01015 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/14 , H01L2924/00014
Abstract: PURPOSE: A fabrication method of UBM(under bump metallurgy) by electroplating for flip chip interconnections is provided to be capable of reducing fabrication cost and improving the reliability of the UBM. CONSTITUTION: A wafer having a predetermined pattern is dipped in a plating solution. At this time, the plating solution contains nickel ion supply source and copper ion supply source. The first copper layer(15) is formed at the upper portion of a pad(12) of a chip(11) by applying predetermined current density. A nickel-copper alloyed layer(16) is formed at the upper portion of the first copper layer as a diffusion barrier between a solder bump and the pad by increasing the current density. Preferably, the second copper layer(17) is formed at the upper portion of the nickel-copper alloyed layer by reducing the current density.
Abstract translation: 目的：提供通过电镀倒装芯片互连的UBM（凸块下冶金）的制造方法，以降低制造成本，提高UBM的可靠性。 构成：将具有预定图案的晶片浸入电镀液中。 此时，镀液含有镍离子供应源和铜离子供应源。 通过施加预定的电流密度，第一铜层（15）形成在芯片（11）的焊盘（12）的上部。 通过增加电流密度，在第一铜层的上部形成镍 - 铜合金层（16）作为焊料凸块和焊盘之间的扩散阻挡层。 优选地，通过降低电流密度，在镍 - 铜合金层的上部形成第二铜层（17）。
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公开(公告)号：KR100397845B1
公开(公告)日：2003-09-13
申请号：KR1020010065502
申请日：2001-10-23
Applicant: 한국과학기술원
IPC: A61B1/01
Abstract: PURPOSE: An intestinal travel device is provided to achieve improved performance of movement, while allowing for direction reverse and movement against the adsorptive power of intestine. CONSTITUTION: An intestinal travel device comprises a shell(10) having an appropriate size to be inserted into a narrow and long tube; a plurality of elastic orbits(12) radially arranged at the shell, and which has an elastic force and friction on the inner wall of the tube; and a driving unit mounted on the shell so as to drive the elastic orbit. The driving unit includes a driving motor(14) mounted on the shell; a worm gear(16) mounted to the rotating shaft of the driving motor; and a tooth form arranged on the surface of the elastic orbit at a predetermined angle for each pitch with respect to the lengthwise direction, in such a manner that the tooth form is engaged with the tooth form of the worm gear.
Abstract translation: 目的：提供肠道移动装置以实现改善的运动性能，同时允许方向反向并且抵抗肠的吸附力运动。 构成：一种肠道传送装置包括一个具有适当尺寸的外壳（10），以便插入一个狭长管中; 多个弹性轨道（12），所述多个弹性轨道径向布置在所述壳体处，并且在所述管的内壁上具有弹性力和摩擦力; 以及安装在壳体上以驱动弹性轨道的驱动单元。 驱动单元包括安装在壳体上的驱动马达（14） 安装在驱动电机的旋转轴上的蜗轮（16） 以及齿形以与蜗轮的齿形啮合的方式以相对于长度方向的每个节距以预定角度布置在弹性轨道的表面上。
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公开(公告)号：KR100381819B1
公开(公告)日：2003-04-26
申请号：KR1020000003648
申请日：2000-01-26
Applicant: 한국과학기술원
IPC: H02K41/02
Abstract: PURPOSE: The linear motor using electromagnetic clamper is provided to make structure be clamped on the bottom as a great force using electromagnetic force and can also drive at high frequency. CONSTITUTION: The linear motor using electromagnetic clamper comprises a wire(25) with many windings like a coil in the middle, many electromagnetic clampers(20) which are ferromagnetic to change direction of magnetic field according to flowing direction of current input from the wire(25), a pizoelectric material connecting with the many electromagnetic clampers(20), and a guide block(30) which are ferromagnetic and adjacent to the both sides of the many electromagnetic clampers(20) and guide moving of the many electromagnetic clampers(20). The electromagnetic loop(95) generated by direction of input current to the wire(25) is formed to pass through the many electromagnetic clampers(20) and the guide block(30). The attractive force is acted between the many electromagnetic clampers(20) and the guide block(30), or the many electromagnetic clampers(20) and the guide block(30) can free slip relatively because the electromagnetic loop(96) is formed outward passing through the many electromagnetic clampers(20).
Abstract translation: 用途：采用电磁夹钳的直线电机，利用电磁力使结构以较大的力夹紧在底部，也可以高频驱动。 本发明涉及一种使用电磁钳位器的线性电动机，它包括一个绕有许多绕组的中间线圈的绕线（25），许多电磁夹具（20）是铁磁的，以根据从绕线输入的电流的流动方向改变磁场的方向 与多个电磁夹持器（20）连接的压电材料和导向块（30），它们是铁磁性的并且与许多电磁夹持器（20）的两侧相邻并且引导许多电磁夹持器（20）的移动 ）。 由导线（25）的输入电流方向产生的电磁回路（95）形成为穿过许多电磁夹持器（20）和导向块（30）。 因为电磁回路（96）向外形成，所以吸引力作用在许多电磁夹持器（20）和导向块（30）之间，或者许多电磁夹持器（20）和导向块（30） 穿过许多电磁夹具（20）。
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公开(公告)号：KR1020020029238A
公开(公告)日：2002-04-18
申请号：KR1020000060088
申请日：2000-10-12
Applicant: 한국과학기술원
IPC: C25F3/02
Abstract: PURPOSE: A cleaning method of workpiece for electrochemical etching is provided which is capable of processing the electrodes in a uniformed shape by removing foreign materials on the surface without separation of electrodes while electrochemical etching is being performed. CONSTITUTION: In a method for performing cleaning while electrodes(1) and the cathode are electrolytic machined in an electrolyte, the cleaning method of workpiece for electrochemical etching comprises the steps of generating bubbles(10) by maintaining positions of the electrodes(1) into the electrolyte for a certain period of time after instantaneously changing an electric potential difference of the electrodes that are being electrolytic machined; and removing bubbles(10) adhered onto the electrodes by moving the electrodes(1) to the above the surface of the electrolyte, thereby standing by there for several seconds when generation of bubbles is completed, wherein cleaning of the workpiece is performed by one or more the above steps, wherein cleaning is performed by sequentially repeating generation of bubbles, removing of bubbles and etching processing for several times after performing etching process by dipping the bubble removed electrodes into the electrolyte again, and wherein the bubbles are generated under a voltage of zero volt by cutting off the power supply impressed to the electrodes.
Abstract translation: 目的：提供一种用于电化学蚀刻的工件的清洁方法，其能够通过在进行电化学蚀刻的同时去除表面上的异物而不分离电极来处理均匀形状的电极。 构成：在电解质中对电极（1）和阴极进行电解处理的方法中，用于电化学蚀刻的工件的清洗方法包括以下步骤：通过将电极（1）的位置保持为 电解质在瞬时改变正被电解加工的电极的电位差之后一段时间; 并且通过将电极（1）移动到电解质的表面上方而去除附着在电极上的气泡（10），从而在产生气泡完成时静置数秒，其中通过一个或多个 进一步的上述步骤，其中通过在进行蚀刻处理之后依次重复产生气泡，除去气泡和蚀刻处理数次进行清洁，再次将除去气泡的电极再次浸入电解液中，并且其中气泡在 通过切断对电极施加的电源来实现零伏。
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Patent Agency Ranking
公开(公告)号：KR1020020024436A
公开(公告)日：2002-03-30
申请号：KR1020000056179
申请日：2000-09-25
Applicant: 한국과학기술원
IPC: B23H3/00
Abstract: PURPOSE: A method and an apparatus for manufacturing minute perforation punches are provided to improve the productivity by fabricating the minute perforation punches in mass-production. CONSTITUTION: An electrolyte(3) is stored in an electrolytic cell(30). An anode(1) and a cathode(2), which are fabricated as a punch, are immersed into the electrolyte(3) by a predetermined depth. The anode and cathode(1,2) are connected to a positive pole and a negative pole of a control device(4). When the voltage is applied to the anode and cathode(1,2), an oxidation reaction is created at the anode(1) and a reduction reaction is created at the cathode(2). By adjusting current density flowing through the anode(1), the diameter of the anode(1) can be uniformly controlled.
Abstract translation: 目的：提供一种用于制造微小穿孔冲孔的方法和装置，以通过在批量生产中制造微小穿孔冲头来提高生产率。 构成：将电解质（3）储存在电解池（30）中。 将作为冲头制造的阳极（1）和阴极（2）以预定深度浸入电解质（3）中。 阳极和阴极（1,2）连接到控制装置（4）的正极和负极。 当电压施加到阳极和阴极（1,2）时，在阳极（1）处产生氧化反应，并在阴极（2）产生还原反应。 通过调节流过阳极（1）的电流密度，可以均匀地控制阳极（1）的直径。
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公开(公告)号：KR100291952B1
公开(公告)日：2001-06-01
申请号：KR1019990007885
申请日：1999-03-10
Applicant: 한국과학기술원
Abstract: 본발명은공간상의방위(Orientation) 결정을수행할수 있는다축회전장치에있어서, 관성력과마찰력을이용하여다축의정밀회전운동을발생시키는관성마찰에의한다축회전장치를제공하는데 그목적이있다. 본발명에따르면, 다축회전장치에있어서, 소정의두께와폭을가지는원형프레임과, 상기원형프레임의내부직경의하부에반원으로형성되는가이드슬롯과, 상기가이드슬롯과직각을이루며상기원형프레임의외부직경의하부에형성되는반원형프레임을포함하는다수개의회전링크와, 상기회전링크의가이드슬롯내에타 회전링크의반원형프레임이미끄러질수 있도록연결된상기가이드슬롯과반원형프레임사이에위치하며전계가형성되면분극현상에의해전단면이소정의단위벡터량만큼변형되고, 전계가해제되면전계가형성되기전의형태로되는다수개의압전부와, 압전부에형성되어압전부의전단변형에따라움직이고소정의속도이상으로움직이면관성마찰에의한미끄러지는미끄럼부및, 상기회전링크를지지하며상기다수개의회전링크와의사이에는압전부와미끄럼부가형성된지지대를포함하는것을특징으로하는관성마찰에의한다축회전장치가제공된다.
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公开(公告)号：KR1020000019444A
公开(公告)日：2000-04-15
申请号：KR1019980037556
申请日：1998-09-11
Applicant: 한국과학기술원
Abstract: PURPOSE: An inchworm type motor is provided to unify a power source for clamping a rotational body and a power source for rotating the rotational body into one. CONSTITUTION: An inchworm type motor comprises a cylindrical rotor(13) which is rotatable mounted with a fixed shaft(12) in the center, a belt(21,22) which is disposed so as to enclose around an outer circumference of the rotor and closely contacted with or apart from the outer circumference, and a pair of extendable actuators which are respectively provided on each end of the belt so as to linearly move the ends of the belt. The extendable actuators are simultaneously extended so that the belt is closely contacted with the rotor. In the state that the belt is closely contacted with the rotor, one of the actuators is further extended and the other is contracted so that the rotor is rotated. Thereby, since each power source for clamping and rotating the rotor is unified, a number of parts is decreased.
Abstract translation: 目的：提供一种蚯蚓型电动机，用于将用于夹紧旋转体的电源和用于将旋转体旋转的电源组合成一体。 构成：蚯蚓型电动机包括圆筒形转子（13），其可旋转地安装有中心的固定轴（12），带（21,22）被设置成围绕转子的外周包围， 与外圆周紧密接触或分开，以及一对可延伸致动器，其分别设置在带的每个端部上，以便直线地移动带的端部。 可延伸的致动器同时延伸，使得皮带与转子紧密接触。 在带与转子紧密接触的状态下，其中一个致动器进一步延伸，另一个致动器使转子旋转。 因此，由于用于夹紧和旋转转子的每个电源是统一的，所以减少了许多部件。
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公开(公告)号：KR101563961B1
公开(公告)日：2015-10-29
申请号：KR1020140098184
申请日：2014-07-31
Applicant: 한국과학기술원
IPC: B63B27/30
CPC classification number: B63B27/30
Abstract: 본발명의일 측면에따르면, 해상에계류하는공급선박과수급선박사이에서중량물을이송하기위한시스템에있어서, 공급선박상에고정설치되는베이스링크; 상기베이스링크와제1조인트에의해연결되는제1링크; 상기제1링크와제2조인트에의해연결되는제2링크; 상기제2링크와제3조인트에의해연결되는제3링크; 및상기제3링크와제4조인트에의해연결되며, 수급선박상에제5조인트를통해연결되는연결링크;를포함하여형성되며, 상기베이스링크, 제1링크, 제2링크, 제3링크및 연결링크의상부면을따라중량물을적재한캐리어가이동하도록형성되는중량물이송시스템이제공된다.
Abstract translation: 根据本发明的一个方面，一种在供应船和海上供需船舶系泊之间传送重物的系统包括：固定在供应船上的基座; 通过第一关节连接到所述基座连杆的第一连杆; 通过第二链路连接到第一链路的第二链路; 通过第三关节连接到第二连杆的第三连杆; 以及通过第四关节连接到第三连杆的连接链路，并通过第五关节连接到需求和供应容器。 用于传送重物的系统具有载重物，载重物重载在该载体上，并沿连接链路，基链路，第一链路，第二链路和第三链路的上表面移动。
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公开(公告)号：KR101495863B1
公开(公告)日：2015-02-26
申请号：KR1020140009462
申请日：2014-01-27
Applicant: 한국과학기술원
Abstract: 본 발명은 단일 액츄에이터를 이용한 발사형 초경량 활공 로봇 시스템에 관한 것으로, 더욱 상세하게 액츄에이터의 중심회전축과 몸체 양측에 날개회전축으로 연결된 날개살에 날개연결선이 연결되도록 하여, 액츄에이터의 회전만으로 내려져 접혀있던 양쪽 날개가 모두 펼쳐질 수 있는 발사형 초경량 활공 로봇 시스템에 관한 것이다.
Abstract translation: 本发明涉及使用单个致动器的发射型超轻型滑翔机器人系统。 根据本发明，机翼连接线通过机翼旋转轴连接到机翼转动轴的中心旋转轴和主体的两侧，使得下降和折叠的机翼只能通过旋转的方式展开 执行器。
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