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公开(公告)号：KR102241978B1
公开(公告)日：2021-04-19
申请号：KR1020140120477
申请日：2014-09-11
Applicant: 삼성전자주식회사
Abstract: 피검체의표면검사방법에따르면, 피검체의표면과평행한제 1 방향을따라조사되는레이저에링 형상을부여할수 있다. 상기링 형상의레이저의크기를조정하여, 상기링 형상의레이저가상기피검체의표면으로입사되는각도를설정할수 있다. 상기링 형상의레이저를상기제 1 방향과직교하는제 2 방향을따라상기피검체의표면을향해서 1차반사시킬수 있다. 상기 1차반사된레이저를상기피검체의검사영역을향해서 2차반사시킬수 있다. 상기피검체의검사영역으로부터반사된레이저를검출할수 있다. 따라서, 링형상의레이저의크기를조정할수가있어서, 피검체의표면으로링 형상의레이저를다양한각도에서조사시킬수 있다.
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公开(公告)号：KR1020130073429A
公开(公告)日：2013-07-03
申请号：KR1020110141268
申请日：2011-12-23
Applicant: 삼성전자주식회사
CPC classification number: G02B5/1876 , G02B5/1857
Abstract: PURPOSE: A zone plate is provided to improve the concentration efficiency of the light, and, therefore, to be able to improve the measurement efficiency of a mask pattern measuring device. CONSTITUTION: A zone plate (100) comprises a first pattern (10) consisting of a first material with first thickness; and a second pattern (20) consisting of a second material with second thickness bigger than the first thickness, and formed in adjacent to the first pattern. The incident light which, has come to the first pattern from the outside, penetrates the first pattern consisting of the first material. The incident light which has come to the second pattern penetrates the second pattern consisting of the second material. The first material and the second material include the same light-transmissive material.
Abstract translation: 目的：提供一种区域板，以提高光的浓度效率，因此能够提高掩模图案测量装置的测量效率。 构造：区板（100）包括由具有第一厚度的第一材料组成的第一图案（10） 以及第二图案（20），其由具有大于所述第一厚度的第二厚度的第二材料组成，并且与所述第一图案相邻地形成。 从外部到达第一图案的入射光穿透由第一材料组成的第一图案。 已经到达第二图案的入射光穿透由第二材料组成的第二图案。 第一材料和第二材料包括相同的透光材料。
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公开(公告)号：KR1020130030686A
公开(公告)日：2013-03-27
申请号：KR1020110094318
申请日：2011-09-19
Applicant: 삼성전자주식회사
IPC: G02B7/28 , G01B9/04 , G01N21/956
CPC classification number: G02B21/245 , G02B7/38 , G02B27/106 , G02B27/14
Abstract: PURPOSE: An auto focusing apparatus for an optical microscope is provided to automatically adjust the focus of the optical microscope using a laser scanning mode. CONSTITUTION: An auto focusing apparatus for an optical microscope using a laser scanning mode includes a focus detection unit(210), a space filter unit and a control unit. The focus detection unit includes a light emitter(212), a wedge mirror(218), a first light receiver(226) and a second light receiver(228). The light emitter emits light having a specific wavelength. The wedge mirror capable of rotating projects the emitted light to multiple spots on the surface of a sample. The first receiver and the second receiver detect the light quantity of laser light reflected at the surface of the sample. In the light reflected at the surface of the sample, a space filter unit removes light which is out of focus and detects the light quantity of light which is in focus. The control unit generates a control signal for performing the focus adjustment of the optical microscope using light quantity information detected through the first receiver, the second receiver and the space filter unit. [Reference numerals] (130) Camera
Abstract translation: 目的：提供一种用于光学显微镜的自动对焦装置，以使用激光扫描模式自动调节光学显微镜的焦点。 构成：使用激光扫描模式的光学显微镜的自动对焦装置包括焦点检测单元（210），空间滤波单元和控制单元。 焦点检测单元包括光发射器（212），楔形反射镜（218），第一光接收器（226）和第二光接收器（228）。 发光体发射具有特定波长的光。 能够将发射的光投射到样品表面上的多个点的楔形镜能够旋转。 第一接收器和第二接收器检测在样品表面反射的激光的光量。 在样品表面反射的光中，空间滤光器单元除去焦点不足的光并检测被聚焦的光的光量。 控制单元使用通过第一接收器，第二接收器和空间滤波器单元检测的光量信息产生用于执行光学显微镜的聚焦调整的控制信号。 （附图标记）（130）相机
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公开(公告)号：KR1020090038966A
公开(公告)日：2009-04-22
申请号：KR1020070104301
申请日：2007-10-17
Applicant: 삼성전자주식회사
IPC: H01L21/66 , H01L21/027
CPC classification number: G03F7/7085 , G01N21/956 , G03F7/70616 , H01L22/12
Abstract: An apparatus for checking uniformity of a critical dimension of a pattern is provided to shorten a check measurement time by performing a check in an atmosphere state. A Zeeman laser(20) irradiates a beam having a different frequency. A beam controller(60) controls a spot size of a laser beam irradiated form the Zeeman laser. A beam splitter(70) multiply separates a beam having a controlled spot size. An optical system(80) irradiates a multiply separated light to a sample(10) by changing an optical route, and guides an optical route of a beam reflected from the sample. A polarizer(30) transmits a reflected beam having changed polarization information. A detector(40) detects a light amount of the reflected beam. A lock-in amplifier(50) amplifies a beat frequency of the reflected beam detected in the detector and a reference signal frequency irradiated in the Zeeman laser, and measures an amplitude and a phase signal of a laser reflected from the sample at the same time. A check part(90) checks a critical dimension uniformity of a sample pattern.
Abstract translation: 提供了用于检查图案的临界尺寸的均匀性的装置，以通过在大气状态下执行检查来缩短检查测量时间。 塞曼激光器（20）照射具有不同频率的光束。 光束控制器（60）控制从塞曼激光器照射的激光束的光斑尺寸。 分束器（70）将具有受控光斑尺寸的光束分开。 光学系统（80）通过改变光学路线将多重分离的光照射到样品（10），并且引导从样品反射的光束的光路。 偏振器（30）透射具有改变的偏振信息的反射光束。 检测器（40）检测反射光束的光量。 锁定放大器（50）放大检测器中检测到的反射光束的拍频和在塞曼激光器中照射的参考信号频率，同时测量从样品反射的激光的振幅和相位信号 。 检查部件（90）检查样品图案的临界尺寸均匀性。
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公开(公告)号：KR100737451B1
公开(公告)日：2007-07-10
申请号：KR1020060019384
申请日：2006-02-28
Applicant: 삼성전자주식회사
IPC: H01L21/683
Abstract: A chuck for a wafer test apparatus is provided to support the lower surface of a wafer by using frictional force of a frictional support member installed on an upper surface of a first plate. A chuck includes a first plate(41) in which a wafer is mounted on an upper surface of the first plate, and at least one frictional support member(44) installed on the upper surface of the first plate for preventing rolling of the wafer and having a given frictional coefficient. The first plate and the frictional support member are made of conductive material for flow of current. The frictional support member is an O-ring extended in a radial direction of the first plate, and the first plate is provided with an engaging groove having a shape corresponding to the frictional support member.
Abstract translation: 提供一种用于晶片测试设备的卡盘，以通过使用安装在第一板的上表面上的摩擦支撑构件的摩擦力来支撑晶片的下表面。 卡盘包括其中晶片安装在第一板的上表面上的第一板（41）和安装在第一板的上表面上用于防止晶片的滚动的至少一个摩擦支撑构件（44），以及 具有给定的摩擦系数。 第一板和摩擦支撑构件由用于电流流动的导电材料制成。 摩擦支撑构件是沿第一板的径向方向延伸的O形环，并且第一板设置有具有与摩擦支撑构件对应的形状的接合槽。
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Patent Agency Ranking
公开(公告)号：KR100643389B1
公开(公告)日：2006-11-10
申请号：KR1020050059853
申请日：2005-07-04
Applicant: 삼성전자주식회사
IPC: G02F1/13
Abstract: An apparatus and a method for inspecting a thin film transistor substrate are provided to effectively inspect the thin film transistor, by measuring an electric signal generated from a pixel electrode, which is irradiated with an electron beam, through a data line. A stage(20) for loading a thin film transistor substrate is positioned within a vacuum chamber(10). An electron beam generator(30) is positioned above the stage. A gate driver(40) applies a gate on voltage to a gate line, thereby turning on a thin film transistor. A signal detector(50) is connected to a data line, and detects an electric signal from a pixel electrode. A controller(60) controls the gate driver and the electron beam generator to irradiate the pixel electrode with an electron beam while the thin film transistor is turned on.
Abstract translation: 提供了一种用于检查薄膜晶体管基板的设备和方法，以通过测量由数据线从用电子束照射的像素电极产生的电信号来有效地检查薄膜晶体管。 用于装载薄膜晶体管基板的台（20）位于真空室（10）内。 电子束发生器（30）位于台上方。 栅极驱动器（40）将栅极导通电压施加到栅极线，由此导通薄膜晶体管。 信号检测器（50）连接到数据线，并检测来自像素电极的电信号。 控制器（60）控制栅极驱动器和电子束发生器，以在薄膜晶体管导通时用电子束照射像素电极。
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公开(公告)号：KR101891182B1
公开(公告)日：2018-08-24
申请号：KR1020120018092
申请日：2012-02-22
Applicant: 삼성전자주식회사
Abstract: 샘플로부터반사된광 빔이입사하는집광렌즈의초점위치들을잇는초점라인과이미지센서의수광면이교차하도록구성함으로써이미지센서를통한단 한번의촬영으로대물렌즈의초점위치에대한샘플의초점위치어긋남을판단할수 있어대물렌즈의초점면에대한샘플의상대적인위치를신속하고정밀하게파악할수 있고보다효과적인자동초점을수행할수 있는자동초점조절장치를개시한다.
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公开(公告)号：KR1020170012037A
公开(公告)日：2017-02-02
申请号：KR1020160087975
申请日：2016-07-12
Applicant: 삼성전자주식회사
Abstract: 송신장치가개시된다. 송신장치는제1 정보및 제2 정보로구성된 L1 시그널링을생성하는 L1 시그널링생성부, 복수의서브프레임을포함하는페이로드를가지는프레임을생성하는프레임생성부및 L1 시그널링을포함하는프리앰블을프레임에포함시켜프레임을송신하는신호처리부를포함하며, 제1 정보는, 복수의서브프레임중 첫번째서브프레임을디코딩하기위한정보를포함한다. 이에따라, 수신장치에서의처리딜레이가감소된다.
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公开(公告)号：KR1020140049369A
公开(公告)日：2014-04-25
申请号：KR1020120115537
申请日：2012-10-17
Applicant: 삼성전자주식회사
CPC classification number: G01B11/2441 , G01N21/88
Abstract: Provided is a method for measuring a surface geometry using a database. The method for measuring a surface geometry using a database includes a step of moving an object to multiple positions and creating multiple interference signals by emitting light to the object and a reference mirror in each position; a step of creating an interference waveform according to the multiple interference signals; and a step of measuring the surface geometry of the object by comparing the interference waveform with a database.
Abstract translation: 提供了一种使用数据库来测量表面几何的方法。 使用数据库测量表面几何的方法包括将物体移动到多个位置并通过在每个位置向对象和参考镜发射光而产生多个干涉信号的步骤; 根据多个干扰信号产生干扰波形的步骤; 以及通过将干扰波形与数据库进行比较来测量物体的表面几何形状的步骤。
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公开(公告)号：KR100688974B1
公开(公告)日：2007-03-08
申请号：KR1020060022053
申请日：2006-03-09
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: An inspecting apparatus using a charged particle beam in a vacuum chamber is provided to secure easily an installation space and detect a correct image from a target to be inspected. An inspecting unit(140) is supported by one side of a vacuum chamber(110). The inspecting unit includes a lens(141) for collecting charged particles which are reflected from a target(120) to be inspected. A driving unit(150) includes a focus driving device(151) for controlling a focus of the lens and a horizontal driving device(152) for driving a stage. A sensor unit(160) is coupled with the inside of the vacuum chamber and senses a gap between the lens and the target by using a capacitance effect. A control unit(170) controls the driving unit by using the sensed information of the sensor unit.
Abstract translation: 提供一种在真空室中使用带电粒子束的检查设备，以容易地确保安装空间并且从待检查目标检测正确图像。 检查单元（140）由真空室（110）的一侧支撑。 检查单元包括用于收集从待检查目标（120）反射的带电粒子的透镜（141）。 驱动单元（150）包括用于控制透镜的焦点的聚焦驱动装置（151）和用于驱动平台的水平驱动装置（152）。 传感器单元（160）与真空室的内部耦合，并通过使用电容效应来感测透镜和目标之间的间隙。 控制单元（170）通过使用传感器单元的感测信息来控制驱动单元。
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