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公开(公告)号：KR101287445B1
公开(公告)日：2013-07-19
申请号：KR1020090094662
申请日：2009-10-06
Applicant: 한국전자통신연구원
IPC: G01N27/414 , G01N27/327 , H01L29/786
Abstract: 본 발명의 바이오 센서 어레이 소자는 기판, 기판 상부에 형성된 소스 및 드레인, 소스 및 드레인 상부에 형성된 게이트, 소스 및 드레인 사이에 형성되는 실리콘 나노 채널을 포함하는 트랜지스터; 및 기판 하부를 식각하여 노출된 상기 트랜지스터의 실리콘 나노 채널에 부착되어, 외부로부터 주입되는 타겟 분자와 반응하는 프로브 분자를 포함하는 복수의 바이오 센서 셀을 포함하며, 복수의 바이오 센서 셀이 어레이 형태를 갖는다. 따라서, 고 집적된 어레이 구조를 통해 타겟 물질을 많은 센서 셀에서 빠른 시간에 검출할 수 있다.
바이오CMOS, 1T 구조, 바이오 센서 어레이-
公开(公告)号：KR101217576B1
公开(公告)日：2013-01-03
申请号：KR1020090089537
申请日：2009-09-22
Applicant: 한국전자통신연구원
IPC: G01N27/416 , G01N27/414 , G01N33/48
CPC classification number: G01N27/4145
Abstract: 본발명은바이오센서에대한것으로서, 이장치는소스, 드레인및 상기소스와드레인사이에형성되는채널을포함하는기판, 상기채널위에형성되는게이트절연막, 상기소스, 드레인과각각연결되어있는소스전극및 드레인전극을포함하는트랜지스터, 상기트랜지스터와내부공간을갖도록상기트랜지스터를덮으며, 타겟분자를포함하는샘플용액을흘리는유체관, 상기유체관의내벽에형성되어있는기준전극, 그리고상기기준전극위에부착되어있으며, 상기타겟분자와반응하는프로브분자층을포함한다. 따라서기준전극을유체관내벽에형성함으로써, 바이오소자의소형화가가능해지며, 프로브분자를기준전극위에형성함으로써기준전극과게이트절연막사이의전위차에따른문턱전압변화를측정함으로감도및 반응속도가크게향상될수 있다.
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公开(公告)号：KR101026468B1
公开(公告)日：2011-04-01
申请号：KR1020080089237
申请日：2008-09-10
Applicant: 한국전자통신연구원
CPC classification number: G01N33/54373 , B01L3/502761 , B01L2200/143 , B01L2300/0636 , B01L2300/0645 , B01L2300/0867 , B01L2300/163 , B01L2400/0415 , G01N27/4145
Abstract: FET를 이용한 생분자 검출 장치 및 검출 방법이 제공된다. 생분자 검출 장치는 기판, 상기 기판에 서로 이격되어 배치된 소오스 및 드레인 전극, 소오스 및 드레인 전극 사이의 채널 영역 및 채널 영역에 고정된 프로브 분자를 포함하는 FET, 프로브 분자가 고정된 FET의 채널 영역으로, 저이온 농도의 기준 버퍼 용액 및 타겟 분자를 포함하는 고이온 농도의 반응 용액을 선택적으로 공급하는 미세 유체 공급부 및 프로브 분자가 고정된 FET의 채널 영역에서의 제 1 전류 값과, 고이온 농도의 반응 용액에서 결합된 프로브 분자와 타겟 분자가 고정된 FET의 채널 영역에서의 제 2 전류 값을 측정하여 타겟 분자를 검출하는 생분자 검출부를 포함한다.
생분자, 이온 세기, 반응 용액, 기준 버퍼 용액, 안정화 버퍼, 전계 효과 트랜지스터-
公开(公告)号：KR1020110032172A
公开(公告)日：2011-03-30
申请号：KR1020090089537
申请日：2009-09-22
Applicant: 한국전자통신연구원
IPC: G01N27/416 , G01N27/414 , G01N33/48
CPC classification number: G01N27/4145
Abstract: PURPOSE: A biosensor and a driving method thereof are provided to remarkably improve sensitivity and reaction velocity by forming a probe molecule on a reference electrode. CONSTITUTION: A biosensor comprises a transistor, a fluid pipe(250), a reference electrode(260), and a probe molecular layer(320). The transistor has a substrate(200), a gate insulator film(217), and a source/drain electrode(215). The substrate has a channel formed in a source, a drain, and a gap between the source and the drain. The gate insulator film is formed on the channel. The source/drain electrode is connected to the source and the drain. The fluid pipe covers the transistor and moves a sample solution with target molecules. The reference electrode is formed in the inner wall of the fluid pipe. The probe molecule layer is attached on the top of the reference electrode and reacts with the target molecules.
Abstract translation: 目的：提供生物传感器及其驱动方法，通过在参比电极上形成探针分子来显着提高灵敏度和反应速度。 构成：生物传感器包括晶体管，流体管（250），参比电极（260）和探针分子层（320）。 晶体管具有基板（200），栅极绝缘膜（217）和源极/漏极（215）。 衬底具有形成在源极，漏极和源极和漏极之间的间隙的沟道。 栅极绝缘膜形成在沟道上。 源极/漏极连接到源极和漏极。 流体管覆盖晶体管并移动具有目标分子的样品溶液。 参考电极形成在流体管的内壁中。 探针分子层附着在参比电极的顶部并与目标分子反应。
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公开(公告)号：KR1020100072533A
公开(公告)日：2010-07-01
申请号：KR1020080130964
申请日：2008-12-22
Applicant: 한국전자통신연구원
Abstract: PURPOSE: A biosensor chip is provided to reduce the manufacturing cost of the biosensor chip compared to a conventional biosensor chip and to easily utilize the small sized biosensor chip. CONSTITUTION: A biosensor chip comprises the following: a sensing unit(150) detecting a target material by the mutual reaction between the target material and a sensing material; a circuit board unit electrically connected with the sensing unit; a channel unit(140) supplying a fluidic material containing the target material to the sensing unit; and a cover(120) covering the channel unit and the sensing unit, while being connected with the circuit board unit. The cover includes a solution inlet(124) and a solution outlet(125) for the fluidic material.
Abstract translation: 目的：提供生物传感器芯片，以降低生物传感器芯片的制造成本，与传统的生物传感器芯片相比，并且易于利用小型生物传感器芯片。 构成：生物传感器芯片包括：感测单元（150），通过目标材料和感测材料之间的相互反应检测目标材料; 与感测单元电连接的电路板单元; 通道单元（140），将含有所述目标材料的流体材料供应到所述感测单元; 以及在与电路板单元连接的同时覆盖通道单元和感测单元的盖（120）。 盖子包括用于流体材料的溶液入口（124）和溶液出口（125）。
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Patent Agency Ranking
公开(公告)号：KR1020090062373A
公开(公告)日：2009-06-17
申请号：KR1020070129581
申请日：2007-12-13
Applicant: 한국전자통신연구원
IPC: H01L21/336 , H01L29/78
CPC classification number: G01N27/4145 , H01L29/66818 , H01L29/7853
Abstract: A high sensitive sensor and a manufacturing method thereof are provided to obtain a high signal by controlling depletion and accumulation of a channel by combining a target material and a sensing material in both sides. An SOI(Silicon On Insulator) substrate is formed in an upper part of a semiconductor substrate. A mask pattern is formed by performing a lithography process in the upper part of the SOI substrate. The structure of a pin shape is formed by etching a silicon layer in the upper part of the SOI substrate. The sensor structure with a pin shaped structure is formed on the semiconductor substrate. A metal electrode is deposited by implanting the ion for electrical ohmic contact to the sensor structure. A sensing material combined in a target material is fixed in both sidewalls of the pin shaped structure. The path for penetrating the target material through the pin-shaped structure is formed on the sensor structure.
Abstract translation: 提供了一种高灵敏度传感器及其制造方法，以通过在两侧组合目标材料和感测材料来控制通道的耗尽和累积来获得高信号。 在半导体衬底的上部形成SOI（绝缘体上硅）衬底。 通过在SOI衬底的上部进行光刻工艺来形成掩模图案。 针状结构通过在SOI衬底的上部蚀刻硅层而形成。 具有针状结构的传感器结构形成在半导体衬底上。 通过将用于电欧姆接触的离子注入传感器结构来沉积金属电极。 组合在目标材料中的感测材料固定在销形结构的两个侧壁中。 在传感器结构上形成穿过针状结构穿透目标材料的路径。
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公开(公告)号：KR1020090058883A
公开(公告)日：2009-06-10
申请号：KR1020070125679
申请日：2007-12-05
Applicant: 한국전자통신연구원
CPC classification number: H01L29/0665 , B82Y10/00 , B82Y15/00 , H01L29/0673 , H01L29/78696
Abstract: A semiconductor nano wire sensor and a manufacturing method thereof are provided to implement a silicon nano wire channel of a line width with several nano meters by using a photolithographic process. A first conductive single crystal silicon line pattern is formed in the uppermost layer of an SOI(Silicon On Insulator) substrate. A second conductive channel(216b) is formed in both ends of the line width direction of the first conductive single crystal silicon line pattern. The second conductive pad is formed in both sides of the longitudinal direction of the first conductive single crystal silicon line pattern. A first electrode(242) for applying a reverse bias voltage is formed in an undoped region of the first conductive single crystal silicon line pattern. A second electrode(232) for applying the bias voltage to both sides of the second conductive channel is formed on the second conductive pad.
Abstract translation: 提供半导体纳米线传感器及其制造方法，通过使用光刻工艺来实现具有数纳米的线宽的硅纳米线通道。 在SOI（绝缘体上硅）衬底的最上层形成第一导电单晶硅线图形。 第二导电沟道（216b）形成在第一导电单晶硅线图案的线宽方向的两端。 第二导电焊盘形成在第一导电单晶硅线图案的纵向方向的两侧。 在第一导电单晶硅线图案的未掺杂区域中形成用于施加反向偏置电压的第一电极（242）。 在第二导电焊盘上形成用于将偏置电压施加到第二导电沟道两侧的第二电极（232）。
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公开(公告)号：KR1020090035209A
公开(公告)日：2009-04-09
申请号：KR1020070100350
申请日：2007-10-05
Applicant: 한국전자통신연구원
CPC classification number: H01J49/4205 , B81B7/0025 , B81B2201/0214 , B81B2201/0271 , B82Y10/00 , B82Y40/00 , G01N2291/0257 , H01J49/0018 , H01L29/0673 , H01L29/7613 , H01L29/775 , H03H2009/02314
Abstract: A three dimensional nano device including nano structures is provided to complement electrical devices and optical devices to each other by improving electrical characteristics of nano device presented in a two-dimensional plane structure. A three dimensional nano device including nano structures comprises: at least one nano structure having a vibration unit(111) formed above a substrate and a support unit(112) supporting the both ends of the vibration unit; a support stand(120) formed on the substrate to support the support unit of the nano structures; a controller, formed in an upper part or lower part of the substrate or both sides of the upper part and lower part, for controlling the nano structures; a sensing unit(150) formed on the vibration unit to sense materials which are flowed in from the outside; and an external vibration unit formed in the lower part of the substrate.
Abstract translation: 提供包括纳米结构的三维纳米器件，以通过改善呈现在二维平面结构中的纳米器件的电特性来彼此补充电子器件和光学器件。 包括纳米结构的三维纳米器件包括：至少一个纳米结构，其具有形成在衬底上方的振动单元（111）和支撑所述振动单元两端的支撑单元（112） 形成在所述基板上以支撑所述纳米结构的支撑单元的支撑台（120） 形成在基板的上部或下部或上部和下部的两侧的控制器，用于控制纳米结构; 感测单元（150），其形成在所述振动单元上以感测从外部流入的材料; 以及形成在基板的下部的外部振动单元。
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公开(公告)号：KR100881956B1
公开(公告)日：2009-02-06
申请号：KR1020070108057
申请日：2007-10-26
Applicant: 한국전자통신연구원
IPC: G01N33/48
CPC classification number: B01J19/0046 , B01J2219/00283 , B01J2219/00351 , B01J2219/00475 , B01J2219/00529 , B01J2219/00533 , B01J2219/00596 , B01J2219/00605 , B01J2219/00659 , B01J2219/00691 , B01L9/52
Abstract: A biochemistry sensor surface treating apparatus is provided to mass produce a sensor by performing a process of surface-processing the sensor by using automatized apparatus. A biochemistry sensor surface treating apparatus contains one or more containers(216) putting one sample of chemical substance, biochemical substance and biomass which are samples surface-processed at one-side of chip used as a biochemistry sensor; a chip off-loading unit(224) having size inserted inside the container for surface process of chip; one or more process areas(210,230) containing a changeable transfer frame(214) changed along X-Y-Z shafts for surface-processing the chip. A first engaging portion attaching/detaching the chip off-loading unit is equipped at a bottom of the Z-shaft.
Abstract translation: 提供了一种生化传感器表面处理装置，通过使用自动化装置进行表面处理传感器的处理来大量生产传感器。 生物传感器表面处理装置包含一个或多个容器（216），将一个样品的化学物质，生化物质和生物质样品在用作生物化学传感器的芯片的一侧进行表面处理; 芯片卸载单元（224），其尺寸插入到用于芯片表面处理的容器内; 一个或多个包含可更换传送框架（214）的处理区域（210,230）沿X-Y-Z轴改变，以对芯片进行表面处理。 安装/拆卸芯片卸载单元的第一接合部分设置在Z轴的底部。
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10.发明公开
公开(公告)号：KR1020080052294A
公开(公告)日：2008-06-11
申请号：KR1020070082205
申请日：2007-08-16
Applicant: 한국전자통신연구원
CPC classification number: G01N33/5308 , C12Q1/6825 , G01N33/54313 , G01N33/54393 , Y10T436/143333 , B82Y15/00
Abstract: Substrates for analyzing the coverage of self-assembled molecules are provided to measure efficiently the presence and reaction degree of functional groups on the surface of self-assembled molecules by using nanoparticles without use of complicated methods such as FT-IR(Fourier Transform InfraRed), XPS(X-ray photoelectron spectroscopy) and fluorescence method. A substrate for analyzing the coverage of self-assembled molecules comprises: a substrate(100) for immobilizing biomaterials; a self-assembled molecule layer(102) formed on the substrate and having a functional group capable of reacting with an amine group; a capture DNA molecule(200) having the amine group to be combined with the self-assembled molecule layer; and a probe DNA molecule combining with the capture DNA molecule and having nanoparticles on the surface, wherein the functional group capable of reacting with an amine group is -SH, -NH2, -Si(OCH3)3, -Si(OC2H5)3 and -Si(Cl)3. Further, the substrate(100) for immobilizing biomaterial is one selected from a group consisting of glass, polycarbonate, polyester, polyethylene, polypropylene and wafer.
Abstract translation: 提供用于分析自组装分子覆盖的底物，通过使用纳米粒子，有效地测量自组装分子表面官能团的存在和反应程度，而不使用复杂的方法，如FT-IR（傅立叶变换红外） XPS（X射线光电子能谱）和荧光法。 用于分析自组装分子的覆盖的基板包括：用于固定生物材料的基底（100）; 形成在所述基板上并具有能够与胺基反应的官能团的自组装分子层（102）; 具有与自组装分子层结合的胺基的捕获DNA分子（200）; 和与捕获DNA分子结合并在表面上具有纳米颗粒的探针DNA分子，其中能与胺基反应的官能团为-SH，-NH2，-Si（OCH3）3，-Si（OC2H5）3和 -Si（CL）3。 此外，用于固定生物材料的基板（100）选自由玻璃，聚碳酸酯，聚酯，聚乙烯，聚丙烯和晶片组成的组中的一种。
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