公开(公告)号：WO2013098053A1

公开(公告)日：2013-07-04

申请号：PCT/EP2012/074507

申请日：2012-12-05

Applicant: ASML NETHERLANDS B.V.

Inventor： BUTLER, Hans ,  BLEEKER, Arno ,  HENNUS, Pieter ,  HOEKS, Martinus ,  HOL, Sven, Antoin, Johan ,  VAN DER SCHOOT, Harmen ,  SLAGHEKKE, Bernardus ,  TINNEMANS, Patricius ,  VAN DER WIJST, Marc ,  ZAAL, Koen ,  CADEE, Theodorus, Petrus, Maria ,  BEERENS, Ruud ,  FISCHER, Olof ,  AANGENENT, Wouter ,  BOSCH, Niels, Johannes, Maria

IPC: G03F7/20

CPC classification number: G03F7/70258 ,  G03F7/70275 ,  G03F7/70366 ,  G03F7/70391 ,  G03F7/704 ,  G03F7/70558 ,  G03F7/70816 ,  G03F7/709

Abstract: An exposure apparatus (1) including a projection system (12, 14) configured to project a plurality of radiation beams onto a target; a movable frame (8) that is at least rotatable around an axis (10); and an actuator system (11) configured to displace the movable frame to an axis away from an axis corresponding to the geometric center of the movable frame and to cause the frame to rotate around an axis through the center of mass of the frame.

Abstract translation: 一种曝光装置（1），包括被配置为将多个辐射束投影到目标上的投影系统（12,14） 至少可绕轴线（10）旋转的可移动框架（8）; 以及致动器系统（11），其构造成将可移动框架移动到远离与可移动框架的几何中心对应的轴线的轴线上，并使框架围绕通过框架的质心的轴线旋转。

公开(公告)号：WO2014009042A1

公开(公告)日：2014-01-16

申请号：PCT/EP2013/059999

申请日：2013-05-15

Applicant: ASML NETHERLANDS B.V.

Inventor： BOON, Fidelus ,  HOL, Sven ,  FISCHER, Olof

IPC: G03F7/20

CPC classification number: G03F7/70833 ,  F16C32/0459 ,  G03F7/70058 ,  G03F7/704 ,  G03F7/70816

Abstract: A support (40) for a movable element (8) includes a stator element (52), a gravity compensator field inducing element (80) mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force (46) to the movable element by controlling a magnetic field (81) in a gap (42) between the stator element and the movable element, and a plurality of torque compensator field inducing elements (66A-D) mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field (77, 79) in the gap between the stator element and the movable element, the torque being about a first axis (48, 50) substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.

Abstract translation: 用于可移动元件（8）的支撑件（40）包括定子元件（52），安装在定子元件上的重力补偿器场引发元件（80），重力补偿器场诱导元件构造成施加平移力（46） 通过控制在定子元件和可动元件之间的间隙（42）中的磁场（81）和安装在定子元件上的多个扭矩补偿器场诱导元件（66A-D）到可移动元件，转矩补偿器 场感应元件被配置为通过控制定子元件和可移动元件之间的间隙中的磁场（77,79）来向可移动元件施加扭矩，扭矩约为基本上垂直于定子元件的第一轴线（48,50） 由重力补偿器场诱导元件施加的平移力的方向。