公开(公告)号：NL2008310A

公开(公告)日：2012-10-08

申请号：NL2008310

申请日：2012-02-17

Applicant: ASML NETHERLANDS BV

Inventor： ZHANG SHAOXIAN ,  BASELMANS JOHANNES ,  JASPER JOHANNES

IPC: G03F7/20

公开(公告)号：NL2010262A

公开(公告)日：2013-09-10

申请号：NL2010262

申请日：2013-02-07

Applicant: ASML NETHERLANDS BV

Inventor： BASELMANS JOHANNES ,  JASPER JOHANNES

IPC: G03F7/20

公开(公告)号：NL2007439A

公开(公告)日：2012-04-23

申请号：NL2007439

申请日：2011-09-19

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  DAM MARINUS ,  JASPER JOHANNES ,  HAM RONALD ,  SHULEPOV SERGEI ,  PIETERSE GERBEN ,  BARAGONA MARCO ,  DEBRAUWER PIETER ,  STEEN ANTONIUS

IPC: G03F7/20

Abstract: A gas manifold to direct a gas flow between two plates of an optical component of a lithographic apparatus, the gas manifold having an inlet, a diffuser downstream of the inlet, a flow straightener downstream of the inlet, a contractor downstream of the flow straightener, and an outlet downstream of the contractor.