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    Polarization control device, and polarization control method
    1.
    发明专利
    Polarization control device, and polarization control method 有权
    极化控制装置和极化控制方法

    公开(公告)号：JP2009177176A

    公开(公告)日：2009-08-06

    申请号：JP2009007725

    申请日：2009-01-16

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： JANSSENS MARCEL HENK ANDRE ,  NOORDMAN OSCAR FRANCISCUS J ,  VISSER HUIBERT ,  NIEUWKOOP EVERT

    IPC: H01L21/027 ,  G02B5/30 ,  G02F1/03

    CPC classification number: G02B27/28 ,  G02F1/0136 ,  G03F7/70566

    Abstract: PROBLEM TO BE SOLVED: To provide a device and a method used for controlling a polarization state of an emitted beam. SOLUTION: A polarization control unit is configured to adjust a polarization state of at least a part of an emitted beam. A measurement arrangement is configured to successively measure the polarization state of the part of the emitted beam. A feedback unit is configured to supply a signal to a polarization control arrangement based on the measured polarization state in order to correct the deviation of the polarization state of the part of the emitted beam from a desired polarization state. For instance, the correction makes the polarization state of the part of the emitted beam surely come into the desired polarization state or return to the desired polarization state. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种用于控制发射光束的偏振状态的装置和方法。 解决方案：偏振控制单元被配置为调节发射光束的至少一部分的偏振状态。 测量装置被配置为连续测量发射束的一部分的偏振状态。 反馈单元被配置为基于所测量的偏振状态向偏振控制装置提供信号，以便校正发射光束的一部分的偏振状态与期望的偏振状态的偏差。 例如，校正使得发射束的一部分的偏振状态确定地进入期望的偏振状态或返回到期望的偏振状态。 版权所有（C）2009，JPO＆INPIT

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