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公开(公告)号：NL2010965A
公开(公告)日：2013-12-24
申请号：NL2010965
申请日：2013-06-13
Applicant: ASML NETHERLANDS BV
Inventor： RIEPEN MICHEL , JANSEN HANS , KATE NICOLAAS , PAULUSSEN DENNIS , SCHIMMEL HENDRIKUS , LABETSKI DZMITRY , CASTELIJNS HENRICUS , MESTROM WILBERT , BADIE RAMIN , KAMPINGA WIM , NIEUWENKAMP JAN , BRINKERT JACOB , VIRGO BRAIN , JILISEN REINIER , RIJPMA ALBERT , FRANKEN JOHANNES , PUTTEN PETER , STRAATEN GERRIT
IPC: H01L21/02
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