公开(公告)号：KR20200125942A

公开(公告)日：2020-11-05

申请号：KR20207025275

申请日：2019-02-28

Applicant: ASML NETHERLANDS BV

Inventor： MA YUE ,  KEMPEN ANTONIUS THEODORUS WILHELMUS ,  HUMMLER KLAUS MARTIN ,  MOORS JOHANNES HUBERTUS JOSEPHINA ,  ROMMERS JEROEN HUBERT ,  VAN DE WIEL HUBERTUS JOHANNES ,  LAFORGE ANDREW DAVID ,  BRIZUELA FERNANDO ,  WIEGGERS ROB CARLO ,  GOMES UMESH PRASAD ,  NEDANOVSKA ELENA ,  KORKMAZ CELAL ,  KIM ALEXANDER DOWNN ,  DUARTE RODRIGUES NUNES RUI MIGUEL ,  VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS ,  VAN DRENT WILLIAM PETER ,  JONKERS PETER GERARDUS ,  ZHU QIUSHI ,  YAGHOOBI PARHAM ,  WESTERLAKEN JAN STEVEN CHRISTIAAN ,  LEENDERS MARTINUS HENDRIKUS ANTONIUS ,  ERSHOV ALEXANDER IGOREVICH ,  FOMENKOV IGOR VLADIMIROVICH ,  LIU FEI ,  JACOBS JOHANNES HENRICUS WILHELMUS ,  KUZNETSOV ALEXEY SERGEEVICH

IPC: G03F7/20 ,  G02B5/08 ,  G02B27/00 ,  H05G2/00

Abstract: EUV 방사선을생성하기위한시스템(SO) 내의하나이상의반사광학요소의반사율열화는광학요소를포함하는진공챔버(26) 내로의가스의제어된도입에의하여감소된다. 가스는수소와같은또 다른가스의흐름에추가될수 있거나수소라디칼의도입과번갈아가며추가될수 있다.

公开(公告)号：JP2009010349A

公开(公告)日：2009-01-15

申请号：JP2008132283

申请日：2008-05-20

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： VANGHELUWE RIK TEODOOR ,  VAN DOMMELEN YOURI JOHANNES LA ,  QUAEDACKERS JOHANNES A ,  GROUWSTRA CEDRIC DESIRE ,  KNAAPEN THIJS EGIDIUS JOHANNES ,  DAVERVELD RALF MARTINUS MARINU ,  ROMMERS JEROEN HUBERT

IPC: H01L21/027 ,  G01B11/00 ,  G01B11/24 ,  G01B11/30 ,  G03F7/20

CPC classification number: G03F7/70608

Abstract: PROBLEM TO BE SOLVED: To provide a method for reducing the risk of contamination of immersion liquid and components of the apparatus. SOLUTION: A method of inspecting a substrate with first and second layers thereon is disclosed. This method includes directing a beam of electromagnetic radiation at an acute angle towards an edge of the layers, detecting scattered and/or reflected electromagnetic radiation, and establishing, from the results of the detecting, whether an edge of the second layer overlaps an edge of the first layer. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种降低浸没液体和装置的部件的污染风险的方法。 公开了一种在其上检测具有第一层和第二层的衬底的方法。 该方法包括将电磁辐射束以锐角朝向层的边缘引导，检测散射和/或反射的电磁辐射，以及从检测结果建立第二层的边缘是否与 第一层。 版权所有（C）2009，JPO＆INPIT