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公开(公告)号:WO2006015642A3
公开(公告)日:2006-09-08
申请号:PCT/EP2005006165
申请日:2005-06-08
Applicant: EPCOS AG , KRUEGER HANS , NICOLAUS KARL , PORTMANN JUERGEN , SELMEIER PETER
Inventor: KRUEGER HANS , NICOLAUS KARL , PORTMANN JUERGEN , SELMEIER PETER
IPC: H01L21/60
CPC classification number: H01L23/49838 , H01L23/50 , H01L23/562 , H01L24/14 , H01L24/73 , H01L24/81 , H01L2224/05568 , H01L2224/05573 , H01L2224/10135 , H01L2224/14132 , H01L2224/81136 , H01L2224/81139 , H01L2224/81801 , H01L2924/00013 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/014 , H01L2224/29099 , H01L2224/05599
Abstract: The invention relates to an electric component comprising a carrier substrate (1), which has a thermal expansion coefficient a p and a chip (2), which is fixed onto the carrier substrate (1) in a flip-chip construction by means of bumps (31 to 34). In a preferred orientation x 1 , the chip (2) has a thermal expansion co-efficient a 1 , whereby ?a 1 = |a p - a 1 | represents the first expansion differential. In a second preferred orientation x 2 , the chip (2) has a thermal expansion coefficient a 2 , whereby ?a 2 = |a p - a 2 | represents the second expansion differential. ?x 1 is the distance between the centres (310, 320) of the terminal bumps (31, 32) in the x 1 orientation. ?x 2 is the distance between the centres (330, 340) of the terminal bumps (33, 34) in the x 2 orientation. The following applies: ?x 1 2 when ?ax 1 > ?a 2 and ?x 1 > ?x 2 when ?a 1 2 . This enables the shear force that occurs during temperature modifications and that acts on the terminal bumps to be minimised.
Abstract translation: 本发明涉及一种包含(1)具有的热膨胀系数的p载体衬底的电子组件,和一个芯片(2),其是(1)安装在倒装芯片型通过凸块(31〜34)的方式在载体衬底上。 该芯片(2)具有在第一个优选的方向x 1 SUB>的热膨胀系数的 1 SUB>,其中 1 SUB> = | AP - 一个< SUB> 1 SUB> | 第一膨胀差。 该芯片(2)具有在第二个优选的方向x 2 SUB>的热膨胀系数的 2 SUB>,其中 2 SUB> = | AP - 一个< SUB> 2 SUB> | 第二膨胀差。 ?X 1 SUB>是在x方向上 1 SUB>端子凸块(31,32)的中心(310,320)之间的距离。 ?X 2 SUB>是在x方向上 2 SUB>端子凸块(33,34)的中心(330,340)之间的距离。 其中
2 SUB>?在?斧 1 SUB >>真?X 1 SUB>?A 2 SUB>和βX 1 <在/ SUB >>?X 2 SUB>?一个 1 SUB> <?A 2 SUB>。 从而可以最小化在温度产生的变化以及作用在终端凸点的剪切力是可能的。 -
公开(公告)号:WO2013124170A2
公开(公告)日:2013-08-29
申请号:PCT/EP2013052553
申请日:2013-02-08
Applicant: EPCOS AG
Inventor: PAHL WOLFGANG , LEIDL ANTON , PORTMANN JUERGEN , EICHINGER ROBERT , SIEGEL CHRISTIAN , NICOLAUS KARL , WASSNER THOMAS , SEDLMEIER THOMAS
IPC: B81C1/00
CPC classification number: B81C1/00333 , B81C99/0045 , H01L22/12 , H01L2224/16225 , H01L2924/1461 , H04R31/006 , H01L2924/00
Abstract: The invention relates to a method for producing a sensor (SEN), comprising the steps of arranging a sensor element (SE) on a carrier (TR), arranging a cover (AF) on the sensor element (SE), wherein the sensor element (SE) is enclosed between the cover (AF) and the carrier (TR), adhering a carrier film (TF) to the cover (AF), and producing an opening (SO) in the carrier film (TF) and the cover (AF), wherein the openings (SO) in the carrier film (TF) and the cover (AF) at least partially overlap.
Abstract translation: 本发明涉及一种方法,用于制造传感器(SEN),其包含载体(TR)上定位的传感器元件(SE),所述传感器元件(SE)上配置覆盖物(AF),的步骤,其中的传感器元件(SE) 将背衬片(TF)粘附到盖(AF),并且在背衬片(TF)和盖(AF)中形成开口(SO),开口 (SO)在载体膜(TF)和盖(AF)中至少部分重叠。
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公开(公告)号:WO2008142081A9
公开(公告)日:2009-04-23
申请号:PCT/EP2008056200
申请日:2008-05-20
Applicant: EPCOS AG , MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
Inventor: MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/485
CPC classification number: H01L24/05 , H01L2224/0231 , H01L2224/0233 , H01L2224/0236 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/05001 , H01L2224/0554 , H01L2224/05552 , H01L2224/05555 , H01L2924/01005 , H01L2924/0101 , H01L2924/01013 , H01L2924/0102 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01061 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/1461 , H01L2924/19043 , H01L2924/351 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
Abstract: The invention relates to a component with multi-layered connection surfaces that can be soldered or bonded to a substrate (SU). Said component has, in addition to the electrically conductive pad metallisation (PM) and the UBM-metallisation (UBM), an electrically conductive stress compensation layer (SK) that is arranged between the substrate and pad-metallisation or between the pad-metallisation and the UBM-metallisation. The stress insensitivity of the connection metallisation is obtained by a stress compensation layer, the E-module thereof being lower than that of the UBM-metallisation.
Abstract translation: 它提出了一种基底(SU),在具有多层可焊接或粘合的衬垫的装置,其除了所述导电焊盘金属(PM)和UBM金属化(UBM)另外的导电应力补偿层(SK),则 在衬底和焊盘金属化之间或焊盘金属化和UBM金属化之间布置。 端子金属化的应力不敏感性通过其E模块低于UBM金属化的应力补偿层来实现。
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4.
公开(公告)号:WO2008142081A3
公开(公告)日:2009-03-05
申请号:PCT/EP2008056200
申请日:2008-05-20
Applicant: EPCOS AG , MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
Inventor: MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/485
CPC classification number: H01L24/05 , H01L2224/0231 , H01L2224/0233 , H01L2224/0236 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/05001 , H01L2224/0554 , H01L2224/05552 , H01L2224/05555 , H01L2924/01005 , H01L2924/0101 , H01L2924/01013 , H01L2924/0102 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01061 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/1461 , H01L2924/19043 , H01L2924/351 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
Abstract: The invention relates to a component with multi-layered connection surfaces that can be soldered or bonded to a substrate (SU). Said component has, in addition to the electrically conductive pad metallisation (PM) and the UBM-metallisation (UBM), an electrically conductive stress compensation layer (SK) that is arranged between the substrate and pad-metallisation or between the pad-metallisation and the UBM-metallisation. The stress insensitivity of the connection metallisation is obtained by a stress compensation layer, the E-module thereof being lower than that of the UBM-metallisation.
Abstract translation: 它提出了一种基底(SU),在具有多层可焊接或粘合的衬垫的装置,其除了所述导电焊盘金属(PM)和UBM金属化(UBM)另外的导电应力补偿层(SK),则 设置在基板和焊盘金属之间或焊盘金属化和UBM之间的金属化。 连接金属化的应力不敏感由应力补偿层,其模量比UBM金属化下实现的。
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公开(公告)号:DE102008025202A1
公开(公告)日:2009-12-10
申请号:DE102008025202
申请日:2008-05-27
Applicant: EPCOS AG
Inventor: BAUER CHRISTIAN , KRUEGER HANS , PORTMANN JUERGEN , STELZL ALOIS
Abstract: Frames (3) applied on a wafer (1) are leveled and covered with a covering film, such that gas-tight housings are formed for component structures (5), in particular for filter or MEMS structures. Inner columns (4) can be provided for supporting the housing and for the ground connection; outer columns (4) can be provided for the electrical connection and are connected to the component structures by means of conductor tracks (6) that are electrically insulated from the frames (3).
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公开(公告)号:DE10238523A1
公开(公告)日:2004-03-04
申请号:DE10238523
申请日:2002-08-22
Applicant: EPCOS AG
Inventor: FEIERTAG GREGOR , STELZL ALOIS , KRUEGER HANS , PORTMANN JUERGEN , NICOLAUS KARL
IPC: H01L23/02 , H01L29/06 , H03H3/08 , H03H9/05 , H03H9/10 , H03H9/25 , H01L23/485 , H01L23/28 , H01L21/52 , H03H9/145
Abstract: The present invention relates to an encapsulated component that includes a carrier substrate and at least one chip positioned on the top of the carrier substrate and electrically connected to it by means of electrically conductive connections. The encapsulation of the chip is accomplished with a seal or dielectric layer. As a result of differing coefficients of expansion of the seal or dielectric layer and the electrically conductive connections, with changing temperatures stresses occur in the electrically conductive connections, which can lead to cracks, breaks and even to interruption of the electrically conductive connections. To mechanically relieve the electrically conductive connections of stresses from changing temperatures (in particular under extreme thermal loads), it is proposed that the carrier substrate be provided with a support element that encircles the chip, which serves to support the seal or dielectric layer, and/or that the material and the arrangement of the encapsulation be selected accordingly.
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公开(公告)号:DE102012101505A1
公开(公告)日:2013-08-29
申请号:DE102012101505
申请日:2012-02-24
Applicant: EPCOS AG
Inventor: PAHL WOLFGANG , LEIDL ANTON , PORTMANN JUERGEN , EICHINGER ROBERT , SIEGEL CHRISTIAN , NICOLAUS KARL , WASSNER THOMAS , SEDLMEIER THOMAS
Abstract: Die vorliegende Erfindung betrifft ein Verfahren zur Herstellung eines Sensors (SEN), das die Schritte Anordnen eines Sensorelements (SE) auf einem Träger (TR), Anordnen einer Abdeckung (AF) auf dem Sensorelement (SE), wobei das Sensorelement (SE) zwischen der Abdeckung (AF) und dem Träger (TR) eingeschlossen wird, Aufkleben einer Trägerfolie (TF) auf die Abdeckung (AF), und Erzeugen einer Öffnung (SO) in der Trägerfolie (TF) und der Abdeckung (AF), wobei die Öffnungen (SO) in der Trägerfolie (TF) und der Abdeckung (AF) zumindest teilweise überlappen, aufweist.
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公开(公告)号:DE102004037817A1
公开(公告)日:2006-03-16
申请号:DE102004037817
申请日:2004-08-04
Applicant: EPCOS AG
Inventor: KRUEGER HANS , NICOLAUS KARL , PORTMANN JUERGEN , SELMEIER PETER
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公开(公告)号:DE102011112476A1
公开(公告)日:2013-03-07
申请号:DE102011112476
申请日:2011-09-05
Applicant: EPCOS AG
Inventor: BAUER CHRISTIAN , KRUEGER HANS , PORTMANN JUERGEN , STELZL ALOIS , SCHMAJEW ALEXANDER
Abstract: Ein Bauelement umfasst ein Substrat (S), einen Chip (CH), und einen Rahmen (MF), wobei der Rahmen (MF), das Substrat (S) und der Chip (CH) ein Volumen (V) umschließen. Eine metallische Verschlussschicht (SL) ist vorgesehen und eingerichtet, das Volumen (V) hermetisch abzudichten, wobei die metallische Verschlussschicht (SL) ein erhärtetes flüssiges Metall oder eine erhärtete flüssige Metalllegierung aufweist.
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公开(公告)号:DE102007023590A1
公开(公告)日:2008-11-27
申请号:DE102007023590
申请日:2007-05-21
Applicant: EPCOS AG
Inventor: MAIER MARTIN , KASTNER KONRAD , OBESSER MICHAEL , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/482
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