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公开(公告)号:DE102005009358A1
公开(公告)日:2006-09-07
申请号:DE102005009358
申请日:2005-03-01
Applicant: EPCOS AG
Inventor: KASTNER KONRAD , OBESSER MICHAEL , HAMMEDINGER ROBERT , MAIER MARTIN
Abstract: A solderable contact for use with an electrical component includes a pad metallization on a substrate, and an under bump metallization over at least part of the pad metallization. The under bump metallization is in an area for receiving solder. The pad metallization is structured to reveal parts of the substrate surface. The under bump metallization is in direct contact with the parts of the substrate.
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公开(公告)号:WO2008142081A9
公开(公告)日:2009-04-23
申请号:PCT/EP2008056200
申请日:2008-05-20
Applicant: EPCOS AG , MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
Inventor: MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/485
CPC classification number: H01L24/05 , H01L2224/0231 , H01L2224/0233 , H01L2224/0236 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/05001 , H01L2224/0554 , H01L2224/05552 , H01L2224/05555 , H01L2924/01005 , H01L2924/0101 , H01L2924/01013 , H01L2924/0102 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01061 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/1461 , H01L2924/19043 , H01L2924/351 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
Abstract: The invention relates to a component with multi-layered connection surfaces that can be soldered or bonded to a substrate (SU). Said component has, in addition to the electrically conductive pad metallisation (PM) and the UBM-metallisation (UBM), an electrically conductive stress compensation layer (SK) that is arranged between the substrate and pad-metallisation or between the pad-metallisation and the UBM-metallisation. The stress insensitivity of the connection metallisation is obtained by a stress compensation layer, the E-module thereof being lower than that of the UBM-metallisation.
Abstract translation: 它提出了一种基底(SU),在具有多层可焊接或粘合的衬垫的装置,其除了所述导电焊盘金属(PM)和UBM金属化(UBM)另外的导电应力补偿层(SK),则 在衬底和焊盘金属化之间或焊盘金属化和UBM金属化之间布置。 端子金属化的应力不敏感性通过其E模块低于UBM金属化的应力补偿层来实现。
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3.
公开(公告)号:WO2008142081A3
公开(公告)日:2009-03-05
申请号:PCT/EP2008056200
申请日:2008-05-20
Applicant: EPCOS AG , MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
Inventor: MAIER MARTIN , OBESSER MICHAEL , KASTNER KONRAD , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/485
CPC classification number: H01L24/05 , H01L2224/0231 , H01L2224/0233 , H01L2224/0236 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/05001 , H01L2224/0554 , H01L2224/05552 , H01L2224/05555 , H01L2924/01005 , H01L2924/0101 , H01L2924/01013 , H01L2924/0102 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01061 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/1461 , H01L2924/19043 , H01L2924/351 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
Abstract: The invention relates to a component with multi-layered connection surfaces that can be soldered or bonded to a substrate (SU). Said component has, in addition to the electrically conductive pad metallisation (PM) and the UBM-metallisation (UBM), an electrically conductive stress compensation layer (SK) that is arranged between the substrate and pad-metallisation or between the pad-metallisation and the UBM-metallisation. The stress insensitivity of the connection metallisation is obtained by a stress compensation layer, the E-module thereof being lower than that of the UBM-metallisation.
Abstract translation: 它提出了一种基底(SU),在具有多层可焊接或粘合的衬垫的装置,其除了所述导电焊盘金属(PM)和UBM金属化(UBM)另外的导电应力补偿层(SK),则 设置在基板和焊盘金属之间或焊盘金属化和UBM之间的金属化。 连接金属化的应力不敏感由应力补偿层,其模量比UBM金属化下实现的。
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公开(公告)号:DE10246784B4
公开(公告)日:2013-06-13
申请号:DE10246784
申请日:2002-10-08
Applicant: EPCOS AG
Inventor: FEIERTAG GREGOR DR , REITLINGER CLAUS DIPL ING , KRUEGER HANS DIPL PHYS , HAUSER MARKUS DR , SYNOWCYK ANDREAS DR , HAMMEDINGER ROBERT , ROTTMANN MATTHIAS DR RER NAT , KASTNER KONRAD , BLEYL INGO , STELZL ALOIS
Abstract: Mit akustischen Wellen arbeitendes Bauelement, enthaltend: – einen Chip, der mittels Lötverbindungen mit einem Trägersubstrat elektrisch und mechanisch verbunden ist, – elektrisch leitende Strukturen, die auf dem Chip angeordnet sind und zumindest zwei Außenkontakte (AK) sowie Zuleitungen (ZL) umfassen, – wobei ein Teil der elektrisch leitenden Strukturen zumindest einen mit akustischen Volumenwellen arbeitenden Resonator und/oder einen mit akustischen Oberflächenwellen arbeitenden Wandler (RE) als akustisch aktive Elemente realisiert, – wobei die elektrisch leitenden Strukturen außerdem zumindest zwei Außenkontakte (AK) und Zuleitungen (ZL) umfassen, – wobei auf den zumindest zwei Außenkontakten (AK) eine erste Struktur und auf einem Teil der Zuleitungen eine zweite Struktur eines lötfähigen strukturierten Mehrschichtaufbaus aus zumindest zwei Metallschichten vorgesehen ist, – wobei die Mehrschichtaufbau-Strukturen (MS) auf den Zuleitungen und den Außenkontakten in einem gemeinsamen Verfahrensschritt hergestellt sind und überall die gleiche Höhe aufweisen – bei dem die erste und die zweite Struktur des Mehrschichtaufbaus eine Unterbrechung aufweisen und nicht verbunden sind.
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公开(公告)号:DE102007023590A1
公开(公告)日:2008-11-27
申请号:DE102007023590
申请日:2007-05-21
Applicant: EPCOS AG
Inventor: MAIER MARTIN , KASTNER KONRAD , OBESSER MICHAEL , PORTMANN JUERGEN , BAUERNSCHMITT ULRICH
IPC: H01L23/482
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公开(公告)号:DE10246784A1
公开(公告)日:2004-04-22
申请号:DE10246784
申请日:2002-10-08
Applicant: EPCOS AG
Inventor: FEIERTAG GREGOR , REITLINGER CLAUS , KRUEGER HANS , HAUSER MARKUS , SYNOWCYK ANDREAS , HAMMEDINGER ROBERT , ROTTMANN MATTHIAS , KASTNER KONRAD , BLEYL INGO , STELZL ALOIS
IPC: H03H9/02 , H03H9/05 , H03H9/08 , H01L27/20 , H03H3/00 , H03H3/08 , H03H9/145 , H03H9/15 , H03H9/25
Abstract: A component operating with acoustic waves comprises a chip electrically and mechanically connected to a supporting substrate by solder connections, and electrically conducting structures arranged on the chip and having outer contacts (AK) and feed lines (ZL). A part of the electrically conducting structures have a resonator operating with acoustic volume waves and/or a converter operating with acoustic surface waves. The resonator or converter is connected to a further resonator or converter or to the outer contacts using the feed lines. An Independent claim is also included for a process for improving the ohmic losses of a component having conducting structures on its surface.
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