Method and apparatus for flattening sintered ceramic electronic package substrate

    公开(公告)号:JP2004311998A

    公开(公告)日:2004-11-04

    申请号:JP2004101141

    申请日:2004-03-30

    CPC classification number: H01L21/4807

    Abstract: PROBLEM TO BE SOLVED: To provide an improved method and apparatus for flattening a sintered multilayer ceramic substrate for fabricating a microelectronic chip. SOLUTION: In the apparatus for flattening the sintered-ceramic electronic package substrates having surfaces facing each other and suffering from undesirable cambers, the substrates are arranged alternately with spacers. At least one heating zone is movable to close or apart from the alternately arranged stack of the ceramic substrates and spacers and includes a heat conducting medium that performs a heating action at a desired rate by directly contacting or coming very closely to the side surface of the stack. A plunger serves for applying pressure to the stack in the direction perpendicular to the surfaces facing each other of the substrates. At least one cooling zone is movable to close or apart from the stack and includes heat the conducting medium that dissipates the heat, having been introduced by the heating zone, by directly contacting or coming very closely to the side surface of the stack. A reducing gas supply communicates with at least one heating zone and at least one cooling zone to supply the gas and maintains a controlled reducing gas atmosphere in the interior of the apparatus. COPYRIGHT: (C)2005,JPO&NCIPI

Patent Agency Ranking