Abstract:
A novel photoacid generator containg a structure of the following formula (I), wherein R is a monovalent organic group with a fluorine content of 50 wt% or less, a nitro group, a cyano group, or a hydrogen atom, and Z and Z are individually a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, is provided. When used in a chemically amplified radiation-sensitive resin composition, the photoacid generator exhibits high transparency, comparatively high combustibility, and no bioaccumulation, and produces an acid exhibiting high acidity, high boiling point, moderately short diffusion length in the resist coating, and low dependency to mask pattern density.
Abstract:
A novel photoacid generator containg a structure of the following formula (I), wherein R is a monovalent organic group with a fluorine content of 50 wt% or less, a nitro group, a cyano group, or a hydrogen atom, and Z and Z are individually a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, is provided. When used in a chemically amplified radiation-sensitive resin composition, the photoacid generator exhibits high transparency, comparatively high combustibility, and no bioaccumulation, and produces an acid exhibiting high acidity, high boiling point, moderately short diffusion length in the resist coating, and low dependency to mask pattern density.
Abstract:
A radiation-sensitive resin composition that not only excels in fundamental properties as resist, such as sensitivity and resolution, but also with respect to both of line-and-space pattern and isolated space pattern, realizes extensive depth of focus (DOF) and is less in the line width change attributed to alteration of baking temperature, the limit line width free from any phenomenon of line pattern collapse of the radiation-sensitive resin composition being small. Further, there is provided a lactone copolymer being useful as a resin component of the radiation-sensitive resin composition. This lactone copolymer is represented by a copolymer of compound of the following formula (1-1), compound of the following formula (2-1) and compound of the following formula (3-1). This radiation-sensitive resin composition comprises the lactone copolymer (a) and radiation-sensitive acid generating agent (b).
Abstract:
PROBLEM TO BE SOLVED: To provide a coloring composition excellent in heat resistance.SOLUTION: A coloring composition contains: a compound (A) represented by a following formula (1); a binder resin (B); and a crosslinking agent (C). [In the formula (1), Xrepresents a cationic chromophore, Z represents an electron attracting group, Rrepresents an alkyl group, an aryl group, or the like, M represents a nitrogen atom, a phosphorus atom, a boron atom, or the like; and when a plurality of Zs or a plurality of Rs are present, they may be the same with or different from each other. a represents an integer of 1 to 6, b represents an integer of 0 to 5 and a+b equals 2, 4 or 6.]
Abstract:
PROBLEM TO BE SOLVED: To provide a coloring composition having high tinctorial power and suitable for forming a coloring layer having high heat resistance and excellent chromaticity characteristics.SOLUTION: A coloring composition for color filter contains (A) colorant, (B) binder resin and (C) crosslinking agent. The coloring composition contains an acidic colorant having phosphonium cation as the (A) colorant.
Abstract:
PROBLEM TO BE SOLVED: To provide a coloring composition which can form a colored layer achieving both excellent heat resistance and a high voltage retaining ratio, and a colorant suitable for the coloring composition.SOLUTION: A coloring composition contains (A) xanthene colorant having a polymerizable unsaturated group in a coloring section, (B) binder resin, and (C) crosslinking agent.
Abstract:
PROBLEM TO BE SOLVED: To provide a reliable color filter produced by low temperature curing, and to provide a liquid crystal display element.SOLUTION: The color filter 10 is manufactured by using a color pattern 6 containing dye or the like, a protection film 8 formed of a radiation-sensitive resin composition having an epoxy group, a spacer 9 formed of a radiation-sensitive resin composition having an alkali-soluble resin, and an alignment layer 12 formed of a liquid crystal alignment agent containing a polyimide, or a polyamic acid obtained by using a tetracarboxylic acid dianhydride component indicated by the expression (CA). The liquid crystal display element 1 is constituted by using the color filter 10.