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公开(公告)号:JP2000294554A
公开(公告)日:2000-10-20
申请号:JP2000066646
申请日:2000-03-10
Applicant: MOTOROLA INC
Inventor: YU ZHIYI , DROOPAD RAVINDRANATH , OVERGAARD COREY DANIEL , RAMDANI JAMAL , CURLESS JAY A , HALLMARK JERALD ALLEN , OOMS WILLIAM J , WANG JUN
IPC: H01L41/24 , C30B23/02 , C30B25/02 , H01L21/203 , H01L21/316
Abstract: PROBLEM TO BE SOLVED: To provide the manufacture of a thin stable crystalline interface to silicon. SOLUTION: This method is for manufacturing of a semiconductor substrate by preparing a silicon substrate 10 having a surface, and forming interface 14 consisting of silicon, oxygen, and a metal on the surface of the silicon substrate, and forming one or more single crystalline oxide layer on the interface 14. This interface consists of the atomic layer of silicon oxygen, and a metal expressed by the formula XSiO2, where X represents a metal.
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公开(公告)号:JP2000294553A
公开(公告)日:2000-10-20
申请号:JP2000065098
申请日:2000-03-09
Applicant: MOTOROLA INC
Inventor: WANG JUN , OOMS WILLIAM J , HALLMARK JERALD ALLEN
IPC: H01L21/316 , C30B23/02 , C30B25/02 , H01L21/203 , H01L21/8242 , H01L27/10 , H01L27/108
Abstract: PROBLEM TO BE SOLVED: To provide a thin stable crystalline interface to silicon. SOLUTION: Semiconductor structure is equipped with a silicon substrate 10, one or more single crystalline oxide layers 26, and interface 14 between the silicon substrate and the one or more single crystalline oxide layers. The interface consists of an atomic layer of crystalline material suitable for the lattice constant of silicon. This interface has a composition of XSiO2 (X is a metal) and consists of oxygen and metal.
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公开(公告)号:AU7491301A
公开(公告)日:2002-01-14
申请号:AU7491301
申请日:2001-05-21
Applicant: MOTOROLA INC
Inventor: FEKETE DOUGLAS D , OOMS WILLIAM J
IPC: H01L21/20 , H01L21/316 , H01L21/30 , H01L21/31 , H01L21/36 , H01L21/46 , H01L21/469 , H01L23/10 , H01L23/58 , H01L31/0328
Abstract: Semiconductor structures including compound semiconductor devices formed in semiconductor substrates and methods of producing the semiconductor devices and substrates that have improved thermal characteristics over conventional compound semiconductor devices and that may be formed substantially thinner than conventional semiconductor devices and substrates. The compound devices (1010) are formed in a layer of compound semiconductor material (1020) which overlies an accommodating layer (1030). The accommodating layer (1030) overlies a monocrystalline silicon semiconductor layer (1040). During the fabrication process, the silicon layer may be thinned by suitable methods, or removed entirely by chemical etching. When the silicon is removed by etching, the accommodating layer provides an etch-stop layer to protect the devices in the compound semiconductor layer.
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公开(公告)号:DE69603407D1
公开(公告)日:1999-09-02
申请号:DE69603407
申请日:1996-04-29
Applicant: MOTOROLA INC
Inventor: ABROKWAH JONATHAN K , HUANG JENN-HWA , OOMS WILLIAM J , SHURBOFF CARL L , HALLMARK JERALD A
IPC: H01L29/43 , H01L21/28 , H01L21/285 , H01L21/3205 , H01L21/335 , H01L21/338 , H01L23/52 , H01L27/085 , H01L29/08 , H01L29/417 , H01L29/45 , H01L29/778 , H01L29/812
Abstract: A complementary III-V heterostructure field effect device includes the same refractory ohmic material for providing the contacts (117, 119), to both the N-type and P-type devices. Furthermore, the refractory ohmic contacts (117, 119) directly contact the InGaAs channel layer (16) to provide improved ohmic contact, despite the fact that the structure incorporates an advantageous high aluminum composition barrier layer (18) and an advantageous GaAs cap layer (20).
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公开(公告)号:DE69226909T2
公开(公告)日:1999-06-17
申请号:DE69226909
申请日:1992-06-30
Applicant: MOTOROLA INC
Inventor: ZHU THEODORE , OOMS WILLIAM J , ABROKWAH JONATHAN K , SHURBOFF CARL L , GORONKIN HERBERT
IPC: H01L21/8232 , H01L27/06 , H01L27/11 , H03K19/08
Abstract: Logic circuits using a heterojunction field effect transistor structure having vertically stacked complementary devices is provided. A P-channel quantum well (12) and an N-channel quantum well (14) are formed near each other under a single gate electrode (17) and separated from each other by a thin layer of barrier material (13). P-source and P-drain regions (18) couple to the P-channel. N-source and N-drain regions (19) couple to the N-channel. The P-source/drain regions (18) are electrically isolated from the N-source/drain regions (19) so the P-channel and N-channel devices may be interconnected to provide many logic functions.
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公开(公告)号:CA1150371A
公开(公告)日:1983-07-19
申请号:CA368265
申请日:1981-01-12
Applicant: MOTOROLA INC
Inventor: OOMS WILLIAM J
Abstract: 20- An improved frequency synthesizer suitable for use in mobile and portable radio applications using multiple dual modulus prescalers to achieve high frequency operation and low current drain. A first high speed prescaler of limited size is used in conjunction with a second prescaler to avoid the use of one large high speed prescaler to attain high frequency operation. Consequently, the frequency synthesizer can be constructed using only a minimum amount of high speed, high current drain logic thereby reducing costs and power consumption.
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公开(公告)号:SG101423A1
公开(公告)日:2004-01-30
申请号:SG200003946
申请日:2000-07-14
Applicant: MOTOROLA INC
Inventor: YU ZHIYI , DROOPAD RAVINDRANATH , OVERGAARD COREY DANIEL , RAMDANI JAMAL , CURLESS JAY A , HALLMARK JERALD A , OOMS WILLIAM J , WANG JUN
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公开(公告)号:AU3046002A
公开(公告)日:2002-06-18
申请号:AU3046002
申请日:2001-11-19
Applicant: MOTOROLA INC
Inventor: FINDER JEFFREY M , OOMS WILLIAM J
IPC: H01L21/20 , H01L21/316 , H01L31/0352 , H01L31/0368 , H01L31/101 , H01L31/00
Abstract: High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer (204) on a silicon wafer (202). The accommodating buffer layer is a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer (206) of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. In addition, formation of a compliant substrate may include utilizing surfactant enhanced epitaxy, epitaxial growth of single crystal silicon onto single crystal oxide, and epitaxial growth of Zintl phase materials. Quantum well infrared photodetectors (200) can be grown on the high quality epitaxial monocrystalline material formed on such compliant substrates to create highly reliable devices having reduced costs.
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公开(公告)号:AU7497001A
公开(公告)日:2002-01-14
申请号:AU7497001
申请日:2001-05-24
Applicant: MOTOROLA INC
Inventor: TAYLOR MICHAEL G , SHANLEY CHARLES W , OOMS WILLIAM J
IPC: G02B6/12 , G02B6/13 , G02B6/132 , G02B6/42 , G02B6/43 , H01L27/15 , H01S5/02 , H01S5/022 , H01S5/183 , H01S5/42
Abstract: A system of integrated circuits (2401-2403) including a plurality of optical semiconductor devices (ex. 2420 and 2416) formed in silicon substrates such that the devices optically communicate with one another. The optical semiconductor devices are formed from compound semiconductor structures. Each substrate forms a plane which is preferably parallel with each other plane.
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公开(公告)号:DE69603407T2
公开(公告)日:2000-03-30
申请号:DE69603407
申请日:1996-04-29
Applicant: MOTOROLA INC
Inventor: ABROKWAH JONATHAN K , HUANG JENN-HWA , OOMS WILLIAM J , SHURBOFF CARL L , HALLMARK JERALD A
IPC: H01L29/43 , H01L21/28 , H01L21/285 , H01L21/3205 , H01L21/335 , H01L21/338 , H01L23/52 , H01L27/085 , H01L29/08 , H01L29/417 , H01L29/45 , H01L29/778 , H01L29/812
Abstract: A complementary III-V heterostructure field effect device includes the same refractory ohmic material for providing the contacts (117, 119), to both the N-type and P-type devices. Furthermore, the refractory ohmic contacts (117, 119) directly contact the InGaAs channel layer (16) to provide improved ohmic contact, despite the fact that the structure incorporates an advantageous high aluminum composition barrier layer (18) and an advantageous GaAs cap layer (20).
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