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公开(公告)号：US11069523B2
公开(公告)日：2021-07-20
申请号：US15985346
申请日：2018-05-21
Applicant: FEI Company
Inventor： Brian Roberts Routh, Jr. , Thomas G. Miller , Chad Rue , Noel Thomas Franco
Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.
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公开(公告)号：US20210202205A1
公开(公告)日：2021-07-01
申请号：US16730998
申请日：2019-12-30
Applicant: FEI Company
Inventor： John J. FLANAGAN , Nathaniel KURTZ , Ashley TILSON , Phillip PARKER
IPC: H01J37/244 , H01J37/28 , H01J37/22 , G01N23/20058
Abstract: Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.
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公开(公告)号：US20210183608A1
公开(公告)日：2021-06-17
申请号：US16717043
申请日：2019-12-17
Applicant: FEI Company
Inventor： Kun LIU , Gregory A. SCHWIND , Sean KELLOGG , Jorge FILEVICH
IPC: H01J27/24
Abstract: Apparatuses and methods for an optical induced ion source are disclosed herein. An example apparatus at least includes an ionization volume arranged to receive a gas and first optical energy, the first optical energy to ionize the gas, and a channel formed between a first membrane and a second membrane, the first membrane having at least a transparent portion and the second membrane including an aperture, where the gas is provided to the ionization volume through the channel, the ionization volume formed inside the channel and adjacent to the aperture, and where the first optical energy ionizes the gas after passing through the at least transparent portion of the first membrane.
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公开(公告)号：US11009449B2
公开(公告)日：2021-05-18
申请号：US16359352
申请日：2019-03-20
Applicant: FEI Company
Inventor： Glenn Myers , Shane Latham , Adrian Sheppard , Olaf Delgado-Friedrichs , Andrew Kingston
Abstract: Apparatuses and methods for implementing scanning trajectories for ROI tomography are disclosed herein. An example method includes determining a first focus object distance based on a circumradius of a sample, the sample including a region of interest, determining a second focus object distance based on a radius of a smallest cylinder that contains the region of interest, determining a plurality of viewing angles from a plurality of possible viewing angles in response to the first focus object distance, where each viewing angle of the plurality of viewing angles has an associated focus object distance measured from the region of interest, and where the associated focus object distance of each of the plurality of viewing angles is less than the first focus object distance and greater than the second focus object distance, and scanning the region of interest using at least the plurality of viewing angles.
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公开(公告)号：US20210131984A1
公开(公告)日：2021-05-06
申请号：US17151033
申请日：2021-01-15
Applicant: FEI Company
Inventor： Pavel Potocek
IPC: G01N23/2251 , H01J37/26 , H01J37/28
Abstract: Techniques for adapting an adaptive specimen image acquisition system using an artificial neural network (ANN) are disclosed. An adaptive specimen image acquisition system is configurable to scan a specimen to produce images of varying qualities. An adaptive specimen image acquisition system first scans a specimen to produce a low-quality image. An ANN identifies objects of interest within the specimen image. A scan mask indicates regions of the image corresponding to the objects of interest. The adaptive specimen image acquisition system scans only the regions of the image corresponding to the objects of interest, as indicated by the scan mask, to produce a high-quality image. The low-quality image and the high-quality image are merged in a final image. The final image shows the objects of interest at a higher quality, and the rest of the specimen at a lower quality.
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Patent Agency Ranking
公开(公告)号：US20210125808A1
公开(公告)日：2021-04-29
申请号：US16664661
申请日：2019-10-25
Applicant: FEI Company
Inventor： Herman Carlo Floresca , Brian Tilley
IPC: H01J37/252 , H01J37/153 , H01J37/28 , H01J37/30
Abstract: Beam intercept profiles are measured as a particle beam transversely scans across a probe. A current of beam particles, a detector intensity, or image pixel intensities can variously be measured to obtain the profiles. Multiple profiles are used to determine geometric parameters which in turn can be used to configure equipment. In one application, transverse beam intercept profiles are measured for different waist heights of the particle beam. Steepness of the several profiles can be used to determine a height of the probe as the height at which the profile is steepest. The known probe height enables placing the probe in contact with a substrate at another known height. In another application, transverse beam intercept profiles of orthogonal probe edges are used to position a beam waist, reduce spot size, or reduce astigmatism. Techniques are applicable to SEM, FIB, and nanoprobe systems. Methods and apparatus are disclosed, with variations.
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公开(公告)号：US20210088770A1
公开(公告)日：2021-03-25
申请号：US16580957
申请日：2019-09-24
Applicant: FEI Company
Inventor： John Flanagan , Brad Larson , Thomas Miller
Abstract: Methods and systems for implementing artificial intelligence to determine the pose of a sample within a microscope system and aligning said sample are disclosed. An example method includes receiving an image of the sample in the microscope apparatus, accessing a template associated with the sample. The template describes a plurality of template key points of the template version of the sample. A plurality of key points on the sample are then determined, where each of the key points on the sample corresponds to a corresponding template key point of a sample template, and the key points are subsequently used to determine a transformation between the sample as depicted in the image and the template version of the sample as described in the template. The transformation can then be used to automate the alignment of the sample within the microscope.
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98.发明申请公开(公告)号：US20210066056A1
公开(公告)日：2021-03-04
申请号：US17017580
申请日：2020-09-10
Applicant: FEI Company
Inventor： Alex DE MARCO , Sergey GORELICK , Chad RUE , Joseph CHRISTIAN , Kenny MANI , Steven RANDOLPH , Matthias LANGHORST
Abstract: The invention relates to a method, a device and a system for the treatment of biological frozen samples using plasma focused ion beams (FIB). The samples can then be used for mass spectrometry (MS), genomics, such as gene sequencing analysis or next generation sequencing (NGS) analysis, and proteomics. The present invention particularly relates to a method of treatment of at least one biological sample. This method is particularly used for high performance microscopy, proteomics analytics, sequencing, such as NGS etc. According to the present invention the method comprises the steps of providing at least one biological sample in frozen form. The milling treats at least one part of the sample by a plasma ion beam comprising at least one of an O+ and/or a Xe+ plasma.
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公开(公告)号：US20210066032A1
公开(公告)日：2021-03-04
申请号：US16557199
申请日：2019-08-30
Applicant: FEI Company
Inventor： Maarten Kuijper , Ondrej Ludmil Shanel , Mathijs Petrus van den Boogaard , Pleun Dona
Abstract: Cryo compatible sample grids having multi-modal cryo-EM compatible GUIDs, according to the present disclosure include an outer support structure that defines a region of the grid for holding one or more samples, and a plurality of inner support structures that define a plurality of apertures that are each configured to hold a sample. Cryo compatible sample grids further include a first identifier located on the outer support structure, and a second identifier located within the region of the grid for holding the one or more samples. The first identifier is readable with an optical detector, while the second identifier is readable with an electron detector (e.g., within an electron microscope). Specifically, the second identifier is readable with an electron detector when one or more teeth and/or holes that comprise the second identifier are filled with ice from a vitrification process.
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公开(公告)号：US10937627B2
公开(公告)日：2021-03-02
申请号：US16423670
申请日：2019-05-28
Applicant: FEI Company
Inventor： Pavel Stejskal , Petr Hlavenka , Bohuslav Sed'a
IPC: H01J37/244 , H01J37/20 , H01J37/28
Abstract: An electron microscope comprising: A specimen holder, for holding a specimen; An electron beam column, for producing an array of electron beams and concurrently irradiating an array of target areas of said specimen therewith; A scanning assembly, for producing relative scanning motion of said beam array with respect to the specimen; A detector, for detecting radiation emanating from the specimen in response to said irradiation, wherein said detector is: A backscattered electron detector that can be disposed proximal to the specimen at a side thereof facing said electron beam column; Provided with an array of apertures that allow passage of said electron beams from said column to the specimen; Provided with a functionally sub-divided detection surface that enables segregated detection of a backscattered electron flux produced by each individual beam.
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