COATING METHOD AND COATING APPARATUS
    94.
    发明申请
    COATING METHOD AND COATING APPARATUS 有权
    涂料方法和涂料装置

    公开(公告)号:US20130089668A1

    公开(公告)日:2013-04-11

    申请号:US13633705

    申请日:2012-10-02

    CPC classification number: H01L21/6715 B05C11/06 B05D3/04

    Abstract: A coating head is constructed of a solvent feed mechanism connected to a forward side in a direction of movement of a coating solution feed mechanism, and a gas jet mechanism connected to a rearward side in the direction of movement. While moving the coating head relative to a substrate, a solvent is supplied onto the substrate from the solvent feed mechanism, then a coating solution is supplied onto a film of the solvent from the coating solution feed mechanism, and finally a gas is jetted to an uneven surface of the coating solution from the gas jet mechanism to smooth a thin film surface of the coating solution.

    Abstract translation: 涂布头由在涂布液供给机构的移动方向上的前方连接的溶剂供给机构和与运动方向的后方连接的气体喷射机构构成。 在相对于基板移动涂布头时,从溶剂供给机构将溶剂供给到基板上,然后将涂布液从涂布液供给机构供给到溶剂的膜上,最后将气体喷射到 喷涂机构的涂层溶液表面不均匀,使涂层溶液的薄膜表面光滑。

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