Integrated optical wavelength discrimination devices and methods for
fabricating same
    91.
    发明授权
    Integrated optical wavelength discrimination devices and methods for fabricating same 失效
    集成光波长鉴别装置及其制造方法

    公开(公告)号:US5784507A

    公开(公告)日:1998-07-21

    申请号:US312286

    申请日:1994-04-26

    Abstract: A top incident spectrometer includes a first distributed wavelength wedge filter region of order n.sub.1 that discriminates incoming radiation as a function of wedge location, at least one second wedge region order n.sub.2 (which region may be a graded dielectric film), and an underlying detector array. In another embodiment, a second dielectric wedge element includes a Fabrey-Perot etalon, a wedge dielectric film, or a graded index film matching the second dielectric wedge region to an underlying substrate. One or more slopes associated with wedge elements may also be varied to alter filter characteristics. Spatial characteristics may further be modified by including a dielectric material whose dielectric constant varies as a function of location. Wedge filter crosstalk is minimized by partitioning a wedge dielectric region in the lateral dimension. Another embodiment provides an edge incident spectrometer including an optical waveguide or thin film structure whose spatial optical impedance varies as a function of position. Outcoupling of optical radiation occurs as a function of wavelength along the spectrometer propagation direction. Outcoupling of optical radiation may also be made to overlying structures, or to regions within a common, preferably solid state, structure. Wedge structures may further be combined to intentionally create gaps in the spectral transmission for a filter structure. A shadow masking fabricates thin film elements having spatially varying features. A material is deposited onto a substrate using an edge to provide a shadow mask affecting the deposition stream.

    Abstract translation: 顶部入射光谱仪包括第n阶n阶第一分布波长楔形滤波器区域,其区分作为楔形位置的函数的入射辐射,至少一个第二楔形区域阶数n2(该区域可以是渐变电介质膜)和底层检测器阵列 。 在另一个实施例中,第二介电楔形元件包括Fabrey-Perot标准具,楔形电介质膜或将第二介电楔形区域与下面的衬底相匹配的渐变折射率膜。 与楔形元件相关联的一个或多个斜面也可以改变以改变滤波器特性。 通过包括其介电常数随着位置的函数而变化的介电材料可以进一步修改空间特性。 楔形滤波器串扰通过在侧向尺寸上划分楔形电介质区域来最小化。 另一个实施例提供了一种边缘入射光谱仪,其包括光学波导或薄膜结构,其空间光阻抗随着位置的变化而变化。 光辐射的外耦合作为沿着光谱仪传播方向的波长的函数发生。 光辐射的外耦合也可以制成覆盖的结构或共同的,优选固态的结构中的区域。 楔形结构可以进一步组合以有意地在滤波器结构的频谱传输中产生间隙。 阴影掩模制造具有空间变化特征的薄膜元件。 使用边缘将材料沉积到基底上,以提供影响沉积流的荫罩。

    Discrete wavelength spectrometer
    92.
    发明授权
    Discrete wavelength spectrometer 失效
    离散波长光谱仪

    公开(公告)号:US5731874A

    公开(公告)日:1998-03-24

    申请号:US709605

    申请日:1996-09-09

    Applicant: Nadim I. Maluf

    Inventor: Nadim I. Maluf

    CPC classification number: H01L27/1446 G01J3/02 G01J3/0259 G01J3/2803

    Abstract: A diffraction grating, diffraction structure or Fresnel zone device is formed on a first substrate for diffracting light components of different wavelengths. An array of detectors is formed on a second substrate for detecting different wavelength components diffracted where the second substrate is spaced apart from the grating, structure or device to form a spectrometer. Spectrometers sensitive to the particular spectral lines may be used for detecting the presence of substances. The spectral resolution at such spectral lines may be increased relative to other regions to enhance the sensitivity of detection. This is done by inverse Fourier transform of the desired discrete spectrum to obtain a desired transmission function and by half-toning the aperture function.

    Abstract translation: 在第一基板上形成衍射光栅,衍射结构或菲涅耳带装置,用于衍射不同波长的光分量。 检测器阵列形成在第二基板上,用于检测衍射的不同波长分量,其中第二基板与光栅,结构或装置间隔开以形成光谱仪。 对特定谱线敏感的光谱仪可用于检测物质的存在。 在这样的谱线处的光谱分辨率可以相对于其它区域增加,以增强检测的灵敏度。 这是通过所需离散频谱的傅立叶逆变换完成的,以获得期望的传输函数,并通过半色调孔径函数。

    Dispersive holographic spectrometer
    93.
    发明授权
    Dispersive holographic spectrometer 失效
    分散全息光谱仪

    公开(公告)号:US5050992A

    公开(公告)日:1991-09-24

    申请号:US508436

    申请日:1990-04-13

    Abstract: This invention relates to a dispersive holographic spectrometer (12) for analyzing radiation from an infrared source (16). The holographic spectrometer (12) comprises a piezoelectric block (40) having a holographic lens (38) on one face, an array of detectors (36) on another face and a pair of vernier electrodes (32, 34) on opposite faces. Radiation from the source (16) incident upon the holographic lens (38) is dispersed into component wavelengths (44, 46) and directed towards the detector array (38). The holographic lens (36) has a holographic interference pattern recorded on it such that radiation of predetermined wavelength components are dispersed sufficiently enough such that radiation of specific wavelengths falls on different detector elements (48) of the detector array (36). By applying a voltage to the electrodes (32, 38), an electric field is created within the piezoelectric block (40) such that it is either compressed or expanded. This change in the piezoelectric block (40) alters the direction of the radiation from the holographic lens (38) to the detector array (36). Therefore, misalignment of the source (16) with the holographic lens (38) can be compensated for such that piezoelectric adjustment of the block (40) will make the radiation of individual wavelengths fall on the desired detector element (48). Further, radiation from different wavelengths can be directed from one detector element to another. The detector array (36) is self-scanning such that an absorption spectrum can be measured and recorded over a range of frequencies.

    Monolithic optical programmable spectrograph (MOPS)
    94.
    发明授权
    Monolithic optical programmable spectrograph (MOPS) 失效
    单片光学可编程光谱仪(MOPS)

    公开(公告)号:US5026160A

    公开(公告)日:1991-06-25

    申请号:US417623

    申请日:1989-10-04

    Abstract: A solid monolithic spectrograph utilizes the Czerny-Turner geometric confration. It has a base constructed of BK7 optical glass to which all components are affixed with optical epoxy. The compact spectrograph operates in the visible spectrum in second order thereby permitting it to be smaller by a factor of two than if it operated in first order. The spectrograph is programmable and is capable of simultaneous multi-channel measurements of wavelengths and bandwidths of sources in the visible and near infrared spectral regions.

    Abstract translation: 固体单片光谱仪采用Czerny-Turner几何配置。 它具有由BK7光学玻璃构成的基座,所有部件都用光学环氧树脂固定。 紧凑型光谱仪在可见光谱中以二次方式操作,从而允许其比以一级操作的方式更小二倍。 光谱仪是可编程的,并且能够同时对可见光和近红外光谱区域中的光源的波长和带宽进行多通道测量。

    Monolithic diffraction spectrometer
    95.
    发明授权
    Monolithic diffraction spectrometer 失效
    单片衍射光谱仪

    公开(公告)号:US5020910A

    公开(公告)日:1991-06-04

    申请号:US488158

    申请日:1990-03-05

    CPC classification number: G01J3/18 G01J3/0259 G01J3/2803

    Abstract: A monolithic diffraction spectrometer having a diffraction grating formed over a light sensing array is provided. The diffraction grating serves to diffract wavelengths of interest to an underlying photosensitive device while diffracting other wavelengths away from the photosensing element. By forming a diffraction grating with a variable pitch, or multiple diffraction gratings having various pitches, any number of specific light wavelengths can be detected with a high degree of precision. When a diffraction grating having a pitch which is in the order of the incident wavelength of light is used, improved sensitivity is achieved.

    Abstract translation: 提供了具有形成在光感测阵列上的衍射光栅的单片衍射光谱仪。 衍射光栅用于将感兴趣的波长衍射到下面的光敏器件,同时将其它波长衍射离开感光元件。 通过形成具有可变间距的衍射光栅或具有各种间距的多个衍射光栅,可以高精度地检测任意数量的特定光波长。 当使用具有光入射波长顺序的间距的衍射光栅时,获得了提高的灵敏度。

    Optical device for use as a multiplexer or demultiplexer in accordance
with the diffraction grating principle
    97.
    发明授权
    Optical device for use as a multiplexer or demultiplexer in accordance with the diffraction grating principle 失效
    根据衍射光栅原理用作多路复用器或解复用器的光学装置

    公开(公告)号:US4744618A

    公开(公告)日:1988-05-17

    申请号:US481357

    申请日:1983-04-01

    Inventor: Hans F. Mahlein

    CPC classification number: G02B6/29307 G01J3/0259 G02B6/2931 G02B6/2938

    Abstract: An optical device for use either as a waveguide demultiplexer or a waveguide multiplexer characterized by a compact transparent member having a surface forming optical means such as an imaging mirror, an opposite surface portion having a diffraction grating formed thereon and first and second coupling surfaces so that light can be coupled into the member reflected by the mirror and the diffraction grating and then coupled out of the member. The device has various embodiments with different structures for the optical mirror and the transparent member, with the structure of the coupling surfaces being flat or curved, and with either flat or curved additional mirrors for reflecting the incoming and outgoing light adjacent to the coupling surfaces.

    Abstract translation: 用作波导解复用器或波导多路复用器的光学装置,其特征在于具有诸如成像镜的表面形成光学装置的紧凑透明构件,其上形成有衍射光栅的相对表面部分和第一和第二耦合表面,使得 光可以耦合到由反射镜和衍射光栅反射的构件中,然后耦合到构件外。 该装置具有用于光学反射镜和透明构件的不同结构的各种实施例,其中联接表面的结构是平坦的或弯曲的,以及用于反射邻近联接表面的入射光和出射光的平坦或弯曲的另外的反射镜。

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