Ion implantation system having beam angle control in drift and deceleration modes

    公开(公告)号:US10037877B1

    公开(公告)日:2018-07-31

    申请号:US15637538

    申请日:2017-06-29

    Abstract: An ion implantation system has an ion source forming an ion beam. An mass analyzer defines and varies a mass analyzed beam along a beam path. A moveable mass resolving aperture assembly has a resolving aperture whose position is selectively varied in response to the variation of the beam path by the mass analyzer. A deflecting deceleration element positioned selectively deflects the beam path and selectively decelerate the mass analyzed beam. A controller selectively operates the ion implantation system in both a drift mode and decel mode. The controller passes the mass analyzed beam along a first path through the resolving aperture without deflection or deceleration in the drift mode and deflects and decelerates the beam along a second path in the decel mode. The position of the resolving aperture is selectively varied based on the variation in the beam path through the mass analyzer and the deflecting deceleration element.

    MULTI-REFLECTION MASS SPECTROMETER WITH DECELERATION STAGE

    公开(公告)号:US20180138026A1

    公开(公告)日:2018-05-17

    申请号:US15801168

    申请日:2017-11-01

    CPC classification number: H01J49/406 H01J49/0031 H01J49/061

    Abstract: Disclosed herein is a multi-reflection mass spectrometer comprising two ion mirrors spaced apart and opposing each other in an X direction, each mirror elongated along a drift direction Y orthogonal to the direction X, and an ion injector for injecting ions as an ion beam into the space between the ion mirrors at an inclination angle to the X direction. Along a first portion of their length in the drift direction Y the ion mirrors converge with a first degree of convergence, and along a second portion of their length in the drift direction Y the ion mirrors converge with a second degree of convergence or are parallel, the first portion of their length being closer to the ion injector than the second portion and the first degree of convergence being greater than the second degree of convergence.

    ION INJECTION TO AN ELECTROSTATIC TRAP
    95.
    发明申请

    公开(公告)号:US20170352530A1

    公开(公告)日:2017-12-07

    申请号:US15600996

    申请日:2017-05-22

    CPC classification number: H01J49/4245 H01J49/061 H01J49/063 H01J49/4295

    Abstract: Ions are injected into an orbital electrostatic trap. An ejection potential is applied to an ion storage device, to cause ions stored in the ion storage device to be ejected towards the orbital electrostatic trap. Synchronous injection potentials are applied to a central electrode of the orbital electrostatic trap and a deflector electrode associated with the orbital electrostatic trap, to cause the ions ejected from the ion storage device to be captured by the electrostatic trap such that they orbit the central electrode. Application of the ejection potential and application of the synchronous injection potentials are each started at respective different times, the difference in times being selected based on desired values of mass-to-charge ratios of ions to be captured by the orbital electrostatic trap.

    MASS ANALYSER AND METHOD OF MASS ANALYSIS
    96.
    发明申请

    公开(公告)号:US20170278689A1

    公开(公告)日:2017-09-28

    申请号:US15618959

    申请日:2017-06-09

    Abstract: An electrostatic ion trap for mass analysis includes a first array of electrodes and a second array of electrodes, spaced from the first array of electrode. The first and second arrays of electrodes may be planar arrays formed by parallel strip electrodes or by concentric, circular or part-circular electrically conductive rings. The electrodes of the arrays are supplied with substantially the same pattern of voltage whereby the distribution of electrical potential in the space between the arrays is such as to reflect ions isochronously in a flight direction causing them to undergo periodic, oscillatory motion in the space, focused substantially mid-way between the arrays. Amplifier circuitry is used to detect image current having frequency components related to the mass-to-charge ratio of ions undergoing the periodic, oscillatory motion.

    DUEL MODE ION MOBILITY SPECTROMETER

    公开(公告)号:US20170248546A1

    公开(公告)日:2017-08-31

    申请号:US15515842

    申请日:2015-09-29

    CPC classification number: G01N27/622 H01J49/0027 H01J49/061

    Abstract: An ion mobility spectrometer (100) comprising a first ion source (102-1, 108-1) for providing positive ions to be analysed, an electric field applier arranged to provide an electric field configured to move the positive ions in a first direction towards a first ion detector (106-1, 110-1) adapted for detecting the positive ions, and a second ion source (102-2, 108-2) for providing negative ions to be analysed, wherein the electric field applier is arranged to move the negative ions in a direction opposite to the first direction, towards the first ion source (102-1, 108-1) and towards a second ion detector (106-1, 110-1) adapted for detecting the negative ions.

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