公开(公告)号：US09146194B2

公开(公告)日：2015-09-29

申请号：US13364226

申请日：2012-02-01

Applicant: Dar Bahatt ,  Chirag Patel ,  Roy Tan ,  Derek Prothro

Inventor： Dar Bahatt ,  Chirag Patel ,  Roy Tan ,  Derek Prothro

IPC: G01J3/28 ,  G01N21/64 ,  G01N21/03 ,  G01N21/25 ,  G01N21/76

CPC classification number: G01N21/31 ,  G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/189 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/4406 ,  G01J2003/1204 ,  G01J2003/1208 ,  G01J2003/1213 ,  G01J2003/1226 ,  G01N21/0332 ,  G01N21/253 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/6456 ,  G01N21/76 ,  G01N2021/6421 ,  G01N2021/6432 ,  G01N2201/06113 ,  G01N2201/0621 ,  G01N2201/0697

Abstract: Systems, including methods, apparatus, and algorithms, for spectrally imaging a two-dimensional array of samples.

Abstract translation: 用于对二维样本阵列进行光谱成像的系统，包括方法，装置和算法。

公开(公告)号：US20150247808A1

公开(公告)日：2015-09-03

申请号：US14195656

申请日：2014-03-03

Applicant: COHERENT LASERSYSTEMS GMBH & CO. KG

Inventor： Paul VAN DER WILT

IPC: G01N21/95 ,  G02B21/00 ,  G01N21/88 ,  H01L21/66 ,  G01N21/84

CPC classification number: H01L21/67253 ,  C30B1/02 ,  C30B29/06 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/8422 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8461 ,  G01N2021/8477 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/105 ,  G02B21/002 ,  G02B21/0092 ,  H01L21/02532 ,  H01L21/02686 ,  H01L21/268 ,  H01L22/12

Abstract: A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystalized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.

Abstract translation: 公开了评估通过用脉冲照射形成准分子激光而结晶的硅层的方法。 结晶层上产生周期性特征，取决于层暴露于的脉冲中的数量和能量密度。 该层的一个区域用光照亮。 照明区域的显微镜图像由从被照明的周期特征衍射的光制成。 显微镜图像包括相应的周期特征。 ED是从显微镜图像中的周期特征的对比度的量度确定的。

公开(公告)号：US20150226539A1

公开(公告)日：2015-08-13

申请号：US14691097

申请日：2015-04-20

Applicant: KLA-TENCOR CORPORATION

Inventor： Klaus-Dieter ROETH ,  Mohammad M. DANESHPANAH ,  Alexander BUETTNER ,  Apo SEZGINER ,  Mark WAGNER

IPC: G01B11/00 ,  G01N21/88

CPC classification number: G01B11/005 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0691 ,  G01N2201/0697 ,  G03F1/22 ,  G03F1/84

Abstract: A system, a method and a coordinate measuring machine is disclosed for determining the position of defects on objects. An interface is provided so that alignment and coordinate information from the inspection device can be sent to the coordinate measuring machine. A special illumination and detection arrangement is used with a plurality of optical elements in order to obtain a signal from defects on the unpatterned object. The light source of the illumination and detection arrangement is a laser light source for providing a partially coherent light beam. A computer calculates from the data provides by the detector array and the alignment and coordinate information of the object from the inspection device a position of the defect on the object.

Abstract translation: 公开了一种用于确定物体上缺陷位置的系统，方法和坐标测量机。 提供了一个接口，使得来自检查装置的对准和坐标信息可以发送到坐标测量机。 与多个光学元件一起使用特殊的照明和检测装置，以便获得来自未图案化物体上的缺陷的信号。 照明和检测装置的光源是用于提供部分相干光束的激光光源。 计算机根据检测器阵列提供的数据和来自检查装置的物体的对准和坐标信息来计算物体上缺陷的位置。

公开(公告)号：US20150198136A1

公开(公告)日：2015-07-16

申请号：US14152851

申请日：2014-01-10

Applicant: Ford Global Technologies, LLC

Inventor： Douglas Raymond Martin ,  Kenneth James Miller

IPC: F02P23/04 ,  G01B11/27 ,  G01S17/06 ,  F02C7/264 ,  G01M15/06

CPC classification number: F02P23/04 ,  F02D35/022 ,  F02D41/009 ,  F02D41/22 ,  F02P17/00 ,  G01M15/06 ,  G01N2201/06113 ,  G01N2201/0697 ,  G01S7/497 ,  G01S17/06 ,  G01S17/10 ,  G01S17/88 ,  Y02T10/40

Abstract: Methods and systems are provided for using an engine laser ignition system to perform a visual inspection of an engine and diagnose various cylinder components and conditions based on engine positional measurements. Laser pulses may be emitted at a lower power level during an intake and/or exhaust stroke to illuminate a cylinder interior while a photodetector captures images of the cylinder interior. Additionally, laser pulses may be emitted at a higher power level to initiate cylinder combustion while the photodetector captures images of the cylinder interior using the light generated during cylinder combustion.

公开(公告)号：US20150146200A1

公开(公告)日：2015-05-28

申请号：US14396908

申请日：2013-04-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshifumi Honda ,  Yuta Urano ,  Takahiro Jingu ,  Akira Hamamatsu

IPC: G01N21/95 ,  G01J1/04

CPC classification number: G01N21/8806 ,  G01J1/0474 ,  G01J1/44 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/12

Abstract: To detect an infinitesimal defect, highly precisely measure the dimensions of the detect, a detect inspection device is configured to comprise: a irradiation unit which irradiate light in a linear region on a surface of a sample; a detection unit which detect light from the linear region; and a signal processing unit which processes a signal obtained by detecting light and detecting a defect. The detection unit includes: an optical assembly which diffuses the light from the sample in one direction and forms an image in a direction orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the light diffused in the one direction and imaged in the direction orthogonal to the one direction, adds output signals of each of the detection pixels aligned in the direction in which the light is diffused, and outputs same.

Abstract translation: 为了检测无限小的缺陷，高度精确地测量检测器的尺寸，检测检查装置被配置为包括：照射单元，其照射样品表面上的线性区域中的光; 检测单元，其检测来自所述线性区域的光; 以及信号处理单元，其处理通过检测光而获得的信号并检测缺陷。 检测单元包括：光学组件，其在一个方向上扩散来自样品的光并在与该一个方向正交的方向上形成图像; 以及检测组件，其具有阵列传感器，其中检测像素被二维地定位，其检测沿与所述一个方向正交的方向成像的沿所述一个方向漫射的光，并将每个所述检测像素的输出信号相加， 光漫射的方向，并输出。

公开(公告)号：US20150131094A1

公开(公告)日：2015-05-14

申请号：US14540410

申请日：2014-11-13

Applicant: Awad Bin Saud Alquaity ,  Aamir Farooq

Inventor： Awad Bin Saud Alquaity ,  Aamir Farooq

IPC: G01N21/3504 ,  G01N33/00

CPC classification number: G01N33/0027 ,  G01J3/42 ,  G01N21/031 ,  G01N21/39 ,  G01N2021/396 ,  G01N2201/0697

Abstract: A system and method for cavity ring-down spectroscopy can include a pulsed quantum cascade laser, an optical ring-down cavity, a photodetector, and an oscilloscope. The system and method can produce pulse widths of less than 200 ns with bandwidths greater than 300 pm, as well as provide temporal resolution of greater than 10 μs.

Abstract translation: 用于空腔衰减光谱的系统和方法可以包括脉冲量子级联激光器，光学衰减腔，光电检测器和示波器。 该系统和方法可以产生小于200 ns的脉冲宽度，带宽大于300 pm，并提供大于10μs的时间分辨率。

公开(公告)号：US20150102229A1

公开(公告)日：2015-04-16

申请号：US14551230

申请日：2014-11-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Kei SHIMURA

IPC: G01N21/95 ,  G01N21/47

CPC classification number: G01N21/33 ,  G01N21/47 ,  G01N21/94 ,  G01N21/95 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95684 ,  G01N2201/06113 ,  G01N2201/0697

Abstract: Method for realizing an inspection with short wavelength, high power light source and large numerical aperture, high performance optics to improve defect inspection sensitivity is disclosed. Short wavelength high power laser is realized by using a pulse oscillation type laser suitable for generation of high output power in a short-wavelength region. In addition, a spectral bandwidth of the laser is narrowed down so that amount of chromatic aberration of detection optics with single glass material (i.e. without compensation of chromatic aberration) is lowered to permissible level. Using highly workable glass material to construct the detection optics enables necessary surface accuracy or profile irregularity conditions to be met, even if the number of lenses is increased for large NA or the lens doesn't have a rotationally symmetrical aperture.

Abstract translation: 公开了实现短波长，高功率光源和大数值孔径检测的方法，提高了高性能光学元件的缺陷检测灵敏度。 通过使用适合于在短波长区域中产生高输出功率的脉冲振荡型激光器来实现短波长大功率激光器。 此外，激光器的光谱带宽变窄，使得具有单一玻璃材料的检测光学器件（即，没有色差的补偿）的色差量降低到允许的水平。 使用高度可加工的玻璃材料来构造检测光学元件，即使对于大NA而言镜片的数量增加或透镜不具有旋转对称的孔径，也能够实现所需的表面精度或轮廓不规则条件。

公开(公告)号：US20150085296A1

公开(公告)日：2015-03-26

申请号：US14559312

申请日：2014-12-03

Applicant: OLYMPUS CORPORATION

Inventor： Hisashi ODE

IPC: G01N21/17 ,  G01B21/02 ,  G01B9/02

CPC classification number: G01N21/1702 ,  G01B9/02007 ,  G01B9/02091 ,  G01B21/02 ,  G01N29/0672 ,  G01N29/0681 ,  G01N29/2418 ,  G01N2021/1706 ,  G01N2201/06113 ,  G01N2201/0697 ,  G01N2201/08 ,  G01N2201/10 ,  G01N2201/125 ,  G02B21/002

Abstract: Provided is a photoacoustic microscope, including: an objective lens configured to collect excitation light into a specimen, the excitation light in a wavelength range that is absorbed by an object to be observed; a detection light optical system configured to (i) form an image of a point light source of detection light in a middle portion of a pupil of the objective lens, the detection light having a wavelength that is different from the wavelength range of the excitation light, and (ii) emit the detection light onto the specimen by means of the objective lens; an optical scanning unit configured to deflect the excitation light and the detection light that enter the objective lens, for scanning the specimen; and a light detection unit configured to detect reflected light of the detection light that is reflected by the specimen.

Abstract translation: 本发明提供一种光声显微镜，包括：被配置为将激发光收集到样本中的物镜，所述激发光在被观察对象吸收的波长范围内; 检测光光学系统，被配置为：（i）在所述物镜的光瞳的中间部分形成检测光的点光源的图像，所述检测光的波长与所述激发光的波长范围不同 ，和（ii）通过物镜将检测光发射到样品上; 光学扫描单元，被配置为偏转激发光和进入物镜的检测光，用于扫描样本; 以及光检测单元，被配置为检测由所述检体反射的检测光的反射光。

公开(公告)号：US20150079625A1

公开(公告)日：2015-03-19

申请号：US14383000

申请日：2012-03-05

Applicant: Xiaojun Peng ,  Hua Zhang ,  Jiangli Fan ,  Jingyun Wang

Inventor： Xiaojun Peng ,  Hua Zhang ,  Jiangli Fan ,  Jingyun Wang

IPC: G01N21/64 ,  C07D471/06 ,  C07D403/12 ,  C07D401/12

CPC classification number: G01N21/6486 ,  C07D401/12 ,  C07D403/12 ,  C07D471/04 ,  C07D471/06 ,  C09B57/00 ,  C09B57/08 ,  C09K11/02 ,  C09K11/06 ,  C09K2211/1007 ,  C09K2211/1029 ,  C09K2211/1044 ,  G01N21/6458 ,  G01N33/582 ,  G01N2201/06113 ,  G01N2201/0697

Abstract: The present invention provides a novel category of naphthalene-based two-photon fluorescent probes having a general formula I, wherein: X is selected from the X1, X2, X3 and X4; The mentioned two-photon fluorescent probes have a low fluorescence background in the non-tumor cells and tissues, and have a strong and specific fluorescent signal in the tumor cells and tissues. These probes have a certain level of water-solubility, while having good membrane permeability. In addition, they have a bigger effective two-photon absorption cross section. The compounds of the present invention also have a lower biotoxicity, phototoxicity and photobleaching. There is sufficient difference between the spectral range thereof and that of a biological sample.

Abstract translation: 本发明提供了一种新型的具有通式I的萘基双光子荧光探针，其中：X选自X1，X2，X3和X4; 所提到的双光子荧光探针在非肿瘤细胞和组织中具有低荧光背景，并且在肿瘤细胞和组织中具有强和特异性的荧光信号。 这些探针具有一定程度的水溶性，同时具有良好的膜透过性。 此外，它们具有更大的有效双光子吸收截面。 本发明的化合物也具有较低的生物毒性，光毒性和光漂白。 在其光谱范围和生物样品的光谱范围之间有足够的差异。

公开(公告)号：US20150069240A1

公开(公告)日：2015-03-12

申请号：US14539465

申请日：2014-11-12

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Kohei TAKAHASHI ,  Tsutomu KANNO ,  Akihiro SAKAI ,  Yuka YAMADA

IPC: H01S1/00 ,  G01N21/59 ,  G21K5/02 ,  G01N21/3581

CPC classification number: H01S1/00 ,  G01N21/3581 ,  G01N21/3586 ,  G01N21/59 ,  G01N2201/0612 ,  G01N2201/0697 ,  G02F1/355 ,  G02F2203/13 ,  G21K5/02 ,  H01L35/16

Abstract: A terahertz electromagnetic wave generator according to the present disclosure includes: a thermoelectric material layer; and a light source system which is configured to irradiate the thermoelectric material layer with pulsed light and generate a terahertz wave from the thermoelectric material layer. The thermoelectric material layer includes a gradient portion in which transmittance of the pulsed light varies in a certain direction. And the light source system is configured to irradiate the gradient portion of the thermoelectric material layer with the pulsed light.

Abstract translation: 根据本公开的太赫兹电磁波发生器包括：热电材料层; 以及光源系统，其被配置为用脉冲光照射所述热电材料层并从所述热电材料层产生太赫兹波。 热电材料层包括梯度部分，其中脉冲光的透射率在某个方向上变化。 并且光源系统被配置为用脉冲光照射热电材料层的梯度部分。