公开(公告)号：US20090323060A1

公开(公告)日：2009-12-31

申请号：US12309897

申请日：2007-07-31

Applicant: Dietmar Knipp

Inventor： Dietmar Knipp

IPC: G01J3/447 ,  H01L31/0224 ,  H01L31/0232 ,  H01L31/18 ,  G01J4/00

CPC classification number: G01J3/12 ,  G01J3/02 ,  G01J3/0259 ,  G01J2003/1213 ,  H01L27/14643

Abstract: The invention relates to an optical spectral sensor for determining the spectral information of incident light, in particular in the visible and infrared spectral range, with at least one optoelectronic semiconductor arrangement and at least one metal film, which is surrounded by a dielectric, wherein the metal film has a periodic pattern, wherein the at least one optoelectronic semiconductor arrangement and the at least one patterned metal film are arranged in such a way that light to be detected initially passes through the patterned metal film and then impinges on the optoelectronic semiconductor arrangement, wherein the optical spectral sensor is formed in such a way that the spectral sensitivity is determined essentially by the optical properties of the patterned metal film.

Abstract translation: 本发明涉及一种光谱传感器，用于利用至少一个光电子半导体装置和被电介质包围的至少一个金属膜确定入射光的光谱信息，特别是在可见光和红外光谱范围内，其中， 金属膜具有周期性图案，其中所述至少一个光电半导体布置和所述至少一个图案化金属膜以使得要被检测的光初始通过图案化的金属膜然后撞击在光电子半导体布置上的方式布置， 其中光谱传感器以这样的方式形成，使得光谱灵敏度基本上由图案化的金属膜的光学特性确定。

公开(公告)号：US07428043B2

公开(公告)日：2008-09-23

申请号：US10854987

申请日：2004-05-27

Applicant: Ingo Boehm ,  Frank Schreiber

Inventor： Ingo Boehm ,  Frank Schreiber

IPC: G01J1/42 ,  G01J3/42 ,  G01J3/447 ,  G01J3/28

CPC classification number: G01J3/14 ,  G01J3/0224 ,  G01J4/00 ,  G02B21/0024

Abstract: An apparatus for ascertaining properties of a light beam, comprises a means for splitting a measured beam out from the light beam and comprises at least one detector that at least partially receives the measured beam. A polarization-influencing means is arranged in the beam path of the measured beam in order to enhance reliability and reproducibility.

Abstract translation: 用于确定光束性质的装置包括用于将测量的光束从光束分离出的装置，并且包括至少部分地接收所测量的光束的至少一个检测器。 在测量光束的光束路径中布置偏振影响装置，以便提高可靠性和再现性。

公开(公告)号：US20080170225A1

公开(公告)日：2008-07-17

申请号：US11954794

申请日：2007-12-12

Applicant: Johannes F. de Boer ,  Guillermo J. Tearney ,  Brett E. Bouma

Inventor： Johannes F. de Boer ,  Guillermo J. Tearney ,  Brett E. Bouma

IPC: G01J3/447 ,  G01J3/28

CPC classification number: G01B9/02007 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/7257 ,  G01B9/02008 ,  G01B9/0201 ,  G01B9/02032 ,  G01B9/02044 ,  G01B9/02045 ,  G01B9/02079 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/45 ,  G01N21/4795

Abstract: Apparatus and method for increasing the sensitivity in the detection of optical coherence tomography and low coherence interferometry (“LCI”) signals by detecting a parallel set of spectral bands, each band being a unique combination of optical frequencies. The LCI broad bandwidth source is split into N spectral bands. The N spectral bands are individually detected and processed to provide an increase in the signal-to-noise ratio by a factor of N. Each spectral band is detected by a separate photo detector and amplified. For each spectral band the signal is band pass filtered around the signal band by analog electronics and digitized, or, alternatively, the signal may be digitized and band pass filtered in software. As a consequence, the shot noise contribution to the signal is reduced by a factor equal to the number of spectral bands. The signal remains the same. The reduction of the shot noise increases the dynamic range and sensitivity of the system.

公开(公告)号：US07256890B2

公开(公告)日：2007-08-14

申请号：US11281536

申请日：2005-11-18

Applicant: Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

Inventor： Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

IPC: G01J3/28 ,  G01J3/447

CPC classification number: G02B27/286 ,  G01B9/04 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/18 ,  G01N21/21

Abstract: A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Abstract translation: 能够抑制衍射光栅的偏振依赖性引起的问题的能够抑制尺寸和成本的分光器。 分光镜包括：偏振分束板3，其将来自输入光纤1的光分成第一和第二光路，并且使具有不同偏振方向的每个光路的每个光彼此偏振;菲涅耳菱形半波片5 其将第一光路中的光的偏振方向排列成第二光路中的偏振方向，以及平面镜4，其使第二光路偏转，使得通过第一光路的光的至少一部分区域为 入射在衍射光栅6上的入射光和穿过第二光路的光入射到衍射光栅上的区域彼此重叠。

公开(公告)号：US20050200845A1

公开(公告)日：2005-09-15

申请号：US11076400

申请日：2005-03-09

Applicant: Nataliya Nabatova-Gabain ,  Yoko Wasai

Inventor： Nataliya Nabatova-Gabain ,  Yoko Wasai

IPC: G01B11/02 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01N21/00 ,  G01N21/17 ,  G01N21/21 ,  G01N21/41 ,  G01N21/47 ,  G01N21/65

CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01J3/28 ,  G01N2021/213

Abstract: An ellipsometer measures any point of a sample by a first spectrometer and a second spectrometer. The ellipsometer performs analysis based on the measurement results obtained by the first spectrometer, performs analysis based on the measurement results obtained by the second spectrometer, and calculates an approximation formula for approximating the analysis results obtained by the second spectrometer to the analysis results obtained by the first spectrometer. The remaining points of the sample are measured with the second spectrometer, and the results of analysis using the measurement results are corrected based on the approximation formula.

Abstract translation: 椭偏仪通过第一光谱仪和第二光谱仪测量样品的任何点。 椭圆光度计基于第一光谱仪获得的测量结果进行分析，根据由第二光谱仪获得的测量结果进行分析，并计算用于将由第二光谱仪获得的分析结果近似的近似公式与由 第一光谱仪 使用第二光谱仪测量样品的剩余点，并且基于近似公式校正使用测量结果的分析结果。

公开(公告)号：US06943880B2

公开(公告)日：2005-09-13

申请号：US10128379

申请日：2002-04-23

Applicant: Toyoki Kanzaki

Inventor： Toyoki Kanzaki

IPC: G01B11/06 ,  G01J3/447 ,  G01J4/04 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01N21/211

Abstract: A spectroscopic ellipsometer is provided for measuring a small target surface with a high degree of precision. An irradiating optical system provides a polarized light to the surface of the target, while a detecting optical system is provided with a higher F-number for collecting the reflected light from the target surface to introduce it into the spectrometer for measuring a thickness of a thin film on the surface of the sample in accordance with the polarization state of change of the detected light rays.

Abstract translation: 提供了一种用于以高精度测量小目标表面的分光椭偏仪。 照射光学系统向目标表面提供偏振光，同时检测光学系统具有较高的F数，用于收集来自目标表面的反射光，将其引入光谱仪中，以测量薄的厚度 根据检测到的光线的偏振状态改变样品表面的膜。

公开(公告)号：US20050105088A1

公开(公告)日：2005-05-19

申请号：US10507280

申请日：2003-03-11

Applicant: Enrique Garcia-Caurel ,  Jean-Luc Moncel ,  Bernard Drevillon ,  Francis Bos

Inventor： Enrique Garcia-Caurel ,  Jean-Luc Moncel ,  Bernard Drevillon ,  Francis Bos

IPC: G01J3/447 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01N21/211

Abstract: The invention concerns a polarimetric system and a method of polarimetric measurement of the Mueller matrix coefficients of a sample (7). The polarimetric system contains an excitation section (1) emitting a light beam (2). Said light beam passes through a polarisation state generator (PSG) (5) and is focused on the sample (7) on a sample holder (3). After reflection on the sample surface (8), the beam goes through an analysis section (4) containing a polarisation state detector (PSD) or polarimeter (9) and detection means (10). According to the invention, the light beam (2) emitted by the excitation section (1) is in the spectral range from the far ultraviolet to the visible. The light beam propagates through the excitation section (1) up to through the analysis section (4) under a low partial pressure of far ultraviolet absorbing gases. The polarimetric system comprises one or more air tight chamber (17), said chambers containing said excitation section, said analysis section, and said sample holder.

Abstract translation: 本发明涉及一种偏振测量系统和一种样品（7）的Mueller矩阵系数的极化测量方法。 偏振系统包含发射光束（2）的激发部分（1）。 所述光束通过偏振状态发生器（PSG）（5）并聚焦在样品架（3）上的样品（7）上。 在样品表面（8）上反射后，光束通过包含偏振状态检测器（PSD）或偏振计（9）和检测装置（10）的分析部分（4）。 根据本发明，由激励部（1）发射的光束（2）处于从远紫外线到可见光的光谱范围。 光束在远紫外吸收气体的低分压下传播通过激发部分（1）直到分析部分（4）。 偏振系统包括一个或多个气密室（17），所述腔室包含所述激发部分，所述分析部分和所述样品保持器。

公开(公告)号：US06121051A

公开(公告)日：2000-09-19

申请号：US3727

申请日：1998-01-07

Applicant: Kristine A. Bertness

Inventor： Kristine A. Bertness

IPC: G01J3/447 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  Y10T436/12

Abstract: This invention provides an inexpensive, noninvasive optical method of quantitatively determining the volume fraction of anisotropic material in a mixture of anisotropic and isotropic material, and more particularly for determining the volume fraction of noncubic crystalline material in a mixed-phase specimen having noncubic crystalline material intermixed with cubic crystalline material. Polarized light is impinged on the specimen and the reflectance or transmission difference between two orthogonal polarization directions is measured. In cubic regions the reflectance or transmission is the same along both polarization directions so the contributions to the difference cancel, leaving a signal only from the noncubic regions. The optical difference can be measured as a function of wavelength and critical points in the band structure, including the band gap, can be profiled. From the band structure the film composition can be determined. This measurement is particularly suited to measuring III-V nitride semiconductor specimens having regions with zincblende symmetry mixed with regions of wurtzite symmetry.

Abstract translation: 本发明提供了一种廉价的无创光学方法，用于定量地测定各向异性和各向同性材料的混合物中的各向异性材料的体积分数，更具体地说，用于确定具有非孪晶结晶材料混合的混合相样品中的非耻结晶材料的体积分数 与立方晶体材料。 偏振光照射在样本上，测量两个正交偏振方向之间的反射率或透射差。 在立方体区域中，两个偏振方向的反射率或透射率相同，所以对差分的贡献取消，仅留下来自非立体区域的信号。 可以测量光学差异作为波长的函数，并且可以对包括带隙的带结构中的临界点进行分析。 从带结构可以确定膜组成。 该测量特别适用于测量III族氮化物半导体样品，其具有与纤锌矿对称性区域混合的闪锌矿对称区域。

公开(公告)号：US6094267A

公开(公告)日：2000-07-25

申请号：US295213

申请日：1999-04-21

Applicant: Marc D. Levenson ,  Barbara A. Paldus ,  Richard N. Zare

Inventor： Marc D. Levenson ,  Barbara A. Paldus ,  Richard N. Zare

IPC: G01J3/26 ,  G01J3/30 ,  G01J3/42 ,  G01J3/447 ,  G01J9/04 ,  G01N21/03 ,  G01N21/21 ,  G01N21/27 ,  G01N21/39 ,  H01S3/00 ,  G01B9/02

CPC classification number: G01N21/39 ,  G01J3/30 ,  G01J3/42

Abstract: A cavity ring-down system for performing cavity ring-down spectroscopy (CRDS) using optical heterodyne detection of a ring-down wave E.sub.RD during a ring-down phase or a ring-up wave E.sub.RU during a ring up phase. The system sends a local oscillator wave E.sub.LO and a signal wave E.sub.SIGNAL to the cavity, preferably a ring resonator, and derives an interference signal from the combined local oscillator wave E.sub.LO and the ring-down wave E.sub.RD (or ring-up wave E.sub.RU). The local oscillator wave E.sub.LO has a first polarization and the ring-down wave E.sub.RD has a second polarization different from the first polarization. The system has a combining arrangement for combining or overlapping local oscillator wave E.sub.LO and the ring-down wave E.sub.RD at a photodetector, which receives the interference signal and generates a heterodyne current I.sub.H therefrom. Frequency and phase differences between the waves are adjustable.

Abstract translation: 一种空穴衰减系统，用于在振铃阶段期间使用环形衰减波ERR的环外波检测来执行空腔衰减光谱（CRDS）。 该系统将本地振荡器波ELO和信号波ESIGNAL发送到腔，优选地是环形谐振器，并且从组合的本地振荡器波ELO和衰减波ERD（或振铃波ERU）导出干扰信号。 本地振荡器波ELO具有第一极化，并且降波波ERD具有与第一极化不同的第二极化。 该系统具有用于组合或重叠本地振荡器波ELO和在光电检测器处的​​衰减波ERD的组合布置，其接收干扰信号并从其产生外差电流IH。 波之间的频率和相位差可调。

公开(公告)号：US5936735A

公开(公告)日：1999-08-10

申请号：US52300

申请日：1998-03-31

Applicant: James F. Elman

Inventor： James F. Elman

IPC: G01J3/447 ,  G01J4/00 ,  G01N21/23

CPC classification number: G01N21/23 ,  G01J3/447 ,  G01J4/00 ,  G01J3/0224

Abstract: An apparatus for determining the optical retardation of a material. The apparatus includes a light source emitting light along a light path, and a lens disposed in the light path intermediate the light source and a sample of the material. A waveguide directs the light from the light source to the sample and directs light reflected from the sample to a wavelength analyzer, whereby the wavelength analyzer detects the wavelengths of the reflected light. The apparatus of the present invention includes a sole polarizing element disposed in the light path intermediate the light source and the wavelength analyzer.

Abstract translation: 一种用于确定材料的光学延迟的装置。 该装置包括沿光路发射光的光源和设置在光源中间的光路中的透镜和材料的样本。 波导将来自光源的光引导到样品，并将从样品反射的光引导到波长分析仪，由此波长分析仪检测反射光的波长。 本发明的装置包括设置在光源和波长分析器之间的光路中的唯一偏振元件。