公开(公告)号：US20180039057A1

公开(公告)日：2018-02-08

申请号：US15520854

申请日：2015-10-22

Applicant: LEICA MICROSYSTEMS CMS GMBH

Inventor： Patric MRAWEK ,  Frank SCHREIBER ,  Roland SEIFERT

IPC: G02B21/28 ,  G02B21/00 ,  G01J1/04 ,  G01J1/02

CPC classification number: G02B21/28 ,  G01J1/0252 ,  G01J1/0271 ,  G01J1/0403 ,  G01J1/0448 ,  G02B21/0032 ,  G02B21/008 ,  G02B21/0096

Abstract: A detector device is designed to capture light and to generate electrical signals. The detector device includes a housing and a detector disposed in the housing so as to be moveable at least partially in the housing and with respect to the housing. The detector device is useable in a detection system and/or in a microscope.

公开(公告)号：US20180029164A1

公开(公告)日：2018-02-01

申请号：US15546067

申请日：2016-02-03

Applicant: PRIMES GMBH MESSTECHNIK FUER DIE PRODUKTION MIT LASERSTRAHLUNG

Inventor： Reinhard KRAMER ,  Otto MÄRTEN ,  Stefan WOLF

IPC: B23K26/70 ,  B23K26/082 ,  B23K26/046 ,  G01J1/04 ,  G01J1/42

CPC classification number: B23K26/705 ,  B23K26/04 ,  B23K26/046 ,  B23K26/082 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/4257 ,  G01J9/00

Abstract: Apparatus for determining geometrical parameters of a laser beam includes an optical system, a device for output coupling radiation, a beam diagnostic device, and a reflector element. The optical system focuses the laser beam into a processing region. The device for output coupling radiation couples out radiation that runs through the optical system in a direction opposite to a direction of the laser beam. The reflector element has a first surface which is partially reflecting and curved, where the curvature is equal to a mean curvature of a wave front of the laser beam in a positioning region of the reflector element.

公开(公告)号：US20180017721A1

公开(公告)日：2018-01-18

申请号：US15711836

申请日：2017-09-21

Applicant: JSR Corporation

Inventor： Katsuya NAGAYA ,  Toshihiro OTSUKI ,  Takashi TSUBOUCHI

IPC: G02B5/22 ,  G01J1/04 ,  G01J1/02

CPC classification number: G02B5/22 ,  G01J1/02 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/0403 ,  G01J1/0448 ,  G01J1/0488 ,  G01J1/4204 ,  G02B5/28 ,  H01L31/02162 ,  H01L31/0232 ,  H01L31/02322 ,  H01L31/08

Abstract: An optical filter including a base member having a layer containing near-infrared absorbing fine particles and a dielectric multilayer film, the optical filter satisfying a requirement that, in a wavelength range of 400 nm to 650 nm, an average of transmittance of any of light incident from a direction perpendicular to the optical filter, light obliquely incident at an angle of 30 degrees, and light obliquely incident at an angle of 60 degrees is 45% or higher and lower than 85%; and a requirement that, in a wavelength range of 800 nm to 1,200 nm, an average of optical density (OD value) of any of light incident from the direction perpendicular to the optical filter, light obliquely incident at an angle of 30 degrees with respect to the perpendicular direction, and light obliquely incident at an angle of 60 degrees with respect to the perpendicular direction is 1.7 or higher.

公开(公告)号：US09813644B1

公开(公告)日：2017-11-07

申请号：US14744779

申请日：2015-06-19

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Paul E. Jackson ,  Clara R. Baleine ,  Christopher P. Voita

IPC: G01J1/04 ,  H04N5/33 ,  G01J1/42 ,  G01J1/44

CPC classification number: H04N5/33 ,  G01J1/0407 ,  G01J1/0448 ,  G01J1/4228 ,  G01J1/44 ,  G01J5/046 ,  G01J5/0825 ,  G01J5/0837 ,  G01J5/0896 ,  G01J2001/448 ,  G01J2005/0077 ,  G01J2005/202

Abstract: An infrared imager includes a first optical component, a second optical component, and at least one thin film dielectric layer. The first optical component has multiple first parallel conductors with a first spacing pattern, aligned in a plane perpendicular to an axis. The second optical component has multiple second parallel conductors with a second spacing pattern, aligned in a plane perpendicular to the axis, angularly offset from the first direction. The thin film dielectric layer includes a refractive index change (RIC) material disposed between and in contact with the first and second parallel conductors. The first optical component, second optical component, and at least one thin film dielectric layer form an antenna array configured to detect one or more predetermined infrared wavelengths based on at least one of the first spacing pattern or the second spacing pattern or the angular offset.

公开(公告)号：US09762023B2

公开(公告)日：2017-09-12

申请号：US14976829

申请日：2015-12-21

Applicant: CYMER, LLC ,  ASML NETHERLANDS B.V.

Inventor： Joshua Jon Thornes ,  Tanuj Aggarwal ,  Kevin Michael O'Brien ,  Frank Everts ,  Herman Philip Godfried ,  Russell Allen Burdt

IPC: G03B27/32 ,  G03B27/72 ,  G03B27/74 ,  H01S3/10 ,  H01S3/13 ,  G03F7/20 ,  H01S3/00 ,  G01J11/00

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0448 ,  G01J1/4257 ,  G03F7/70041 ,  G03F7/70516 ,  G03F7/7055 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/10046 ,  H01S3/10069

Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.

公开(公告)号：US09719882B2

公开(公告)日：2017-08-01

申请号：US14371588

申请日：2013-01-07

Applicant: Emmanuelle Pitte ,  Vincent Petit ,  Pierre Lecoq

Inventor： Emmanuelle Pitte ,  Vincent Petit ,  Pierre Lecoq

IPC: G01B9/00 ,  G01M11/04 ,  G02B15/16 ,  G02B27/30 ,  G01J1/42 ,  G01J1/04 ,  G01J1/08 ,  F21V13/02 ,  F21V14/06

CPC classification number: G01M11/04 ,  F21V13/02 ,  F21V14/06 ,  G01J1/0411 ,  G01J1/0448 ,  G01J1/08 ,  G01J1/4257 ,  G02B15/161 ,  G02B27/30

Abstract: This optical system includes: a device (106) for generating a plane light wave, called a collimated light wave (OLcol); and a device (114) for deviating the collimated light wave so as to provide a light wave, called a test light wave (OLtest), the deviating device (114) having an adjustable focal length.

公开(公告)号：US09714863B2

公开(公告)日：2017-07-25

申请号：US14647992

申请日：2013-11-08

Applicant: International Business Machines Corporation

Inventor： Bernd W. Gotsmann ,  Siegfried F. Karg ,  Emanuel Loertscher ,  Heike E. Riel ,  Giorgio Signorello

IPC: G01J3/02 ,  B82Y20/00 ,  H01L31/105 ,  G01J1/04 ,  G01J1/42 ,  G01J3/28 ,  H01L31/0352 ,  G01J1/02

CPC classification number: G01J3/0202 ,  B82Y20/00 ,  G01J1/0204 ,  G01J1/0429 ,  G01J1/0448 ,  G01J1/42 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/28 ,  G01J3/2803 ,  H01L31/035227 ,  H01L31/105

Abstract: An optical spectrometer contains a photodiode and a straining mechanism for imposing adjustable strain on the photodiode. The spectrometer includes a measurement apparatus for measuring variation of photocurrent with strain at different values of the adjustable strain imposed by the straining mechanism. Adjusting the strain allows adjustment of the band gap Eg of the photosensitive region of the photodiode, and this determines the cut-off energy for absorption of photons. Measuring variation of photocurrent with strain at different values of the adjustable strain imposed by the straining mechanism allows study of photons within a desired energy range of the band gap energy corresponding to each strain value.

公开(公告)号：US09534953B2

公开(公告)日：2017-01-03

申请号：US14356247

申请日：2011-12-27

Applicant: Fumio Shoda ,  Hidenori Fukahori ,  Takayuki Yanagisawa ,  Mitoru Yabe ,  Tetsuya Nishimura ,  Shuhei Yamamoto ,  Yoko Inoue ,  Tetsuo Funakura

Inventor： Fumio Shoda ,  Hidenori Fukahori ,  Takayuki Yanagisawa ,  Mitoru Yabe ,  Tetsuya Nishimura ,  Shuhei Yamamoto ,  Yoko Inoue ,  Tetsuo Funakura

IPC: G01J1/42 ,  G01J1/04 ,  G01J1/22

CPC classification number: G01J1/4257 ,  G01J1/0407 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0448 ,  G01J1/0474 ,  G01J1/22

Abstract: A laser output measuring apparatus in which an optical separator is disposed in a position that is rotated by a predetermined angle about an optical axis of a laser beam converged by a lens, and further rotated by a predetermined angle about the optical axis of the laser beam and a straight line perpendicular to an incident surface of the laser beam.

Abstract translation: 一种激光输出测量装置，其中光学分离器设置在围绕由透镜会聚的激光束的光轴旋转预定角度的位置，并且进一步围绕激光束的光轴旋转预定角度 以及垂直于激光束的入射表面的直线。

公开(公告)号：US20160231174A1

公开(公告)日：2016-08-11

申请号：US14843310

申请日：2015-09-02

Applicant: Sekonic Corporation

Inventor： Tomohide KANZAWA ,  Hiroshi HARADA ,  Yasushi FUKAZAWA ,  Eigo YOSHIKAWA ,  Hirohiko OKABE

IPC: G01J3/50 ,  G01J3/02

CPC classification number: G01J3/0272 ,  G01J1/0233 ,  G01J1/0403 ,  G01J1/0411 ,  G01J1/0418 ,  G01J1/0422 ,  G01J1/0448 ,  G01J1/0474 ,  G01J3/0202 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0213 ,  G01J3/0216 ,  G01J3/0237 ,  G01J3/46

Abstract: Disclosed is a photometric apparatus improved in measurement precision by improving the state of light incident to a sensor. The photometric apparatus 1 includes a photometric sensor 30 into which light which is an object to be measured is incident, a signal processing element for processing a sensor output by the photometric sensor, and optical systems 50, 100, 92, 93 and 150 which introduces external light into the photometric sensor, wherein a columnar fiber rod 100 in which a center axis is provided along a direction perpendicular to a light receiving surface of the photometric sensor is provided at a part of the optical system.

Abstract translation: 公开了一种通过改善入射到传感器的光的状态来提高测量精度的测光装置。 测光装置1包括测光传感器30，测量对象物入射到该测光传感器30中，用于处理由测光传感器输出的传感器的信号处理元件以及引入了光测量传感器的光学系统50,100,92,93和150 外部光进入光度传感器，其中在光学系统的一部分处设置有沿着与测光传感器的光接收表面垂直的方向设置中心轴的柱状纤维杆100。

公开(公告)号：US20160146664A1

公开(公告)日：2016-05-26

申请号：US14945507

申请日：2015-11-19

Applicant: Heraeus Noblelight America LLC

Inventor： Keith Andrew Helms ,  Timothy Allan Dombkowski ,  James Robert Elliott

IPC: G01J1/42 ,  B05D3/06 ,  G01J1/02

CPC classification number: G01J1/429 ,  B05D3/061 ,  G01J1/0271 ,  G01J1/0403 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0448 ,  G01J1/0462

Abstract: A photo-detector device may include a substrate having a bottom surface. The photo-detector device may further include a photocell secured to the bottom surface of the substrate. The photo-detector device may further include a metallic block having a top portion secured to a bottom surface of the substrate to enclose the photocell, wherein an opening is formed within the metallic block that extends from the top portion of the metallic block to a bottom portion of the metallic block to form an aperture for light to travel through the metallic block to the photocell. The photo-detector device may further include a member insertable into the metallic block to vary an open area of the aperture.

Abstract translation: 光检测器装置可以包括具有底表面的基底。 光检测器装置还可以包括固定到基底的底表面的光电池。 光检测器装置还可以包括金属块，其具有固定到基板的底表面以封闭光电池的顶部部分，其中在金属块内形成有从金属块的顶部延伸到底部的开口 金属块的一部分以形成用于光穿过金属块到光电池的孔。 光检测器装置还可以包括可插入到金属块中以改变开口面积的构件。