Image data acquisition method
    121.
    发明申请
    Image data acquisition method 审中-公开
    图像数据采集方法

    公开(公告)号:US20020062202A1

    公开(公告)日:2002-05-23

    申请号:US09955858

    申请日:2001-09-19

    Inventor: Yujin Arai

    Abstract: An image data acquisition method comprises scanning a sample by a light, receiving a light from the sample, to acquire a scanned image data, and storing the scanned image data obtained by scanning a region of a predetermined size every time a region scanned by the light reaches a predetermined size, sequentially.

    Abstract translation: 一种图像数据采集方法,包括用光进行样本的扫描,接收来自样本的光,获得扫描图像数据,并存储通过扫描由光照射的区域每隔预定尺寸区域获得的扫描图像数据 顺序达到预定尺寸。

    MULTIPLE CHANNEL LASER ULTRASONIC SYSTEM
    122.
    发明公开

    公开(公告)号:US20240328926A1

    公开(公告)日:2024-10-03

    申请号:US18191788

    申请日:2023-03-28

    Abstract: The present disclosure provides for a multiple channel laser ultrasonic system using a single detection laser and a single generation laser for inspecting internal structures. An example system includes a laser generator configured to emit generation laser light, a laser detector configured to emit detection laser light, and a scanning apparatus. The scanning apparatus is configured to receive the generation laser light and the detection laser light, direct the generation laser light and the detection laser light onto a surface of a structure via a plurality of laser ultrasonic channels, and collect reflections of the detection laser light from the surface of the structure via the plurality of laser ultrasonic channels. The system also includes a controller configured to characterize an internal feature of the structure based on the reflections.

    Apparatuses for analyzing the optical properties of a sample

    公开(公告)号:US11781989B2

    公开(公告)日:2023-10-10

    申请号:US17652941

    申请日:2022-03-01

    Abstract: A method of analysing a sample in the form of a droplet provided on a sample-receiving surface includes providing a light source and a detector in a housing, positioning said sample-receiving surface in or on the housing, and focussing an incident beam of light to a focal point in the vicinity of the sample. Light is detected from the sample resulting from an interaction with the sample, the sample-receiving surface, or the atmosphere surrounding the sample. At least one parameter of the detected light is measured, and the sample-receiving surface is translated relative to the housing such that the focal point is at a different region of the sample, the sample-receiving surface, or the atmosphere surrounding the sample. The step of measuring one or more parameters of the detected light is repeated following the translating step.

    DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

    公开(公告)号:US20230175978A1

    公开(公告)日:2023-06-08

    申请号:US17913553

    申请日:2020-04-02

    CPC classification number: G01N21/9501 G01N21/47 G01N2201/10

    Abstract: A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.

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