公开(公告)号：US20050110995A1

公开(公告)日：2005-05-26

申请号：US10954388

申请日：2004-09-30

Applicant: Erin Weeks ,  Kenneth Brecher

Inventor： Erin Weeks ,  Kenneth Brecher

IPC: G01J3/04 ,  G01J3/18 ,  G01J3/30 ,  G01J3/28

CPC classification number: G01J3/04 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/1838 ,  G01J3/30

Abstract: A direct-view handheld binocular spectrometer for use in a variety of educational settings. The device comprises a holographic transmission diffraction grating and a uniquely curved quantitative wavelength scale for viewing visible-wavelength spectra with both eyes simultaneously. A variable width entrance slit, adjustable illumination for the wavelength scale, and attachable corrective lenses enhance the ease of use and efficiency as compared to traditional monocular spectrometers.

Abstract translation: 一种用于各种教育环境的直视手持式双目光谱仪。 该装置包括全息透射衍射光栅和唯一弯曲的定量波长标度，用于同时用双眼观察可见光波长光谱。 与传统的单目光谱仪相比，可变宽度入口狭缝，可调节的波长标度照明和可连接的矫正镜片增强了使用和效率的便利性。

公开(公告)号：US06897952B1

公开(公告)日：2005-05-24

申请号：US09869371

申请日：1999-06-25

Applicant: Thomas W. Hagler

Inventor： Thomas W. Hagler

IPC: G01J3/12 ,  G01J3/28 ,  G01J3/32 ,  G01J3/433 ,  G01J3/04

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/18 ,  G01J3/32 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866

Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(mθ+pπ/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by corresponding filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

Abstract translation: 用作空间辐射调制器的盘在其上具有分散的辐射滤波器。 每个滤光器具有形式为sinθ2（mta + ppi / 4）的透射率或反射调制函数，其中m是正整数，p具有四个值0,1,2,3中的一个 包括所选择的波长分量的辐射束被衍射成根据波长分散的细长图像。 不同的波长分量聚焦在调制器上的不同滤波器上，并由相应的滤波器编码。 由于滤波器的调制功能彼此正交，因此可以在一次测量期间从总检测信号对相应的滤波器进行编码或调制之后提取每个波长分量的振幅。

公开(公告)号：US06859275B2

公开(公告)日：2005-02-22

申请号：US09798860

申请日：2001-03-01

Applicant: William G. Fateley ,  Ronald R. Coifman ,  Frank Geshwind ,  Richard A. DeVerse

Inventor： William G. Fateley ,  Ronald R. Coifman ,  Frank Geshwind ,  Richard A. DeVerse

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/18 ,  G01J3/28 ,  G01J3/32 ,  G01J3/457 ,  G01N21/39 ,  G02B26/08 ,  G02B27/10 ,  G01J3/04

CPC classification number: G02B27/1013 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/06 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/2846 ,  G01J3/2889 ,  G01J3/32 ,  G01J3/42 ,  G01J3/433 ,  G01J3/457 ,  G01J2003/2866 ,  G01N21/39 ,  G01N2021/393 ,  G01N2021/6463 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/1086 ,  G02B27/126

Abstract: Encoded spatio-spectral information processing is performed using a system having a radiation source, wavelength dispersion device and two-dimensional switching array, such as digital micro-mirror array (DMA). In one aspect, spectral components from a sample are dispersed in space and modulated separately by the switching array, each element of which may operate according to a predetermined encoding pattern. The encoded spectral components can then be detected and analyzed. In a different aspect, the switching array can be used to provide a controllable radiation source for illuminating a sample with radiation patterns that have predetermined characteristics and separately encoded components. Various applications are disclosed.

Abstract translation: 使用具有辐射源，波长色散器件和二维开关阵列（例如数字微镜阵列（DMA））的系统执行编码空间光谱信息处理。 在一个方面，来自样本的频谱分量被分散在空间中，并且由开关阵列分开调制，开关阵列的每个元件可以根据预定的编码模式进行操作。 然后可以检测和分析编码的光谱分量。 在不同的方面，开关阵列可以用于提供用于利用具有预定特征的辐射图案和分开编码的部件来照射样本的可控辐射源。 公开了各种应用。

公开(公告)号：US20050030607A1

公开(公告)日：2005-02-10

申请号：US10889650

申请日：2004-07-12

Applicant: Lutz Niggl ,  Karl Puchegger

Inventor： Lutz Niggl ,  Karl Puchegger

IPC: G01J3/04 ,  G01N21/25 ,  G01N21/64 ,  G02B26/02

CPC classification number: G01N21/6452 ,  G01J3/04 ,  G01N21/253 ,  G01N2021/6463 ,  G01N2021/6473

Abstract: Device (1) and method for delimiting a field (3) impinged with light from a light source (2), particularly on the surface of an optical element (4) and/or sample (5), having a slit diaphragm (6) including a slit height (7) and a slit width (8), which includes first and second linearly movable slides (9, 9′), positioned parallel to one another on two separate parallel lines, which are movable at least partially symmetrically to one another in relation to an optical axis (10), each of the two slides (9, 9′) including at least one optical opening (11, 11′), which—for continuous adjustment of at least the slit height (7) or the slit width (8)—may be positioned at least partially on the optical opening (11′, 11) of the neighboring slide (9′, 9) in the region of the optical axis (10). The device (1) according to the present invention and the method according to the present invention are distinguished in that the device (1) includes a motor drive (15) having an axis of rotation (16) for moving the two slides (9, 9′) in a movement direction (19), this axis of rotation (16) of the motor drive (15) being positioned perpendicularly to this movement direction (19).

Abstract translation: 用于界定光源（2）的光（特别是在具有狭缝光阑6的光学元件4和/或样品5的表面上）的场（3）的定界装置（1） 包括狭缝高度（7）和狭缝宽度（8），其包括第一和第二线性可移动的滑动件（9,9'），它们在两个分开的平行线上彼此平行地定位，它们可以至少部分对称地移动到一个 另一个相对于光轴（10），两个滑块（9,9'）中的每一个包括至少一个光学开口（11,11'），用于至少连续调节狭缝高度（7）或 狭缝宽度（8）可以在光轴（10）的区域中至少部分地位于相邻滑块（9'，9）的光学开口（11'，11）上。 根据本发明的装置（1）和根据本发明的方法的特征在于，装置（1）包括具有旋转轴线（16）的马达驱动器（15），用于使两个滑块（9， 9'），电机驱动器（15）的该旋转轴线（16）垂直于该移动方向（19）定位。

公开(公告)号：US6088096A

公开(公告)日：2000-07-11

申请号：US96524

申请日：1998-06-12

Applicant: Masahiro Aoki ,  Susumu Saito

Inventor： Masahiro Aoki ,  Susumu Saito

IPC: G01N21/67 ,  C23F4/00 ,  G01N21/68 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/46 ,  G01J3/04

CPC classification number: H01J37/32935 ,  G01N21/68 ,  H01J37/32963

Abstract: An end-point detector for a plasma etcher, includes a converging lens for receiving strip-like plasma light produced between a pair of opposed electrodes and a spectroscope, having a slit located at a substantial rear-side focal plane of the converging lens, for detecting an etching end time point from a time-based variation of spectrum light intensity of the plasma light which has been converged at the slit and has passed through the slit. The converging lens has a pupil diameter of not greater than ##EQU1## where W is a width of a short side of the strip-like plasma light produced between the electrodes, 1 is a distance between an end of each electrode and a pupil face of the converging lens, NAm is a numerical aperture required by the spectroscope, and h is a width of a short side of the slit of the spectroscope. The converging lens has a numerical aperture of not less than NAm.

Abstract translation: 一种用于等离子体蚀刻器的端点检测器，包括会聚透镜，用于接收在一对相对电极和分光镜之间产生的带状等离子体光，其具有位于会聚透镜的大体后侧焦平面处的狭缝，用于 从已经收敛在狭缝处并已经通过狭缝的等离子体光的光谱光强度的基于时间的变化检测蚀刻结束时间点。 会聚透镜的瞳孔直径不大于其中W是在电极之间产生的带状等离子体光的短边的宽度，1是每个电极的端部和会聚透镜的光瞳面之间的距离 ，NAm是分光器所需的数值孔径，h是分光器狭缝的宽度。 会聚透镜的数值孔径不小于NAm。

公开(公告)号：US5764053A

公开(公告)日：1998-06-09

申请号：US502509

申请日：1995-07-14

Applicant: John Robbins ,  Shachar Nadler

Inventor： John Robbins ,  Shachar Nadler

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/28 ,  G01J3/32 ,  G01B7/14 ,  G01J3/42 ,  G01N33/00

CPC classification number: G01J3/02 ,  G01J3/0232 ,  G01J3/04 ,  G01J3/32 ,  G01J2003/2866

Abstract: An apparatus for use in Differential Optical Absorption Spectroscopy (DOAS) or in other optical apparatus provides a moveable or oscillating aperture. It has a sensor for detecting the position of the aperture, and a drive for oscillating the aperture; the drive and sensor can comprise coils forming a linear variable differential transformer, and the aperture can be spring biased to a neutral position. A control circuit is connected between the coil or other sensor and the drive coils, so that the motion of the aperture follows a desired profile. This enables significant parts of the apertures motion to be constrained to be linear. The aperture can be provided in a shuttle mounted on extension arms, whose ends are connected to resilient biassing means which serve both to support the shuttle and to bias it. More preferably, extension arms extend through pole pieces of magnets, which provide a magnetic field for drive coils. Another aspect of the invention provides a telescope apparatus, for a DOAS technique, including a baffle moveable between calibration and operational positions. This enables light from the light source to be transmitted either for measurement or for calibration allowing for changes in lamp output, etc.

Abstract translation: 用于差分光吸收光谱（DOAS）或其他光学装置的装置提供可移动或摆动的光圈。 它具有用于检测孔的位置的传感器和用于使孔径摆动的驱动器; 驱动器和传感器可以包括形成线性可变差动变压器的线圈，并且孔可以被弹簧偏压到中立位置。 控制电路连接在线圈或其它传感器与驱动线圈之间，使得孔的运动遵循期望的轮廓。 这使得孔的大部分运动被限制为线性的。 孔可以设置在安装在延伸臂上的穿梭件中，其端部连接到弹性偏压装置，其用于支撑梭子并偏置。 更优选地，延伸臂延伸穿过磁体的极片，磁体片为驱动线圈提供磁场。 本发明的另一方面提供了一种用于DOAS技术的望远镜装置，其包括可在校准位置和操作位置之间移动的挡板。 这使得来自光源的光被传输用于测量或校准，从而允许灯输出的变化等。

公开(公告)号：US5661589A

公开(公告)日：1997-08-26

申请号：US399093

申请日：1995-02-24

Applicant: Duane E. Meyer

Inventor： Duane E. Meyer

IPC: G01J3/04 ,  G02B5/00 ,  G02F1/28

CPC classification number: G01J3/04 ,  G02B5/005

Abstract: A system for translating applied linear motion into a slit width present between facing edges of two "Knife-blade" elements. In its preferred embodiment, two slide assemblies are firmly affixed to a frame such that loci of motion of slide elements thereof form an acute angle therebetween. Lower ends of each slide element, as viewed in vertically oriented frontal elevation, allow horizontal motion therebetween when said slide element lower ends are caused to simultaneously move vertically. An alternative embodiment provides that the slide elements be oriented such that said loci of motion of said slide elements are, for instance, horizontally directed. In its preferred embodiment the simultaneous motion of the slide elements is effected by a motor, preferably a precisely controlled computer driven stepper motor, which motor causes a threaded shaft therein to move vertically as a result of screw thread translation of motor imparted rotational motion to said threaded shaft.

Abstract translation: 用于将应用的线性运动转换成存在于两个“刀 - 刀”元件的相对边缘之间的狭缝宽度的系统。 在其优选实施例中，两个滑动组件牢固地固定到框架上，使得其滑动元件的运动轨迹在其间形成锐角。 当在垂直方向的正面高度上看时，每个滑动元件的下端允许当所述滑动元件下端同时垂直移动时在其间进行水平运动。 替代实施例提供了滑动元件被定向成使得所述滑动元件的所述运动轨迹例如是水平定向的。 在其优选实施例中，滑动元件的同时运动由电动机，优选地是精确控制的计算机驱动的步进电动机来实现，该电动机使得其中的螺纹轴由于电动机旋转运动的螺纹平移而垂直地移动到所述 螺纹轴。

公开(公告)号：US5570180A

公开(公告)日：1996-10-29

申请号：US518194

申请日：1995-08-23

Applicant: Yoshiroh Nagai

Inventor： Yoshiroh Nagai

IPC: G01J3/06 ,  G01J3/28 ,  G01J3/04

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/06 ,  G01J3/2846 ,  G01J2003/1273

Abstract: A multi-slit type spectrometer includes a light diffracter which diffracts an incident light according to wavelengths; an optical shutter array member including a plurality of optical shutter elements arranged in correspondence with wavelength bands diffracted by the light diffracter, operable to transmit an incident ray according to an applied voltage, and made of PLZT. A zone of a given number of adjacent optical shutter elements is applied with a voltage corresponding to the wavelength bands of the rays incident upon the zone of adjacent optical shutter elements at a specified timing so that the rays respectively pass through or are reflected at the optical shutter elements. A signal processor receives the ray which has passed through or has been reflected at each optical shutter element and outputs an electrical signal according to the intensity of the received ray. A calculator calculates the intensity of the incident ray for each wavelength band in accordance with the electrical signal output from the signal processor and the specified applying timing.

Abstract translation: 多狭缝型光谱仪包括根据波长衍射入射光的光致畸变器; 光学快门阵列部件，其包括与由光致变色器衍射的波长带对应地布置的多个光学快门元件，可操作以根据施加的电压传输入射光线，并由PLZT制成。 给定数量的相邻光学快门元件的区域以指定的时刻施加与入射在相邻光学快门元件的区域上的光线的波段相对应的电压，使得光线分别通过或者被反射在光学 快门元素 信号处理器接收已经通过或已经在每个光学快门元件反射的光线，并根据所接收的光线的强度输出电信号。 计算器根据从信号处理器输出的电信号和指定的施加定时计算每个波段的入射光线的强度。

公开(公告)号：US5042893A

公开(公告)日：1991-08-27

申请号：US611238

申请日：1990-11-09

Applicant: Ronald G. J. Ong

Inventor： Ronald G. J. Ong

IPC: G01J3/02 ,  G01J3/04 ,  G02B6/04 ,  G02B6/34 ,  G02B6/36 ,  G02B6/42

CPC classification number: G02B6/40 ,  G01J3/02 ,  G01J3/0221 ,  G01J3/0291 ,  G02B6/3807 ,  G02B6/4249 ,  G01N2201/084 ,  G02B6/04 ,  G02B6/29308 ,  G02B6/2931 ,  G02B6/3885 ,  G02B6/4215

Abstract: A fiber optic coupler for use with a diode array spectrophotometer system that optimizes the optical interface between a first fiber optic waveguide employed to couple light from a sample under analysis and a diode array spectrograph. The coupler comprises a fiber optic waveguide connector that secures the first optical fiber waveguide that couples light from the sample under investigation. A slit block is provided that has a relatively thin, rectangular exit aperture having dimensions compatible with the spectrograph. A single waveguide (or plurality of fiber optic waveguides) is coupled between the connector and the exit aperture and is arranged to have a generally round cross section adjacent the connector and a linear cross section adjacent the spectrograph. Improved light throughput is achieved at the fiber optic waveguide-spectrophotometer interface, when compared with conventional fiber optic spectrophotometer designs. The coupler provides for easier assembly at the fiber optic waveguide to spectrophotometer interface and minimizes the total number of optical components in the system. The present invention eliminates misalignment of the fiber-slit interface of conventional designs, and provides better sensitivity and signal to noise. Furthermore, the present invention is simpler, and reduces the total number of optically active components which results in a lower unit cost. The use of fixed parts in the coupler elminates light loss associated with the tedius and difficult manual alignment at the fiber-slit interface. As a consequence, better sensitivity is achieved.

Abstract translation: 一种用于二极管阵列分光光度计系统的光纤耦合器，其优化用于耦合来自被分析的样品的光的第一光纤波导与二极管阵列光谱仪之间的光学接口。 耦合器包括光纤波导连接器，其固定耦合来自被调查样品的光的第一光纤波导。 提供了具有相对较薄的矩形出口孔的狭缝块，具有与该光谱仪相容的尺寸。 单个波导（或多个光纤波导）耦合在连接器和出口孔之间，并被布置成具有与连接器相邻的大致圆形的横截面和与该光谱仪相邻的线性横截面。 与传统的光纤分光光度计设计相比，在光纤波导 - 分光光度计界面上实现了光通量的提高。 耦合器提供了在光纤波导处更容易地组装到分光光度计接口并且最小化系统中的光学部件的总数。 本发明消除了常规设计的光纤狭缝界面的未对准，并且提供了更好的灵敏度和信噪比。 此外，本发明更简单，并且减少了导致较低单位成本的光学活性组分的总数。 在耦合器中使用固定部件会降低与Tedius相关的光损失，并且在光纤切口界面处难于手动对准。 因此，实现更好的灵敏度。

公开(公告)号：US4993834A

公开(公告)日：1991-02-19

申请号：US411820

申请日：1989-09-25

Applicant: Christoph Carlhoff ,  Claus-Jurgen Lorenzen ,  Klaus-Peter Nick

Inventor： Christoph Carlhoff ,  Claus-Jurgen Lorenzen ,  Klaus-Peter Nick

IPC: G01J1/44 ,  G01J3/04 ,  G01J3/12 ,  G01J3/20 ,  G01J3/28 ,  G01J3/36

CPC classification number: G01J3/20 ,  G01J3/2803 ,  G01J2001/446 ,  G01J2001/448 ,  G01J2003/045 ,  G01J2003/1295

Abstract: A polychromator in a Paschen-Runge mounting in which intensity measurements are made by means of a row of photodiodes. The spectral intensity distribution of at least two spectral regions on the Rowland circle is transmitted to the row of photodiodes by image conductors and is measured there.

Abstract translation: 在Paschen-Runge安装中的多色分光仪，其中通过一行光电二极管进行强度测量。 Rowland圆上至少两个光谱区域的光谱强度分布通过图像导体传输到光电二极管行，并在那里进行测量。