Abstract:
A micromachined mass spectrometer includes an ionizer, a separation region and a detector. The ionizer is formed from an upper electrode, a center electrode and a lower electrode. Ionization of a sample gas takes place around an edge of the center electrode. Accelerating electrodes extract ionized particles from the ionizer. Ionized particles are accelerated through the separation region. A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region causing the trajectory of the ionized particles to bend. The mass spectrometer is formed using micromachined techniques and is carried on a single substrate.
Abstract:
A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
Abstract:
A lens system in a photo ion spectrometer for manipulating a primary ion beam and ionized atomic component. The atomic components are removed from a sample by a primary ion beam using the lens system, and the ions are extracted for analysis. The lens system further includes ionization resistant coatings for protecting the lens system.
Abstract:
A MOSFET structure having a biased gate covered with an insulator of such a thickness as to render the structure capable of giving a measure of accumulated charge and usable in a stacked structure as a particle spectrometer.
Abstract:
The molecules of a sample are ionized and the produced ions are subjected to a dispersion according to their kinetic energies in an electrostatic field and then to a dispersion according to their mass numbers in a magnetic field. Of the mass-dispersed ions, some having a specific mass number are focussed by means of a lens system disposed between the electrostatic and magnetic fields and the focussed ions are detected by an ion detector.
Abstract:
Method and apparatus for separating selectively ionized particles of one isotope type from the background environment of charged and neutral particles. In particular, a particle flow is generated which contains neutral particles of plural isotope types, as well as a number of ions of the various isotope types. It is desired to selectively ionize and separately collect only those particles of one isotope type and for this purpose, an acceleration is produced in the ions of the background environment prior to selective ionization of the desired isotope particles. After selective ionization, a further acceleration, in an opposite direction, is produced upon the charged particles which results in a deflection of the selectively ionized particles towards collection surfaces and restores to generally normal flow velocity and charge distribution, the ions from the background environment.