LIMITED F-CONE LIGHT SOURCE
    143.
    发明申请
    LIMITED F-CONE LIGHT SOURCE 失效
    有限公司F-CONE光源

    公开(公告)号:US20130010474A1

    公开(公告)日:2013-01-10

    申请号:US13617195

    申请日:2012-09-14

    Applicant: Andrew Bodkin

    Inventor: Andrew Bodkin

    Abstract: A shutter includes micro-optics having first and second concentrator arrays. A transducer laterally displaces one of the first and second concentrator arrays between transmissive and shuttered modes. In the transmissive mode, the arrays of concentrators are optically aligned to permit electromagnetic energy passing through the first array of concentrators to pass through the second array of concentrators. In the shuttered mode, the electromagnetic radiation is blocked from passing through the second array of concentrators. The concentrators may be compound parabolic concentrators, or lenslets positioned on opposing plates with pinholes printed therethrough. The shutter may increase f-number of radiation passing therethrough, and may be used in a limited f-cone radiation source with shuttering abilities, for example reducing f-cone of radiation output from the radiation source.

    Abstract translation: 快门包括具有第一和第二集中器阵列的微光学器件。 换能器在透射和快门模式之间横向移位第一和第二聚光器阵列中的一个。 在透射模式中,聚光器阵列被光学对准以允许通过第一集中器阵列的电磁能量穿过第二阵列的聚光器。 在快门模式中,电磁辐射被阻止通过第二阵列的聚光器。 集中器可以是复合抛物面聚光器,或者位于相对的板上的小透镜,其中针孔印刷在其中。 快门可以增加通过其中的f数量的辐射,并且可以用于具有快门能力的有限的f-锥体辐射源,例如减小从辐射源输出的辐射的f锥。

    Planar waveguide wavelength dispersive devices with multiple waveguide input aperture
    144.
    发明授权
    Planar waveguide wavelength dispersive devices with multiple waveguide input aperture 有权
    具有多个波导输入孔径的平面波导波长色散装置

    公开(公告)号:US08351043B2

    公开(公告)日:2013-01-08

    申请号:US12531338

    申请日:2008-03-20

    Abstract: A spectrometer has a multi-input aperture for admitting an input wavefront and an array of multiple waveguide structures terminating at the multi-input aperture. The input wavefront is incident on each of the waveguide structures, which provide a dispersive function for the input wavefront. Interferometers are formed by elements of the waveguide structures. The interferometers have different optical path length differences (OPDs). The interferometers provide a wavelength responsive output for spatially extended light sources. The output of the interferometers is detected with a detector array. The spectrometer has an improved etendue, and in some embodiments very high resolution.

    Abstract translation: 光谱仪具有用于允许输入波前的多输入孔径和终止于多输入孔径处的多个波导结构的阵列。 输入波前入射在每个波导结构上,这为输入波前提供了色散函数。 干涉仪由波导结构的元件形成。 干涉仪具有不同的光程差(OPD)。 干涉仪为空间延伸的光源提供波长响应输出。 用检测器阵列检测干涉仪的输出。 光谱仪具有改进的光密度,并且在一些实施例中具有非常高的分辨率。

    ANALYSIS DEVICE
    145.
    发明申请
    ANALYSIS DEVICE 有权
    分析装置

    公开(公告)号:US20130003054A1

    公开(公告)日:2013-01-03

    申请号:US13634207

    申请日:2011-02-21

    Applicant: Ippei Kamimura

    Inventor: Ippei Kamimura

    Abstract: An analysis device capable of handling analysis of a wide variety of components while suppressing an increase in device size is provided. An analysis device 1 is provided with a light emitting unit 10, a transmissive spectral filter 22, a light detector 23, and an analysis unit 31. The spectral filter 22 is provided with a light transmissive substrate, a plurality of raised portions formed with a first metal material on one surface of the substrate, and a metal film formed using a second metal material having a higher refractive index than the first metal material, so as to cover the raised portions and the one surface. The raised portions are disposed such that the metal film existing between the raised portions serves as a diffraction grating and the raised portions serve as a waveguide. The grating pitch of the diffraction grating, the height of the raised portions and the thickness of the metal film are set to a different value for each portion of the spectral filter, such that the wavelength of the transmitted light of the spectral filter changes for each of the portions. The light detector 23 is disposed such that each light receiving element 24 receives transmitted light of the spectral filter. The analysis unit 31 acquires the spectrum of the object 40 from the output signals of the light receiving elements 24.

    Abstract translation: 提供能够在抑制设备尺寸增加的同时处理各种部件的分析的分析装置。 分析装置1设置有发光单元10,透射光谱滤波器22,光检测器23和分析单元31.光谱滤波器22设置有透光基板,多个凸起部分形成有 在所述基板的一个表面上的第一金属材料和使用具有比所述第一金属材料更高的折射率的第二金属材料形成的金属膜,以覆盖所述凸起部分和所述一个表面。 凸起部分被布置成使得存在于凸起部分之间的金属膜用作衍射光栅,并且凸起部分用作波导。 衍射光栅的光栅间距,凸起部分的高度和金属膜的厚度被设置为对于光谱滤光器的每个部分的不同值,使得光谱滤光器的透射光的波长针对每个 的部分。 光检测器23被布置成使得每个光接收元件24接收光谱滤波器的透射光。 分析单元31从光接收元件24的输出信号获取物体40的光谱。

    TEMPERATURE-COMPENSATED SPECTROMETER
    146.
    发明申请
    TEMPERATURE-COMPENSATED SPECTROMETER 有权
    温度补偿光谱仪

    公开(公告)号:US20120327416A1

    公开(公告)日:2012-12-27

    申请号:US13579838

    申请日:2011-02-15

    CPC classification number: G01J3/20 G01J3/02 G01J3/0286 G01J3/443

    Abstract: The invention relates to a spectrometer comprising a hollow main optical body having at least one light channel, a light source, a diffraction grating having a grating central point, a light inlet opening, and a detector unit, which are arranged in such a way that the focal curve of the spectrometer satisfies the back focus equation. In order to create a spectrometer having sufficient spectral resolution from a low-price, light, and easy-to-process material, which spectrometer is able to operate in a large temperature interval even without thermostatic control, according to the invention the light inlet opening is arranged on a compensation body, the compensation body is arranged in the light channel and fastened to the main optical body between the light source and the diffraction grating, and the compensation body is dimensioned in such a way that the compensation body changes the distance between the light inlet opening and the grating central point when the main optical body thermally expands.

    Abstract translation: 本发明涉及一种光谱仪,其包括具有至少一个光通道的中空主光学主体,光源,具有光栅中心点的衍射光栅,光入口和检测器单元,其布置成 光谱仪的焦点曲线满足后焦点方程。 为了从低价格,轻便且易于处理的材料制造具有足够的光谱分辨率的光谱仪,即使没有恒温控制,该光谱仪也能够在大的温度范围内操作,根据本发明,光入口开口 被配置在补偿体上,补偿体配置在光通道中并且紧固在光源与衍射光栅之间的主光学体上,并且补偿体的尺寸使得补偿体的尺寸使得补偿体之间的距离 当主光学体热膨胀时,光入口和光栅中心点。

    Apparatus and method for detecting arcs
    147.
    发明授权
    Apparatus and method for detecting arcs 失效
    电弧检测装置及方法

    公开(公告)号:US08332170B2

    公开(公告)日:2012-12-11

    申请号:US12772565

    申请日:2010-05-03

    Abstract: The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.

    Abstract translation: 在用于制造半导体或LCD面板的等离子体处理室中检测电弧的装置包括:用于感测电弧的传感器模块; 处理器模块,用于处理来自传感器模块的数据; 其中传感器模块包括RGB颜色传感器,用于感测在室中发生的电弧的颜色数据,RGB颜色传感器是可感测到电弧的红色或绿色或蓝色中的至少一种的传感器,该装置通过 感测电弧的颜色和色度和亮度的数据。

    Time resolved raman spectroscopy
    148.
    发明授权
    Time resolved raman spectroscopy 有权
    时间分辨拉曼光谱

    公开(公告)号:US08325337B2

    公开(公告)日:2012-12-04

    申请号:US12668844

    申请日:2008-07-14

    Abstract: System, method, and apparatus for determining the composition of a sample of material. In one embodiment, the method pertains to the counting of photons that were inelastically scattered by the sample, and for minimizing the effects of fluorescent or phosphorescent photons. In yet another embodiment of the invention, a sample is illuminated by a repetitive pulse of monochromatic light, and the resultant scattered photons from the samples are collected and counted during a predetermined integration period. Yet other embodiments pertain to a low-cost, computer-controlled system for repetitively counting inelastically scattered photons so as to create a Raman histogram and a Raman spectrogram of the photons.

    Abstract translation: 用于确定材料样品的组成的系统,方法和装置。 在一个实施方案中,该方法涉及由样品非弹性散射的光子的计数,并且用于使荧光或磷光光子的影响最小化。 在本发明的另一个实施例中,通过单色光的重复脉冲照射样品,并且在预定的积分期间收集并计数来自样品的所得散射光子。 其他实施例涉及用于重复计数非弹性散射的光子的低成本的计算机控制系统,以便产生光子的拉曼直方图和拉曼光谱图。

    COMPACT INTERFEROMETER SPECTROMETER
    149.
    发明申请
    COMPACT INTERFEROMETER SPECTROMETER 有权
    紧凑型干涉仪光谱仪

    公开(公告)号:US20120281223A1

    公开(公告)日:2012-11-08

    申请号:US13522665

    申请日:2011-01-14

    Applicant: Hugh Mortimer

    Inventor: Hugh Mortimer

    CPC classification number: G01J3/02 G01B9/0209 G01J3/0208 G01J3/4531 G01J3/4532

    Abstract: An interferometer is disclosed, such as may be incorporated into a hand-held spectrometer. The interferometer comprises enclosed path optics and a detector, the enclosed path optics comprise at least two reflecting elements and a beamsplitter, the beamsplitter is arranged to divide an input beam into first and second beams. The enclosed path optics are arranged to direct the first and second beams in opposite directions around paths enclosing an area and to output the first and second beams towards the detector. The enclosed path optics also focus the first and second beams onto the detector. The detector is arranged to detect a pattern produced by interference of the first and second beams. In a preferred embodiment the two reflecting elements are a pair of concave mirrors, and the enclosed path optics enclose a triangular area. The use of concave mirrors for both reflection and focussing provides the interferometer with compactness.

    Abstract translation: 公开了干涉仪,例如可以并入到手持式光谱仪中。 干涉仪包括封闭路径光学器件和检测器,封闭路径光学器件包括至少两个反射元件和分束器,分束器被布置成将输入光束分成第一和第二光束。 封闭路径光学器件被布置成围绕围绕一个区域的路径沿相反的方向引导第一和第二光束,并且将第一和第二光束朝向检测器输出。 封闭路径光学器件还将第一和第二光束聚焦到检测器上。 检测器被布置成检测由第一和第二光束的干涉产生的图案。 在优选实施例中,两个反射元件是一对凹面镜,并且封闭路径光学器件包围三角形区域。 使用凹面反射镜进行反射和聚焦为干涉仪提供了紧凑性。

    PROCESS AND MEASURING EQUIPMENT FOR IMPROVING THE SIGNAL RESOLUTION IN GAS ABSORPTION SPECTROSCOPY
    150.
    发明申请
    PROCESS AND MEASURING EQUIPMENT FOR IMPROVING THE SIGNAL RESOLUTION IN GAS ABSORPTION SPECTROSCOPY 审中-公开
    用于改善气体吸收光谱信号分析的过程和测量设备

    公开(公告)号:US20120281221A1

    公开(公告)日:2012-11-08

    申请号:US13460950

    申请日:2012-05-01

    CPC classification number: G01J3/02 G01J3/0262 G01J3/433 G01N21/0303 G01N21/39

    Abstract: Process and measuring equipment for improving the signal resolution in gas absorption spectroscopy, wherein the measuring equipment includes a laser light source, a light detector and a measuring chamber arranged in between, and furthermore a light source control unit and a light detector evaluation unit. To improve the signal resolution, the noise intensity of the measuring equipment is reduced by averaging over time the interfering signal portions caused by back-reflections, etalons respectively self-mixing effects. This is accomplished by a light modulator arranged downstream the laser light source that continuously periodically influences the optical path length of the light beam. Thereto the light modulator includes an optical element with an adjustable refractory index that continuously cyclically alters the phase of the laser light of the light beam.

    Abstract translation: 一种用于改善气体吸收光谱信号分辨率的处理和测量设备,其中测量设备包括激光源,光检测器和布置在其间的测量室,此外还包括光源控制单元和光检测器评估单元。 为了提高信号分辨率,测量设备的噪声强度通过随时间推移的干扰信号部分由反射反射,标准具分别自我混合的影响而减小。 这是通过布置在激光光源下游的光调制器实现的,其连续地周期性地影响光束的光路长度。 光调制器包括具有可调节的耐火指数的光学元件,其连续地循环地改变光束的激光的相位。

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