公开(公告)号：US08558199B2

公开(公告)日：2013-10-15

申请号：US13724379

申请日：2012-12-21

Applicant: Institut National de la Recherche Scientifique

Inventor： Stephane Payeur ,  Sylvain Fourmaux ,  Jean-Claude Kieffer ,  Michel Piche ,  Jean-Philippe MacLean ,  Christopher Tchervenkov

IPC: G21G4/00

CPC classification number: G21G4/00 ,  H01J3/02 ,  H01J3/04 ,  H01J27/20 ,  H01J27/24 ,  H01J31/00 ,  H01J35/02 ,  H05H15/00

Abstract: A method for generating an ultrashort charged particle beam, comprising creating a high intensity longitudinal E-field by shaping and tightly focusing, in an on-axis geometry, a substantially radially polarized laser beam, and using the high intensity longitudinal E-field for interaction with a medium to accelerate charged particles.

Abstract translation: 一种用于产生超短带电粒子束的方法，包括通过在轴上的几何形状中成形和紧密聚焦来产生高强度纵向电场，基本上径向偏振的激光束，并且使用高强度纵向电场进行相互作用 用介质加速带电粒子。

公开(公告)号：US20130168577A1

公开(公告)日：2013-07-04

申请号：US13715662

申请日：2012-12-14

Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE

Inventor： Vincenzo GRILLO ,  Lorenzo MARRUCCI ,  Ebrahim KARIMI ,  Enrico SANTAMATO

IPC: G21K1/16

CPC classification number: H01J37/26 ,  G21K1/16 ,  H01J3/02 ,  H01J37/06 ,  H01J2203/0296 ,  H01J2237/06383

Abstract: An apparatus for spin polarizing a particle beam is adapted to process an input particle beam in such a way as to generate an at least partially spin polarized output particle beam. A vortex beam generator for imparting orbital angular momentum to the input particle beam. An electromagnetic field generator generates a transverse magnetic field, space-variant and symmetric with respect to the axis of the input particle beam, in such a way as to change the spin of the particles and attach thereto different values of orbital angular momentum in dependence on their input spin values. A beam component separating group spatially separates the particles in dependence on their orbital angular momentum values, in such a way as to obtain the at least partially spin polarized output particle beam.

Abstract translation: 用于自旋极化粒子束的装置适于处理输入粒子束，以便产生至少部分旋转偏振的输出粒子束。 用于将轨道角动量传递给输入粒子束的涡流束发生器。 电磁场发生器以相对于输入粒子束的轴线的空间变化和对称的方式产生横向磁场，以便改变粒子的旋转，并依附于其上附加不同的轨道角动量值 他们的输入自旋值。 光束分量分组基于其轨道角动量值空间上分离颗粒，以获得至少部分自旋极化输出粒子束。

公开(公告)号：US20130140977A1

公开(公告)日：2013-06-06

申请号：US13812700

申请日：2011-06-15

Applicant: Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

Inventor： Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

IPC: H01J29/48

CPC classification number: H01J29/484 ,  H01J3/02 ,  H01J3/027 ,  H01J3/40 ,  H01J29/488 ,  H01J37/026 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

公开(公告)号：US08159157B1

公开(公告)日：2012-04-17

申请号：US12326271

申请日：2008-12-02

Applicant: Timothy J. Imholt

Inventor： Timothy J. Imholt

IPC: H01J23/00

CPC classification number: H01J3/02 ,  H01J2237/04735 ,  H01J2237/06 ,  H05H15/00

Abstract: According to certain embodiments, a linear accelerator comprises a nanotube, a particle, and an energy source. The nanotube has a cylindrical shape, and the particle is disposed within the nanotube. The energy source is configured to apply energy to the nanotube to cause the particle to accelerate.

Abstract translation: 根据某些实施方案，线性加速剂包括纳米管，颗粒和能量源。 纳米管具有圆柱形状，并且该颗粒设置在纳米管内。 能量源被配置为向纳米管施加能量以使颗粒加速。

公开(公告)号：US07285777B2

公开(公告)日：2007-10-23

申请号：US10504869

申请日：2003-05-19

Applicant: Hiroki Kawada ,  Takashi Iizumi ,  Tadashi Otaka

Inventor： Hiroki Kawada ,  Takashi Iizumi ,  Tadashi Otaka

IPC: H01J37/28 ,  G01N23/225

CPC classification number: G01B15/00 ,  G01N23/225 ,  H01J3/02 ,  H01J9/042 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/061 ,  H01J2237/06308 ,  H01J2237/2814

Abstract: An object of the present invention is to suppress measurement errors caused by the fact that the shrink amount due to scan of an electron beam differs pattern by pattern.To accomplish this object, according to the invention, functions indicative of a process of change of pattern dimension when the electron beam is irradiated on a sample are prepared in respect of the kinds of sample patterns, and dimension values of a particular pattern measured by scanning the electron beam on the particular pattern are fitted to a function prepared for the particular pattern to calculate a dimension of the particular pattern before it changes.

Abstract translation: 本发明的目的是抑制由于扫描电子束的收缩量不同于图案的事实而引起的测量误差。 为了实现该目的，根据本发明，就样品图案的种类和通过扫描测量的特定图案的尺寸值准备指示电子束照射在样品上时图形尺寸变化过程的功能 特定图案上的电子束被拟合到为特定图案准备的功能，以在特定图案改变之前计算特定图案的尺寸。

公开(公告)号：US07208867B2

公开(公告)日：2007-04-24

申请号：US10891277

申请日：2004-07-14

Applicant: Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Louis Naberhuis

Inventor： Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Louis Naberhuis

IPC: H01J1/02

CPC classification number: B82Y10/00 ,  G11B9/10 ,  G11B9/1409 ,  H01J3/02 ,  H01J2201/308

Abstract: An electron source includes a planar emission region for generating an electron emission, and a focusing structure for focusing the electron emission into an electron beam.

Abstract translation: 电子源包括用于产生电子发射的平面发射区域和用于将电子发射聚焦成电子束的聚焦结构。

公开(公告)号：US20060157656A1

公开(公告)日：2006-07-20

申请号：US11035447

申请日：2005-01-14

Applicant: Yoseph Bar-Cohen ,  Stewart Sherrit ,  Yakov Krasik ,  Joshua Felsteiner ,  Xiaoqi Bao

Inventor： Yoseph Bar-Cohen ,  Stewart Sherrit ,  Yakov Krasik ,  Joshua Felsteiner ,  Xiaoqi Bao

IPC: G21G4/00

CPC classification number: H05G2/00 ,  H01J1/30 ,  H01J3/02 ,  H01J3/04 ,  H01J27/02 ,  H01J35/06 ,  H01J2201/306

Abstract: The present invention provides a source of plurality of radiation types using a single source that is made of ferroelectric material in the form of a cathode. The generated radiation types consist of ion and electron beams, X-ray, visible light and ultraviolet radiation. These types allow testing the surface and bulk of the same medium while placed in the same location and are providing confirmation and independent measurements of the material properties. The cathode is made with a continuous electrode on one side and a grid shape electrode on the other. This cathode is supported with fixtures that are used to produce various radiation types. Also, control elements are used to define the shape and directivity of the emitted beam. The present invention eliminates the need for plurality of instruments for obtaining required properties of test materials covering both the surface and the bulk of the test medium. The disclosed source emits multiple types of charged particles and radiation using switchable electromechanical elements. The source performance is enhanced by use of a ferroelectric wafer with a high dielectric constant, and the control of the driving pulse shape. A set of stacks and arrays of multiplexed ferroelectric cathode wafers are used to offer various options in the design of the Ferrosource.

Abstract translation: 本发明提供使用由阴极形式的铁电材料制成的单一源的多种辐射类型的源。 产生的辐射类型由离子和电子束，X射线，可见光和紫外线辐射组成。 这些类型允许在放置在相同位置时测试相同介质的表面和体积，并提供对材料性质的确认和独立测量。 阴极由一侧的连续电极和栅状电极构成。 该阴极由用于产生各种辐射类型的固定装置支撑。 此外，控制元件用于限定发射光束的形状和方向性。 本发明不需要多个仪器来获得覆盖测试介质的表面和体积的测试材料所需的性能。 所公开的源使用可转换的机电元件发射多种类型的带电粒子和辐射。 通过使用具有高介电常数的铁电晶片和驱动脉冲形状的控制来增强源性能。 复合铁电阴极晶片的一组堆叠和阵列被用于在Ferrosource的设计中提供各种选择。

公开(公告)号：US20050211921A1

公开(公告)日：2005-09-29

申请号：US11128512

申请日：2005-05-12

Applicant: Marco Wieland ,  Bert Kampherbeek ,  Alexander Vincent van Veen ,  Pieter Kruit

Inventor： Marco Wieland ,  Bert Kampherbeek ,  Alexander Vincent van Veen ,  Pieter Kruit

IPC: A61N5/00 ,  G01Q30/02 ,  G01Q30/08 ,  G03B1/00 ,  H01J37/08 ,  H01J37/30 ,  H01J37/304 ,  H01J37/317

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron beamlets; a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optical system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Abstract translation: 本发明涉及一种用于将图案转印到目标表面上的电子束曝光装置，包括：用于产生多个电子束的小波发生器; 用于接收所述多个电子子束的调制阵列，包括用于调制电子束的强度的多个调制器; 连接到用于单独控制调制器的调制阵列的控制器，可操作地连接到每个调制器的调节器，用于单独调整每个调制器的控制信号; 一种聚焦电子光学系统，包括静电透镜阵列，其中每个透镜将由所述调制阵列传输的相应单独的子束聚焦成小于300nm的横截面，以及用于将其曝光表面保持在其上的靶保持器 其图案将在聚焦电子光学系统的第一焦平面中转印。

公开(公告)号：US06872959B2

公开(公告)日：2005-03-29

申请号：US10638528

申请日：2003-08-12

Applicant: Yasuaki Nishigami

Inventor： Yasuaki Nishigami

IPC: G21G5/00 ,  H01J3/02 ,  H01J37/02 ,  H01J37/06 ,  H01J37/317

CPC classification number: H01J37/06 ,  H01J3/02 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/0044

Abstract: A thermoelectron generating source including a facial main cathode for emitting thermoelectrons by being heated from behind, a filament for heating the main cathode from behind to emit the thermoelectrons, an extraction electrode for extracting the thermoelectrons emitted from the main cathode under an electric field, the extraction electrode being provided near the front of the main cathode, and two deflecting electrodes and disposed on the left and right sides near the front of the extraction electrode to carry the extraction electrode. The potentials of the two deflecting electrodes are kept in a relation VL>VR≧0, where the potential of one deflecting electrode is VL and the potential of the other deflecting electrode is VR.

Abstract translation: 一种热电子发生源，包括通过从后面加热来发射热电子的面部主阴极，用于从后面加热主阴极以发射热电子的灯丝;用于在电场下从主阴极发射的热电子的提取电极， 提供电极设置在主阴极前部附近，以及两个偏转电极，并设置在靠近提取电极前部的左侧和右侧，以承载提取电极。 两个偏转电极的电位保持在VL> VR> = 0的关系中，其中一个偏转电极的电位为VL，另一个偏转电极的电位为VR。

公开(公告)号：US20050001530A1

公开(公告)日：2005-01-06

申请号：US10891277

申请日：2004-07-14

Applicant: Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Naberhuis

Inventor： Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Naberhuis

IPC: H01J1/312 ,  G11B9/00 ,  G11B9/10 ,  H01J3/02 ,  H01J3/18 ,  H01J1/02 ,  H01L29/06

CPC classification number: B82Y10/00 ,  G11B9/10 ,  G11B9/1409 ,  H01J3/02 ,  H01J2201/308

Abstract: An electron source includes a planar emission region for generating an electron emission, and a focusing structure for focusing the electron emission into an electron beam.

Abstract translation: 电子源包括用于产生电子发射的平面发射区域和用于将电子发射聚焦成电子束的聚焦结构。