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    High brightness point ion sources using liquid ionic compounds
    2.
    发明授权
    High brightness point ion sources using liquid ionic compounds 失效
    使用液体离子化合物的高亮点离子源

    公开(公告)号：US06337540B1

    公开(公告)日：2002-01-08

    申请号：US08541663

    申请日：1995-10-10

    Applicant: Antoine Corbin ,  Pierre Sudraud ,  Rainer Sailer

    Inventor： Antoine Corbin ,  Pierre Sudraud ,  Rainer Sailer

    IPC: H01J724

    CPC classification number: H01J37/3056 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0802

    Abstract: A novel high brightness point ion source (10) that is adapted to operate with liquid ionic compounds such as mixtures of molten salts, bases or acids. The ion source is basically comprised of two parts: the needle assembly (11) and the extraction assembly (12). The former consists of a point shaped needle (13) made of a refractory ceramic material, whose sharpened extremity is referred to as the tip (13a). The needle is partially lodged in a recess of an insulating support (15). A heating coil (14) made of stainless steel is tightly wound around a portion of the needle adjacent to the tip. The needle is coated with the mixture, for instance, by dipping in a crucible containing the mixture. The extraction assembly is comprised of a metal extracting electrode (20) provided with a central aperture that is screwed on a cylindrical metallic body (19), so that the spacing between the tip and the aperture center is adjustable. The needle assembly is mounted inside the cylindrical body and accurately affixed thereto by centering screws (22). The high brightness point ion source is then ready for use in a FIB column. A heating current supply (18) is connected to the coil extremities to melt the mixture if necessary. An extraction voltage supply (23) applies a potential difference between the extraction assembly and the mixture at the tip apex for ion emission.

    Abstract translation: 一种新颖的高亮点离子源（10），其适于与液体离子化合物如熔融盐，碱或酸的混合物一起操作。 离子源基本上由两部分组成：针组件（11）和提取组件（12）。 前者包括由难熔陶瓷材料制成的点状针（13），其尖锐的末端被称为尖端（13a）。 针被部分地放置在绝缘支撑件（15）的凹部中。 由不锈钢制成的加热线圈（14）紧紧地缠绕在与尖端相邻的针的一部分上。 例如，通过浸入含有混合物的坩埚中将针涂覆混合物。 提取组件由金属提取电极（20）组成，金属提取电极（20）设置有螺纹连接在圆柱形金属体（19）上的中心孔，使得尖端和孔径中心之间的间距是可调节的。 针组件安装在圆柱体内部，并通过定心螺钉（22）精确地固定在其上。 然后高亮度点离子源准备用于FIB色谱柱。 如果需要，加热电流源（18）连接到线圈末端以熔化混合物。 提取电压源（23）在提取组件和尖端顶点处的混合物之间施加电位差用于离子发射。

    Device for Generating a Source Current of Charge Carriers
    4.
    发明申请
    Device for Generating a Source Current of Charge Carriers 审中-公开

    公开(公告)号：US20180174792A1

    公开(公告)日：2018-06-21

    申请号：US15843919

    申请日：2017-12-15

    Applicant: KETEK GmbH

    Inventor： Felix Düsberg ,  Michael Bachmann

    IPC: H01J29/96 ,  H01J35/14 ,  H01J35/06 ,  H01J29/62

    CPC classification number: H01J29/96 ,  H01J27/26 ,  H01J29/62 ,  H01J35/065 ,  H01J35/14 ,  H01J37/073 ,  H01J37/08 ,  H01J37/243 ,  H01J2237/0635 ,  H01J2237/0802 ,  H05G1/34

    Abstract: A device for generating a source current of charge carriers by a field emission and a method stabilizing a source current of charge carriers emitted by a field emission element are disclosed. In an embodiment the device includes at least one field emission element from which the charge carriers emerge during operation, which lead to an emission current in the field emission element, at least one extraction electrode in order to extract the charge carriers from the field emission element, wherein a first part of the extracted charge carriers contributes to the source current, and a second part of the extracted charge carriers impinges on the extraction electrode and leads to an extraction current in the extraction electrode, an additional electrode on which the source current of charge carriers impinges at least in part and which contributes to an electrode current in the additional electrode.

    Charged particle beam radiation apparatus
    6.
    发明授权
    Charged particle beam radiation apparatus 有权
    带电粒子束辐射装置

    公开(公告)号：US08803411B2

    公开(公告)日：2014-08-12

    申请号：US13812700

    申请日：2011-06-15

    Applicant: Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

    Inventor： Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

    IPC: H01J29/84 ,  H01J29/48 ,  H01J3/40 ,  H01J3/02 ,  H01J37/02

    CPC classification number: H01J29/484 ,  H01J3/02 ,  H01J3/027 ,  H01J3/40 ,  H01J29/488 ,  H01J37/026 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/0802

    Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

    Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

    Method and apparatus for a porous electrospray emitter
    7.
    发明授权
    Method and apparatus for a porous electrospray emitter 有权
    多孔电喷发射体的方法和装置

    公开(公告)号：US08785881B2

    公开(公告)日：2014-07-22

    申请号：US14070351

    申请日：2013-11-01

    Applicant: Massachusetts Institute of Technology

    Inventor： Paulo C. Lozano ,  Steven Mark Arestie

    IPC: H01J9/02 ,  H01J37/08

    CPC classification number: H01J37/08 ,  B01L3/502715 ,  C25F3/14 ,  H01J1/05 ,  H01J9/02 ,  H01J49/0445 ,  H01J2237/0802 ,  H01J2237/317

    Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.

    Abstract translation: 离子液体离子源可以包括包含基底和尖端的微加工体。 身体可以由与离子液体或室温熔融盐中的至少一种相容的多孔材料形成。 身体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体或室温熔融盐中的至少一种能够通过毛细管线从基底转移到 小费。

    Charged particle source with multiple selectable particle emitters
    8.
    发明授权
    Charged particle source with multiple selectable particle emitters 有权
    具有多个可选粒子发射器的带电粒子源

    公开(公告)号：US08710453B2

    公开(公告)日：2014-04-29

    申请号：US13341487

    申请日：2011-12-30

    Applicant: N. William Parker

    Inventor： N. William Parker

    IPC: H01J31/48

    CPC classification number: H01J37/26 ,  H01J37/06 ,  H01J37/08 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/0802 ,  H01J2237/083 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/31749

    Abstract: A charged particle source for a focused particle beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.

    Abstract translation: 公开了透射电子显微镜（TEM），扫描透射电子显微镜（STEM），扫描电子显微镜（SEM）或聚焦离子束（FIB）系统等聚焦粒子束系统的带电粒子源。 该源在可以在带电粒子系统的轴线上居中的小区域内采用多个可独立寻址的发射器。 所有的发射器可以被单独控制以使得能够同时从一个或多个尖端发射。 只有一个发射器激活的模式对应于高亮度，而同时激活多个发射器的模式提供了较高亮度的较高角度强度。 可以通过连续使用单个发射器来扩展源寿命。 描述了用于所有发射器的组合的机械和电气校准程序。

    Charged Particle Source with Multiple Selectable Particle Emitters
    9.
    发明申请
    Charged Particle Source with Multiple Selectable Particle Emitters 有权
    带多个可选粒子发射器的带电粒子源

    公开(公告)号：US20120168638A1

    公开(公告)日：2012-07-05

    申请号：US13341487

    申请日：2011-12-30

    Applicant: N. William Parker

    Inventor： N. William Parker

    IPC: H01J3/14

    CPC classification number: H01J37/26 ,  H01J37/06 ,  H01J37/08 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/0802 ,  H01J2237/083 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/31749

    Abstract: A charged particle source for a focused particle beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.

    Abstract translation: 公开了透射电子显微镜（TEM），扫描透射电子显微镜（STEM），扫描电子显微镜（SEM）或聚焦离子束（FIB）系统等聚焦粒子束系统的带电粒子源。 该源在可以在带电粒子系统的轴线上居中的小区域内采用多个可独立寻址的发射器。 所有的发射器可以被单独控制以使得能够同时从一个或多个尖端发射。 只有一个发射器激活的模式对应于高亮度，而同时激活多个发射器的模式提供了较高亮度的较高角度强度。 可以通过连续使用单个发射器来扩展源寿命。 描述了用于所有发射器的组合的机械和电气校准程序。

    Ion propulsion device
    10.
    发明授权
    Ion propulsion device 有权

    公开(公告)号：US11993402B2

    公开(公告)日：2024-05-28

    申请号：US17762303

    申请日：2020-09-22

    Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  CENTRE NATIONAL D'ETUDES SPATIALES ,  UNIVERSITE PARIS-SACLAY

    Inventor： Jacques Gierak ,  Claude Boniface ,  Mathieu Lepesant

    IPC: B64G1/40 ,  H01J27/26

    CPC classification number: B64G1/405 ,  H01J27/26 ,  H01J2237/0802 ,  H01J2237/317

    Abstract: An ion propulsion device including emission modules in an emission plane, each module having an insulating support, an emission electrode on the support, and a conductive liquid with a microfluidic channel depositing conductive liquid on the electrode; an extraction electrode common to the emission modules and facing the modules; and a control unit, in which each module is configured to emit an ion beam when an electric field is applied to the liquid; each control unit controls an ion emission current emitted by applying a potential difference between each emission electrode and the extraction electrode; the emission electrodes are spaced apart by a linear distance that is greater than a distance between two adjacent emission electrodes separated by an empty space; and a length of the insulating support between the electrodes is greater than a propagation distance of an electric leakage current by charge jumping along the support between the electrodes.

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