中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

346 records (took 0.016 seconds)

    SYSTEM FOR ANALYZING OPTICAL PROPERTIES OF AN OBJECT
    142.
    发明申请
    SYSTEM FOR ANALYZING OPTICAL PROPERTIES OF AN OBJECT 审中-公开

    公开(公告)号：US20180299252A1

    公开(公告)日：2018-10-18

    申请号：US16013664

    申请日：2018-06-20

    Applicant: ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.

    Inventor： Yoel Arieli ,  Yoel Cohen

    IPC: G01B9/02 ,  G01J3/02 ,  G01J3/453 ,  G01J3/447 ,  G01N21/31

    CPC classification number: G01B9/02091 ,  G01B9/02019 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/447 ,  G01J3/453 ,  G01N21/31 ,  G01N2201/0636 ,  G01N2201/0683

    Abstract: Apparatus and methods are described including a line spectrometer that receives a point of light. The line spectrometer includes a first optical element, and a second optical element configured to convert the point of light to a line of light and to direct the line of light toward the first optical element. The first optical element defines first and second surfaces, a distance between the first and second surface varying as a function of distance along the first optical element, the first optical element thereby being configured to generate first and second reflected lines of light that reflect respectively from the first and second surfaces. A detector array receives the first and second lines of light, and generates an interferogram in response thereto. A computer processor determines a spectrum of the point of light, by analyzing the interferogram. Other applications are also described.

    SPATIALLY RESOLVED AEROSOL DETECTION
    143.
    发明申请
    SPATIALLY RESOLVED AEROSOL DETECTION 审中-公开

    公开(公告)号：US20180284013A1

    公开(公告)日：2018-10-04

    申请号：US15562791

    申请日：2016-03-30

    Applicant: Nederlandse Organisatie voor toegepast-natuurweten schappelijk onderzoek TNO

    Inventor： Hedser van Brug ,  Huibert Visser

    IPC: G01N21/21 ,  G01N21/53 ,  G01J3/02 ,  G01J3/447

    CPC classification number: G01N21/21 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/447 ,  G01J4/04 ,  G01N21/538 ,  G01N2021/1793 ,  G01N2021/4704 ,  G01N2021/4711 ,  G01N2021/4792

    Abstract: The invention pertains to an aerosol detector system for spatially resolved detection of an aerosol distribution in an area, comprising: a wide field polarization preserving telescope having telecentric imaging optics for imaging the earth surface onto a detector; said detector receiving phase stepped images imaged by said telescope; and a controller coupled to the detector, arranged to provide a resulting image as a function of corresponding pixel values of the multiple images to produce an image at a spatially resolved polarization state corresponding to said aerosol substance; wherein the telescope comprises a first telecentric imaging lens group and a wavelength filter positioned in a field image of the first telescope telecentric beam to define a spectral range of interest; the telescope further comprising: a converging lens group converging the beam to a pupil stop; relay optics including a second telecentric imaging lens group arranged to generate a telecentric beam; and splitter optics, comprising a polarization splitter for the selected wavelength range to split the telebeam into polarized beams; a further splitter; and a retarder to create multiple phase stepped images at different polarizations, the detector comprising multiple image sensors positioned in imaging planes after the splitter optics, and said polarization splitter, further splitter and retarder positioned in the telecentric beam of the second telecentric imaging lens group.

    METROLOGY METHOD AND APPARATUS, SUBSTRATE, LITHOGRAPHIC METHOD AND ASSOCIATED COMPUTER PRODUCT
    144.
    发明申请
    METROLOGY METHOD AND APPARATUS, SUBSTRATE, LITHOGRAPHIC METHOD AND ASSOCIATED COMPUTER PRODUCT 审中-公开

    公开(公告)号：US20180238737A1

    公开(公告)日：2018-08-23

    申请号：US15962826

    申请日：2018-04-25

    Applicant: ASML NETHERLANDS B.V.

    Inventor： Chi-Hsiang FAN ,  Maurits VAN DER SCHAAR ,  Youping ZHANG

    IPC: G01J3/447 ,  G03C7/00

    CPC classification number: G01J3/447 ,  G01J2003/283 ,  G01N21/47 ,  G03C7/00 ,  G03F7/70616 ,  G03F7/70633 ,  G03F7/70683

    Abstract: A method of measuring n values of a parameter of interest (e.g., overlay) relating to a structure forming process, where n>1. The method includes performing n measurements on each of n+1 targets, each measurement performed with measurement radiation having a different wavelength and/or polarization combination and determining the n values for a parameter of interest from the n measurements of n+1 targets, each of the n values relating to the parameter of interest for a different pair of the layers. Each target includes n+1 layers, each layer including a periodic structure, the targets including at least n biased targets having at least one biased periodic structure formed with a positional bias relative to the other layers, the biased periodic structure being in at least a different one of the layers per biased target. Also disclosed is a substrate having such a target and a patterning device for forming such a target.

    Total reflection spectroscopic measurement device and total reflection spectroscopic measurement method
    145.
    发明授权
    Total reflection spectroscopic measurement device and total reflection spectroscopic measurement method 有权

    公开(公告)号：US10048129B2

    公开(公告)日：2018-08-14

    申请号：US15597329

    申请日：2017-05-17

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Yoichi Kawada

    IPC: G01J3/14 ,  G01J3/447 ,  G01N21/25

    Abstract: A total reflection spectroscopic measurement device includes a terahertz wave generation unit, an internal total reflection prism, a detection unit configured to detect the terahertz wave, an electric field vector measurement unit configured to measure an electric field vector of the terahertz wave, and an analysis unit configured to acquire information about an optical constant of the object to be measured. Proportions of S polarization component and P polarization component of the terahertz wave are constant. The analysis unit acquires the information about the optical constant on the basis of a ratio between S polarization component and P polarization component of the measured electric field vector when the object is not arranged on the total reflection surface and a ratio between S polarization component and P polarization component of the measured electric field vector when the object is arranged on the total reflection surface.

    Spectrometer and method of spectroscopy
    147.
    发明授权
    Spectrometer and method of spectroscopy 有权

    公开(公告)号：US09976903B2

    公开(公告)日：2018-05-22

    申请号：US15293219

    申请日：2016-10-13

    Applicant: Fuji Electric Co., Ltd.

    Inventor： Masanori Oto

    IPC: G01J3/45 ,  G01B9/02 ,  G01J3/453 ,  G01J3/447 ,  G01J3/02

    CPC classification number: G01J3/453 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/447 ,  G01J3/4531

    Abstract: A spectrometer includes a beam splitter that receives incident light rays and splits each of the incident light rays into first and second spatially displaced, linearly polarized light rays that respectively have first and second polarization directions orthogonal to each other; an optical member that receives the split incident light rays from the beam splitter and optically converts the split incident light rays into a plurality of light beams that are respectively guided to mutually differing locations so as to generate interference fringes in the respective locations, each of the plurality of light beams including a component of the first linearly polarized light rays and a component of the second linearly polarized light rays; and a detector that detects the interference fringes respectively generated by the plurality of light beams.

Patent Agency Ranking