公开(公告)号：US09412560B2

公开(公告)日：2016-08-09

申请号：US14432730

申请日：2013-10-07

Applicant: FEI Company

Inventor： Stacey Stone ,  Sang Hoon Lee ,  Jeffrey Blackwood ,  Michael Schmidt

IPC: H01J37/31 ,  G01N1/32 ,  H01J37/30 ,  G01N23/225 ,  H01J37/305

CPC classification number: H01J37/3005 ,  G01N1/32 ,  G01N23/2255 ,  G01N2223/104 ,  G01N2223/611 ,  H01J37/3007 ,  H01J37/3053 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/2813 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: To reduce artifacts in a surface exposed by a focused ion beam for viewing, a trench is milled next to the region of interest, and the trench is filled to create a bulkhead. The ion beam is directed through the bulkhead to expose a portion of the region of interest for viewing. The trench is filled, for example, by charged particle beam-induced deposition. The trench is typically milled and filled from the top down, and then the ion beam is angled with respect to the sample surface to expose the region of interest.

Abstract translation: 为了减少由聚焦离子束暴露的表面中的人造物进行观察，在感兴趣区域旁边研磨沟槽，并且填充沟槽以形成隔板。 离子束被引导通过隔板以暴露感兴趣区域的一部分以供观察。 例如，通过带电粒子束诱导沉积来填充沟槽。 沟槽通常从顶部向下铣削和填充，然后离子束相对于样品表面成角度以暴露感兴趣区域。

公开(公告)号：US09412559B2

公开(公告)日：2016-08-09

申请号：US14311614

申请日：2014-06-23

Applicant: FEI Company

Inventor： Ryan Tanner

IPC: H01J37/304 ,  H01J37/30 ,  H01J37/28 ,  H01J37/305 ,  H01J37/26 ,  G01N1/28

CPC classification number: H01J37/3005 ,  G01N1/286 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2803 ,  H01J2237/2814 ,  H01J2237/30472 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

公开(公告)号：US09412558B2

公开(公告)日：2016-08-09

申请号：US14767796

申请日：2014-02-14

Applicant: UNIVERSITEIT ANTWERPEN ,  FEI COMPANY

Inventor： Dirk Van Dyck ,  Uwe Lucken ,  Holger Stark ,  Sara Bals

IPC: H01J37/26 ,  H01J37/06 ,  G01N23/04 ,  H01J37/244

CPC classification number: H01J37/265 ,  G01N23/04 ,  G01N2223/0565 ,  G01N2223/612 ,  H01J37/06 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: A method for performing high resolution electron microscopy of a soft matter object is described. The method comprises irradiating a soft matter object using an electron microscope having a spherical aberration correction with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.

Abstract translation: 描述了用于执行软物体的高分辨率电子显微镜的方法。 该方法包括使用具有基本上恒定的传递函数的球面像差校正的电子显微镜照射在软质物体上分散的热散射电子的频带中的软质物体。 该方法包括检测在软物质处散射的热散射散射（TDS）电子，并使用检测到的热散射电子从其中导出软物体的图像。

公开(公告)号：US20160211113A1

公开(公告)日：2016-07-21

申请号：US15082848

申请日：2016-03-28

Applicant: FEI Company

Inventor： Alexander Buxbaum

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/305

CPC classification number: H01J37/222 ,  G01N1/286 ,  G01N1/32 ,  G01N1/44 ,  H01J37/261 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/08 ,  H01J2237/20 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/262 ,  H01J2237/30466 ,  H01J2237/31745

Abstract: A method for using differential imaging for applications involving TEM samples by allowing operators to take multiple images during a procedure involving a focused ion beam procedure and overlaying the multiple images to create a differential image that clearly shows the differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image, and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using them to automatically mill subsequent slices.

Abstract translation: 一种在涉及TEM样品的应用中使用差分成像的方法，允许操作者在涉及聚焦离子束过程的过程中拍摄多个图像，并覆盖多个图像以产生清晰地显示铣削步骤之间的差异的差分图像。 该方法还涉及生成正在研磨的区域的实时图像并使用差分图像的叠加来显示每个图像中的小变化，并且因此突出显示离子束研磨位置。 这些方法还涉及自动化创建差分图像的过程，并使用它们来自动研磨随后的切片。

公开(公告)号：US09396907B2

公开(公告)日：2016-07-19

申请号：US14795704

申请日：2015-07-09

Applicant: FEI Company

Inventor： Maximus Theodorus Otten ,  Abigaël Adriana Maria Kok ,  Martin Verheijen

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2817 ,  H01J2237/2826

Abstract: A method of calibrating a Scanning Transmission Charged-Particle Microscope, operable in a non-scanning mode, whereby said beam is relatively broad, and a scanning mode, whereby said beam is relatively narrow and an image is formed as a function of scan position of said beam, the method comprising: providing a calibration specimen on said specimen holder; in non-scanning mode, using said detector to form a calibration image of the calibration specimen, using a given configuration of said imaging system; utilizing a known dimension of said calibration specimen and comparing it to a corresponding dimension in said calibration image to calibrate a characteristic dimension of a field of view of said detector; and, in scanning mode, recording a beam pattern of said beam in the calibrated field of view of said detector, and examining the recorded beam pattern to derive a geometric aspect thereof.

Abstract translation: 一种校准扫描透射带电粒子显微镜的方法，其可在非扫描模式下操作，由此所述光束相对较宽，并且扫描模式，由此所述光束相对较窄并且形成图像作为扫描位置的函数 所述光束，所述方法包括：在所述样本保持器上提供校准样本; 在非扫描模式中，使用所述检测器，使用所述成像系统的给定配置来形成所述校准样本的校准图像; 利用所述校准样本的已知尺寸并将其与所述校准图像中的对应尺寸进行比较，以校准所述检测器的视野的特征尺寸; 并且在扫描模式中，在所述检测器的校准视场中记录所述光束的光束图案，并且检查记录的光束图案以导出其几何方面。

公开(公告)号：US09384567B2

公开(公告)日：2016-07-05

申请号：US14349429

申请日：2012-10-03

Applicant: FEI Company

Inventor： Adrian Paul Sheppard ,  Andrew Maurice Kingston ,  Trond Karsten Varslot

IPC: A61B6/00 ,  G06T11/00 ,  G01N23/04

CPC classification number: G06T11/005 ,  G01N23/046 ,  G01N2223/419 ,  G01N2223/616

Abstract: A computed tomography imaging process, including: acquiring projection images of an object by detecting radiation that has passed through the object for respective different relative orientations of the object and the radiation; and processing the projection images to generate a tomogram of the object; wherein the radiation passes through the object in the form of a diverging beam, and the different relative orientations of the object and the beam of radiation define two or more complete trajectories of the beam along the object, the complete trajectories being mutually offset to reduce the degradation of spatial resolution in portions of the generated tomogram due to the divergence of the beam through the object.

Abstract translation: 一种计算机断层摄影成像处理，包括：通过检测已经通过所述物体的辐射来获取物体的投影图像，以分别对象和辐射的不同相对取向; 并处理所述投影图像以产生所述对象的断层图像; 其中辐射以分支光束的形式穿过物体，并且物体和辐射束的不同相对取向定义沿着物体的光束的两个或更多个完整轨迹，完整的轨迹被相互偏移以减少 由于光束通过物体的发散而产生的断层图像的部分空间分辨率降低。

公开(公告)号：US20160189922A1

公开(公告)日：2016-06-30

申请号：US14983038

申请日：2015-12-29

Applicant: FEI Company

Inventor： Cornelis Sander Kooijman ,  Thijs Thomas Withaar ,  Gerard Nicolaas Anne Van Veen

IPC: H01J37/244 ,  H01J37/285

CPC classification number: H01J37/244 ,  G01N23/223 ,  G01N23/2252 ,  G01N23/2257 ,  G01N2223/501 ,  H01J37/285 ,  H01J2237/2445

Abstract: A spectroscopic analysis method, comprising: Directing a beam of radiation onto a location P on a specimen, thereby causing a flux of X-rays to emanate from said location; Examining said flux using a detector arrangement, thus accruing a measured spectrum; Choosing a set of mutually different measurement directions d={dn} that originate from P, where n is a member of an integer sequence; Recording an output On of said detector arrangement for different values of dn, thus compiling a measurement set M={(On, dn)}; Adopting a spectral model On′ for On that is a convoluted mix of terms Band Lp, where: B is a substantially continuous spectral component associated with Bremsstrahlung; Lp is a substantially discrete spectral component associated with the specimen composition at location P; automatically deconvolving the measurement set Mon the basis of said spectral model On′ and distill Lp therefrom.

Abstract translation: 一种光谱分析方法，包括：将辐射束定向到样本上的位置P，从而导致从所述位置发出X射线通量; 使用检测器装置检查所述通量，从而产生测量的光谱; 选择一组彼此不同的测量方向d = {dn}，其源自于P，其中n是整数序列的成员; 记录不同值dn的所述检测器装置的输出On，从而编译测量集M = {（On，dn）}; 采用光谱模型On'for On是一个卷积混合的条带Band Lp，其中：B是与Bremsstrahlung相关联的基本上连续的光谱分量; Lp是与位置P处的样本组成相关联的基本上离散的光谱分量; 自动解卷积测量设置Mon所述光谱模型的基础On'并从中提取Lp。

公开(公告)号：US20160172156A1

公开(公告)日：2016-06-16

申请号：US15052650

申请日：2016-02-24

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR.

IPC: H01J37/285 ,  H01J37/305 ,  H01J37/147 ,  H01J37/10 ,  H01J37/077 ,  H01J37/08

CPC classification number: H01J37/285 ,  G01T1/28 ,  H01J27/16 ,  H01J37/05 ,  H01J37/077 ,  H01J37/08 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/265 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/0817 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/31749

Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

Abstract translation: 具有用户可选择配置的单列带电粒子源以离子模式进行FIB操作或SEM操作的电子模式。 配备了X射线检测器，可进行能量色散X射线光谱分析。 用户可以选择性地配置源以在离子模式或FIB模式下准备样品，然后基本上翻转开关选择电子模式或SEM模式，并使用EDS或其他类型的分析来分析样品。

公开(公告)号：US20160126059A1

公开(公告)日：2016-05-05

申请号：US14991507

申请日：2016-01-08

Applicant: FEI Company

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

公开(公告)号：US20160104596A1

公开(公告)日：2016-04-14

申请号：US14878513

申请日：2015-10-08

Applicant: FEI Company

Inventor： Bart Buijsse ,  Gijs van Duinen

IPC: H01J37/02 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/023 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/024 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.

Abstract translation: 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。