公开(公告)号：US20130335738A1

公开(公告)日：2013-12-19

申请号：US13873407

申请日：2013-04-30

Applicant: Thomas Richard Field

Inventor： Thomas Richard Field

IPC: G01J3/18

CPC classification number: G01J3/18 ,  G01J3/0202 ,  G01J3/0291 ,  G01J3/2803

Abstract: A system for a fix-positioned camera with an internal diffraction grating for classroom and retail applications that is simple to use and inexpensive, as described in this disclosure. The fix-positioned camera system with an internal diffraction grating having a front cover, a rear cover connected to the front cover, a first glass pressure plate affixed to the front cover, a transmission diffraction grating affixed to the first glass pressure plate, a second glass pressure plate affixed to the transmission diffraction grating, a compression O-ring attached to the second glass pressure plate, and a retention block connected to the compression O-ring.

Abstract translation: 如本公开所述，用于具有用于教室和零售应用的内部衍射光栅的固定定位相机的系统，其易于使用且价格便宜。 具有内部衍射光栅的固定相机系统具有前盖，连接到前盖的后盖，固定到前盖的第一玻璃压板，固定到第一玻璃压板的透射衍射光栅，第二玻璃压板 固定在透射衍射光栅上的玻璃压板，连接到第二玻璃压板的压缩O形环和与压缩O形环连接的保持块。

公开(公告)号：US20130329225A1

公开(公告)日：2013-12-12

申请号：US13964472

申请日：2013-08-12

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Anna YOSHIDA

IPC: G01J3/02 ,  H01L31/18

CPC classification number: G01J3/0205 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2803 ,  G02B7/027 ,  H01L31/18

Abstract: The present invention provides a highly reliable spectral module. When light L1 proceeding to a spectroscopic unit (4) passes through a light transmitting hole (50) in the spectral module (1) in accordance with the present invention, only the light having passed through a light entrance side unit (51) formed such as to become narrower toward a substrate (2) and entered a light exit side unit (52) formed such as to oppose a bottom face (51b) of the light entrance side unit (51) is emitted from a light exit opening (52a). Therefore, stray light M incident on a side face (51c) or bottom face (51b) of the light entrance side unit (51) is reflected to the side opposite to the light exit side unit (52) and thus is inhibited from entering the light exit side unit (52). Therefore, the reliability of the spectral module (1) can be improved.

Abstract translation: 本发明提供了一种高度可靠的光谱模块。 当进入分光单元（4）的光L1穿过根据本发明的光谱模块（1）中的透光孔（50）时，仅通过形成光入射侧单元（51）的光 朝向基板（2）变窄并且进入与光入射侧单元（51）的底面（51b）相对形成的光出射侧单元（52）从光出射开口（52a）射出， 。 因此，入射到光入射单元（51）的侧面（51c）或底面（51b）的杂散光M被反射到与光出射单元（52）相反的一侧，因此被禁止进入 光出射侧单元（52）。 因此，可以提高光谱模块（1）的可靠性。

公开(公告)号：US08599374B1

公开(公告)日：2013-12-03

申请号：US13799958

申请日：2013-03-13

Applicant: Corning Incorporated

Inventor： Lovell Elgin Comstock, II ,  Richard Lynton Wiggins ,  Kenneth Smith Woodard

IPC: G01J3/04

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/04 ,  G01J3/2803 ,  G01J3/36 ,  G01J2003/042 ,  G01J2003/045 ,  G01J2003/2813 ,  G01J2003/2826 ,  H04N5/347 ,  H04N9/04

Abstract: A hyperspectral imaging system and a method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). In one aspect, the hyperspectral imaging system includes at least one optic, a rotatable disk (which has at least one spiral slit formed therein), a spectrometer, a two-dimensional image sensor, and a controller. In another aspect, the hyperspectral imaging system includes at least one optic, a rotatable disk (which has multiple straight slits formed therein), a spectrometer, a two-dimensional image sensor, and a controller. In yet another aspect, the hyperspectral imaging system includes at least one optic, a rotatable drum (which has a plurality of slits formed on the outer surface thereof and a fold mirror located therein), a spectrometer, a two-dimensional image sensor, and a controller.

公开(公告)号：US20130296709A1

公开(公告)日：2013-11-07

申请号：US13776087

申请日：2013-02-25

Applicant: Board of Regents, The University of Texas System

Inventor： Karel J. ZUZAK ,  Jeffrey A. CADEDDU ,  Rafael UFRET-VINCENTY ,  Robert P. FRANCIS ,  Edward LIVINGSTON

IPC: A61B5/00

CPC classification number: A61B5/0059 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/0084 ,  A61B5/0086 ,  A61B5/14551 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/413 ,  A61B5/4842 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/2823 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/31 ,  G01N21/39

Abstract: A hyperspectral imaging system having an optical path. The system including an illumination source adapted to output a light beam, the light beam illuminating a target, a dispersing element arranged in the optical path and adapted to separate the light beam into a plurality of wavelengths, a digital micromirror array adapted to tune the plurality of wavelengths into a spectrum, an optical device having a detector and adapted to collect the spectrum reflected from the target and arranged in the optical path and a processor operatively connected to and adapted to control at least one of: the illumination source; the dispersing element; the digital micromirror array; the optical device; and, the detector, the processor further adapted to output a hyperspectral image of the target. The dispersing element is arranged between the illumination source and the digital micromirror array, the digital micromirror array is arranged to transmit the spectrum to the target and the optical device is arranged in the optical path after the target.

公开(公告)号：US08569677B2

公开(公告)日：2013-10-29

申请号：US12843773

申请日：2010-07-26

Applicant: Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

Inventor： Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

IPC: H01J3/14 ,  H01J5/02

CPC classification number: G01J1/4257 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/429 ,  G01J1/58 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0245 ,  G01J3/2803

Abstract: The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Abstract translation: 本发明提供了一种包括一种装置的装置，该装置包括：（a）能够将光子束衍射成衍射光子输出的透射光栅，以及（b）能够检测衍射光子输出的图像检测器。 该装置可用于测量诸如真空紫外（VUV）光束的光子束的空间分布和衍射图案。

公开(公告)号：US08564780B2

公开(公告)日：2013-10-22

申请号：US12844851

申请日：2010-07-28

Applicant: Phillip Walsh ,  Dale Harrison

Inventor： Phillip Walsh ,  Dale Harrison

IPC: G01N21/55

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步的细化使用r-θ级来进一步减少占地面积。

公开(公告)号：US08558189B2

公开(公告)日：2013-10-15

申请号：US12590758

申请日：2009-11-12

Applicant: Roderick A. Hyde ,  Muriel Y. Ishikawa ,  Edward K. Y. Jung ,  Nathan P. Myhrvold ,  Clarence T. Tegreene ,  Lowell L. Wood, Jr.

Inventor： Roderick A. Hyde ,  Muriel Y. Ishikawa ,  Edward K. Y. Jung ,  Nathan P. Myhrvold ,  Clarence T. Tegreene ,  Lowell L. Wood, Jr.

IPC: G01J1/42

CPC classification number: G01J1/04 ,  G01J1/0448 ,  G01J1/4228 ,  G01J3/02 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/2803 ,  G01J3/36 ,  G01J9/00

Abstract: A variable waveform detector may include multiple stages.

公开(公告)号：US08553225B2

公开(公告)日：2013-10-08

申请号：US12846319

申请日：2010-07-29

Applicant: John F. Silny

Inventor： John F. Silny

IPC: G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/12 ,  G01J3/1256

Abstract: An electromagnetic radiation detection device is described which includes a tunable dispersive optical element configured to receive electromagnetic radiation and to change the dispersion of the received electromagnetic radiation; a sensor configured to detect the dispersed electromagnetic radiation changed by the dispersive optical element; and a controller configured to: (i) selectively tune the dispersive optical element so as to adjust the dispersion of the received electromagnetic radiation; and (ii) change one or more of operating parameters of the sensor in accordance with the adjusted dispersion. In some implementations, the radiation detection device may be configured as a spectrometer to measure one or more properties of electromagnetic radiation. A method for detecting electromagnetic radiation is also disclosed.

Abstract translation: 描述了一种电磁辐射检测装置，其包括被配置为接收电磁辐射并改变所接收的电磁辐射的色散的可调谐色散光学元件; 传感器，被配置为检测由所述分散光学元件改变的分散的电磁辐射; 以及控制器，被配置为：（i）选择性地调谐所述色散光学元件，以调节所接收的电磁辐射的色散; 和（ii）根据所调节的色散改变传感器的一个或多个操作参数。 在一些实施方案中，辐射检测装置可以被配置为测量电磁辐射的一个或多个性质的光谱仪。 还公开了一种用于检测电磁辐射的方法。

公开(公告)号：US20130242299A1

公开(公告)日：2013-09-19

申请号：US13889714

申请日：2013-05-08

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hisanori Kobayashi ,  Shin Komori ,  Mitsuhiro Obara

IPC: G01J3/50

CPC classification number: G01J3/502 ,  G01J3/02 ,  G01J3/0237 ,  G01J3/0248 ,  G01J3/04 ,  G01J3/20 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/50 ,  G01J2003/2866

Abstract: A spectral colorimetric apparatus includes a housing which includes a side wall. An outer surface of the side wall is an adjustment surface capable of adjusting a position of a linear sensor by moving while attaching the linear sensor to the adjustment surface. The linear sensor is supported by the side wall of the housing while abutting on the adjustment surface and receives alight beam that is dispersed by a concave surface reflection type diffraction element and passes through an opening portion. The adjustment surface is parallel to a tangential line at a part of a Rowland circle of the concave surface reflection type diffraction element, through which a light beam received by the linear sensor passes.

Abstract translation: 光谱比色装置包括包括侧壁的壳体。 侧壁的外表面是能够通过在将线性传感器附接到调节表面的同时通过移动来调节线性传感器的位置的调节表面。 线性传感器由壳体的侧壁支撑，同时抵靠调节表面并且接收由凹面反射型衍射元件分散并穿过开口部分的光束。 调整面平行于凹面反射型衍射元件的Rowland圆的一部分的切线，由线性传感器接收的光束通过该切线。

公开(公告)号：US20130235249A1

公开(公告)日：2013-09-12

申请号：US13788058

申请日：2013-03-07

Applicant: Kohei SHIMBO ,  Naohiro KAMIJO ,  Yoichi KUBOTA ,  Manabu SEO

Inventor： Kohei SHIMBO ,  Naohiro KAMIJO ,  Yoichi KUBOTA ,  Manabu SEO

IPC: G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/0256 ,  G01J3/04 ,  G01J3/1804 ,  G01J3/2803 ,  G01N21/8914 ,  G01N2021/8908 ,  G01N2021/8917

Abstract: A spectrometer includes a light source to project a light beam to a target object, a spectral element to disperse the light beam reflected by the target object and including a diffraction element to diffract the light beam, and a light receiving element to receive, at pixels, light beams with different spectral characteristics from each other dispersed by the spectral element, wherein the diffraction element and the light receiving element are integrally formed.

Abstract translation: 光谱仪包括将光束投影到目标物体的光源，用于分散由目标物体反射的光束并包括衍射元件以衍射光束的光谱元件，以及光接收元件，以在像素处接收 具有彼此分散的不同光谱特性的光束被光谱元件分散，其中衍射元件和光接收元件一体形成。