公开(公告)号：US20170131218A1

公开(公告)日：2017-05-11

申请号：US15346430

申请日：2016-11-08

Applicant: ACEMACH CO.,LTD

Inventor： CHIH-CHIANG CHANG

IPC: G01N21/94 ,  H04N5/232 ,  G01C3/08 ,  G01N21/95 ,  G01N15/02 ,  G06T7/00 ,  G01N15/14

CPC classification number: G01N21/94 ,  G01C3/08 ,  G01N15/0227 ,  G01N15/0612 ,  G01N15/1456 ,  G01N21/95 ,  G01N21/956 ,  G01N2015/03 ,  G01N2015/0693 ,  G01N2021/95676 ,  G01N2201/06113 ,  G06T7/0008 ,  G06T2207/30148 ,  H04N5/23296

Abstract: Provided herein is a mask inspection device, including an inspection base, a shift platform, a rotating platform, a bearing platform, a laser ranging module, a vertical shift module, a processing module, and an image capturing module. A mask, which is carried and held by the bearing platform, includes a dust-proof film, each region of which is measured by the laser ranging module for generating a distance measuring signal; each distance measuring signal is utilized to control the movement of the vertical shift module, such that image capturing module can take an inspection image of that region. Based on the distance measuring signals and inspection images, height information of the dust-proof film and inspection information can be acquired. Also provided herein is a method applicable to said mask inspection device.

公开(公告)号：US20170131201A1

公开(公告)日：2017-05-11

申请号：US15275555

申请日：2016-09-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yunho KIM ,  Seojeong LIM ,  Sueryeon KIM ,  Jinsung KIM

IPC: G01N21/27 ,  G01N33/18

CPC classification number: G01N21/27 ,  B08B9/283 ,  B08B9/46 ,  G01N21/39 ,  G01N21/85 ,  G01N21/9018 ,  G01N33/18 ,  G01N2201/06113

Abstract: A water inspection apparatus includes an injector, a suction unit, and a water measurement unit. The injector injects a drying gas into a bottle. The suction unit sucks the drying gas from the bottle. The water measurement unit measures the water concentration of the drying gas sucked by the suction unit.

公开(公告)号：US20170131194A1

公开(公告)日：2017-05-11

申请号：US15416149

申请日：2017-01-26

Applicant: JP3 Measurement, LLC

Inventor： Joseph Paul Little, III ,  Jie Zhu

IPC: G01N7/14 ,  G01N21/359 ,  G01N33/28 ,  G01N21/3577

CPC classification number: G01N7/14 ,  G01N21/3577 ,  G01N21/359 ,  G01N33/22 ,  G01N33/2829 ,  G01N2201/06113 ,  G01N2201/129

Abstract: An NIR analyzer with the optical probes across a pipe, or in a bypass configuration, after a stabilizer in an oil or condensate production plant. Prior to use, liquid samples from the plant are analyzed in a chemical lab to obtain reference vapor pressure or compositional values. A chemometric model using known techniques is then built with the captured absorption spectra and the reference lab results. Preprocessing methodologies can be used to help mitigate interferences of the fluid, instrument drift, and contaminate build up on the lenses in contact with the fluid. The chemometric model is implemented through the NIR analyzer as the calibration curve to predict the vapor pressure or other values of the flowing fluid in real time.

公开(公告)号：US09645049B2

公开(公告)日：2017-05-09

申请号：US14470254

申请日：2014-08-27

Applicant: ROLLS-ROYCE PLC

Inventor： John David Black

IPC: G01M15/10 ,  G01N21/71 ,  G01N5/00 ,  G01N15/00 ,  G01N15/06

CPC classification number: G01M15/108 ,  G01N5/00 ,  G01N15/0606 ,  G01N21/71 ,  G01N2015/0046 ,  G01N2201/06113 ,  G01N2201/127

Abstract: A soot generating device suitable for calibration purposes and a method of using the device for calibrating a soot measuring apparatus are presented. The soot generating device includes a wick located relative to a burning zone, a gas diffusion shield surrounding the burning zone that allows a continuous stream of air into the combustion zone, and a fuel supply for delivering fuel to the wick.

公开(公告)号：US20170115218A1

公开(公告)日：2017-04-27

申请号：US15269586

申请日：2016-09-19

Applicant: NEC Laboratories America, Inc.

Inventor： Ming-Fang Huang ,  Lei Tao ,  Yue Tian ,  Ting Wang

IPC: G01N21/59 ,  B64B1/40 ,  G01S19/13 ,  G01S17/06 ,  G01S3/786 ,  B64C39/02 ,  B60R11/04

CPC classification number: G01N21/59 ,  B60R11/04 ,  B64B1/40 ,  B64C39/024 ,  B64C2201/12 ,  G01N33/0062 ,  G01N2021/1795 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/0636 ,  G01S3/786 ,  G01S7/4802 ,  G01S17/06 ,  G01S17/66 ,  G01S17/88 ,  G01S19/13

Abstract: Systems and methods for generating a three-dimensional gas map includes a remote vehicle including reflective material. A positioning stage including multidimensional movement to track the remote vehicle. A light head to reflect light off of the remote vehicle. A controller to analyze received light to determine gas content and generate a three-dimensional gas map.

公开(公告)号：US20170115214A1

公开(公告)日：2017-04-27

申请号：US15195346

申请日：2016-06-28

Applicant: Hannu Harjunmaa ,  Sinikka Harjunmaa

Inventor： Hannu Harjunmaa ,  Sinikka Harjunmaa

IPC: G01N21/41 ,  G01N33/14

CPC classification number: G01N21/4133 ,  C12G1/00 ,  G01B11/06 ,  G01B11/0633 ,  G01N21/41 ,  G01N33/14 ,  G01N33/143 ,  G01N33/146 ,  G01N2201/06113

Abstract: The present invention pertains to the measurement of the refractive index of a medium, such as a fluid, through the wall of its container. The essential characteristic of the invention is that, by using at least two separate light paths that are of unequal length and that reflect from the wall/medium interface, it is possible to perform the measurement of the refractive index of the medium so that the result is insensitive to the color and thickness of the wall.

公开(公告)号：US09632424B2

公开(公告)日：2017-04-25

申请号：US14526032

申请日：2014-10-28

Applicant: ASML Netherlands B.V.

Inventor： Richard Quintanilha

IPC: G02B6/10 ,  G03F7/20 ,  G01N21/47 ,  G01N21/25 ,  F21V8/00

CPC classification number: G03F7/70191 ,  G01N21/255 ,  G01N21/47 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/08 ,  G02B6/0008 ,  G02B6/10 ,  G03F7/20 ,  G03F7/70058 ,  G03F7/70108 ,  G03F7/70575 ,  G03F7/70633

Abstract: An illumination system for a lithographic or inspection apparatus. A plurality of optical waveguides transmit radiation from the illumination source to an output. A switching system enables selective control of one or more subsets of the optical waveguides. An inspection method uses an illumination system and inspection and lithographic apparatuses comprise an illumination system. In one example, the optical waveguides and switching system are replaced by a plurality of parallel optical bandpass filter elements. The optical bandpass filter elements each only transmit a predetermined wavelength or a band of wavelengths of radiation. At least two of the parallel optical bandpass filter elements each being operable to transmit a different wavelength or band of wavelengths.

公开(公告)号：US09632038B2

公开(公告)日：2017-04-25

申请号：US14808994

申请日：2015-07-24

Applicant: KLA-Tencor Corporation

Inventor： Haiguang Chen ,  Jaydeep Sinha

IPC: G01N21/95 ,  G01B11/24 ,  G01B11/06 ,  G01N21/88 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01B11/06 ,  G01B11/2441 ,  G01N21/8851 ,  G01N2201/06113 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: Systems and methods for unwrapping phase signals obtained from interferometry measurements of patterned wafer surfaces are disclosed. A phase unwrapping method in accordance with the present disclosure may calculate a front surface phase map and a back surface phase map of a wafer, subtract the back surface phase map from the front surface phase map to obtain a phase difference map, unwrap the phase difference map to obtain a wafer thickness variation map, unwrap the back surface phase map to obtain a back surface map representing the back surface of the wafer; and add the wafer thickness variation map to the back surface phase map to calculate a front surface map representing the front surface of the wafer.

公开(公告)号：US09625391B2

公开(公告)日：2017-04-18

申请号：US14898025

申请日：2014-06-12

Applicant: K+S AKTIENGESELLSCHAFT

Inventor： Udo-Walter Lisner ,  Torsten Rest ,  Jessica Waechter ,  Joachim Makowe ,  Volker Moerkens ,  Christoph Dominic Gehlen

IPC: G01J3/30 ,  G01N21/71 ,  G01J3/443 ,  G01N21/85 ,  G01J3/02 ,  G02B7/02 ,  G01N21/15

CPC classification number: G01N21/718 ,  G01J3/0291 ,  G01J3/443 ,  G01N21/8507 ,  G01N2021/152 ,  G01N2021/8592 ,  G01N2201/06113 ,  G02B7/023

Abstract: (EN) The invention relates to a special LIBS measurement tube focusing unit, referred to simply as LIBS measurement tube, for vertically dipping into a material to be analyzed, which material is moved in a horizontal flow, characterized in that the measurement tube extends vertically and is internally hollow and open at least at the bottom end, such that a bottom edge is formed at the bottom end, the measurement tube has an inlet for coupling in a laser beam and an outlet for coupling out an emission spectrum at the upper end, the measurement tube is constructed in such a way that, in the measurement tube, the laser beam is focused at the material to be analyzed, specifically bulk material, in particular raw, intermediate, and end products from the processing of potash, magnesium, rock salt, or evaporated salt, but without additional scattering and deflection occurring, such that a plasma of the material to be analyzed is produced within the measurement tube by the laser radiation and the emission spectrum of the material to be analyzed reaches the outlet for outcoupling through the interior of the measurement tube, and scrapers (1, 2) lie on the inner and outer focusing tube wall annularly, preferably at the same vertical height on the focusing tube (3), which scrapers are arranged in such a way that the scrapers can be moved vertically in relation to the focusing tube (3), such that material to be analyzed that adheres to the focusing tube (3) on the inside and outside in the lower region can be scraped off by a relative motion of the focusing tube (3) in relation to the scrapers (1, 2).

公开(公告)号：US09625371B2

公开(公告)日：2017-04-18

申请号：US14629155

申请日：2015-02-23

Applicant: Visualant, Inc.

Inventor： Thomas A. Furness, III ,  Brian T. Schowengerdt ,  Ross D. Melville ,  Nicholas E. Walker ,  Bradley E. Sparks

IPC: G06K9/74 ,  G01N21/27 ,  G01J3/02 ,  G01J3/10 ,  G01J3/42 ,  G01J3/46 ,  G01J3/50 ,  G01N21/25 ,  G01N33/483

CPC classification number: G01N21/27 ,  A61B2562/0219 ,  G01J3/02 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/42 ,  G01J3/46 ,  G01J3/463 ,  G01J3/50 ,  G01J3/501 ,  G01N21/255 ,  G01N33/4833 ,  G01N2201/06113 ,  G01N2201/062

Abstract: Spectral information may be employed in process control and/or quality control of goods and articles. Spectral information may be employed in process control and/or quality control of media, for example financial instruments, identity documents, legal documents, medical documents, financial transaction cards, and/or other media, fluids for example lubricants, fuels, coolants, or other materials that flow, and in machinery, for example vehicles, motors, generators, compressors, presses, drills and/or supply systems. Spectral information may be employed in identifying biological tissue and/or facilitating diagnosis based on biological tissue.