公开(公告)号：US20030030801A1

公开(公告)日：2003-02-13

申请号：US10183335

申请日：2002-06-25

Inventor： Richard Levenson ,  Peter J. Miller

IPC: G01J003/28

CPC classification number: G06T5/50 ,  G01J1/08 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/465 ,  G01J3/50 ,  G01J3/501 ,  G01J2003/467 ,  G01N21/31 ,  G06K9/00127 ,  G06T7/90 ,  G06T11/001 ,  G06T2207/10056 ,  G06T2207/10152 ,  G06T2207/30024

Abstract: A imaging method is described that includes: obtaining a spectral weighting function indicative of an attribute of the reference sample; illuminating a target sample with light whose spectral flux distribution corresponds to the spectral weighting function to produce a corresponding target image, wherein the target image is indicative of a response of the target sample to the corresponding illumination at multiple spatial locations of the target sample; and identifying one or more target features in the target sample based on the target image.

Abstract translation: 描述了一种成像方法，其包括：获得指示参考样本的属性的频谱加权函数; 用其光谱通量分布对应于光谱加权函数的光照射目标样本以产生相应的目标图像，其中目标图像指示目标样本对目标样本的多个空间位置处的对应照明的响应; 以及基于所述目标图像识别所述目标样本中的一个或多个目标特征。

公开(公告)号：US06480273B1

公开(公告)日：2002-11-12

申请号：US09567745

申请日：2000-05-10

Applicant: John C. Brock ,  Richard L. Davis

Inventor： John C. Brock ,  Richard L. Davis

IPC: G01J300

CPC classification number: G01J3/2846 ,  G01J3/0229 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/457

Abstract: A multispectral imaging system (1) and method utilize an optical processor (3) for simultaneously comparing an input wavelength spectrum observed in a single spatial pixel in a scene image from a multispectral imager (2) with a plurality of template wavelength spectra to find a correlation. The optical processor exploits the three-dimensional attributes of optical correlation to perform massively parallel correlation processing by modulating (4) respective ones of a plurality of spectral bands of the input wavelength spectrum of an incident light beam (6) with modulating elements (5) to alter at least one property of the incident light beam by a value corresponding to the observed intensity of the input spectrum in the respective spectral band. In a disclosed embodiment, the modulated beam is expanded and transited through a spatial light modulator (7) having a two-dimensional array of modulating elements. Each row of the elements of the array alter the at least one property of the incident light by values corresponding to a particular template wavelength spectrum of a plurality of template wavelength spectra of the modulator. The values corresponding to each template spectrum are the conjugates of the representative values of the modulating elements of the template spectrum of the plurality of template spectra.

Abstract translation: 多光谱成像系统（1）和方法利用光学处理器（3），用于将来自多光谱成像器（2）的场景图像中的单个空间像素中观察到的输入波长光谱与多个模板波长光谱进行比较，以找到 相关性。 光学处理器通过利用调制元件（5）调制（4）入射光束（6）的输入波长光谱的多个光谱带中的各个光谱带，从而利用光学相关的三维属性进行大规模并行相关处理， 以将入射光束的至少一个特性改变为与各个光谱带中的输入光谱的观察强度对应的值。 在所公开的实施例中，经调制的光束被扩展并经过具有调制元件的二维阵列的空间光调制器（7）。 阵列元件的每一行通过对应于调制器的多个模板波长光谱的特定模板波长光谱的值来改变入射光的至少一个特性。 对应于每个模板谱的值是多个模板谱的模板谱的调制元素的代表值的共轭。

公开(公告)号：US06381008B1

公开(公告)日：2002-04-30

申请号：US09318402

申请日：1999-05-25

Applicant: Wayne A. Branagh ,  Robert C. Fry ,  Juan C. Ivaldi ,  Jason A. Rivers ,  Michael R. Dyas ,  Robert M. Brown, Jr.

Inventor： Wayne A. Branagh ,  Robert C. Fry ,  Juan C. Ivaldi ,  Jason A. Rivers ,  Michael R. Dyas ,  Robert M. Brown, Jr.

IPC: G01J318

CPC classification number: G01J3/18 ,  G01J3/0229 ,  G01J3/443

Abstract: Disclosed is a spectrometer system with unique wavelength resolution improving relative positioning of diffraction grating and detector. Also disclosed is a modified evolving windowed factor analysis based method of detecting semiconductor etch end points which is particularly well suited for use in real time monitoring and process control. Use of wavelength group selecting mask filters is also disclosed.

Abstract translation: 公开了具有独特波长分辨率的光谱仪系统，改善衍射光栅和检测器的相对定位。 还公开了一种基于改进的基于窗口因子分析的检测半导体蚀刻终点的方法，其特别适用于实时监测和过程控制。 还公开了使用波长组选择掩模滤波器。

公开(公告)号：US20020018205A1

公开(公告)日：2002-02-14

申请号：US09944831

申请日：2001-08-31

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01J004/00

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135null to 225null, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US06271917B1

公开(公告)日：2001-08-07

申请号：US09105279

申请日：1998-06-26

Applicant: Thomas W. Hagler

Inventor： Thomas W. Hagler

IPC: G01J304

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/18 ,  G01J3/32 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866

Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

Abstract translation: 用作空间辐射调制器的盘在其上具有分散的辐射滤波器。 每个滤波器具有形式为sin2（mtata + ppi / 4）的透射率或反射率调制函数，其中m是正整数，p具有四个值0,1,2,3中的一个。包括选择的波长分量 衍射成根据波长分散的细长图像。 不同的波长分量聚焦在调制器上的不同滤波器上，并由相应的滤波器编码。 由于滤波器的调制功能彼此正交，因此可以在一次测量期间从总检测信号对相应的滤波器进行编码或调制之后提取每个波长分量的振幅。

公开(公告)号：US20010002149A1

公开(公告)日：2001-05-31

申请号：US09746141

申请日：2000-12-21

Inventor： Mehdi Vaez-Iravani ,  Stanley Stokowski ,  Guoheng Zhao

IPC: G01N021/88

CPC classification number: G01J3/44 ,  G01J3/0216 ,  G01J3/0229 ,  G01N21/21 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/065

Abstract: A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

公开(公告)号：US6166805A

公开(公告)日：2000-12-26

申请号：US350093

申请日：1999-07-09

Applicant: Tohru Mori ,  Tsutomu Kaneko ,  Manabu Kojima

Inventor： Tohru Mori ,  Tsutomu Kaneko ,  Manabu Kojima

IPC: G01J3/18

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/18 ,  G01J3/1804

Abstract: The present invention relates to a double pass monochromator that improves wavelength resolution and reduces the actual length thereof. A return reflection means 7 that reverses the direction of dispersion of the wavelength of the second pass light 1c, 1f emitted and incident on a diffraction grating 4 during the reflection. In addition, the angles of the incident and emitted light during separation of spectral components by the diffraction grating are identical during the first and second diffraction.

Abstract translation: 本发明涉及提高波长分辨率并降低其实际长度的双通单色仪。 反射反射装置7，其反射在反射期间发射并入射到衍射光栅4上的第二通过光1c 1f的波长的散射方向。 此外，在衍射光栅分离光谱分量期间入射光和发射光的角度在第一和第二衍射期间是相同的。

公开(公告)号：US6034370A

公开(公告)日：2000-03-07

申请号：US176884

申请日：1998-10-22

Applicant: Robert G. Messerschmidt

Inventor： Robert G. Messerschmidt

IPC: G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/45 ,  G01N21/35

CPC classification number: G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/021 ,  G01J3/0229

Abstract: A spectrometer having a source of broad band infrared energy, a relay mirror that focuses the infrared energy at an intercepting mirror, a first object mirror that collimates the infrared energy from the intercepting mirror, a spatial light modulator that receives the collimated infrared energy and reflects it back to the first object mirror, the spatial light modulator including deformable mirror elements, and a controller that deforms the mirror elements according to a predetermined pattern. Deformable mirror elements obtain needed spectra while reducing the mechanical complexity of the spectrometer.

Abstract translation: 具有宽带红外能量源的光谱仪，将红外能量聚焦在拦截镜处的中继镜，准直来自拦截镜的红外能量的第一物镜，接收准直红外能量并反射的空间光调制器 它回到第一物镜，包括可变形镜元件的空间光调制器和根据预定图案使镜元件变形的控制器。 可变形的镜子元件获得所需的光谱，同时降低光谱仪的机械复杂性。

公开(公告)号：US06005249A

公开(公告)日：1999-12-21

申请号：US40441

申请日：1998-03-18

Applicant: Douglass R. Hayes, Jr. ,  Vernon R. Goodrich ,  William R. Brinley, Jr. ,  Patrick J. Neale

Inventor： Douglass R. Hayes, Jr. ,  Vernon R. Goodrich ,  William R. Brinley, Jr. ,  Patrick J. Neale

IPC: G01J1/04 ,  G01J1/42 ,  G01J3/02 ,  G01J5/08

CPC classification number: G01J1/429 ,  G01J1/04 ,  G01J1/0444 ,  G01J1/0474 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0229 ,  G01J3/0235 ,  G01J5/08 ,  G01J5/0862 ,  G01J5/0865 ,  G01J5/0878 ,  G01J1/0488 ,  G01J2001/0485 ,  G01J2001/4266

Abstract: An optical pathway of a scanning spectral radiometer for a continuous monitoring of spectral radiation employs a diffuser having an upper source directed surface and a lower sensor directed surface for diffusing radiation incident on the upper surface and transmitting the diffused radiation. An occulting ring laterally surrounds the diffuser. A filter receives the diffused radiation from the light diffuser and passes a predetermined wavelength range. A photodetector is positioned to receive the filtered radiation. The photodetector is positioned at one end of an optical path, with a diffuser being positioned at the other end of the optical path. A collimator is provided between the diffuser and the photodetector, with the optical path extending through the collimator.

Abstract translation: 用于连续监测光谱辐射的扫描光谱辐射计的光学路径使用具有上源指向表面和下传感器指向表面的漫射器，用于扩散入射在上表面上的辐射并透射扩散的辐射。 遮蔽环横向围绕扩散器。 滤光器接收来自光扩散器的漫射辐射并通过预定的波长范围。 光电检测器被定位成接收经过滤的辐射。 光电检测器位于光路的一端，漫射器位于光路的另一端。 在漫射器和光电检测器之间提供准直器，光路延伸穿过准直器。

公开(公告)号：US5717605A

公开(公告)日：1998-02-10

申请号：US321667

申请日：1994-10-12

Applicant: Yasuhiro Komiya ,  Yasushi Hibi ,  Tohru Wada ,  Kensuke Ishii ,  Susumu Kikuchi

Inventor： Yasuhiro Komiya ,  Yasushi Hibi ,  Tohru Wada ,  Kensuke Ishii ,  Susumu Kikuchi

IPC: G01J3/02 ,  G01J3/12 ,  G01J3/51

CPC classification number: G06T5/50 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/12 ,  G01J3/51 ,  G01J3/462 ,  G01J3/501 ,  G06T2207/10068 ,  G06T2207/10144 ,  G06T2207/10152 ,  G06T2207/30088 ,  G06T2207/30108

Abstract: The present invention provides a simple, low-cost color classification apparatus having a high resistance to mechanical vibrations and capable of properly performing color classification even if a light source is not specified and its spectrum changes. A color classification apparatus of the present invention is further including an image pickup means for picking up a spectrum of light reflected by a target object, a plurality of bandpass filters having different bands and arranged between the target object and the image pickup means, and a classifying means for calculating a classification spectrum for classification using a statistic technique from a spectrum of light reflected by the target object and picked up by the image pickup means, and classifying the target object using the classification spectrum.

Abstract translation: 本发明提供了一种简单的低成本的颜色分类装置，其具有高的机械振动阻力，并且即使没有指定光源并且其光谱改变，也能够适当地执行颜色分类。 本发明的颜色分类装置还包括：摄像装置，用于拾取目标物体反射的光谱;多个带通滤波器，其具有不同的带并配置在目标物体与图像拾取装置之间;以及 分类装置，用于使用统计技术从由目标对象反射并由图像拾取装置拾取的光谱计算分类谱，并使用分类光谱对目标对象进行分类。