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    SPECTROSCOPIC MODULE
    181.
    发明申请
    SPECTROSCOPIC MODULE 有权
    光谱模块

    公开(公告)号：US20100208257A1

    公开(公告)日：2010-08-19

    申请号：US12377300

    申请日：2008-06-05

    Applicant: Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

    Inventor： Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

    IPC: G01J3/02

    CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/2803

    Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

    Abstract translation: 在光谱模块1中，光检测元件4设置有入射到主体部分2中的光通过的光通过开口4b。 因此，能够防止光通过口4b与光检测元件4的光检测部4a之间的相对位置关系的偏差。此外，引导入射到主体部2的光的光学元件7， 布置在光通过开口4b处。 因此，入射到主体部分2中的光在光通过开口4b的光入射边缘部分处不被部分阻挡，而入射到主体部分2中的光可以是 引导安全。 因此，根据光谱模块1，可以提高可靠性。

    Infrared imaging using thermal radiation from a scanning probe tip
    182.
    发明申请
    Infrared imaging using thermal radiation from a scanning probe tip 有权
    使用来自扫描探头的热辐射的红外成像

    公开(公告)号：US20100045970A1

    公开(公告)日：2010-02-25

    申请号：US12228539

    申请日：2008-08-12

    Applicant: Markus B. Raschke

    Inventor： Markus B. Raschke

    IPC: G01J3/443 ,  G01J3/00

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/108 ,  G01J3/36 ,  G01J3/42 ,  G01J3/453 ,  G01Q30/02 ,  G01Q60/58

    Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.

    Abstract translation: 描述了使用加热的SPM探针和远场收集光学器件执行亚微米光谱的方法。 在尖锐的加热尖端处的增强的发射特性构成高度局部化的宽带IR源。 因此，即使相互作用区域在亚微米级别，也可以在远场观察和测量邻近的样品表面的IR吸收和发射性质。 。 。 。 提供样品组成的空间分辨率映射。

    SPECTROSCOPY MODULE
    183.
    发明申请
    SPECTROSCOPY MODULE 失效
    光谱模块

    公开(公告)号：US20090290164A1

    公开(公告)日：2009-11-26

    申请号：US12464259

    申请日：2009-05-12

    Applicant: Katsumi Shibayama ,  Tomofumi Suzuki ,  Takafumi Yokino ,  Anna Yoshida

    Inventor： Katsumi Shibayama ,  Tomofumi Suzuki ,  Takafumi Yokino ,  Anna Yoshida

    IPC: G01J3/45

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0286 ,  G01J3/0297 ,  G01J2003/1213

    Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, the light transmissive plate 16 covers a part of a light incident opening 50a. Thus, a light incident side surface 63a of the optical resin adhesive 63 becomes a substantially flat plane in the light passing hole 50. Therefore, it is possible to make the light L1 appropriately incident into the substrate 2.

    Abstract translation: 在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与 光检测元件5的光检测部分5a偏离。 此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力 检测元件5和基板2.此外，透光板16覆盖光入射开口50a的一部分。 因此，光学树脂粘合剂63的光入射侧面63a在光通过孔50中变为基本平坦的平面。因此，可以使光L1适当地入射到基板2中。

    METHOD FOR MANUFACTURING SPECTROSCOPY MODULE, AND SPECTROSCOPY MODULE
    184.
    发明申请
    METHOD FOR MANUFACTURING SPECTROSCOPY MODULE, AND SPECTROSCOPY MODULE 失效
    制造光谱模块的方法和光谱模块

    公开(公告)号：US20090290154A1

    公开(公告)日：2009-11-26

    申请号：US12464267

    申请日：2009-05-12

    Applicant: Katsumi SHIBAYAMA ,  Tomofumi SUZUKI

    Inventor： Katsumi SHIBAYAMA ,  Tomofumi SUZUKI

    IPC: G01J3/28 ,  B23P11/00

    CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/04 ,  G01J3/2803 ,  Y10T29/49826 ,  Y10T29/49895 ,  Y10T156/10

    Abstract: In a spectroscopy module 1, a light detecting element 5 having a light passing hole 50 is used. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is electrically connected to a wiring 9 formed on a front plane 2a of a substrate 2 by face-down bonding, and a resin layer 79 is formed as an underfill resin between the substrate 2 and the light detecting element 5. Therefore, it is possible to improve the fixing strength between the substrate 2 and the light detecting element 5. Additionally, before the resin layer 79 is formed, a resin layer 78 is formed along a guide portion 77 that surrounds the passing hole 50. Thus, the resin layer 79 is prevented from penetrating into the light passing hole 50, which makes it possible to make a light be appropriately incident into the substrate 2.

    Abstract translation: 在光谱模块1中，使用具有光通过孔50的光检测元件5。 因此，可以防止光通过孔50和光检测元件5的光检测部分5a之间的相对位置关系偏离。 此外，光检测元件5通过面朝下接合与形成在基板2的前面2a上的布线9电连接，并且在基板2和光检测元件之间形成树脂层79作为底部填充树脂 因此，可以提高基板2和光检测元件5之间的固定强度。另外，在形成树脂层79之前，沿着包围通孔50的引导部77形成树脂层78 因此，防止了树脂层79渗入光通过孔50，这使得可以使光适当地入射到基板2中。

    Reflective optical system
    185.
    发明授权
    Reflective optical system 有权
    反光光学系统

    公开(公告)号：US07532414B2

    公开(公告)日：2009-05-12

    申请号：US11832837

    申请日：2007-08-02

    Applicant: David Scheiner ,  Michael Winik ,  Yakov Lyubchik

    Inventor： David Scheiner ,  Michael Winik ,  Yakov Lyubchik

    IPC: G02B17/08 ,  G02B27/14

    CPC classification number: G02B21/16 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0243 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G02B17/06 ,  G02B17/0605 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G02B21/04 ,  G02B27/10 ,  G02B27/283

    Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

    Abstract translation: 呈现镜头布置。 透镜装置包括具有凹面反射表面并限定透镜装置的光轴的第一元件以及沿着光轴与第一元件间隔开的第二基本平坦且至少部分反射的元件。 第二元件被配置为允许光通过其并且相对于光轴和第一元件定向，使得在输入光束到第二元件的预定入射角度处，输入光束被反射到反射 第一元件的表面并从其反射以穿过第二元件。

    Optical spectrum analyzer
    186.
    发明授权
    Optical spectrum analyzer 有权
    光谱分析仪

    公开(公告)号：US07365845B2

    公开(公告)日：2008-04-29

    申请号：US11338276

    申请日：2006-01-24

    Applicant: Yoshifumi Takahashi ,  Takanori Saitoh ,  Kenichi Nakamura

    Inventor： Yoshifumi Takahashi ,  Takanori Saitoh ,  Kenichi Nakamura

    IPC: G01J3/18

    CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0243 ,  G01J3/1804 ,  G01J2003/2866

    Abstract: An optical spectrum analyzer measures to-be-measured light while carrying out calibration processing for correcting wavelength information of spectrum data of the to-be-measured light by a wavelength information correction device through a storage device based on the spectrum data of reference light that is obtained by causing the reference light whose wavelength is known to be incident on a tunable wavelength filter from light incident devices at all times together with the to-be-measured light. Since the optical spectrum analyzer can continuously measure the to-be-measured light in a wide wavelength range at high speed while maintaining high wavelength accuracy, it can continuously obtain the spectrum data of the to-be-measured light with high wavelength accuracy even if it is installed in a place in which an environment intensely changes.

    Abstract translation: 光谱分析仪在进行基于参考光的频谱数据的基于光的参考光的频谱数据的波长信息校正装置进行用于校正待测光的光谱数据的波长信息的校准处理时， 通过使波长已知的参考光与待测光一起入射到可调谐波长滤光器上，并从光入射装置始终进入。 由于光谱分析仪可以在保持高波长精度的同时高速连续地测量宽波长范围内的被测光，所以即使在高频波长精度的情况下也可以连续获得待测光的光谱数据 它安装在环境剧烈变化的地方。

    SPECTROPHOTOMETRIC OPTICAL SYSTEM OF MICROPLATE READER AND FILTER WHEEL THEREOF
    187.
    发明申请
    SPECTROPHOTOMETRIC OPTICAL SYSTEM OF MICROPLATE READER AND FILTER WHEEL THEREOF 有权
    微波读数器和滤光片的光谱光学系统

    公开(公告)号：US20080062421A1

    公开(公告)日：2008-03-13

    申请号：US11564446

    申请日：2006-11-29

    Applicant: Lihua ZHOU ,  Jinhong QIU

    Inventor： Lihua ZHOU ,  Jinhong QIU

    IPC: G01N21/25 ,  G01N21/51

    CPC classification number: G01J3/51 ,  G01J3/0243 ,  G01J3/12 ,  G01J2003/1217 ,  G01N2201/0453

    Abstract: A spectrophotometric optical system of a microplate reader and a filter wheel thereof are disclosed. The filter wheel comprises a pivotable wheel body, at least one narrow-band filter with a relatively long central wavelength mounted to the wheel body, and at least one narrow-band filter with a relatively short central wavelength mounted to the wheel body. The narrow-band filter with a relatively long central wavelength is provided with a diaphragm on a front surface thereof The diaphragm is formed with a plurality of apertures. A ratio of a total effective area of the plurality of apertures to an effective area of the narrow-band filter with a relatively short central wavelength is equivalent to a ratio of energy amounts of shorter wavelength light passed through the narrow-band filter with a relatively short central wavelength to energy amounts of longer wavelength light passed through the narrow-band filter with a relatively long central wavelength when the diaphragm is not disposed. By the diaphragm attached to the front surface of the narrow-band filter with a relatively long central wavelength, an energy matching between light of longer wavelength and light of shorter wavelength may be achieved. Further, due to the uniformly distributed apertures in the diaphragm, an even light spot may be obtained.

    Abstract translation: 公开了微板读数器及其滤光轮的分光光度学系统。 所述滤光轮包括可枢转的轮体，至少一个安装在所述车轮主体上的具有较长的中心波长的窄带过滤器以及至少一个具有相对短的中心波长的窄带过滤器，安装在所述车轮主体上。 具有相对长的中心波长的窄带滤光片在其前表面上设置有隔膜。隔膜形成有多个孔。 多个孔的总有效面积与具有相对短的中心波长的窄带滤光器的有效面积的比率等于通过窄带滤光器的较短波长光的能量比与相对 当不设置隔膜时，较长的中心波长与较长波长的光的能量通过具有较长的中心波长的窄带滤光器。 通过附着在具有较长中心波长的窄带滤光片的前表面的光阑，可以实现较长波长的光与较短波长的光之间的能量匹配。 此外，由于隔膜中均匀分布的孔，可以获得均匀的光点。

    Optical Measurement System with Simultaneous Multiple Wavelengths, Multiple Angles of Incidence and Angles of Azimuth
    189.
    发明申请
    Optical Measurement System with Simultaneous Multiple Wavelengths, Multiple Angles of Incidence and Angles of Azimuth 审中-公开
    具有同时多个波长的光学测量系统，多个角度的发射角和方位角

    公开(公告)号：US20070263220A1

    公开(公告)日：2007-11-15

    申请号：US11747173

    申请日：2007-05-10

    Applicant: Tongxin Lu ,  Xiaohan Wang

    Inventor： Tongxin Lu ,  Xiaohan Wang

    IPC: G01J4/00 ,  G01N21/55

    CPC classification number: G01J3/02 ,  G01J3/0216 ,  G01J3/0224 ,  G01J3/0243 ,  G01J3/10 ,  G01N21/8806

    Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

    Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的设备，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器阵列接收出射的光线，并且可以分析光线以确定被测器件的特性。

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