公开(公告)号：US20090261266A1

公开(公告)日：2009-10-22

申请号：US12492610

申请日：2009-06-26

Applicant: STEFAN LANIO

Inventor： STEFAN LANIO

IPC: H01J1/50

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole piece, a second pole piece and at least two openings for charged particle beams, wherein the two openings are arranged in one row, thereby forming a lens row, and wherein the pole piece unit has an elongated shape.

Abstract translation: 本发明提供一种用于多个带电粒子束的透镜系统。 所述透镜系统包括向具有第一极片，第二极片和用于带电粒子束的至少两个开口的极片单元提供磁通的激励线圈，其中两个开口布置成一排，从而形成透镜 并且其中所述极靴单元具有细长形状。

公开(公告)号：US20070257207A1

公开(公告)日：2007-11-08

申请号：US10576547

申请日：2004-10-19

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Helmut Banzhof

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Helmut Banzhof

IPC: H01J37/09

CPC classification number: H01J37/09 ,  H01J2237/0455

Abstract: The present invention relates to a charged particle beam device (1) for inspecting or structuring a specimen (3) comprising a charged particle beam source (5) to generate a charged particle beam (7), a focussing lens (9) to focus the charged particle beam (7) onto the specimen (3), and an aperture system (13) for defining an aperture (6) for the charged particle beam (7). The aperture system (13) includes a first member (20) to block a first portion (7a) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), a second member (30) to block a second portion (7b) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), first means (24) for moving the first member (20) to adjust the size of the blocked first portion (7a) of the charged particle beam (7), and second means (34) for moving the second member (30) independently from the first portion (7b). With such aperture system (13), it is possible to freely adjust the size of the aperture (6) and align it to the optical axis (8) during operation.

Abstract translation: 本发明涉及一种用于检查或构造包括带电粒子束源（5）以产生带电粒子束（7）的样本（3）的带电粒子束装置（1），聚焦透镜（9） 带电粒子束（7）到样品（3）上，以及孔径系统（13），用于限定带电粒子束（7）的孔（6）。 孔径系统（13）包括阻挡带电粒子束源（5）和聚焦透镜（9）之间的带电粒子束（7）的第一部分（7a）的第一构件（20），第二构件 （30）阻挡所述带电粒子束源（5）和所述聚焦透镜（9）之间的带电粒子束（7）的第二部分（7b），用于移动所述第一构件（20）的第一装置（24） 以调节带电粒子束（7）的阻塞的第一部分（7a）的尺寸，以及用于独立于第一部分（7b）移动第二部件（30）的第二装置（34）。 利用这种孔径系统（13），可以在操作期间自由地调整孔径（6）的尺寸并将其对准光轴（8）。

公开(公告)号：US20060163488A1

公开(公告)日：2006-07-27

申请号：US10540178

申请日：2003-12-12

Applicant: Stefan Lanio

Inventor： Stefan Lanio

IPC: H01J1/50

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise an first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

公开(公告)号：US20060151711A1

公开(公告)日：2006-07-13

申请号：US11274608

申请日：2005-11-15

Applicant: Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

Inventor： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

IPC: H01J1/50

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

Abstract translation: 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US4740704A

公开(公告)日：1988-04-26

申请号：US907040

申请日：1986-09-12

Applicant: Harald Rose ,  Stefan Lanio

Inventor： Harald Rose ,  Stefan Lanio

IPC: H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J3/14 ,  G21K1/08

CPC classification number: H01J37/05

Abstract: The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..

Abstract translation: 本发明涉及一种具有直边的极片的图像形成ω滤波器，其具有良好的局部分辨率和非常好的能量分辨率。 ω滤波器包括四个偏转区域，偏转角大于90°。

公开(公告)号：US09048068B2

公开(公告)日：2015-06-02

申请号：US12776980

申请日：2010-05-10

Applicant: Stefan Lanio ,  Gerald Schoenecker

Inventor： Stefan Lanio ,  Gerald Schoenecker

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/153

CPC classification number: H01J37/28 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/1523 ,  H01J2237/1534 ,  H01J2237/244

Abstract: An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.

Abstract translation: 电子束装置包括：用于发射一次电子束的射束发射器; 用于将一次电子束聚焦到样本上的目标电子透镜，物镜限定光轴; 具有用于从一次电子束分离信号电子束的第一色散的光束分离器; 和色散补偿元件。 色散补偿元件具有第二色散，色散补偿元件适用于独立于色散补偿元件下游的主光束的倾斜角而调节第二色散，使得第二色散基本上补偿第一色散。 色散补偿元件沿着一级电子束布置在分束器的上游。

公开(公告)号：US20140175277A1

公开(公告)日：2014-06-26

申请号：US13734180

申请日：2013-01-04

Applicant: Stefan Lanio

Inventor： Stefan Lanio ,  Jüergen Frosien ,  Gerald Schoenecker ,  Dieter Winkler

IPC: H01J37/26

CPC classification number: H01J37/244 ,  H01J37/147 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2812 ,  H01J2237/2814

Abstract: A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.

Abstract translation: 描述了带电粒子束装置的二次带电粒子检测系统。 检测系统包括用于分离初级束的分束器和在冲击样品上形成的次级束; 用于偏转次光束的光束弯曲机; 用于聚焦二次束的聚焦透镜; 用于检测次级束粒子的检测元件和三个偏转元件，其中至少第一偏转器设置在光束弯曲器和聚焦透镜之间，至少第二偏转器设置在聚焦透镜和检测元件之间，至少 在分束器和检测元件之间提供第三偏转器。

公开(公告)号：US20130026385A1

公开(公告)日：2013-01-31

申请号：US13196778

申请日：2011-08-02

Applicant: Dieter WINKLER ,  Stefan LANIO

Inventor： Dieter WINKLER ,  Stefan LANIO

IPC: H01J3/14 ,  H01S4/00

CPC classification number: H01J37/09 ,  H01J2237/0206 ,  H01J2237/026 ,  H01J2237/28

Abstract: A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.

Abstract translation: 带电粒子束装置的屏蔽构件包括导电基板; 以及延伸穿过导电基板的通孔。 导电衬底由具有约106Ω-cm至约1012Ω-cm范围内的特定电阻率的材料组成。

公开(公告)号：US07507956B2

公开(公告)日：2009-03-24

申请号：US10571346

申请日：2004-09-02

Applicant: Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

Inventor： Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

IPC: H01J40/00 ,  H01J47/00 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42 ,  H01J1/50 ,  G21K1/08 ,  G01K1/08 ,  G01N23/00 ,  G21K7/00 ,  A61N5/00 ,  G21G5/00

CPC classification number: H01J37/05 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/1534

Abstract: The present invention provides a charged particle beam energy width reduction system. The system comprises a first element acting in a focusing and dispersive manner in an x-z-plane; a second element acting in a focusing and dispersive manner in the x-z-plane; a charged particle selection element positioned between the first and the second element acting in a focusing and dispersive manner; and a focusing element positioned between the first and the second element acting in a focusing and dispersive manner.

Abstract translation: 本发明提供一种带电粒子束能量减少系统。 该系统包括在x-z平面中以聚焦和分散方式起作用的第一元件; 在x-z平面中以聚焦和分散方式起作用的第二元素; 位于第一和第二元件之间的带电粒子选择元件以聚焦和分散的方式起作用; 以及位于第一和第二元件之间的聚焦元件，其以聚焦和分散的方式起作用。

公开(公告)号：US20070158561A1

公开(公告)日：2007-07-12

申请号：US10571345

申请日：2004-09-02

Applicant: Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

IPC: G21K7/00

CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

Abstract: The present invention provides a charged particle beam device. The device comprises a first lens (101; 510) generating a crossover a second lens (102; 512) positioned after the crossover and a element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Abstract translation: 本发明提供一种带电粒子束装置。 所述装置包括产生交叉的第一透镜（101; 510），所述第二透镜位于所述交叉之后，所述第二透镜（102; 512）位于所述交叉之后，并且所述元件以聚焦和分散方式作用在xz平面中，所述元件的中心具有基本相同 z位置作为交叉。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。