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    Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
    11.
    发明授权
    Axial alignment assembly, and charged particle microscope comprising such an alignment assembly 有权

    公开(公告)号：US11773905B2

    公开(公告)日：2023-10-03

    申请号：US17325946

    申请日：2021-05-20

    Applicant: FEI Company

    Inventor： Pleun Dona ,  Casper Maria Smit

    IPC: F16C33/76 ,  H01J37/15

    CPC classification number: F16C33/768 ,  F16C33/761 ,  H01J37/15 ,  H01J2237/1415

    Abstract: An axial alignment assembly (100) comprising a first body and a second body. The first body has a substantially cylindrical outer jacket, and has a first alignment axis. The second body comprises a substantially cylindrical inner jacket, and has a second alignment axis. The second body is positioned with respect to said first body in so that said inner jacket faces said outer jacket and in between said inner jacket and said outer jacket a substantially annular recess is formed. The axial alignment assembly further comprises a plurality of resilient elements that are positioned within said annular recess, wherein each resilient element is in contact with said outer jacket of said first body and with said inner jacket of said second body. Each resilient element exerts a force onto said outer jacket and onto said inner jacket for aligning said first alignment axis and said second alignment axis.

    VACUUM COMPATIBLE X-RAY SHIELD
    12.
    发明公开
    VACUUM COMPATIBLE X-RAY SHIELD 审中-公开

    公开(公告)号：US20230162942A1

    公开(公告)日：2023-05-25

    申请号：US17533610

    申请日：2021-11-23

    Applicant: FEI Company

    Inventor： Pleun Dona ,  Casper Smit ,  Rients Jan de Groot

    IPC: H01J37/16 ,  H01J37/18 ,  B33Y80/00

    CPC classification number: H01J37/165 ,  H01J37/18 ,  B33Y80/00

    Abstract: Methods and apparatus are disclosed for providing an X-ray shield within an ultra-high vacuum enclosure. A shell is fabricated, leak-tested, filled with an X-ray shielding material, and sealed. An elongated twisted X-ray shield can be deployed within a pump-out channel of an electron microscope or similar equipment. The shield can incorporate lead within a stainless steel shell, with optional low-Z cladding outside the shell. Further variations are disclosed.

    Mounting structures for multi-detector electron microscopes
    15.
    发明授权
    Mounting structures for multi-detector electron microscopes 有权
    多检测器电子显微镜的安装结构

    公开(公告)号：US08993963B2

    公开(公告)日：2015-03-31

    申请号：US14325166

    申请日：2014-07-07

    Applicant: FEI Company

    Inventor： Hanno Sebastian von Harrach ,  Bert Henning Freitag ,  Pleun Dona

    IPC: H01J37/244 ,  H01J37/26 ,  H01J49/06 ,  H01J37/28 ,  G01N23/225

    CPC classification number: H01J37/244 ,  G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/2442 ,  H01J2237/28 ,  H01J2237/2802

    Abstract: A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.

    Abstract translation: 一种用于包括检测器支撑环和柔性元件的电子显微镜的检测器支架，其中每个柔性元件的第一端连接到支撑环，并且其中检测器支撑环和柔性元件构造成支撑至少两个 所述检测器围绕所述电子显微镜的光轴围绕圆周布置，使得所述至少两个检测器中的每一个的光轴与所述电子显微镜的光轴相交，并且所述至少两个检测器的目标点保持在相对恒定的 温度变化。

    Reduction of thermal magnetic field noise in TEM corrector systems
    16.
    发明授权
    Reduction of thermal magnetic field noise in TEM corrector systems 有权

    公开(公告)号：US11915904B2

    公开(公告)日：2024-02-27

    申请号：US17880624

    申请日：2022-08-03

    Applicant: FEI Company

    Inventor： Alexander Henstra ,  Pleun Dona

    IPC: H01J37/153 ,  H01J37/28

    CPC classification number: H01J37/153 ,  H01J37/28 ,  H01J2237/1516 ,  H01J2237/1534

    Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω−1. The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2×, 3×, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

    REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS
    17.
    发明申请
    REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS 有权

    公开(公告)号：US20220392736A1

    公开(公告)日：2022-12-08

    申请号：US17880624

    申请日：2022-08-03

    Applicant: FEI Company

    Inventor： Alexander Henstra ,  Pleun Dona

    IPC: H01J37/153 ,  H01J37/28

    Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω−1. The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2×, 3×, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

    Reduction of thermal magnetic field noise in TEM corrector systems
    18.
    发明授权
    Reduction of thermal magnetic field noise in TEM corrector systems 有权

    公开(公告)号：US11437216B2

    公开(公告)日：2022-09-06

    申请号：US17139859

    申请日：2020-12-31

    Applicant: FEI Company

    Inventor： Alexander Henstra ,  Pleun Dona

    IPC: H01J37/153 ,  H01J37/28

    Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω−1. The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2×, 3×, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

    Coating on dielectric insert of a resonant RF cavity
    19.
    发明授权
    Coating on dielectric insert of a resonant RF cavity 有权

    公开(公告)号：US11328892B2

    公开(公告)日：2022-05-10

    申请号：US16987172

    申请日：2020-08-06

    Applicant: FEI Company

    Inventor： Erik Rene Kieft ,  Pleun Dona ,  Jasper Frans Mathijs van Rens ,  Wouter Verhoeven ,  Peter Mutsaers ,  Jom Luiten ,  Ond{hacek over (r)}ej Ba{hacek over (c)}o

    IPC: H01J37/04 ,  H01J37/26 ,  H01P7/06

    Abstract: Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity includes a dielectric insert, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.

    MULTI MODAL CRYO COMPATIBLE GUID GRID
    20.
    发明申请
    MULTI MODAL CRYO COMPATIBLE GUID GRID 有权

    公开(公告)号：US20210066032A1

    公开(公告)日：2021-03-04

    申请号：US16557199

    申请日：2019-08-30

    Applicant: FEI Company

    Inventor： Maarten Kuijper ,  Ondrej Ludmil Shanel ,  Mathijs Petrus van den Boogaard ,  Pleun Dona

    IPC: H01J37/26 ,  G06K9/00 ,  H01J37/22 ,  H01J37/10

    Abstract: Cryo compatible sample grids having multi-modal cryo-EM compatible GUIDs, according to the present disclosure include an outer support structure that defines a region of the grid for holding one or more samples, and a plurality of inner support structures that define a plurality of apertures that are each configured to hold a sample. Cryo compatible sample grids further include a first identifier located on the outer support structure, and a second identifier located within the region of the grid for holding the one or more samples. The first identifier is readable with an optical detector, while the second identifier is readable with an electron detector (e.g., within an electron microscope). Specifically, the second identifier is readable with an electron detector when one or more teeth and/or holes that comprise the second identifier are filled with ice from a vitrification process.

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