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    Method for synchronous wet etching processing of differential microstructures
    11.
    发明授权
    Method for synchronous wet etching processing of differential microstructures 有权

    公开(公告)号：US10468265B1

    公开(公告)日：2019-11-05

    申请号：US16383885

    申请日：2019-04-15

    Applicant: Guangdong University of Technology

    Inventor： Xin Chen ,  Yun Chen ,  Dachuang Shi ,  Xun Chen ,  Qiang Liu ,  Jian Gao ,  Chengqiang Cui

    IPC: H01L31/0216 ,  B81C1/00 ,  H01L21/308 ,  H01L21/306

    Abstract: A method for synchronous wet etching processing of differential microstructures, including the following steps: step a: performing photoetching on a processing surface of a workpiece to be processed to develop the workpiece; step b: affixing a mask to a surface opposite to the processing surface of the workpiece; step c: continuously cooling the mask; step d: placing the cooled mask and the workpiece in a wet etching device; and adding an etchant to the processing surface of the workpiece to start etching; step e: removing the mask and the workpiece from the wet etching device after the set etching time; separating the mask and the workpiece to obtain a workpiece with a etching structure. A temperature difference is formed between the pattern area to be processed and the retaining area.

    Method of processing nano- and micro-pores
    12.
    发明授权
    Method of processing nano- and micro-pores 有权

    公开(公告)号：US10427936B2

    公开(公告)日：2019-10-01

    申请号：US16221457

    申请日：2018-12-15

    Applicant: Guangdong University of Technology

    Inventor： Yun Chen ,  Xin Chen ,  Dachuang Shi ,  Jian Gao ,  Zhengping Wang ,  Haidong Yang

    IPC: B81C1/00 ,  B82Y40/00 ,  H01L21/306 ,  H01L29/06

    Abstract: A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.

    HIGH-SPEED PLATFORM MOTION PARAMETER SELF-TUNING METHOD BASED ON MODEL IDENTIFICATION AND EQUIVALENT SIMPLIFICATION
    13.
    发明申请
    HIGH-SPEED PLATFORM MOTION PARAMETER SELF-TUNING METHOD BASED ON MODEL IDENTIFICATION AND EQUIVALENT SIMPLIFICATION 审中-公开

    公开(公告)号：US20170124249A1

    公开(公告)日：2017-05-04

    申请号：US15375174

    申请日：2016-12-12

    Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

    Inventor： Zhijun Yang ,  Youdun Bai ,  Xin Chen ,  Jian Gao ,  Xindu Chen ,  Yunbo He ,  Yun Chen ,  Chengxiang Li ,  Jianglong Wang

    IPC: G06F17/50

    CPC classification number: G06F17/5086 ,  G06F17/5009 ,  G06F17/5095

    Abstract: A high-speed platform motion parameter self-tuning method based on model identification and equivalent simplification is provided, comprising: establishing a test of a motion state of a high-speed platform, identifying model parameters, and optimizing motion parameters of an equivalent simplified model; selecting any motion function from a pre-set parameterized curve, setting initial parameters, and driving the high-speed platform to move under the action of a controller and an actuator; collecting dynamic response information of the platform, calculating dynamic characteristic information of the platform such as stiffness, frequency, damping and the like; establishing a dynamic response equivalent simplified model by using the acquired dynamic characteristic information, and performing the optimization constrained by meeting motion precision and targeting at shorter execution time for the motion parameters in the selected parameterized motion function to obtain the optimum parameters. The method of the present invention gives consideration to the dynamic characteristic requirement of the platform and the comprehensive requirement of the parameter identification and optimization on the industrial site, facilitates the implementation of an algorithm in a motion control card, and is suitable for rapidly acquiring the optimum motion parameters of the actual high-speed platform on site.

    Method and device for preparing graphene-based polyethylene glycol phase change material
    16.
    发明授权
    Method and device for preparing graphene-based polyethylene glycol phase change material 有权

    公开(公告)号：US11339316B1

    公开(公告)日：2022-05-24

    申请号：US17559112

    申请日：2021-12-22

    Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

    Inventor： Yun Chen ,  Xiangyuan Luo ,  Shuquan Ding ,  Canguang Lin ,  Zengguang Gao ,  Xin Chen ,  Xun Chen ,  Jian Gao

    IPC: C09K5/06 ,  C08K3/04 ,  C08K9/12 ,  C08J9/40

    Abstract: A method and device for preparing a graphene-based polyethylene glycol phase change material. The method includes: (S1) dispersing carbon black in deionized water to form a carbon black dispersion; immersing polyurethane sponge in the carbon black dispersion; and taking out polyurethane sponge followed by drying to obtain a polyurethane sponge-carbon black combination; (S2) subjecting the polyurethane sponge-carbon black combination to a first electrical discharge machining to obtain a first intermediate; (S3) ultrasonically mixing the first intermediate, polyethylene glycol, and MgO to obtain a second intermediate; (S4) subjecting the second intermediate to a second electrical discharge machining to obtain a third intermediate; (S5) subjecting the third intermediate to acid washing to obtain a fourth intermediate, and drying the fourth intermediate; (S6) injecting polyethylene glycol into the fourth intermediate followed by stirring in a mold and drying to prepare the graphene-based polyethylene glycol phase change material.

    Macro-micro integrated compound platform with adjustable dynamic characteristics
    17.
    发明授权
    Macro-micro integrated compound platform with adjustable dynamic characteristics 有权

    公开(公告)号：US10232477B2

    公开(公告)日：2019-03-19

    申请号：US15376658

    申请日：2016-12-13

    Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

    Inventor： Zhijun Yang ,  Youdun Bai ,  Xin Chen ,  Jian Gao ,  Xindu Chen ,  Yunbo He ,  Yun Chen ,  Ruiqi Li ,  Chaoran Chen

    IPC: B23Q1/25 ,  B25H1/02 ,  B23Q1/34 ,  B23Q11/00

    Abstract: The present invention proposes a macro-micro integrated compound platform with adjustable dynamic characteristics. When a macro platform mover and a micro platform mover are driven at the same time, the whole large-scale high-speed motion can be realized; when a motion deviation occurs, a micro motion platform can be driven separately to realize the high-frequency motion deviation compensation, because the micro motion platform has small inertia and zero friction and achieves precision displacement output through elastic deformation. The macro-micro integrated compound platform can realize high-speed precision motion through compound motion control, is mounted and used in a manner consistent with the traditional platform, and is convenient to be popularized and applied; a stiffness and frequency adjustment mechanism and a variable damper are arranged, so that the micro motion platform can transfer the motion of a macro motion platform and isolate the vibration at any frequency, and realize high-precision displacement compensation; meanwhile, damping of the variable damper is matched with the stiffness and frequency parameters to ensure the high-precision displacement compensation at any frequency and increase the range of working frequency.

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