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    SYMMETRIC MEMS PIEZOELECTRIC ACCELEROMETER FOR LATERAL NOISE REDUCTION
    12.
    发明申请
    SYMMETRIC MEMS PIEZOELECTRIC ACCELEROMETER FOR LATERAL NOISE REDUCTION 审中-公开

    公开(公告)号：US20180335443A1

    公开(公告)日：2018-11-22

    申请号：US16047732

    申请日：2018-07-27

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01P15/09

    CPC classification number: G01P15/0922

    Abstract: Apparatus and associated methods relate to maximizing a signal to noise ratio of an accelerometer by inhibiting signals arising from movements of a proofmass in directions perpendicular to a direction of intended sensitivity. The direction of intended sensitivity of the accelerometer is along an axis of the proofmass. The accelerometer is rendered substantially insensitive to lateral accelerations of the proofmass by making the accelerometer axially symmetric. Two axially-asymmetric acceleration sensing devices are axially engaged in such a manner as to render the coupled sensing devices substantially axially-symmetric. In some embodiments, each acceleration sensor has an axially-thin membrane portion extending from a proofmass portion. The two acceleration sensors can be engaged in an antiparallel fashion at projecting ends of the proofmass portions. An engagement surface will be located about halfway between the axially-thin membrane portions of the two acceleration sensors, thereby causing mechanical symmetry about the engagement surface.

    MEMS PRESSURE SENSOR WITH MODIFIED CAVITY TO IMPROVE BURST PRESSURE
    13.
    发明申请
    MEMS PRESSURE SENSOR WITH MODIFIED CAVITY TO IMPROVE BURST PRESSURE 审中-公开

    公开(公告)号：US20170203954A1

    公开(公告)日：2017-07-20

    申请号：US15001067

    申请日：2016-01-19

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang ,  David P. Potasek

    IPC: B81B3/00 ,  B81C1/00

    CPC classification number: B81B3/0021 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0132 ,  B81C2201/0133 ,  G01L9/0048 ,  G01L19/0618

    Abstract: A method for producing a silicon based MEMS pressure sensor includes forming a cavity in a first (100) surface of a silicon wafer with first and second parallel (100) surfaces wherein the angle between the walls of the first cavity and the first (100) surface where they intersect the first (100) surface are greater than 90 degrees and the remaining material between the bottom of the cavity and the second parallel (100) surface comprises a flexible diaphragm. The method also includes forming a backing wafer, having a through hole, and bonding the silicon wafer to the backing wafer such that the hole in the backing wafer matches up with the cavity in the second side of the (100) silicon wafer. A dielectric layer is formed on the second side of the (100) silicon wafer and a sensing element is formed on the dielectric layer to detect pressure induced deflection of the silicon diaphragm.

    Symmetric MEMS piezoelectric accelerometer for lateral noise reduction
    16.
    发明授权
    Symmetric MEMS piezoelectric accelerometer for lateral noise reduction 有权

    公开(公告)号：US10520525B2

    公开(公告)日：2019-12-31

    申请号：US16047732

    申请日：2018-07-27

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01P15/00 ,  G01P15/09

    Abstract: Apparatus and associated methods relate to maximizing a signal to noise ratio of an accelerometer by inhibiting signals arising from movements of a proofmass in directions perpendicular to a direction of intended sensitivity. The direction of intended sensitivity of the accelerometer is along an axis of the proofmass. The accelerometer is rendered substantially insensitive to lateral accelerations of the proofmass by making the accelerometer axially symmetric. Two axially-asymmetric acceleration sensing devices are axially engaged in such a manner as to render the coupled sensing devices substantially axially-symmetric. In some embodiments, each acceleration sensor has an axially-thin membrane portion extending from a proofmass portion. The two acceleration sensors can be engaged in an antiparallel fashion at projecting ends of the proofmass portions. An engagement surface will be located about halfway between the axially-thin membrane portions of the two acceleration sensors, thereby causing mechanical symmetry about the engagement surface.

    SYMMETRIC MEMS PIEZOELECTRIC ACCELEROMETER FOR LATERAL NOISE
    17.
    发明申请
    SYMMETRIC MEMS PIEZOELECTRIC ACCELEROMETER FOR LATERAL NOISE 审中-公开

    公开(公告)号：US20170269119A1

    公开(公告)日：2017-09-21

    申请号：US15074567

    申请日：2016-03-18

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01P15/09

    CPC classification number: G01P15/0922

    Abstract: Apparatus and associated methods relate to maximizing a signal to noise ratio of an accelerometer by inhibiting signals arising from movements of a proofmass in directions perpendicular to a direction of intended sensitivity. The direction of intended sensitivity of the accelerometer is along an axis of the proofmass. The accelerometer is rendered substantially insensitive to lateral accelerations of the proofmass by making the accelerometer axially symmetric. Two axially-asymmetric acceleration sensing devices are axially engaged in such a manner as to render the coupled sensing devices substantially axially-symmetric. In some embodiments, each acceleration sensor has an axially-thin membrane portion extending from a proofmass portion. The two acceleration sensors can be engaged in an antiparallel fashion at projecting ends of the proofmass portions. An engagement surface will be located about halfway between the axially-thin membrane portions of the two acceleration sensors, thereby causing mechanical symmetry about the engagement surface.

    MEMS PEIZOELECTRIC ACCELEROMETER WITH BUILT-IN SELF TEST
    19.
    发明申请
    MEMS PEIZOELECTRIC ACCELEROMETER WITH BUILT-IN SELF TEST 审中-公开

    公开(公告)号：US20170205440A1

    公开(公告)日：2017-07-20

    申请号：US15000838

    申请日：2016-01-19

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang ,  Cuong Tho Huynh ,  James Joseph McTighe

    IPC: G01P15/09 ,  G01P21/00

    CPC classification number: G01P15/09 ,  G01P15/0922 ,  G01P21/00

    Abstract: Apparatus and associated methods relate to an accelerometer having first and second piezoelectric transducers that are electrically isolated but mechanically coupled one to another via a coupling member. The first piezoelectric transducer is configured to induce a mechanical deformation of the coupling member in response to an electrical excitation signal received by the first piezoelectric transducer. The second piezoelectric transducer is configured to generate an electrical response signal in response to mechanical deformation of the coupling member. The accelerometer has a self-test module configured to generate the electrical excitation signal and to receive the electrical response signal. The self-test module is further configured to generate a sensor test result based upon a comparison between the received electrical response signal and a reference signal. The self-test module may advantageously detect changes in an excitation/response relation due to time and/or environmental conditions, for example.

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