公开(公告)号：US09383577B2

公开(公告)日：2016-07-05

申请号：US14403308

申请日：2013-10-11

Applicant: KOREA OPTRON CORP.

Inventor： Kyungsu Kim ,  Junil Kim ,  Jonghyun Lee ,  Seunghwan Moon

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B3/0048 ,  B81B2201/033 ,  G02B26/105 ,  G03B21/008 ,  H02N1/008 ,  H04N3/08

Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.

Abstract translation: 微机电系统（MEMS）扫描器技术领域本发明涉及一种微机电系统（MEMS）扫描器，更具体地说，涉及一种MEMS扫描器，用于在使用MEMS工艺增加固定电极和驱动电极之间的驱动角的同时实现稳定的驱动。 MEM扫描器包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。

公开(公告)号：US20160152202A1

公开(公告)日：2016-06-02

申请号：US14948503

申请日：2015-11-23

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Ville-Pekka RYTKÖNEN ,  Matti LIUKKU

IPC: B60R21/01 ,  G01P15/13

CPC classification number: B60R21/01 ,  B60R2021/01286 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2203/0154 ,  B81B2203/0163 ,  B81B2207/015 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01P2015/0817

Abstract: The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame, a substrate, a proof-mass a spring connected to the proof-mass and to the substrate, and comb electrodes. The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame. The semiconductor package of the invention comprises at least one MEMS sensor.

Abstract translation: 本发明的MEMS传感器具有用于在与弹簧轴线垂直的平面内的方向上测量旋转模式的加速度的可移动和固定部件。 这些部件包括元件框架，基板，连接到检验块和基板的校准质量弹簧和梳状电极。 MEMS传感器的主要特征在于组件的布置，导致在覆盖纵向和横向加速度的范围内测量加速度的固有灵敏度。 与元件框架相比，一个或多个部件倾斜。 本发明的半导体封装包括至少一个MEMS传感器。

公开(公告)号：US09200689B2

公开(公告)日：2015-12-01

申请号：US13586444

申请日：2012-08-15

Applicant: Shorya Awtar ,  Siddharth Sood ,  Mohammad Olfatnia

Inventor： Shorya Awtar ,  Siddharth Sood ,  Mohammad Olfatnia

IPC: F16F1/00 ,  B81B3/00

CPC classification number: F16F1/00 ,  B81B3/0051 ,  B81B2201/033

Abstract: Flexure bearing systems and configurations guide translational motion along a single-axis in micro and macro applications such as micro-electro-mechanical system (MEMS) devices including sensors and actuators like electrostatic comb-drive actuators. The flexure bearing systems and configurations described herein provide an improved constraint against movement (i.e., stiffness) of the primary mover in non-motion axes such as a bearing axis.

Abstract translation: 挠性轴承系统和结构在微型和宏观应用中沿单轴引导平移运动，如微机电系统（MEMS）设备，包括传感器和执行器，如静电梳驱动执行器。 本文所述的挠曲轴承系统和构造提供了在诸如轴承轴线的非运动轴线中抵抗原动机的运动（即，刚度）的改进的限制。

公开(公告)号：US09195054B2

公开(公告)日：2015-11-24

申请号：US13124468

申请日：2009-08-24

Applicant: Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

Inventor： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC: H02N1/06 ,  G02B26/08 ,  B81B3/00 ,  H02N1/00

CPC classification number: G02B26/0833 ,  B81B3/004 ,  B81B2201/033 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/006

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract translation: 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。

公开(公告)号：US20150323323A1

公开(公告)日：2015-11-12

申请号：US14694208

申请日：2015-04-23

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Anssi BLOMQVIST

IPC: G01C19/5712

CPC classification number: G01C19/5762 ,  B81B2201/0242 ,  B81B2201/033 ,  G01C19/5712 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion. A drive element is suspended for one-dimensional motion in a direction of a drive axis, and a sense body carries one or more sense rotor electrodes and is coupled to the drive element with a first directional spring structure that forces the sense body to move with the drive element and has a preferred direction of motion in a direction of a sense axis. The drive element includes an actuation body and a drive frame wherein the first spring structure couples the sense body directionally to the drive frame, and a second directional spring structure that couples the drive frame to the actuation body and has a preferred direction of motion in the direction of the sense axis.

Abstract translation: 一种用于检测角运动轴线的角运动的微机电陀螺仪结构。 驱动元件悬挂在驱动轴的方向上进行一维运动，并且感测体携带一个或多个感测转子电极，并且以第一定向弹簧结构联接到驱动元件，第一定向弹簧结构迫使感测体与 驱动元件并且在感测轴的方向上具有优选的运动方向。 驱动元件包括致动体和驱动框架，其中第一弹簧结构将感测体定向地耦合到驱动框架，以及第二定向弹簧结构，其将驱动框架联接到致动体并且具有优选的运动方向 感应轴的方向。

公开(公告)号：US08770050B2

公开(公告)日：2014-07-08

申请号：US11378596

申请日：2006-03-17

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01N33/00

CPC classification number: G01N27/22 ,  B81B2201/033 ,  B81C99/003

Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.

Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微型和纳米级，因为它利用了刻度尺的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量一个或多个测试结构的电容变化，电压变化和/或谐振频率，可以以比常规方法更高的精度和精度提取多个几何，动态和材料特性。

公开(公告)号：US08755556B2

公开(公告)日：2014-06-17

申请号：US13122464

申请日：2009-10-01

Applicant: Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

Inventor： Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

IPC: H04R1/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/033 ,  B81B2203/053 ,  H02N1/006 ,  H04R1/005 ,  H04R1/403 ,  H04R3/002 ,  H04R3/007 ,  H04R3/12 ,  H04R7/18 ,  H04R19/02 ,  H04R31/00 ,  H04R2201/401

Abstract: Actuator apparatus comprising at least one moving elements, each comprising comb drive apparatus including at least first and second comb elements at least one of which is free to be in motion in a medium, and a controller controlling the motion responsive to an input signal representing a desired sound.

Abstract translation: 致动器装置包括至少一个移动元件，每个移动元件包括梳状驱动装置，其至少包括第一和第二梳状元件，其中至少一个可以在介质中自由运动;以及控制器，响应于表示 所需的声音。

公开(公告)号：US08755106B2

公开(公告)日：2014-06-17

申请号：US13377030

申请日：2009-06-11

Applicant: Qingxin Zhang ,  Yu Du ,  Chee Wei Tan

Inventor： Qingxin Zhang ,  Yu Du ,  Chee Wei Tan

IPC: G02B26/00 ,  H01H71/00 ,  H01H61/00 ,  H01H51/00

CPC classification number: B81B3/0054 ,  B81B2201/033 ,  B81B2201/047 ,  G02B6/4204 ,  G02B6/4226 ,  G02B6/4236 ,  G02B26/0833 ,  G02B26/0866

Abstract: A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.

Abstract translation: 提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。 定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。 所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。 锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。 第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

公开(公告)号：US08526098B2

公开(公告)日：2013-09-03

申请号：US12669333

申请日：2008-07-10

Applicant: Ulrich Hofmann ,  Hans-Joachim Quenzer ,  Marten Oldsen

Inventor： Ulrich Hofmann ,  Hans-Joachim Quenzer ,  Marten Oldsen

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/033 ,  B81B2201/042 ,  G02B26/105

Abstract: The invention relates to a microsystem having at least one micromirror (1) and at least one micromirror actuator (2) for pivoting the at least one micromirror (1) about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover (3) disposed on the frame chip, wherein the frame chip has a chip frame (10), on which the at least one micromirror (1) is articulated in an elastically pivoting manner, wherein the at least one micromirror (1) is further disposed within the chip frame (10) and in a cavity (11) that is formed between the transparent cover (3) and a carrier layer. To this end, the at least one micromirror (1) is articulated on a frame (14) pivotally about the at least one axis, the frame (14) in turn being pivotally articulated on the chip frame (10), wherein the frame (14) is permanently pivoted out of a chip plane defined by the carrier layer such that the micromirror (1) in the resting position thereof is tilted about a non-pivoting angle relative to the chip plane. The invention further relates to a method for the production of such a microsystem.

Abstract translation: 本发明涉及一种具有至少一个微反射镜（1）和至少一个微反射镜致动器（2）的微系统，用于将至少一个微反射镜（1）从松弛的静止位置绕至少一个轴线枢转，包括框架芯片和 透明盖（3），其中所述框架芯片具有芯片框架（10），所述至少一个微镜（1）以弹性枢转的方式铰接在所述芯片框架（10）上，其中所述至少一个微镜（1） 进一步设置在所述芯片框架（10）内并且形成在所述透明盖（3）和载体层之间的空腔（11）中。 为此，所述至少一个微镜（1）铰接在围绕所述至少一个轴线枢转的框架（14）上，所述框架（14）依次被枢转地铰接在所述芯片框架（10）上，其中所述框架 14）从由载体层限定的切屑平面永久地枢转，使得其静止位置中的微镜（1）相对于切屑平面倾斜不转动的角度。 本发明还涉及一种用于生产这种微系统的方法。

公开(公告)号：US08497619B2

公开(公告)日：2013-07-30

申请号：US12761621

申请日：2010-04-16

Applicant: Mostafa Medhat ,  Yasseen Nada ,  Bassem Mortada ,  Bassam A. Saadany

Inventor： Mostafa Medhat ,  Yasseen Nada ,  Bassem Mortada ,  Bassam A. Saadany

IPC: H02N1/00 ,  H01L41/04

CPC classification number: B81B3/0051 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H02N1/008 ,  Y10T74/20558

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物，其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配，并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。