Wafer thickness, topography, and layer thickness metrology system

    公开(公告)号:US11885609B2

    公开(公告)日:2024-01-30

    申请号:US17532308

    申请日:2021-11-22

    CPC classification number: G01B11/06 G01J3/0218 G01J3/42

    Abstract: The invention describes a metrology system allowing for the reduction of the errors caused by vibration of the production floor and allowing for measurements of the thickness of wafers in motion. This is accomplished by performing simultaneous measurements of spectra containing interference signals containing distance information using a plurality of probes positioned on both sides of the measured wafer on the same detector at the same time or by means of plurality of synchronized detectors. System is also able to measure thickness of the individual optically accessible layers present in the sample.

    Sensor device and method of use
    15.
    发明授权

    公开(公告)号:US11852531B2

    公开(公告)日:2023-12-26

    申请号:US17663256

    申请日:2022-05-13

    CPC classification number: G01J3/027 G01J3/0229 G01J3/42 G01S17/08

    Abstract: A device may determine a time-of-flight measurement by performing a sample of a sensor based on light received via at least one first spectral filter, wherein the at least one first spectral filter is associated with a spectral range for a time-of-flight measurement; determine that a condition is satisfied with regard to the time-of-flight measurement, wherein the condition relates to an orientation or a position of the sensor or the sensor device relative to a measurement target; trigger a spectrometry measurement to be performed based on determining that the condition is satisfied with regard to the time-of-flight measurement; and perform, based on light received via at least one second spectral filter and by performing a sample of the sensor, the spectrometry measurement for the measurement target based on the condition being satisfied with regard to the time-of-flight measurement.

    CONCEALMENT COMPONENT FOR AN OPTICAL SENSOR DEVICE

    公开(公告)号:US20230314213A1

    公开(公告)日:2023-10-05

    申请号:US17657233

    申请日:2022-03-30

    CPC classification number: G01J3/0205 G01J3/42 G02B5/201 G01J2003/1213

    Abstract: A concealment component for an optical sensor device includes an optical filter and one or more diffusive optical structures. The one or more diffusive optical structures are configured to distribute light in a diffused pattern on an input surface of the optical filter. The optical filter is configured to pass a first set of light beams, of the light distributed in the diffused pattern on the input surface of the optical filter, that are associated with a particular wavelength range, and prevent a second set of light beams, of the light distributed in the diffused pattern on the input surface of the optical filter, that are not associated with the particular wavelength range, from passing. Preventing the second set of light beams from passing is to cause the second set of light beams to be directed away from or absorbed by the concealment component in a concealment pattern.

    System, apparatus and methods for detecting methane leak

    公开(公告)号:US11774355B1

    公开(公告)日:2023-10-03

    申请号:US17161814

    申请日:2021-01-29

    CPC classification number: G01N21/3504 G01J3/42 G08B21/14 G01J2003/421

    Abstract: A methane alert station for detecting methane gas in an environment. The methane alert station comprises a casing, at least one window opening formed in the casing, a infrared transmitting window disposed in the at least one window opening, an infrared light source disposed adjacent to the infrared transmitting window, a hyperbolic mirror disposed in the casing coaxially with a central axis, a Winston cone disposed coaxially with the central axis and spaced from the hyperbolic mirror along the central axis, and a filter-detector arranged coaxially with the central axis and so that the Winston cone is disposed between the hyperbolic mirror and the filter-detector. The infrared light source is configured to emit an outgoing infrared light from the casing. The filter-detector is configured to measure a methane gas concentration in the environment by measuring an absorption of infrared radiation of the methane gas at specific wavelength bandwidths.

    Apparatus and method for quantitative detection of gases

    公开(公告)号:US11761887B2

    公开(公告)日:2023-09-19

    申请号:US17418223

    申请日:2020-04-23

    Abstract: An apparatus and a method for quantitative detection of gases are provided. The apparatus for quantitative detection of gases includes: a cavity ring-down spectroscopy device configured to quantitatively detect any characteristic gas in gases to be detected; a sample processing device disposed in a downstream of the cavity ring-down spectroscopy device and connected to the cavity ring-down spectroscopy device; and a mass spectrometry device disposed in a downstream of the sample processing device and configured to detect all the gases to be detected. Quantitative analysis of any variety of gases may be achieved without using standard gas in the technical solution proposed by the present application. Since no standard gas is required, the technology has significantly increased flexibility, and can be used for routine laboratory testing, for online analysis at industrial sites, as well as detection and analysis in environmental protection, national defense, aviation, aerospace, military and other fields.

Patent Agency Ranking