公开(公告)号：US20060108544A1

公开(公告)日：2006-05-25

申请号：US10995836

申请日：2004-11-23

Applicant: Steven Richards ,  Julian Blake ,  Steven Campbell

Inventor： Steven Richards ,  Julian Blake ,  Steven Campbell

IPC: H01J37/08

CPC classification number: H01J37/241 ,  H01J37/304 ,  H01J2237/0203

Abstract: In one aspect, the present invention provides a method of managing fluctuations in power supplied to a semiconductor processing apparatus that includes monitoring the power supplied to the apparatus to detect the occurrence of a power fluctuation event during a semiconductor processing session. Upon detection of a power fluctuation event, the semiconductor processing can be interrupted. After the end of the power fluctuation event, at least one operational parameter of the apparatus, e.g., vacuum level in an evacuated processing chamber, can be measured, and the semiconductor processing can be resumed when the measured operational parameter is within an acceptable range. The measured operational parameter can preferably include a parameter that recovers more slowly than others when adversely affected by a power fluctuation event.

Abstract translation: 一方面，本发明提供了一种管理提供给半导体处理装置的功率波动的方法，该方法包括监视提供给该装置的功率，以检测半导体处理会话期间发生功率波动事件。 在检测到功率波动事件时，可以中断半导体处理。 在功率波动事件结束之后，可以测量设备的至少一个操作参数，例如真空处理室中的真空度，并且当测量的操作参数在可接受的范围内时，可以恢复半导体处理。 测量的操作参数可以优选地包括当受到功率波动事件的不利影响时，比其他参数恢复得更慢的参数。

公开(公告)号：US20050218777A1

公开(公告)日：2005-10-06

申请号：US11137445

申请日：2005-05-26

Applicant: Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

Inventor： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

IPC: H01J37/06 ,  G09G1/04 ,  H01J37/065 ,  H01J37/24 ,  H01J37/248 ,  H01L21/027 ,  H05B39/04

CPC classification number: H01J37/241 ,  H01J2237/0206

Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.

公开(公告)号：US06320319B1

公开(公告)日：2001-11-20

申请号：US09461219

申请日：1999-12-16

Applicant: Toshimichi Iwai ,  Takayuki Nakamura ,  Akira Kintaka

Inventor： Toshimichi Iwai ,  Takayuki Nakamura ,  Akira Kintaka

IPC: H05B4136

CPC classification number: H01J37/241

Abstract: A charged particle generating apparatus including a first electrode, a second electrode, a current source supplying a current to the first electrode for heating the first electrode and a voltage source for generating an attraction voltage for generation of an electric field between the first electrode and the second electrode. The first electrode discharges charged particles as a result of the generation of the electric field between the first electrode and the second electrode. The apparatus further includes a heat current measurement unit for measuring the current for heating the first electrode, an electrode current measurement unit for measuring electrode current flowing through the second electrode in accordance with an amount of the charged particles discharged from the first electrode to the second electrode, and a power supply shut-down circuit for terminating at least one of the supply of the current for heating the first electrode and the generation of the attraction voltage based on the current measured by the heat current measurement unit or the electrode current measured by the electrode current measurement unit.

Abstract translation: 一种带电粒子产生装置，包括第一电极，第二电极，向第一电极提供电流以加热第一电极的电流源和用于产生用于在第一电极和第二电极之间产生电场的吸引电压的电压源 第二电极。 作为第一电极和第二电极之间的电场产生的结果，第一电极对带电粒子进行放电。 该装置还包括用于测量用于加热第一电极的电流的热电流测量单元，用于根据从第一电极排放到第二电极的带电粒子的量来测量流过第二电极的电极电流的电极电流测量单元 电极和电源关闭电路，用于终止用于加热第一电极的电流的供给中的至少一个和基于由热电流测量单元测量的电流或由电流测量单元测量的电极电流产生吸引电压 电极电流测量单元。

公开(公告)号：US5949078A

公开(公告)日：1999-09-07

申请号：US131368

申请日：1998-08-07

Applicant: Yoshihisa Ooaeh ,  Tomohiko Abe ,  Akio Yamada ,  Hiroshi Yasuda ,  Kenj Kudoh ,  Kouzi Takahata

Inventor： Yoshihisa Ooaeh ,  Tomohiko Abe ,  Akio Yamada ,  Hiroshi Yasuda ,  Kenj Kudoh ,  Kouzi Takahata

IPC: H01J37/07 ,  H01J37/065 ,  H01J37/24 ,  H01J37/30

CPC classification number: H01J37/241 ,  H01J37/065 ,  H01J2237/3175

Abstract: An electron gun for emitting an electron beam traveling along a beam axis includes a cathode having a tip, the tip having substantially a circular conic shape and a tip surface substantially at the beam axis, the cathode being applied with a first voltage, an anode having a first aperture substantially on the beam axis and being applied with a second voltage higher than the first voltage, a control electrode having a second aperture substantially on the beam axis and being applied with a voltage lower that the first voltage to control a current of the cathode, the second aperture being larger than the tip surface, a guide electrode having a third aperture substantially on the beam axis, being arranged between the cathode and the anode, and being applied with a voltage higher than the first voltage and lower than the second voltage, the third aperture being smaller than the tip surface, and a lens electrode having a fourth aperture substantially on the beam axis, being arranged between the guide electrode and the anode, and being applied with a voltage lower than the first voltage to form a cross-over image of the electron beam, the fourth aperture being larger than the third aperture.

Abstract translation: 用于发射沿着光束轴线行进的电子束的电子枪包括具有尖端的阴极，该尖端具有基本上圆形的圆锥形形状和基本上在光束轴线处的尖端表面，阴极被施加第一电压，阳极具有 基本上在所述光束轴上的第一孔，并且施加有高于所述第一电压的第二电压;控制电极，其具有基本上在所述光束轴上的第二孔，并施加低于所述第一电压以控制所述第一电压的电流 阴极，第二孔径大于尖端表面，具有基本上在梁轴上的第三孔的引导电极设置在阴极和阳极之间，并施加有比第一电压高的电压并且低于第二电压 电压，所述第三孔小于所述尖端表面，以及透镜电极，所述透镜电极具有基本上在所述光束轴上的第四孔 引导电极和阳极，并施加低于第一电压的电压以形成电子束的交叉图像，第四孔径大于第三孔径。

公开(公告)号：US5216690A

公开(公告)日：1993-06-01

申请号：US850686

申请日：1992-03-11

Applicant: Charles W. Hanks

Inventor： Charles W. Hanks

IPC: H01J37/077 ,  H01J37/06 ,  H01J37/065 ,  H01J37/24 ,  H01J37/248 ,  H01J37/305

CPC classification number: H01J37/241 ,  H01J37/248 ,  H01J2237/0203 ,  H01J2237/0206 ,  H01J2237/31

Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.

Abstract translation: 一种接地金属屏蔽，其包括在用于熔化和铸造金属和其它材料和蒸发源的类型的高真空室中包围电极枪的细丝引线和发射器的电极。 屏蔽层与灯丝引线和发射器间隔一定距离，用于在高真空室内使用的电子平均自由路径。 其结构及其使用方法抑制或消除掉弧或辉光放电。

公开(公告)号：US4315195A

公开(公告)日：1982-02-09

申请号：US147447

申请日：1980-05-07

Applicant: Karl-Georg Redel ,  Gerd Deppisch

Inventor： Karl-Georg Redel ,  Gerd Deppisch

IPC: H01J37/24 ,  H05B7/148 ,  H02H7/20

CPC classification number: H01J37/241

Abstract: A high-voltage power supply for an electron-beam gun with a heatable cathode and an anode and of the type having an electronic switch connected in the current circuit for the cathode and controllable for blocking the current to the cathode, includes an impulse protecting filter connected in the current circuit for the cathode. The filter comprises a capacitor connected in parallel to the cathode, a choke connected in series with the cathode current circuit, a blocking diode and a discharge resistor connected in series therewith, with the diode and resistor connected in parallel with the choke.

Abstract translation: 一种用于具有可加热阴极和阳极的电子束枪的高压电源，并且具有连接在用于阴极的电流电路中并且可控制用于阻断到阴极的电流的电子开关的类型的高压电源包括脉冲保护滤波器 连接在阴极的电流电路中。 滤波器包括与阴极并联连接的电容器，与阴极电流电路串联连接的扼流器，与串联连接的阻塞二极管和放电电阻器，二极管和电阻器与扼流器并联连接。

公开(公告)号：US4199689A

公开(公告)日：1980-04-22

申请号：US971043

申请日：1978-12-19

Applicant: Tadahiro Takigawa

Inventor： Tadahiro Takigawa

IPC: H01J37/24 ,  H01J37/30 ,  H01J37/00

CPC classification number: H01J37/241 ,  H01J37/3007

Abstract: The diameter of an electron beam at a crossover point can be set to a predetermined value by adjusting a heater current through a heater of an electron gun and a voltage between an emitter of the electron gun and wehnelt electrode. The diameter of the electron beam incident onto an object to be exposed can be varied by varying the diameter of the electron beam at the crossover point. This can be done without adjusting an electron beam lens and deflection electrode of an electron beam exposing apparatus. The diameter of the electron beam incident onto an object to be exposed can be set to a predetermined value dependent upon a pattern to be described.

Abstract translation: 通过调节通过电子枪的加热器的加热器电流和电子枪的发射极与电极之间的电压，可以将交叉点处的电子束的直径设定为预定值。 入射到待曝光物体上的电子束的直径可以通过在交叉点处改变电子束的直径来改变。 这可以在不调整电子束曝光装置的电子束透镜和偏转电极的情况下进行。 入射到待曝光物体上的电子束的直径可以根据要描述的图案设定为预定值。

公开(公告)号：US4058697A

公开(公告)日：1977-11-15

申请号：US628891

申请日：1975-11-03

Applicant: Boris Grigorievich Sokolov ,  Georgy Fomich Zaboronok

Inventor： Boris Grigorievich Sokolov ,  Georgy Fomich Zaboronok

IPC: B23K15/02 ,  H01J37/063 ,  H01J37/24

CPC classification number: H01J37/063 ,  B23K15/02 ,  H01J37/241

Abstract: An electron beam unit for heat treatment by the electron bombardment technique wherein the resistor for limiting the discharge current arising in the vacuum chamber between the cathode and the accelerating electrode of the electron beam gun is connected between the positive pole of the power supply and the accelerating electrode, the accelerating electrode being insulated from the material being processed by means of an insulator.

Abstract translation: 一种用于通过电子轰击技术进行热处理的电子束单元，其中用于限制在电子束枪的阴极和加速电极之间的真空室中产生的放电电流的电阻器连接在电源的正极和加速 电极，加速电极通过绝缘体与被加工的材料绝缘。

公开(公告)号：US3938001A

公开(公告)日：1976-02-10

申请号：US445955

申请日：1974-02-26

Applicant: Susumu Ota ,  Ryuzo Aihara

Inventor： Susumu Ota ,  Ryuzo Aihara

IPC: H01J37/073 ,  H01J37/24 ,  H01J37/248 ,  H01J29/70

CPC classification number: H01J37/241 ,  H01J37/073 ,  H01J37/248

Abstract: An electron gun comprising a changeover chamber and changeover circuit between the gun chamber and the insulated cable which connects the power supply circuits to the electrodes which enables adjustment of electrode potentials to accomplish electrode treatment without excessive gun currents.

Abstract translation: 一种电子枪，包括转换室和枪室和绝缘电缆之间的转换电路，其将电源电路连接到电极，其能够调节电极电位以在没有过多的枪电流的情况下实现电极处理。

公开(公告)号：US3909663A

公开(公告)日：1975-09-30

申请号：US47039574

申请日：1974-05-16

Applicant: LEYBOLD HERAEUS VERWALTUNG

Inventor： THOMAS FRIEDRICH WERNER ,  VOCK GERHARD

IPC: G05F1/44 ,  H01J37/24 ,  H05B7/02 ,  B23K15/00

CPC classification number: H01J37/241 ,  G05F1/44

Abstract: An arrangement for regulating the operating parameters of an electron beam generator in which the main cathode is indirectly heated by a directly-heated auxiliary cathode. A regulating circuit connected to the auxiliary cathode has three individual regulators connected in tandem for regulating the auxiliary cathode. Three separate signals corresponding to the accelerating voltage of the auxiliary cathode, the emission current of the auxiliary cathode, and the emission current of the main cathode are applied respectively to the inputs of the three individual regulators in feedback arrangement.

Abstract translation: 用于调节电子束发生器的操作参数的装置，其中主阴极由直接加热的辅助阴极间接加热。 连接到辅助阴极的调节电路具有串联连接用于调节辅助阴极的三个单独调节器。 对应于辅助阴极的加速电压，辅助阴极的发射电流和主阴极的发射电流的三个独立信号分别应用于反馈布置中的三个单独调节器的输入。