公开(公告)号：US07402821B2

公开(公告)日：2008-07-22

申请号：US11334265

申请日：2006-01-18

Applicant: David K. Bernhardt

Inventor： David K. Bernhardt

IPC: H01J37/317 ,  H05H9/00 ,  G21K5/10

CPC classification number: H01J37/3172 ,  H01J37/248 ,  H01J2237/2487 ,  H01J2237/30411

Abstract: An improved HE LINAC-based ion implantation system is disclosed utilizing direct digital synthesis (DDS) techniques to obtain precise frequency and phase control and automated electrode voltage phase calibration. The DDS controller may be used on a multi-stage linear accelerator based implanter to digitally synchronize the frequency and phase of the electric fields to each electrode within each stage of the accelerator. The DDS controller includes digital phase synthesis (DPS) circuits for modulating the phase of the electric field to the electrodes, and a master oscillator that uses digital frequency synthesis or DFS to digitally synthesize a master frequency and phase applied to each of the DPS circuits. Also disclosed are methods for automatically phase and amplitude calibrating the RF electrode voltages of the stages.

Abstract translation: 公开了一种改进的基于HE LINAC的离子注入系统，其利用直接数字合成（DDS）技术来获得精确的频率和相位控制以及自动电极电压相位校准。 DDS控制器可以用在基于多级线性加速器的注入器上，以将加速器的每个阶段内的电场的频率和相位数字地同步到每个电极。 DDS控制器包括用于调制电极相位的数字相位合成（DPS）电路，以及使用数字频率合成或DFS的主振荡器来数字地合成施加到每个DPS电路的主频率和相位。 还公开了用于自动相位和幅度校准级的RF电极电压的方法。

公开(公告)号：US20030234165A1

公开(公告)日：2003-12-25

申请号：US10176817

申请日：2002-06-21

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Edward D. Heller

IPC: H01H035/38

CPC classification number: H01J37/248 ,  H01J37/3171

Abstract: An electrical switch includes a tubular housing constructed substantially of a non-conductive material, a first electrical contact positioned at one end of the housing, a second electrical contact positioned at a second end of the housing, and a shuttle selectively displaceable within the housing between the first electrical contact and the second electrical contact. The shuttle is electrically connected to the first electrical contact. A spring mechanism positioned within the housing and connected to the shuttle biases the shuttle into a first position proximate the first electrical contact. The shuttle is displaceable into engagement with the second electrical contact by pressurized gas to establish an electrical connection between the first electrical contact and the second electrical contact. The disclosed switch may be employed to selectively ground the components of an ion implantation system and is particularly suitable for use in high-voltage environments.

Abstract translation: 电开关包括基本上由非导电材料构成的管状壳体，位于壳体的一端的第一电触点，位于壳体的第二端的第二电触点和位于壳体内的可选择性位移 第一电接触和第二电接触。 梭子电连接到第一电触头。 定位在壳体内并连接到梭的弹簧机构将梭子偏压到靠近第一电触头的第一位置。 梭子可移动地通过加压气体与第二电触头接合，以在第一电接触件和第二电触点之间形成电连接。 所公开的开关可用于选择性地研磨离子注入系统的组件，并且特别适用于高压环境。

公开(公告)号：US06252339B1

公开(公告)日：2001-06-26

申请号：US09156544

申请日：1998-09-17

Applicant: Rodney Arthur Kendall

Inventor： Rodney Arthur Kendall

IPC: H01J100

CPC classification number: H01J5/52 ,  H01J9/50 ,  H01J37/248 ,  Y02W30/828

Abstract: This method and apparatus permit installing and removing an electron beam generating element comprising a filament or a cathode in a rapidly replaceable module. The apparatus is an electron gun system having an electron gun enclosure, a feed-through element extending through the electron gun enclosure, an electron beam generating element housed within a filament module housing and connected to the feed-through element, an electron gun column and a connector port in the gun enclosure for direct removal and replacement of the filament. The feed-through element and the filament module housing are removed, through the connector port, from the gun enclosure and then the filament is removed and replaced. A load-lock is provided above the connector port to avoid venting into the gun. A bellows can be used to facilitate removal of the gun with minimal exposure to ambient atmospheric gases.

Abstract translation: 该方法和装置允许在可快速更换的模块中安装和去除包括灯丝或阴极的电子束产生元件。 该装置是具有电子枪外壳的电子枪系统，延伸穿过电子枪外壳的馈通元件，容纳在灯丝模组外壳内并连接到馈通元件的电子束产生元件，电子枪柱和 枪壳中的连接器端口用于直接移除和更换灯丝。 穿通元件和灯丝模块外壳通过连接器端口从枪壳中移除，然后将灯丝拆下并更换。 在连接器端口上方设有一个装载锁，以避免排放到枪内。 可以使用波纹管，以最小限度地暴露于环境大气中的气体去除喷枪。

公开(公告)号：US5216690A

公开(公告)日：1993-06-01

申请号：US850686

申请日：1992-03-11

Applicant: Charles W. Hanks

Inventor： Charles W. Hanks

IPC: H01J37/077 ,  H01J37/06 ,  H01J37/065 ,  H01J37/24 ,  H01J37/248 ,  H01J37/305

CPC classification number: H01J37/241 ,  H01J37/248 ,  H01J2237/0203 ,  H01J2237/0206 ,  H01J2237/31

Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.

Abstract translation: 一种接地金属屏蔽，其包括在用于熔化和铸造金属和其它材料和蒸发源的类型的高真空室中包围电极枪的细丝引线和发射器的电极。 屏蔽层与灯丝引线和发射器间隔一定距离，用于在高真空室内使用的电子平均自由路径。 其结构及其使用方法抑制或消除掉弧或辉光放电。

公开(公告)号：US5134339A

公开(公告)日：1992-07-28

申请号：US704175

申请日：1991-05-22

Applicant: Dietrich Hoffmeister ,  Johannes Bihr ,  Harald Niebel

Inventor： Dietrich Hoffmeister ,  Johannes Bihr ,  Harald Niebel

IPC: H01J37/06 ,  H01J37/248

CPC classification number: H01J37/248

Abstract: The invention is directed to a high-voltage lead-through arrangement for introducing a high voltage into an enclosure wherein a vacuum is maintained such as for particle-beam apparatus. The arrangement includes: a high-voltage electrode for carrying a high potential; an insulator enclosing the high-voltage electrode and having a surface defining a boundary with the vacuum; and, an outer low-voltage electrode surrounding the insulator for carrying a low potential. The electrodes are spaced from each other by an electrode spacing measured along the surface of the insulator. The high-voltage electrode and the insulator conjointly define a first region wherein the high potential is present to a good approximation; and the first region is bounded by the insulator surface for a first distance of up to approximately 1/10 of the electrode spacing. The low-voltage electrode and the insulator conjointly define a second region wherein the low potential is present to a good approximation and the second region is bounded by the insulator surface for a second distance of up to approximately 1/10 of the electrode spacing. With this arrangement, the high-voltage lead-through can be operated at a higher voltage than the known configurations without the occurrence of micro-discharges.

Abstract translation: 本发明涉及一种用于将高电压引入外壳中的高压导通装置，其中保持诸如用于粒子束装置的真空。 该装置包括：用于承载高电位的高压电极; 封闭高压电极并具有限定与真空边界的表面的绝缘体; 以及包围用于承载低电位的绝缘体的外部低压电极。 电极通过沿着绝缘体的表面测量的电极间隔彼此间隔开。 高压电极和绝缘体共同限定了第一区域，其中存在高电位以获得良好的近似值; 并且第一区域由绝缘体表面限定高达电极间距的大约1/10的第一距离。 低电压电极和绝缘体共同限定了第二区域，其中存在低电位以达到良好的近似值，而第二区域由绝缘体表面限定高达电极间距的大约1/10的第二距离。 通过这种布置，高电压导通可以以比已知构造更高的电压工作，而不会发生微放电。

公开(公告)号：US5118991A

公开(公告)日：1992-06-02

申请号：US579792

申请日：1990-09-10

Applicant: Dieter Fritz ,  Wolfgang Schwarz

Inventor： Dieter Fritz ,  Wolfgang Schwarz

IPC: H01J37/248 ,  H02H7/00

CPC classification number: H01J37/248 ,  H02H7/00

Abstract: In an electron beam generator where the heating current for the cathode is transformed by an insulating transformer 7 disposed on the high-voltage insulator 4 of the beam head, the primary winding of this insulating transformer 7 being connected to ground potential, and where a single-pole high-voltage connection 2 and a single-pole high-voltage cable 2 connect the beam head 3 to a high-voltage generator 1, the high-voltage cable 2, at its terminal ends, has a protective resistor 10 corresponding to the surge impedance of the high-voltage cable 2 in order to reduce the damages to insulating and component parts.

Abstract translation: 在通过设置在光束头的高压绝缘体4上的绝缘变压器7使阴极的加热电流变换的电子束发生器中，该绝缘变压器7的初级绕组连接到地电位，并且其中单个 杆高压连接2和单极高压电缆2将光束头3连接到高压发生器1，高压电缆2在其末端具有对应于高压发生器1的保护电阻器10 为了减少对绝缘和部件的损坏，高压电缆2的浪涌阻抗。

公开(公告)号：US4998004A

公开(公告)日：1991-03-05

申请号：US386222

申请日：1989-07-28

Applicant: Glen S. Lawrence ,  Timothy J. Haynie ,  Joseph D. Farrario

Inventor： Glen S. Lawrence ,  Timothy J. Haynie ,  Joseph D. Farrario

IPC: H01J37/06 ,  B23K15/00 ,  H01J37/065 ,  H01J37/248 ,  H01J37/315

CPC classification number: B23K15/00 ,  H01J37/248

Abstract: An improvement in high power electron beam guns including a non-inductive high-voltage cable for supplying power to the gun having barriers for preventing air leakage from inside the cable into the vacuum chamber. The gun includes a support for its cathode and filament, which transmits heat developed in these elements to a heat sink so that dimensional accuracy is maintained in the electron beam generating elements. Provision is made for quick release of cable terminations from the gun receptacle and for maintaining a given pressure in insulating grease placed between mating sufaces of plugs and receptacles.

公开(公告)号：US4454453A

公开(公告)日：1984-06-12

申请号：US386529

申请日：1982-06-09

Applicant: Toru Sugawara

Inventor： Toru Sugawara

IPC: G21K1/00 ,  G21K1/04 ,  H01J3/04 ,  H01J27/08 ,  H01J37/08 ,  H01J37/248 ,  H05H5/00 ,  H05B41/36 ,  H01J27/02

CPC classification number: H01J27/08 ,  H01J37/248

Abstract: The invention provides a power source device for an ion source, including first to third power source units coupled to the anode, the cathode and the beam extraction electrode of the ion source. The second power source unit applies an alternating voltage across the cathode. An alternating heating current then flows through the cathode. Each cycle of the alternating voltage from the second power source unit has positive and negative components with preset levels which are generated with a predetermined time interval between them. The power source device further includes a control circuit for interrupting the operation of the first and third power source units during the predetermined time interval.

Abstract translation: 本发明提供了一种用于离子源的电源装置，包括耦合到阳极的第一至第三电源单元，离子源的阴极和光束提取电极。 第二电源单元跨越阴极施加交流电压。 然后交替的加热电流流过阴极。 来自第二电源单元的交流电压的每个周期具有正和负分量，其中预设电平以它们之间的预定时间间隔产生。 电源装置还包括用于在预定时间间隔期间中断第一和第三电源单元的操作的控制电路。

公开(公告)号：US3938001A

公开(公告)日：1976-02-10

申请号：US445955

申请日：1974-02-26

Applicant: Susumu Ota ,  Ryuzo Aihara

Inventor： Susumu Ota ,  Ryuzo Aihara

IPC: H01J37/073 ,  H01J37/24 ,  H01J37/248 ,  H01J29/70

CPC classification number: H01J37/241 ,  H01J37/073 ,  H01J37/248

Abstract: An electron gun comprising a changeover chamber and changeover circuit between the gun chamber and the insulated cable which connects the power supply circuits to the electrodes which enables adjustment of electrode potentials to accomplish electrode treatment without excessive gun currents.

Abstract translation: 一种电子枪，包括转换室和枪室和绝缘电缆之间的转换电路，其将电源电路连接到电极，其能够调节电极电位以在没有过多的枪电流的情况下实现电极处理。

公开(公告)号：US3515976A

公开(公告)日：1970-06-02

申请号：US3515976D

申请日：1968-06-10

Applicant: COMP GENERALE ELECTRICITE

Inventor： HURET JEROME ,  CHEVALIER MICHEL ,  ROCHEROLLES RAYMOND

IPC: H02M7/04 ,  H01G2/00 ,  H01J37/02 ,  H01J37/16 ,  H01J37/248 ,  H02M7/10 ,  H02M7/00 ,  H02J7/00

CPC classification number: H01G2/00 ,  H01J37/02 ,  H01J37/026 ,  H01J37/16 ,  H01J37/248 ,  H02M7/10 ,  H02M7/106