公开(公告)号：US5824567A

公开(公告)日：1998-10-20

申请号：US679382

申请日：1996-07-09

Applicant: Ishiang Shih ,  Linh Ngo Phong ,  Cindy Xing Qiu ,  Philips Laou

Inventor： Ishiang Shih ,  Linh Ngo Phong ,  Cindy Xing Qiu ,  Philips Laou

IPC: G01J1/02 ,  G01J1/42 ,  G01J3/26 ,  G01J9/00 ,  H01L21/00 ,  H01L31/02 ,  H01L31/0232 ,  H01L31/0352 ,  H01L31/108 ,  H01L31/18

CPC classification number: G01J3/26 ,  G01J1/02 ,  G01J1/0204 ,  G01J1/4228 ,  G01J9/00 ,  H01L31/02024 ,  H01L31/0232 ,  H01L31/03529 ,  H01L31/1085 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Methods for wavelength determination of a monochromatic beam are described. The methods involve a detector unit containing at least one variable filter and at least one pair of photo detectors. The detectors have photo sensitive regions with their areas varying with the position in one direction. The wavelength for maximum transmission of the variable filter varies in the same direction. By comparing the photo current values from the two detectors, wavelength of the incident beam is determined. Methods to construct wavelength discrimination junction photo detector pair and double barrier photo detector pair are also given.

Abstract translation: 描述了用于单色光束的波长确定的方法。 所述方法涉及包含至少一个可变滤波器和至少一对光电检测器的检测器单元。 检测器具有光敏区域，其区域随着一个方向的位置而变化。 可变滤波器的最大传输波长在相同方向上变化。 通过比较来自两个检测器的光电流值，确定入射光束的波长。 还给出了构建波长鉴别结光电检测器对和双屏障光电探测器对的方法。

公开(公告)号：US5798859A

公开(公告)日：1998-08-25

申请号：US666229

申请日：1996-06-20

Applicant: Paul Colbourne ,  Joseph Ip ,  Neil Teitelbaum

Inventor： Paul Colbourne ,  Joseph Ip ,  Neil Teitelbaum

IPC: G01J3/26 ,  G01J9/02 ,  G02B27/14 ,  G02F1/21 ,  H01S3/13 ,  H01S3/139 ,  H01S5/0687 ,  G02F1/03 ,  G01B9/02

CPC classification number: G02B27/144 ,  G01J3/0259 ,  G01J3/26 ,  G01J9/0246 ,  G02B27/145 ,  G02F1/21 ,  H01S3/13 ,  H01S3/1392 ,  H01S5/0687 ,  H01S3/1305

Abstract: A method and device for wavelength locking is provided, wherein an element having a wavelength dependent characteristic such as a Fabry Perot etalon is used to provide an output signal having an intensity that varies with wavelength. The intensity of a reference signal derived from an input signal is compared with an output from the Fabry Perot etalon to provide a feedback signal that corresponds to the frequency of the input signal. The system is calibrated before wavelength locking is performed to determine a ratio of intensities that determines a locked state or condition.

Abstract translation: 提供了一种用于波长锁定的方法和装置，其中使用诸如法布里珀罗标准具的波长相关特性的元件来提供具有随波长变化的强度的输出信号。 将从输入信号导出的参考信号的强度与法布里珀罗标准具的输出进行比较，以提供对应于输入信号的频率的反馈信号。 在执行波长锁定之前校准系统以确定确定锁定状态或状况的强度比。

公开(公告)号：US5784507A

公开(公告)日：1998-07-21

申请号：US312286

申请日：1994-04-26

Applicant: James W. Holm-Kennedy ,  Koon Wing Tsang ,  Datong Yang

Inventor： James W. Holm-Kennedy ,  Koon Wing Tsang ,  Datong Yang

IPC: G01J3/26 ,  G02B6/12 ,  G02B6/122 ,  G02B6/293

CPC classification number: G02B6/12007 ,  G01J3/0259 ,  G01J3/26 ,  G02B6/1228 ,  G01J3/0256 ,  G02B2006/12109 ,  G02B2006/12173 ,  G02B2006/12195

Abstract: A top incident spectrometer includes a first distributed wavelength wedge filter region of order n.sub.1 that discriminates incoming radiation as a function of wedge location, at least one second wedge region order n.sub.2 (which region may be a graded dielectric film), and an underlying detector array. In another embodiment, a second dielectric wedge element includes a Fabrey-Perot etalon, a wedge dielectric film, or a graded index film matching the second dielectric wedge region to an underlying substrate. One or more slopes associated with wedge elements may also be varied to alter filter characteristics. Spatial characteristics may further be modified by including a dielectric material whose dielectric constant varies as a function of location. Wedge filter crosstalk is minimized by partitioning a wedge dielectric region in the lateral dimension. Another embodiment provides an edge incident spectrometer including an optical waveguide or thin film structure whose spatial optical impedance varies as a function of position. Outcoupling of optical radiation occurs as a function of wavelength along the spectrometer propagation direction. Outcoupling of optical radiation may also be made to overlying structures, or to regions within a common, preferably solid state, structure. Wedge structures may further be combined to intentionally create gaps in the spectral transmission for a filter structure. A shadow masking fabricates thin film elements having spatially varying features. A material is deposited onto a substrate using an edge to provide a shadow mask affecting the deposition stream.

Abstract translation: 顶部入射光谱仪包括第n阶n阶第一分布波长楔形滤波器区域，其区分作为楔形位置的函数的入射辐射，至少一个第二楔形区域阶数n2（该区域可以是渐变电介质膜）和底层检测器阵列 。 在另一个实施例中，第二介电楔形元件包括Fabrey-Perot标准具，楔形电介质膜或将第二介电楔形区域与下面的衬底相匹配的渐变折射率膜。 与楔形元件相关联的一个或多个斜面也可以改变以改变滤波器特性。 通过包括其介电常数随着位置的函数而变化的介电材料可以进一步修改空间特性。 楔形滤波器串扰通过在侧向尺寸上划分楔形电介质区域来最小化。 另一个实施例提供了一种边缘入射光谱仪，其包括光学波导或薄膜结构，其空间光阻抗随着位置的变化而变化。 光辐射的外耦合作为沿着光谱仪传播方向的波长的函数发生。 光辐射的外耦合也可以制成覆盖的结构或共同的，优选固态的结构中的区域。 楔形结构可以进一步组合以有意地在滤波器结构的频谱传输中产生间隙。 阴影掩模制造具有空间变化特征的薄膜元件。 使用边缘将材料沉积到基底上，以提供影响沉积流的荫罩。

公开(公告)号：US5784162A

公开(公告)日：1998-07-21

申请号：US571047

申请日：1995-12-12

Applicant: Dario Cabib ,  Robert A. Buckwald ,  Zvi Malik ,  Yuval Garini ,  Nir Katzir ,  Dirk G. Soeknsen

Inventor： Dario Cabib ,  Robert A. Buckwald ,  Zvi Malik ,  Yuval Garini ,  Nir Katzir ,  Dirk G. Soeknsen

IPC: G01B11/00 ,  A61B3/00 ,  A61B3/12 ,  A61B5/00 ,  A61B10/00 ,  C12Q1/68 ,  G01J3/02 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/44 ,  G01J3/443 ,  G01J3/45 ,  G01J3/453 ,  G01N21/27 ,  G01N21/64 ,  G01N33/48 ,  G01N33/483 ,  G01N33/50 ,  G01N33/569 ,  G01N33/58 ,  G02B21/36 ,  G06K9/00 ,  G06K9/76 ,  G01B9/02

CPC classification number: G01N21/6458 ,  C12Q1/6841 ,  C12Q1/6883 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/4406 ,  G01J3/453 ,  G01N21/6428 ,  G01N21/6486 ,  G01N33/5005 ,  G01N33/56966 ,  G01N33/582 ,  G06K9/00127 ,  G06K9/76 ,  G01J2003/2866 ,  G01J3/02 ,  G01N2021/6417 ,  G01N2021/6423

Abstract: According to the present invention there are provided spectral imaging methods for biological research, medical diagnostics and therapy comprising the steps of (a) preparing a sample to be spectrally imaged; (b) viewing the sample through an optical device, the optical device being optically connected to an imaging spectrometer, the optical device and the imaging spectrometer obtaining a spectrum of each pixel of the sample by: (i) collecting incident light simultaneously from all pixels of the sample using collimating optics; (ii) passing the incident collimated light through an interferometer system having a number of elements, to form an exiting light beam; (iii) passing the exiting light beam through a focusing optical system which focuses the exiting light beam on a detector having a two-dimensional array of detector elements, so that at each instant each of the detector elements is the image of one pixel of the sample, so that the real image of the sample is stationary on the plane of the detector array, and so that each of the detector elements produces a signal which is a particular linear combination of light intensity emitted by the pixel at different wavelengths, wherein the linear combination is a function of the instantaneous optical path difference; (iv) rotating one or more of the elements of the interferometer system, so that the optical path difference between the two coherent beams generated by the interferometer system is scanned simultaneously for all the pixels of the sample; and (v) recording signals of each of the detector elements as function of time using a recording device to form a first spectral cube of data; and (c) interpreting the first spectral cube of data using a mathematical algorithm.

Abstract translation: 根据本发明，提供了用于生物学研究，医学诊断和治疗的光谱成像方法，其包括以下步骤：（a）制备待成像的样品; （b）通过光学装置观察样品，光学装置光学连接到成像光谱仪，光学装置和成像光谱仪通过以下步骤获得样品的每个像素的光谱：（i）从所有像素同时收集入射光 的样品使用准直光学; （ii）使入射的准直光通过具有多个元件的干涉仪系统，以形成出射的光束; （iii）使出射的光束通过聚焦光学系统，该聚焦光学系统将出射的光束聚焦在具有检测器元件的二维阵列的检测器上，使得在每个瞬间，每个检测器元件是 样本，使得样本的真实图像在检测器阵列的平面上是静止的，并且使得每个检测器元件产生信号，其是由不同波长的像素发射的光强度的特定线性组合，其中 线性组合是瞬时光程差的函数; （iv）旋转干涉仪系统的一个或多个元件，使得由干涉仪系统产生的两个相干光束之间的光程差同时扫描样品的所有像素; 以及（v）使用记录装置记录每个检测器元件的信号作为时间的函数，以形成数据的第一光谱立方体; 和（c）使用数学算法解释数据的第一个频谱立方体。

公开(公告)号：US5646729A

公开(公告)日：1997-07-08

申请号：US573759

申请日：1995-12-18

Applicant: Yrjo Koskinen ,  Ari Lehto ,  Simo Tammela ,  Martti Blomberg ,  Markku Orpana ,  Altti Torkkeli

Inventor： Yrjo Koskinen ,  Ari Lehto ,  Simo Tammela ,  Martti Blomberg ,  Markku Orpana ,  Altti Torkkeli

IPC: G01J3/12 ,  G01J3/26 ,  G01N21/31 ,  G01N21/35 ,  G02B26/02 ,  G01B9/02 ,  G02B27/00

CPC classification number: G01J3/26 ,  G01N21/31 ,  G01N21/3504 ,  G02B26/02 ,  G01J2003/1247

Abstract: A single-channel gas concentration measurement method and apparatus. According to the method, a radiant source is employed to generate a measuring signal, the measuring signal is subsequently directed to a measurement object containing a gas mixture to be measured, the measuring signal is subsequently bandpass filtered using at least two passband wavelengths, and the filtered measuring signals are detected by a detector. According to the invention, the bandpass filtering step is implemented by a single electrostatically tunable, short-resonator Fabry-Perot interferometer.

Abstract translation: 单通道气体浓度测量方法和装置。 根据该方法，使用辐射源来产生测量信号，随后将测量信号引导到包含要测量的气体混合物的测量对象，随后使用至少两个通带波长对测量信号进行带通滤波，并且 滤波的测量信号由检测器检测。 根据本发明，带通滤波步骤由单个静电可调谐的短谐振器法布里 - 珀罗干涉仪实现。

公开(公告)号：US5584117A

公开(公告)日：1996-12-17

申请号：US570061

申请日：1995-12-11

Applicant: Shih-ping Lee ,  Chi-Nan Chen

Inventor： Shih-ping Lee ,  Chi-Nan Chen

IPC: G01J3/26 ,  G01J5/20 ,  G02B26/00 ,  H01L31/09 ,  H01C17/06 ,  H01J4/00

CPC classification number: H01L31/09 ,  G01J3/26 ,  G01J5/20 ,  G02B26/001 ,  Y10T29/49002 ,  Y10T29/49099

Abstract: An infrared detector device is described. It is based on an infrared analog of the Fabry Perot interferometer, using one curved, fully reflecting, plate and one planar, mainly reflecting, but partially transmitting, plate. The space between these plates behaves as a resonant cavity which can be built to respond to either a broad or a narrow band of wavelengths in the general range between 1 and 15 microns. It is also possible to combine several detectors of different narrow bands in a single device. Actual detection of the radiation is based on use of thin film resistors, having a high thermal coefficient of resistance, that are thermally isolated from the other parts of the structure. Details relating to the manufacture of the devices are given.

Abstract translation: 描述了红外检测器装置。 它基于法布里·珀罗干涉仪的红外模拟，使用一个弯曲的，完全反射的板和一个平面的，主要是反射的，但部分透射的板。 这些板之间的空间表现为谐振腔，该谐振腔可被构造成响应在1至15微米之间的一般范围内的宽波段或窄波段。 还可以在单​​个设备中组合不同窄带的几个检测器。 辐射的实际检测是基于使用薄膜电阻器，其具有与结构的其它部分热隔离的高的电阻热系数。 给出了关于装置制造的细节。

公开(公告)号：US5557468A

公开(公告)日：1996-09-17

申请号：US442367

申请日：1995-05-16

Applicant: Joseph Ip

Inventor： Joseph Ip

IPC: G01J3/26 ,  G02B26/02 ,  G02B27/00 ,  H04B10/18 ,  G02B5/04

CPC classification number: H04B10/25133 ,  G01J3/26 ,  G02B26/02 ,  G02B27/0025

Abstract: A chromatic dispersion compensation device is provided in the form of an etalon having first partially reflecting mirror providing an input and output port for porting a signal into and out of the etalon cavity. A second partially reflective mirror parallel to and spaced apart from the first mirror, being more reflective than the first mirror provides a monitoring port for monitoring energy within the cavity. Means are optionally provided for controlling a parameter related to the cavity in dependence upon a signal ported from the monitoring port. Means may be provided to control a transmitting laser in dependence upon the signal ported from the monitoring port.

Abstract translation: 以标准具的形式提供色散补偿装置，其具有第一部分反射镜，其提供输入和输出端口，用于将信号移入和移出标准具腔。 平行于第一反射镜并与第一反射镜间隔开的第二部分反射镜比第一反射镜更具反射性，提供用于监测空腔内的能量的监视端口。 可选地提供了用于根据从监视端口输入的信号来控制与腔相关的参数的装置。 可以提供装置以根据从监视端口输入的信号来控制发射激光。

公开(公告)号：US5550373A

公开(公告)日：1996-08-27

申请号：US367491

申请日：1994-12-30

Applicant: Barrett E. Cole ,  Bernard S. Fritz ,  Robert D. Horning

Inventor： Barrett E. Cole ,  Bernard S. Fritz ,  Robert D. Horning

IPC: B81B1/00 ,  G01J3/26 ,  G01J3/28 ,  G01J5/20 ,  G02B26/00 ,  G01B9/02 ,  G01J3/45

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/26 ,  G01J5/20 ,  G02B26/001

Abstract: A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filter-detector has a hermetically sealed Fabry-Perot cavity that has a mirror which has an adjustable distance relative to another mirror of the cavity. The former mirror is adjusted by piezoelectric film on the mirror support or with piezoelectric stacks or wall supporting the mirror. There may be electrodes situated near the mirrors for capacitive sensing of the distance between the mirrors. Light to be filtered and detected comes in through a window wafer which may have diffractive or refractive microlenses, plus an optional spatial filter. After passing through the window wafer, the light is filtered by the tunable mirrors of the Fabry-Perot cavity. The portion of the light that is passed by the cavity is detected by an infrared microbolometer or a CCD array. The cavity and detector are hermetically sealed in a vacuum.

Abstract translation: 用于光谱检测具有2至12微米波长范围内的吸收线的特定物质的单片构造的红外可调谐法布里 - 珀罗腔滤波器检测器。 过滤器检测器具有气密密封的法布里 - 珀罗腔，其具有相对于空腔的另一反射镜具有可调距离的反射镜。 前镜由反射镜支架上的压电膜或支撑镜子的压电叠层或墙壁调节。 可能存在位于反射镜附近的用于电容感测反射镜之间的距离的电极。 要过滤和检测的光通过可能具有衍射或折射微透镜的窗玻璃加上可选的空间滤光片进入。 通过窗玻璃后，光被法布里 - 珀罗腔的可调镜过滤。 由空腔通过的光的部分由红外微辐射热计或CCD阵列检测。 空腔和检测器在真空中气密密封。

公开(公告)号：US5515169A

公开(公告)日：1996-05-07

申请号：US136212

申请日：1993-10-13

Applicant: Robert L. Cargill ,  Erich Gombocz ,  Claudio I. Zanelli ,  Basil Swaby

Inventor： Robert L. Cargill ,  Erich Gombocz ,  Claudio I. Zanelli ,  Basil Swaby

IPC: G01J3/26 ,  G01J9/02 ,  G01N21/25 ,  G01N21/64 ,  G02B5/28

CPC classification number: G01N21/255 ,  G01J3/26 ,  G01J9/0246 ,  G01J3/0294

Abstract: A spectral wavelength discrimination system and method for using are provided which allows the wavelength of a beam of radiation to be accurately determined using compact inexpensive optics and electronics. The system is particularly useful for identifying the emission wavelength of a multi-component marker system which includes a plurality of components having different wavelength ranges. The system comprises a wavelength selective beamsplitter, termed a Linear Wavelength Filter, that directs predetermined fractions of the beam at each wavelength into each of two output beams. The intensities of these output beams are measured. The measurements and selected system parameters, including the beamsplitter spectral characteristics and the detector sensitivity characteristics are used in a special algorithm for performing Fourier based wavelength-dispersive analysis. The unique solution of the Fourier based analysis is the wavelength of the beam of radiation. The system employs various optical components and structures to achieve the desired spatial resolution and sensitivity. Multiple channel devices and other special configurations are also described.

Abstract translation: 提供了一种使用光谱波长鉴别系统和方法，其允许使用紧凑廉价的光学和电子学来精确地确定辐射束的波长。 该系统对于识别包括具有不同波长范围的多个分量的多分量标记系统的发射波长特别有用。 该系统包括称为线性波长滤波器的波长选择性分束器，其将每个波长处的波束的预定分数引导到两个输出波束中的每一个。 测量这些输出光束的强度。 用于执行基于傅立叶的波长色散分析的特殊算法中使用的测量和选定的系统参数，包括分光器光谱特性和检测器灵敏度特性。 傅里叶分析的独特解决方案是辐射束的波长。 该系统采用各种光学部件和结构来实现所需的空间分辨率和灵敏度。 还描述了多信道设备和其他特殊配置。

公开(公告)号：US5461477A

公开(公告)日：1995-10-24

申请号：US402314

申请日：1995-03-10

Applicant: William J. Marinelli ,  Karl W. Holtzclaw ,  Steven J. Davis ,  Byron D. Green

Inventor： William J. Marinelli ,  Karl W. Holtzclaw ,  Steven J. Davis ,  Byron D. Green

IPC: G01J3/18 ,  G01J3/26 ,  G01J3/28 ,  G01N21/27 ,  G01B9/02

CPC classification number: G01J3/2823 ,  G01J2003/1828 ,  G01J3/26

Abstract: A spectrometer comprises a tunable interferometer for producing a monochromatic continuous image at an image plane and including two mirrors having substantially parallel surfaces and an adjustable spacing therebetween, a radiation detector located at the image plane for recording the image, a filter arrangement for allowing at least one predetermined range of wavelengths to pass to the detector, and a lens arrangement for collecting radiation and limiting radiation incident on the interferometer to an angle which is substantially perpendicular to the substantially parallel surfaces of the two mirrors.

Abstract translation: 光谱仪包括可调干涉仪，用于在图像平面处产生单色连续图像，并且包括两个反射镜，其具有基本上平行的表面和可调节的间隔，位于图像平面处的用于记录图像的辐射探测器，至少允许 一个预定范围的波长传递到检测器，以及透镜装置，用于收集辐射并将入射在干涉仪上的辐射限制在大致垂直于两个反射镜的基本上平行的表面的角度。