公开(公告)号：US07471386B2

公开(公告)日：2008-12-30

申请号：US11679112

申请日：2007-02-26

Applicant: Jason H. Neiss ,  Patrick J. Treado ,  Robert Schweitzer

Inventor： Jason H. Neiss ,  Patrick J. Treado ,  Robert Schweitzer

IPC: G01J3/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0221 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/2823 ,  G01J3/44 ,  G01N21/65 ,  G01N2201/0833 ,  G01N2201/1293

Abstract: The disclosure relates generally to methods and apparatus for using a fiber array spectral translator-based (“FAST”) spectroscopic system for performing spectral unmixing of a mixture containing multiple polymorphs. In an embodiment, a first spectrum of a mixture containing polymorphs of a compound is obtained using a photon detector and a fiber array spectral translator having plural fibers. A set of second spectra is provided where each spectrum of the set of second spectra may be representative of a different polymorph of the compound. The first spectrum and the set of second spectra may be compared, and based on the comparison, the presence of one or more polymorphs in the mixture may be determined.

Abstract translation: 本公开总体上涉及使用用于执行含有多个多晶型物的混合物的光谱解混合的光纤阵列光谱转换器（“FAST”）光谱系统的方法和装置。 在一个实施方案中，使用具有多个纤维的光子检测器和光纤阵列光谱转换器获得含有化合物多晶型物的混合物的第一光谱。 提供了一组第二光谱，其中该组第二光谱的每个光谱可以代表该化合物的不同多晶型物。 可以比较第一光谱和第二光谱集，并且基于比较，可以确定混合物中一个或多个多晶型物的存在。

公开(公告)号：US07423748B2

公开(公告)日：2008-09-09

申请号：US11833886

申请日：2007-08-03

Applicant: Thomas W. Hagler

Inventor： Thomas W. Hagler

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01N21/552 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/28 ,  G01J3/42 ,  G01N21/274 ,  G01N21/31 ,  G01N2021/317 ,  G01N2201/129

Abstract: An encoder spectrograph is used to analyze radiation from one or more samples in various configurations. The radiation is analyzed by spatially modulating the radiation after it has been dispersed by wavelength or imaged along a line. Dual encoder spectrographs may be used to encode radiation using a single modulator. An encoder spectrograph includes a modulator with radiation filters having non-equal widths and centered at non-equal intervals along the encoding axis of the modulator.

Abstract translation: 编码器光谱仪用于分析来自一种或多种不同配置样品的辐射。 通过在辐射被波长分散或沿着一条线成像后，通过空间调制辐射来分析辐射。 双编码器光谱仪可用于使用单个调制器对辐射进行编码。 编码器光谱仪包括具有不等宽度的辐射滤光器的调制器，并且沿着调制器的编码轴以不等间隔居中。

公开(公告)号：US20080191149A1

公开(公告)日：2008-08-14

申请号：US11802831

申请日：2007-05-25

Applicant: Oleg Zimenkov ,  Xavier Amouretti ,  Robert M. Gifford ,  Mark R. Kennedy ,  Michael Kontorovich ,  Ben Norris ,  Richard N. Sears ,  Dan Venditti ,  Christopher Many

Inventor： Oleg Zimenkov ,  Xavier Amouretti ,  Robert M. Gifford ,  Mark R. Kennedy ,  Michael Kontorovich ,  Ben Norris ,  Richard N. Sears ,  Dan Venditti ,  Christopher Many

IPC: G01J3/30 ,  G21G5/00

CPC classification number: G01J3/42 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/4406 ,  G01J3/443 ,  G01N21/6452 ,  G01N21/76 ,  G01N2021/6463

Abstract: An apparatus and a method for optically analyzing a sample are provided. The apparatus includes a first optical device that transmits a narrow waveband of light and has a first filter and a first monochromator that provide different paths for the narrow waveband of the light. The apparatus may also include a light source that generates the light as broadband excitation light, in which case the first optical device transmits a narrow waveband of the broadband excitation light through the first filter or the first monochromator. Further, the apparatus may include a second optical device that directs the narrow waveband of the broadband excitation light onto the sample and receives emission light from the sample, a third optical device that transmits a narrow waveband of the emission light, and a detector that converts the narrow waveband of the emission light into an electrical signal.

Abstract translation: 提供了用于光学分析样品的装置和方法。 该装置包括发射窄波段光的第一光学装置，并具有为光的窄波段提供不同路径的第一滤光器和第一单色仪。 该装置还可以包括产生作为宽带激发光的光的光源，在这种情况下，第一光学装置通过第一滤光器或第一单色器传输宽带激发光的窄波段。 此外，该装置可以包括第二光学装置，其将宽带激发光的窄波段引导到样本上并接收来自样品的发射光，透射发射光的窄波段的第三光学装置，以及转换 将发射光的窄波段变成电信号。

公开(公告)号：US20080180698A1

公开(公告)日：2008-07-31

申请号：US12019592

申请日：2008-01-24

Applicant: Hidong Kwak ,  Shankar Krishnan

Inventor： Hidong Kwak ,  Shankar Krishnan

IPC: G01B11/06 ,  G01J1/42

CPC classification number: G01B11/0625 ,  G01B11/0633 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/447 ,  G01N21/211 ,  G01N21/33 ,  G01N2021/213 ,  G01N2201/0233

Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

Abstract translation: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中，用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见（UV-Vis）范围内具有真空紫外（VUV）范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时，净化气体的流量被调节。 该系统包括光源，照明光学器件，收集光学器件，检测器，吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

公开(公告)号：US07382498B1

公开(公告)日：2008-06-03

申请号：US11796895

申请日：2007-04-30

Applicant: Lacy G. Cook

Inventor： Lacy G. Cook

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/12 ,  G01J3/2823

Abstract: A two-channel spectrometer has a shared objective and a pair of slits at a common image plane. Each of the slits receives a portion of the output beam of the shared objective and is optimized for transmitting different wavelengths. A shared double-pass reflective triplet receives the output beams of the slits. The output of the reflective triplet is incident upon a beamsplitter, which sends a collimated first reflective triplet output of a first wavelength to a first dispersive element, and a collimated second reflective triplet output of a second wavelength to a second dispersive element. The outputs of the dispersive elements are directed back to the beamsplitter and the reflective triplet to imaging detectors located at two different locations of the common image plane.

Abstract translation: 双通道光谱仪在共同的图像平面上具有共享物镜和一对狭缝。 每个狭缝接收共享物镜的输出光束的一部分，并且被优化用于传输不同的波长。 共享的双通反射三重态接收狭缝的输出光束。 反射三重态的输出入射到分束器上，分束器将第一波长的准直的第一反射三联体输出发送到第一色散元件，并将第二波长的准直的第二反射三重态输出发送到第二色散元件。 分散元件的输出被引导回到分光器和反射三联体到位于公共图像平面的两个不同位置处的成像检测器。

公开(公告)号：US20080123097A1

公开(公告)日：2008-05-29

申请号：US11577860

申请日：2005-10-25

Applicant: Hamed Hamid Muhammed ,  Fredrik Bergholm

Inventor： Hamed Hamid Muhammed ,  Fredrik Bergholm

IPC: G01J3/51

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0294 ,  G01J3/2823 ,  G01J3/51 ,  G01J2003/1213 ,  G01J2003/2826 ,  G01N2021/1793 ,  G01N2021/1797 ,  G01N2021/3177

Abstract: The present invention relates to the production of instantaneous or non-instantaneous multi-band images, to be transformed into multi- or hyperspectral images, comprising light collecting means (11), an image sensor (12) with at least one two dimensional sensor array (121), and an instantaneous colour separating means (123), positioned before the image sensor array (121) in the optical path (OP) of the arrangement (1), and first uniform spectral filters (13) in the optical path (OP), with the purpose of restricting imaging to certain parts of the electromagnetic spectrum. The present invention specifically teaches that a filter unit (FU) comprising colour or spectral filter mosaics and/or uniform colour or spectral filters mounted on filter wheels (114) or displayed by transmissive displays (115), is either permanently or interchangeably positioned before the colour separating means (123) in the optical path (OP) in, or close to, converged light (B). Each colour or spectral filter mosaic consists of a multitude of homogeneous filtering regions. The transmission curves (TC) of the filtering regions of a colour or spectral filter mosaic can be partly overlapping, in addition to overlap between these transmission curves and those belonging to the filtering regions of the colour separating means (123). The transmission curves (TC) of the colour or spectral filter mosaics and the colour separating means (123) are suitably spread out in the intervals of a spectrum to be studied. The combination of the colour separating means (123) and the spectral or colour or spectral filter mosaics produces different sets of linearly independent transmission curves (TC). The multiple-filter image captured by the image sensor (12) is demosaicked by identifying and segmenting the image regions that are affected by the regions of the multiple filter mosaic, and after an optional interpolation step, a multi-band image is obtained. The resulting multi-band image is transformed into a multi- or hyperspectral image.

公开(公告)号：US07359051B2

公开(公告)日：2008-04-15

申请号：US11278037

申请日：2006-03-30

Applicant: Kohei Shibata

Inventor： Kohei Shibata

IPC: G01J3/28 ,  G02B27/44

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/0297 ,  G02B5/1866 ,  G02B6/29311 ,  G02B6/29358 ,  G02B6/29397

Abstract: In a multi-wavelength spectroscopic apparatus using diffraction gratings, a first diffraction grating is a diffraction grating with diffraction efficiencies of p-polarized light and s-polarized light being equal on a short wavelength side of an operating wavelength range, and a second diffraction grating is a diffraction grating with diffraction efficiencies of p-polarized light and s-polarized light being equal on a long wavelength side of an operating wavelength range. By performing dispersion with two such diffraction gratings, it is possible to enlarge the amount of angular dispersion, and to produce a spectroscopic apparatus, which cancels wavelength dependencies of the diffraction efficiencies and has a small wavelength dependency of the diffraction efficiency.

Abstract translation: 在使用衍射光栅的多波长分光装置中，第一衍射光栅是衍射光栅，衍射光栅的p偏振光和s偏振光的衍射效率在工作波长范围的短波长侧相等，第二衍射光栅 是衍射光栅，其工作波长范围的长波长侧的p偏振光和s偏振光的衍射效率相等。 通过利用两个这样的衍射光栅进行色散，可以扩大角度色散的量，并且可以产生消除衍射效率的波长依赖性并且具有衍射效率的小的波长依赖性的分光装置。

公开(公告)号：US07336357B2

公开(公告)日：2008-02-26

申请号：US11202211

申请日：2005-08-12

Applicant: Jeremy Levy

Inventor： Jeremy Levy

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/0294 ,  G01J3/1256 ,  G01J3/2803 ,  G01J3/2889 ,  G01J3/433 ,  G01J2001/4242

Abstract: The development of a multiple-channel dual phase lock-in optical spectrometer (LIOS) is presented, which enables parallel phase-sensitive detection at the output of an optical spectrometer. The light intensity from a spectrally broad source is modulated at the reference frequency, and focused into a high-resolution imaging spectrometer. The height at which the light enters the spectrometer is controlled by an acousto-optic deflector, and the height information is preserved at the output focal plane. A two-dimensional InGaAs focal plane array collects light that has been dispersed in wavelength along the horizontal direction, and in time along the vertical direction. The data is demodulated using a high performance computer-based digital signal processor. This parallel approach greatly enhances (by more than 100×) the speed at which spectrally resolved lock-in data can be acquired.

Abstract translation: 提出了一种多通道双相锁相光谱仪（LIOS）的开发，可在光谱仪的输出端进行并行相敏检测。 来自光谱宽源的光强度以参考频率调制，并且聚焦成高分辨率成像光谱仪。 光进入光谱仪的高度由声光偏转器控制，高度信息保留在输出焦平面。 二维InGaAs焦平面阵列沿着水平方向并沿着垂直方向在时间上收集沿波长分散的光。 使用基于高性能计算机的数字信号处理器对数据进行解调。 这种并行方法极大地提高了可以获取光谱解析的锁定数据的速度（超过100倍）。

公开(公告)号：US20080037009A1

公开(公告)日：2008-02-14

申请号：US11826744

申请日：2007-07-18

Applicant: Arno Simon

Inventor： Arno Simon

IPC: G01N21/00

CPC classification number: G01N21/3563 ,  G01J3/02 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/45 ,  G01N2021/3595

Abstract: A spectrometer system (1) comprising an IR (infrared) spectrometer (2) and an IR microscope (3), wherein a sample (42) and a first detector (21; 31) are provided in the IR microscope (3), wherein the IR microscope (3) is designed such that during measurement, the sample (42) is imaged on the first detector (21; 31) via an intermediate focus (44), is characterized in that at least one second detector (24, 25; 33) is provided whose detector surface (26, 27; 34) extends parallel to the detector surface (22; 32) of the first detector (21; 31), the detector surface (26, 27; 34) of the at least one second detector (24, 25; 33) is at least 5 times larger than the detector surface (22; 32) of the first detector (21; 31), and the first (21; 31) and the at least one second detector (24, 25; 33) are disposed directly next to each other, wherein the detector surface (26, 27; 34) of the at least one second detector (24, 25; 33) largely surrounds the detector surface (22; 32) of the first detector (21, 31), and the first detector (21; 31) can be read out independently of the at least one second detector (24, 25; 33). The inventive spectrometer system yields a good signal-to-noise ratio both for large and small selected sample areas.

Abstract translation: 一种包括IR（红外）光谱仪（2）和IR显微镜（3）的光谱仪系统（1），其中在所述IR显微镜（3）中设置有样品（42）和第一检测器（21; 31），其中 红外显微镜（3）被设计成使得在测量期间，样品（42）经由中间焦点（44）成像在第一检测器（21; 31）上，其特征在于至少一个第二检测器 ; 33），其检测器表面（26,27; 34）平行于所述第一检测器（21; 31）的检测器表面（22; 32）延伸，所述检测器表面（26,27; 34）至少 一个第二检测器（24,25; 33）比第一检测器（21; 31）的检测器表面（22; 32）大至少5倍，第一检测器（21; 31）和至少一个第二检测器 （24,25; 33）彼此直接布置，其中所述至少一个第二检测器（24,25; 33）的检测器表面（26,27; 34）主要围绕所述检测器 表面（22; 可以独立于至少一个第二检测器（24,25; 33）读出第一检测器（21,31）和第一检测器（21; 31）。 本发明的光谱仪系统对于大和小的选定样品区域都产生良好的信噪比。

公开(公告)号：US20070271055A1

公开(公告)日：2007-11-22

申请号：US11833900

申请日：2007-08-03

Applicant: Thomas Hagler

Inventor： Thomas Hagler

IPC: G06F19/00

CPC classification number: G01N21/552 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/28 ,  G01J3/42 ,  G01N21/274 ,  G01N21/31 ,  G01N2021/317 ,  G01N2201/129

Abstract: An encoder spectrograph is used to analyze radiation from one or more samples in various configurations. The radiation is analyzed by spatially modulating the radiation after it has been dispersed by wavelength or imaged along a line. Dual encoder spectrographs may be used to encode radiation using a single modulator. A spectra sorting algorithm is used to determine calibration training spectra for a spectrometer in a spectrometer calibration training mode.

Abstract translation: 编码器光谱仪用于分析来自一种或多种不同配置样品的辐射。 通过在辐射被波长分散或沿着一条线成像后，通过空间调制辐射来分析辐射。 双编码器光谱仪可用于使用单个调制器对辐射进行编码。 光谱排序算法用于确定光谱仪校准训练模式下的光谱仪的校准训练光谱。