公开(公告)号：US20050280906A1

公开(公告)日：2005-12-22

申请号：US11003012

申请日：2004-12-03

Applicant: David Scheiner ,  Michael Winik ,  Yakov Lyubchik

Inventor： David Scheiner ,  Michael Winik ,  Yakov Lyubchik

IPC: G01N21/21 ,  G01N21/47 ,  G01N21/956 ,  G02B20060101 ,  G02B17/00 ,  G02B17/06 ,  G02B21/04 ,  G02B21/16

CPC classification number: G02B21/16 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0243 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G02B17/06 ,  G02B17/0605 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G02B21/04 ,  G02B27/10 ,  G02B27/283

Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

Abstract translation: 呈现镜头布置。 透镜装置包括具有凹面反射表面并限定透镜装置的光轴的第一元件以及沿着光轴与第一元件间隔开的第二基本平坦且至少部分反射的元件。 第二元件被配置为允许光通过其并且相对于光轴和第一元件定向，使得在输入光束到第二元件的预定入射角度处，输入光束被反射到反射 第一元件的表面并从其反射以穿过第二元件。

公开(公告)号：US20050275847A1

公开(公告)日：2005-12-15

申请号：US10508960

申请日：2004-10-06

Applicant: Danny Moshe

Inventor： Danny Moshe

IPC: G01J3/28 ,  G01J3/453 ,  G01J3/45

CPC classification number: G01J3/4535 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291 ,  G01J3/2823 ,  G01J3/4532

Abstract: Real time high speed high resolution hyper-spectral imaging. (a) electromagnetic radiation collimating element (16), collimating electromagnetic radiation (44) emitted by objects (12) in a scene or a sample (14); (b) optical interferometer (18), receiving and dividing collimated object emission beam, generating interference images, and piezoelectrically determining and changing magnitude of optical path difference of divided collimated object emission beam; optical interferometer (18) includes: beam splitter (20′), fixed mirror (22), movable mirror (24), piezoelectric motor (26), displacing movable mirror (24) along axis (60), distance change feedback sensor (28), sensing and measuring change in distance of movable mirror (24) along axis (60), piezoelectric motor controller (30), actuating and controlling piezoelectric motor (26); and thermo-mechanically stable optical interferometer mount (32A); (c) camera optics (34), focusing interference images of each optical path difference; (d) detector (36), recording interference images; processing unit (38), and (f) display (40).

Abstract translation: 实时高速高分辨率超光谱成像。 （a）电磁辐射准直元件（16），对由物体（12）在场景或样本（14）中发射的电磁辐射（44）进行准直; （b）光学干涉仪（18），接收和分割准直物体发射光束，产生干涉图像，以及压电确定和改变分割的准直对象发射光束的光程差大小; 光干涉仪（18）包括：分束器（20'），固定反射镜（22），可移动反射镜（24），压电马达（26），沿轴线（60）移动可移动镜（24），距离变化反馈传感器 ），感测和测量可移动镜（24）沿轴线（60）的距离变化，压电马达控制器（30），致动和控制压电马达（26）; 和热机械稳定的光学干涉仪安装座（32A）; （c）相机光学器件（34），聚焦每个光程差的干涉图像; （d）检测器（36），记录干涉图像; 处理单元（38）和（f）显示器（40）。

公开(公告)号：US20050264807A1

公开(公告)日：2005-12-01

申请号：US10844086

申请日：2004-05-11

Applicant: Scott Lerner

Inventor： Scott Lerner

IPC: G01J3/02 ,  G01J3/12 ,  G01J3/28 ,  G02B5/18

CPC classification number: G01J3/12 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/2823 ,  G02B5/1814

Abstract: A compact imaging spectrometer comprising an entrance slit, an anamorphic mirror, a grating, and a detector array. The entrance slit directs light to the anamorphic mirror. The anamorphic mirror receives the light and directs the light to the grating. The grating receives the light from the anamorphic mirror and defracts the light back onto the anamorphic mirror. The anamorphic mirror focuses the light onto a detector array.

Abstract translation: 一种紧凑型成像光谱仪，包括入射狭缝，变形反射镜，光栅和检测器阵列。 入口狭缝将光引导到变形镜。 变形镜接收光并将光引导到光栅。 光栅接收来自变形镜的光，并将光折回到变形镜上。 变形镜将光线聚焦到探测器阵列上。

公开(公告)号：US06967718B1

公开(公告)日：2005-11-22

申请号：US10377977

申请日：2003-02-28

Applicant: Clinton B. Carlisle ,  Jahja I. Trisnadi ,  Douglas A. Webb ,  David Lehoty ,  Kais Almarzouk ,  Akira Tomita

Inventor： Clinton B. Carlisle ,  Jahja I. Trisnadi ,  Douglas A. Webb ,  David Lehoty ,  Kais Almarzouk ,  Akira Tomita

IPC: G01J3/18 ,  G01J3/28 ,  G02B6/34 ,  G02B26/08

CPC classification number: G02B26/0808 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/18 ,  G01J3/2803 ,  G01J2003/1828 ,  G02B6/29314 ,  G02B6/4215

Abstract: An apparatus for measuring wavelength composition and power of a dispersed spectrum of light comprises a diffractive light modulator and a detector. The diffractive light modulator comprises an array of light modulating pixels operable in a first mode and a second mode. In operation, the dispersed spectrum of light illuminates the diffractive light modulator along the array of light modulating pixels, which selectively directs a subset of the dispersed spectrum of light into the first mode while directing a remainder of the dispersed spectrum of light into the second mode. The detector is optically coupled to the diffractive light modulator. In operation, the detector detects the subset of the dispersed spectrum of light while not detecting the remainder of the dispersed spectrum of light. Each of the light modulating pixels is controlled by signals sent from a controller. The signals comprise a time division multiplex modulation, a code division multiplex modulation, or a combination thereof.

Abstract translation: 用于测量光分散光谱的波长成分和功率的装置包括衍射光调制器和检测器。 衍射光调制器包括可在第一模式和第二模式下操作的光调制像素的阵列。 在操作中，光的分散光线沿着光调制像素阵列照射衍射光调制器，该阵列选择性地将散射光谱的子集导入第一模式，同时将剩余的分散光谱引导到第二模式 。 检测器光耦合到衍射光调制器。 在操作中，检测器检测光的分散光谱的子集，而不检测光的分散光谱的其余部分。 每个光调制像素由从控制器发送的信号控制。 信号包括时分复用调制，码分多路调制或其组合。

公开(公告)号：US20050248757A1

公开(公告)日：2005-11-10

申请号：US10519529

申请日：2003-06-26

Applicant: Quy Dao Nguyen ,  Edouard Da Silva

Inventor： Quy Dao Nguyen ,  Edouard Da Silva

IPC: G01N21/65 ,  G01J3/44

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/021 ,  G01J3/44

Abstract: The invention concerns a Raman spectrometry apparatus containing a source of excitation (14), optical means (16) of excitation directing a beam of excitation (15) derived from that source on the sample (17), means (18) for collecting the energy diffused by the sample (17) containing an inlet diffusion slot (19), a spectral dispersion system (20), means for selecting the Raman energy (23), a detector (22), optical detection means (21) directing the Raman energy thus collected and selected to the detector (22). According to the invention, the optical means (16) of excitation cause the beam of excitation (15) to be dispersed by the dispersion system (20), said optical means (16) of excitation containing an inlet slot (24) and an outlet slot of excitation constituted by the inlet diffusion slot (19) and selecting the wavelength of excitation.

Abstract translation: 本发明涉及一种包含激发源（14）的拉曼光谱测量装置，用于引导源自该源的样品（17）的激发光束（15）的激发光学装置（16），用于收集能量的装置（18） 由包含入口扩散槽（19）的样品（17）扩散，光谱色散系统（20），用于选择拉曼能量的装置（23），检测器（22），引导拉曼能量的光学检测装置（21） 从而被收集并选择到检测器（22）。 根据本发明，激发光学装置（16）使得激发光束（15）被分散系统（20）分散，所述激光的光学装置（16）包含入口狭槽（24）和出口 由入口扩散槽（19）构成并选择激发波长的激励槽。

公开(公告)号：US20050243324A1

公开(公告)日：2005-11-03

申请号：US11088206

申请日：2005-03-24

Applicant: Richard Freeling ,  Kenneth Augustyn

Inventor： Richard Freeling ,  Kenneth Augustyn

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/44 ,  G01N21/31 ,  G01N21/64

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/4406 ,  G01N21/31 ,  G01N21/64 ,  G01N2021/6417 ,  G01N2021/6491

Abstract: A system for and method of detecting and characterizing materials using entangled photons is presented. The material may be at a great distances from the detector and may be biological material, complex organic compounds, or inorganic chemicals. The disclosed system and method provide advantages over traditional techniques in that they are largely impervious to atmospheric reduction of probing radiation and in that less probing radiation is required. The reduced probe energy requirement allows for detecting and characterizing sensitive material with significantly reduced material bleaching compared with traditional techniques.

Abstract translation: 提出了使用纠缠光子检测和表征材料的系统和方法。 该材料可能距离检测器很远，并且可以是生物材料，复合有机化合物或无机化学品。 所公开的系统和方法提供了优于传统技术的优点，因为它们在很大程度上不受大气降低探测辐射的影响，并且需要较少的探测辐射。 与传统技术相比，减少的探针能量需求允许检测和表征敏感材料，显着减少材料漂白。

公开(公告)号：US20050236563A1

公开(公告)日：2005-10-27

申请号：US11141773

申请日：2005-06-01

Applicant: Kenneth Busch ,  Dennis Rabbe

Inventor： Kenneth Busch ,  Dennis Rabbe

IPC: G01D18/00 ,  G01J3/28

CPC classification number: G01J3/28 ,  G01J3/0202 ,  G01J3/021 ,  G01J2003/2866

Abstract: The present invention is a dispersive, diffraction grating, NIR spectrometer that automatically calibrates the wavelength scale of the instrument without the need for external wavelength calibration materials. The invention results from the novel combination of: 1) a low power He—Ne laser at right angles to the source beam of the spectrometer; 2) a folding mirror to redirect the collimated laser beam so that it is parallel to the source beam; 3) the tendency of diffraction gratings to produce overlapping spectra of higher orders; 4) a “polka dot” beam splitter to redirect the majority of the laser beam toward the reference detector; 5) PbS detectors and 6) a software routine written in Lab VIEW that automatically corrects the wavelength scale of the instrument from the positions of the 632.8 nm laser line in the spectrum.

Abstract translation: 本发明是一种分散衍射光栅，NIR光谱仪，可自动校准仪器的波长标度，无需外部波长校准材料。 本发明的结果是：1）与光谱仪的源光束成直角的低功率He-Ne激光器; 2）折叠镜，以使准直激光束重定向成平行于源光束; 3）衍射光栅产生高阶重叠光谱的趋势; 4）一个“波尔卡点”分束器，将大部分激光束重定向到参考探测器; 5）PbS检测器和6）Lab VIEW中编写的软件程序，可自动从波长632.8 nm激光线的位置校正仪器的波长范围。

公开(公告)号：US06943881B2

公开(公告)日：2005-09-13

申请号：US10860094

申请日：2004-06-03

Applicant: Feiling Wang

Inventor： Feiling Wang

IPC: A61B5/00 ,  G01B9/02 ,  G01J3/02 ,  G01J3/42 ,  G01N21/21 ,  G01N21/47 ,  G01N21/49 ,  G02B21/06 ,  G01J4/00

CPC classification number: G01N21/55 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/14532 ,  A61B5/1455 ,  A61B5/14558 ,  A61B2562/0242 ,  G01B9/0201 ,  G01B9/02044 ,  G01B9/02057 ,  G01B9/02091 ,  G01B2290/35 ,  G01B2290/40 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/42 ,  G01N21/21 ,  G01N21/27 ,  G01N21/474 ,  G01N21/4795 ,  G01N21/49 ,  G01N2021/4709 ,  G01N2021/4792 ,  G02B21/06

Abstract: This application describes designs, implementations, and techniques for controlling propagation mode or modes of light in a common optical path, which may include one or more waveguides, to sense a sample.

Abstract translation: 该应用描述了用于控制公共光路中的传播模式或光模式的设计，实现和技术，其可以包括一个或多个波导以感测样本。

公开(公告)号：US20050185185A1

公开(公告)日：2005-08-25

申请号：US11040535

申请日：2005-01-21

Applicant: Robert Hoult ,  Paul Evetts

Inventor： Robert Hoult ,  Paul Evetts

IPC: G01J3/42 ,  G01N21/55 ,  G01J3/28

CPC classification number: G01N21/55 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0237 ,  G01J3/0291 ,  G01J3/42

Abstract: An accessory for a spectrometer for carrying out measurements of specular reflectance of a sample. The accessory is designed so that all components can be located in a housing and the sample can be located horizontally on a top-plate of the housing with the components disposed below the plane of that plate.

Abstract translation: 用于进行样品镜面反射率测量的光谱仪附件。 附件被设计成使得所有部件可以位于壳体中，并且样品可以水平地定位在壳体的顶板上，并且部件设置在该板的平面之下。

公开(公告)号：US20050001173A1

公开(公告)日：2005-01-06

申请号：US10669030

申请日：2003-09-23

Applicant: Dale Harrison

Inventor： Dale Harrison

IPC: G01J3/28 ,  G01J3/36 ,  G01N21/21 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/211 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55

Abstract: A spectroscopy system is provided which operates in the vacuum ultraviolet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. To ensure accurate and repeatable measurement, the environment of the optical path is controlled to limit absorption effects of gases that may be present in the optical path. The VUV reflectometer may be utilized to monitor a wide range of data in a semiconductor processing environment. For example, the techniques may be used for measuring thicknesses, optical properties, composition, porosity and roughness of a film or stack of films. Further, the VUV techniques and apparatus may be used to characterize critical dimensions and other features of a device. The VUV reflectometer system may be utilized as a stand alone tool, or the relatively compact nature of the system may be taken advantage of such that the system is incorporated into other process tools. Thus, for example, the VUV techniques described herein may be incorporated directly into tools used for deposition, etch, photolithography, etc. so that in-line measurements, monitoring and control may be advantageously obtained.

Abstract translation: 提供在真空紫外光谱中操作的光谱系统。 更具体地，提供了在真空紫外光谱中利用反射测量技术的系统用于计量学应用。 为了确保准确和可重复的测量，控制光路的环境以限制可能存在于光路中的气体的吸收效应。 VUV反射计可用于在半导体处理环境中监视宽范围的数据。 例如，这些技术可以用于测量薄膜或薄膜层的厚度，光学性质，组成，孔隙率和粗糙度。 此外，VUV技术和装置可用于表征装置的关键尺寸和其它特征。 VUV反射计系统可以用作独立的工具，或者可以利用系统的相对紧凑的特性，使得该系统被并入到其他工艺工具中。 因此，例如，本文所述的VUV技术可以直接结合到用于沉积，蚀刻，光刻等的工具中，使得可以有利地获得在线测量，监测和控制。