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    Non-Destructive 3-Dimensional Chemical Imaging Of Photo-Resist Material
    262.
    发明申请
    Non-Destructive 3-Dimensional Chemical Imaging Of Photo-Resist Material 审中-公开
    光致抗蚀材料的非破坏性三维化学成像

    公开(公告)号：US20150276480A1

    公开(公告)日：2015-10-01

    申请号：US14229909

    申请日：2014-03-29

    Applicant: Nilanjan GHOSH ,  Kevin T. MCCARTHY ,  Zhiyong WANG ,  Deepak GOYAL ,  Changhua LIU ,  Leonel R. ARANA

    Inventor： Nilanjan GHOSH ,  Kevin T. MCCARTHY ,  Zhiyong WANG ,  Deepak GOYAL ,  Changhua LIU ,  Leonel R. ARANA

    IPC: G01J3/28 ,  G01J3/04 ,  G01J3/44

    CPC classification number: G02B21/008 ,  G01J3/44 ,  G01N21/21 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/656 ,  G02B21/0064

    Abstract: Embodiments include devices, systems and processes for using a combined confocal Raman microscope for inspecting a photo resist film material layer formed on the top surface of a layer of a substrate package, to detect border defects between regions of light exposed (e.g., cured) and unexposed (e.g., uncured) resist film material. Use of the confocal Raman microscope may provide a 3D photo-resist chemical imaging and characterization technique based on combining (1) Raman spectroscopy to identify the borders between regions of light exposed and unexposed resist along XY planes, with (2) Confocal imaging to select a Z-height of the XY planes scanned. Such detection provides fast, high resolution, non-destructive in-line inspection, and improves technical development of polymerization profiles of the resist film material.

    Abstract translation: 实施例包括使用组合共聚焦拉曼显微镜来检查形成在衬底封装层的顶表面上的光致抗蚀剂膜材料层的装置，系统和方法，以检测暴露（例如，固化）和 未曝光（例如未固化）抗蚀膜材料。 共焦拉曼显微镜的使用可以提供基于（1）拉曼光谱法的3D光刻抗蚀剂化学成像和表征技术，以识别沿XY平面的曝光和未曝光抗蚀剂区域之间的边界，（2）共聚焦成像选择 扫描XY平面的Z高。 这种检测提供了快速，高分辨率，无损的在线检测，并且改进了抗蚀剂膜材料的聚合曲线的技术发展。

    Serial-line-scan-encoded multi-color fluorescence microscopy and imaging flow cytometry
    263.
    发明授权
    Serial-line-scan-encoded multi-color fluorescence microscopy and imaging flow cytometry 有权
    串行扫描编码的多色荧光显微镜和成像流式细胞术

    公开(公告)号：US09091654B2

    公开(公告)日：2015-07-28

    申请号：US14148600

    申请日：2014-01-06

    Applicant: Bio-Rad Laboratories, Inc.

    Inventor： Xin Heng ,  Paul Patt

    IPC: G06K9/00 ,  G01N21/64 ,  G01J3/02 ,  G01J3/04 ,  G01J3/10 ,  G01J3/36 ,  G01J3/44 ,  G01N15/14

    CPC classification number: G01N21/6486 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/04 ,  G01J3/10 ,  G01J3/36 ,  G01J3/4406 ,  G01N15/1425 ,  G01N15/1429 ,  G01N15/147 ,  G01N15/1475 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421

    Abstract: A system for performing high-speed, high-resolution imaging cytometry includes a scanning region that is illuminated by light including at least first and second wavelength bands. The system also includes a cell transport mechanism that transports a cell through the scanning region such that the cell is illuminated. The system further includes a set of at least one linear light sensor, and an optical system that selectively directs light emitted from the cell to two portions of the linear light sensor set such that emitted light in a third wavelength band is primarily directed to a first portion of the linear light sensor set, and emitted light in a fourth wavelength band is primarily directed to a second portion of the linear light sensor set. The system repeatedly takes readings of light falling on the linear light sensor set while the cell is transported through the scanning region.

    Abstract translation: 用于执行高速，高分辨率成像细胞计数的系统包括被包括至少第一和第二波长带的光照射的扫描区域。 该系统还包括传送细胞通过扫描区域使得细胞被照亮的细胞传输机制。 该系统还包括一组至少一个线性光传感器，以及光学系统，其将从单元发射的光选择性地引导到线性光传感器组的两个部分，使得第三波长带中的发射光主要指向第一 线性光传感器组的一部分和第四波长带中的发射光主要指向线状光传感器组的第二部分。 当单元格通过扫描区域传输时，系统重复地读取落在线性光传感器组上的光的读数。

    Spectral characteristic obtaining apparatus, image evaluation apparatus and image forming apparatus
    264.
    发明授权
    Spectral characteristic obtaining apparatus, image evaluation apparatus and image forming apparatus 有权
    光谱特征获取装置，图像评估装置和图像形成装置

    公开(公告)号：US09068893B2

    公开(公告)日：2015-06-30

    申请号：US13138428

    申请日：2010-03-24

    Applicant: Manabu Seo ,  Naohiro Kamijo ,  Kohei Shimbo

    Inventor： Manabu Seo ,  Naohiro Kamijo ,  Kohei Shimbo

    IPC: G01J3/28 ,  G01J3/51 ,  G01J3/02 ,  G01J3/04 ,  G01J3/26 ,  H04N9/04

    CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/51 ,  G01J3/513 ,  G01J2003/2806 ,  H04N9/045

    Abstract: A spectral characteristic obtaining apparatus including a light irradiation unit configured to emit light onto a reading object; a spectroscopic unit configured to separate at least a part of diffused reflected light from the light emitted onto the reading object by the light irradiation unit into a spectrum; and a light receiving unit configured to receive the diffused reflected light separated into the spectrum by the spectroscopic unit and to obtain a spectral characteristic. In at least one example embodiment, the light receiving unit is configured to be a spectroscopic sensor array including plural spectroscopic sensors arranged in a direction, and the spectroscopic sensors include a predetermined number of pixels arranged in the direction to receive lights with different spectral characteristics from each other.

    Abstract translation: 一种光谱特征获取装置，包括被配置为将光发射到读取对象上的光照射单元; 分光单元，被配置为将由所述光照射单元发射到所述读取对象的光的漫反射光的至少一部分分离成光谱; 以及光接收单元，被配置为接收由分光单元分离成光谱的扩散反射光并获得光谱特性。 在至少一个示例性实施例中，光接收单元被配置为包括沿方向布置的多个分光传感器的分光传感器阵列，并且光谱传感器包括沿着方向布置的预定数量的像素，以接收具有不同光谱特性的光 彼此。

    Arrangement for monitoring thermal spray processes
    267.
    发明授权
    Arrangement for monitoring thermal spray processes 失效
    监控热喷涂工艺的安排

    公开(公告)号：US07688441B2

    公开(公告)日：2010-03-30

    申请号：US11887797

    申请日：2006-03-30

    Applicant: Manuel Hertter ,  Joerg Hoeschele ,  Stefan Schneiderbanger ,  Juergen Steinwandel

    Inventor： Manuel Hertter ,  Joerg Hoeschele ,  Stefan Schneiderbanger ,  Juergen Steinwandel

    IPC: G01J3/04

    CPC classification number: H05H1/0037 ,  H05H1/0025

    Abstract: An arrangement for measuring characteristic properties of a plasma beam in a thermal spray process, including a device for introducing spray materials into the plasma, a one-dimensional or two-dimensional array including first optical waveguides for receiving the light radiation emitted by the plasma, and other optical waveguides for distributing the light radiation emitted by the plasma. A device is provided for splitting the light guided in the first optical waveguides into the other optical wave guides, one optical waveguide being connected to the opening diaphragm of a particle flow arrangement, and the other optical waveguide being connected to the opening diaphragm of a spectrometer. A device is also provided for determining the current state of the spray process.

    Abstract translation: 一种用于在热喷涂工艺中测量等离子体束的特性的装置，包括用于将喷射材料引入等离子体的装置，包括用于接收等离子体发射的光辐射的第一光波导的一维或二维阵列， 以及用于分配等离子体发射的光辐射的其它光波导。 提供了一种用于将在第一光波导中引导的光分成另一个光波导的装置，一个光波导连接到粒子流布置的开口振膜，另一个光波导连接到光谱仪的开口振膜 。 还提供了用于确定喷雾过程的当前状态的装置。

    Light scanning type confocal microscope
    268.
    发明授权
    Light scanning type confocal microscope 有权
    光扫描型共聚焦显微镜

    公开(公告)号：US07365842B2

    公开(公告)日：2008-04-29

    申请号：US11154968

    申请日：2005-06-16

    Applicant: Junichi Kitagawa

    Inventor： Junichi Kitagawa

    IPC: G01J3/18 ,  G01J3/26 ,  G01J3/32 ,  G01J3/443 ,  G01J3/04

    CPC classification number: G01N21/6458

    Abstract: A light scanning type confocal microscope includes a light source unit that projects an excitation light beam, a scanning optical system that scans the excitation light beam, an objective lens that applies the excitation light beam to a sample, a separation optical element that separates the excitation light and detection light generated by the sample, a confocal detection unit that obtains a confocal effect, and a spectral detection device that spectrally detects the detection light. The spectral detection device has a spectroscopic element that spectrally separates the detection light, a light extracting unit that extracts light in a wavelength band from the light spectrally separated by the spectroscopic element, a detector that detects the light extracted by the light extracting unit, and a wavelength band shifting unit that shifts a wavelength band of light to be extracted by the light extracting unit.

    Abstract translation: 光扫描型共聚焦显微镜包括投射激发光束的光源单元，扫描激发光束的扫描光学系统，将激发光束施加到样本的物镜;分离光学元件，其分离激发 由样品产生的光和检测光，获得共焦效应的共焦检测单元以及光谱检测检测光的光谱检测装置。 光谱检测装置具有光谱分离检测光的分光元件，从由分光元件光谱分离的光提取波长带的光的光提取单元，检测由光提取单元提取的光的检测器，以及 波长带移位单元，其移位由光提取单元提取的光的波长带。

    Coding and modulation for hyperspectral imaging
    269.
    发明授权
    Coding and modulation for hyperspectral imaging 有权
    高光谱成像的编码和调制

    公开(公告)号：US07336353B2

    公开(公告)日：2008-02-26

    申请号：US11580925

    申请日：2006-10-16

    Applicant: David J. Brady ,  Michael E. Gehm

    Inventor： David J. Brady ,  Michael E. Gehm

    IPC: G01J3/28 ,  G01J3/04

    CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/2846 ,  G02B2207/129

    Abstract: Embodiments of the present invention relate to systems and methods for spectral imaging. In one embodiment, an image of the scene is formed on a coded aperture of a spectrometer. A coded image from the coded aperture is detected on a two-dimensional detector array of the spectrometer through a spectrally dispersive element of the spectrometer. Data from the two-dimensional detector array is collected as the coded image is varied over time. The spectral image is estimated from the data collected and the variation of the coded image over time. The data collected is varied over time through translation, rotation, and defocus.

    Abstract translation: 本发明的实施例涉及用于光谱成像的系统和方法。 在一个实施例中，场景的图像形成在光谱仪的编码孔径上。 来自编码孔径的编码图像通过光谱仪的光谱色散元件在光谱仪的二维检测器阵列上检测。 当编码图像随时间变化时，来自二维检测器阵列的数据被收集。 从所收集的数据和编码图像随时间的变化估计光谱图像。 收集的数据随着时间的推移随着翻译，旋转和散焦而变化。

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