公开(公告)号：US5271084A

公开(公告)日：1993-12-14

申请号：US957443

申请日：1992-10-06

Applicant: Peter M. N. Vandenabeele ,  Karen I. J. Maex

Inventor： Peter M. N. Vandenabeele ,  Karen I. J. Maex

IPC: G01J5/00 ,  A21B2/00 ,  F26B19/00 ,  G01J5/10

CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0862 ,  G01J5/0875 ,  G01J5/0878 ,  G01J5/0896 ,  G01J2005/0051 ,  G01J2005/066

Abstract: Method and apparatus for measuring the radiation originating from one side of a wafer of semiconductor material using a pyrometer, wherein non-blackbody compensation radiation is projected onto that side to compensate for the reflectivity of the wafer of material and wherein the intensity of the non-blackbody compensation radiation is controlled subject to the amount of radiation measured by the pyrometer.

Abstract translation: 用于使用高温计测量源于半导体材料的晶片的一侧的辐射的方法和装置，其中非黑体补偿辐射被投影到该侧以补偿晶片的反射率，并且其中， 黑体补偿辐射受到高温计测量的辐射量的控制。

公开(公告)号：US4785174A

公开(公告)日：1988-11-15

申请号：US8216

申请日：1987-01-28

Applicant: Steven E. Hodges ,  Gregory L. Tangonan

Inventor： Steven E. Hodges ,  Gregory L. Tangonan

IPC: G01J5/00 ,  G01J5/58 ,  G01J9/02 ,  G08B13/19 ,  G01J5/48

CPC classification number: G01J5/08 ,  G01J5/0014 ,  G01J5/0821 ,  G01J5/0853 ,  G01J5/0896 ,  G01J5/58 ,  G01J9/02 ,  G08B13/19 ,  G01J2005/066

Abstract: An interferometric sensor (10) employs a sensing optical fiber (12) and a reference optical fiber (14). The sensing fiber (12) has a coating 16 thereon responsive to radiated thermal energy while the reference fiber is shielded therefrom. Both the sensing and reference fibers are subjected to the same ambient environment so that both fibers are subjected to heating by convection or conduction in essentially the same amounts. As a result, the sensor (10) is substantially nonresponsive to convected or conducted thermal energy while being highly responsive to radiated energy, particularly in the 6-30 micron wavelength region.

Abstract translation: 干涉式传感器（10）采用感测光纤（12）和参考光纤（14）。 感测光纤（12）上具有一个涂层16，其上响应于辐射的热能，而参考光纤被屏蔽。 感测和参考光纤都经受相同的周围环境，使得两个纤维通过对流或传导以基本上相同的量进行加热。 结果，传感器（10）对对流或传导的热能基本上是无响应的，同时对辐射能高度响应，特别是在6-30微米波长区域。

公开(公告)号：US20190154513A1

公开(公告)日：2019-05-23

申请号：US16314359

申请日：2017-06-14

Applicant: Robert Bosch GmbH

Inventor： Michael Frank ,  Volkmar Senz ,  Michael Badeja ,  Axel Rumberg ,  Michael Krueger ,  Helge Dittmer

IPC: G01J5/06 ,  G01J5/10 ,  G01J5/02 ,  G01J5/08

CPC classification number: G01J5/06 ,  G01J5/023 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/0265 ,  G01J5/0834 ,  G01J5/10 ,  G01J2005/066 ,  G01J2005/106

Abstract: A method for contactlessly establishing a temperature of a surface includes determining the temperature measurement values of the plurality of blind pixels and determining temperature measurement values of the plurality of measurement pixels. The method further includes determining a temperature measurement value and a temperature measurement values by subtracting the temperature measurement value of the first blind pixel of the plurality of blind pixels from a temperature measurement value of a second blind pixel of the plurality of blind. The method further includes correcting the temperature measurement values by pixel-associated temperature drift components in each case, wherein the temperature drift components are determined using the temperature measurement value and/or the temperature measurement value.

公开(公告)号：US20190154511A1

公开(公告)日：2019-05-23

申请号：US16191733

申请日：2018-11-15

Applicant: MELEXIS TECHNOLOGIES NV

Inventor： Carl VAN BUGGENHOUT ,  Karel VANROYE

IPC: G01J5/02 ,  G01J5/00 ,  G01J5/12 ,  G01J5/22

CPC classification number: G01J5/0225 ,  G01J5/0003 ,  G01J5/026 ,  G01J5/12 ,  G01J5/22 ,  G01J2005/0048 ,  G01J2005/066 ,  G01J2005/067

Abstract: A semiconductor device for measuring IR radiation comprising: at least one sensor pixel; at least one reference pixel shielded from said IR radiation comprising a heater; a controller adapted for: measuring a responsivity by applying power to the heater, while not heating the sensor pixel; measuring a first output signal of an unheated pixel and a first reference output signal of the heated pixel, obtaining the responsivity as a function of a measure of the applied power to the heater and of the difference between the first output signal and the first reference output signal; applying a period of cooling down until the temperature of the reference pixel and the sensor pixel are substantially the same; generating the output signal indicative of the IR radiation, based on the difference between the sensor and the reference output signal, by converting this difference using the responsivity.

公开(公告)号：US09989405B2

公开(公告)日：2018-06-05

申请号：US15211123

申请日：2016-07-15

Applicant: Melexis Technologies NV

Inventor： Carl Van Buggenhout ,  Ben Maes ,  Karel Vanroye ,  Stijn Reekmans

IPC: G01J5/02 ,  G01J1/02 ,  G01J5/06 ,  G01J5/12 ,  G01J1/42

CPC classification number: G01J1/0252 ,  G01J1/4228 ,  G01J5/06 ,  G01J5/12 ,  G01J2005/066 ,  G01J2005/068

Abstract: An infrared sensor assembly for sensing infrared radiation from an object is disclosed. The infrared sensor assembly comprises a sensor array comprising a plurality of sensing elements, provided on or embedded in a substrate extending in a substrate plane. The sensor array comprises at least two infrared sensing elements, each infrared sensing element having a radiation responsive element providing a proportionate electrical signal in response to infrared radiation incident thereto and at least two blind sensing elements, at least one blind sensing element being interspersed among the at least two sensing elements, each blind sensing element being shielded from incident infrared radiation from the object and providing a proportionate electrical signal in response to parasitic thermal fluxes. The output of the sensor array is a function of the infrared sensing elements and of the blind sensing elements such that parasitic thermal fluxes are at least partly compensated for.

公开(公告)号：US20170314995A1

公开(公告)日：2017-11-02

申请号：US15516821

申请日：2015-10-09

Applicant: Thomas ROCZNIK ,  Fabian PURKL ,  Gary O'BRIEN ,  Ando FEYH ,  Bongsang KIM ,  Ashwin SAMARAO ,  Gary YAMA ,  Robert Bosch GmbH

Inventor： Thomas Rocznik ,  Fabian Purkl ,  Gary O'Brien ,  Ando Feyh ,  Bongsang Kim ,  Ashwin Samarao ,  Gary Yama

IPC: G01J5/06 ,  G01J5/08 ,  G01J5/24

CPC classification number: G01J5/06 ,  G01J5/0809 ,  G01J5/0853 ,  G01J5/20 ,  G01J5/24 ,  G01J2005/066 ,  G01J2005/067

Abstract: A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.

公开(公告)号：US09253418B2

公开(公告)日：2016-02-02

申请号：US14005882

申请日：2012-03-09

Applicant: Yoshihisa Warashina ,  Jun Suzuki

Inventor： Yoshihisa Warashina ,  Jun Suzuki

IPC: G01J5/00 ,  G01J5/10 ,  H04N5/33 ,  G01J1/44 ,  G01J5/22 ,  H04N5/217 ,  G01J5/24 ,  G01J5/06 ,  G01J5/20 ,  H04N5/357

CPC classification number: H04N5/33 ,  G01J1/44 ,  G01J5/00 ,  G01J5/10 ,  G01J5/22 ,  G01J5/24 ,  G01J2001/444 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/066 ,  G01J2005/202 ,  H04N5/217 ,  H04N5/357

Abstract: Provided is an infrared image sensor for detecting infrared rays. The infrared image sensor includes a light-receiving unit including a pixel region in which a plurality of pixels are arranged and at least one reference pixel; a difference circuit for acquiring a first differential signal that is a differential signal between a signal of one pixel contained in the pixel region and a signal of the reference pixel and a second differential signal that is a differential signal between signals of two predetermined pixels out of the pixels contained in the pixel region; and a pixel signal calculating unit that calculates a signal of each of the pixels on the basis of the first differential signal and the second differential signal.

Abstract translation: 提供了一种用于检测红外线的红外图像传感器。 红外图像传感器包括：光接收单元，包括其中布置多个像素的像素区域和至少一个参考像素; 差分电路，用于获取作为像素区域中包含的一个像素的信号与参考像素的信号之间的差分信号的第一差分信号和作为两个预定像素的信号之间的差分信号的第二差分信号 包含在像素区域中的像素; 以及像素信号计算单元，其基于第一差分信号和第二差分信号来计算每个像素的信号。

公开(公告)号：US20070194238A1

公开(公告)日：2007-08-23

申请号：US10591579

申请日：2005-03-04

Applicant: Jean-Louis Ouvrier-Buffet ,  Laurent Carle ,  Claire Vialle ,  Michel Vilain

Inventor： Jean-Louis Ouvrier-Buffet ,  Laurent Carle ,  Claire Vialle ,  Michel Vilain

IPC: G01J5/00

CPC classification number: G01J5/10 ,  G01J5/02 ,  G01J5/024 ,  G01J5/06 ,  G01J5/20 ,  G01J2005/066 ,  G01J2005/068

Abstract: The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 Å to 2000 Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.

Abstract translation: 本发明涉及一种被动微电热计（12），包括反射屏（17）和具有辐射吸收器，温度计和电连接功能的悬浮膜。 膜由固定到支撑衬底（16）的至少两个锚定元件（15）支撑。 反射屏（17）可以由至少一层厚度为500埃至2000埃的金属材料层（18）来实现。 屏幕（17）布置在膜下面与膜吸收体元件（13）电接触，以减小由屏幕（17）和吸收元件（13）组成的单元的面积电阻，并避免 后者吸收辐射。

公开(公告)号：US5098197A

公开(公告)日：1992-03-24

申请号：US303181

申请日：1989-01-30

Applicant: Robert L. Shepard ,  Theron V. Blalock ,  Michael J. Roberts ,  Lonnie C. Maxey

Inventor： Robert L. Shepard ,  Theron V. Blalock ,  Michael J. Roberts ,  Lonnie C. Maxey

IPC: G01J5/00

CPC classification number: G01J5/08 ,  G01J5/0003 ,  G01J5/0862 ,  G01J5/0896 ,  G01J2005/066

Abstract: Method and device for direct, non-contact temperature measure of a body. A laser beam is reflected from the surface of the body and detected along with the Planck radiation. The detected signal is analyzed using signal correlation technique to generate an output signal proportional to the Johnson noise introduced into the reflected laser beam as a direct measure of the absolute temperature of the body.

Abstract translation: 用于身体直接，非接触式温度测量的方法和装置。 激光束从身体的表面反射并与普朗克辐射一起检测。 使用信号相关技术分析所检测的信号，以产生与引入到反射激光束中的约翰逊噪声成正比的输出信号，作为人体绝对温度的直接测量。

公开(公告)号：US4722612A

公开(公告)日：1988-02-02

申请号：US772372

申请日：1985-09-04

Applicant: Kenneth G. Junkert ,  Henry P. Voznick

Inventor： Kenneth G. Junkert ,  Henry P. Voznick

IPC: G01J5/00 ,  G01J5/04 ,  G01J5/06 ,  G01J5/12 ,  G01J5/16 ,  G01J5/26

CPC classification number: G01J5/04 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/025 ,  G01J5/12 ,  G01J5/16 ,  G01J2005/0081 ,  G01J2005/066 ,  G01J2005/068

Abstract: A thermopile detector means for a temperature measuring instrument physically and electrically configured to supply an output signal which indicates target temperature substantially independent of the influence of ambient temperature changes. The detector means includes a first thermopile device exposed to radiation from the target and a transducer means, preferably a second thermopile device, shielded from the target and connected in series opposition to the first.

Abstract translation: 一种用于温度测量仪器的热电堆检测器，其物理和电气配置为提供指示目标温度的输出信号，其基本上不受环境温度变化的影响。 检测器装置包括暴露于来自靶的辐射的第一热电堆装置和与目标相隔离并且与第一热电堆串联地连接的换能器装置，优选地是第二热电堆装置。