PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL
    21.
    发明申请
    PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL 有权
    脉冲光束光谱特征控制

    公开(公告)号:US20160380402A1

    公开(公告)日:2016-12-29

    申请号:US14794508

    申请日:2015-07-08

    Applicant: Cymer, LLC

    Abstract: A system includes a first actuation module coupled to a first actuatable apparatus of an optical source, the first actuatable apparatus being altered by the first actuation module to adjust the spectral feature of the pulsed light beam; a second actuation module coupled to a second actuatable apparatus of the optical source, the second actuatable apparatus being altered by the second actuation module to adjust the spectral feature of the pulsed light beam; and a control system configured to receive an indication regarding the operating state of the first actuatable apparatus; and send a signal to the second actuation module to adjust the spectral feature of the pulsed light beam to either: prevent the first actuatable apparatus from saturating based on the operating state of the first actuatable apparatus, or desaturate the first actuatable apparatus if the first actuatable apparatus is saturated.

    Abstract translation: 系统包括耦合到光源的第一致动装置的第一致动模块,第一致动装置被第一致动模块改变以调节脉冲光束的光谱特征; 耦合到所述光源的第二致动装置的第二致动模块,所述第二致动装置被所述第二致动模块改变以调整所述脉冲光束的光谱特征; 以及控制系统,被配置为接收关于所述第一可致动装置的操作状态的指示; 并且向第二致动模块发送信号以将脉冲光束的光谱特征调整为:基于第一致动装置的操作状态来防止第一致动装置饱和,或者如果第一可致动装置 装置饱和。

    Imaging apparatus and microscope system having the same
    22.
    发明授权
    Imaging apparatus and microscope system having the same 有权
    成像装置和显微镜系统具有相同的功能

    公开(公告)号:US09528878B2

    公开(公告)日:2016-12-27

    申请号:US14074892

    申请日:2013-11-08

    Inventor: Masanori Mitsui

    Abstract: Disclosed is an imaging apparatus including: a spectroscopic measurement section configured to measure a spectral characteristic of a subject; a spectral image capture section configured to capture a subject image separated into a plurality of colors through color separation to create a plurality of spectral images; and a color separation characteristic determining section configured to determine a color separation characteristic to be used for image capturing of the spectral image capture section, based on the spectral characteristic of the subject measured by the spectroscopic measurement section. The color separation characteristic determining section determines a count of color separations in the image capturing of the spectral image capture section and spectral bands corresponding to each of the color separations.

    Abstract translation: 公开了一种成像装置,包括:分光测量部,被配置为测量被检体的光谱特性; 光谱图像捕获部分,被配置为通过颜色分离捕获分离成多种颜色的被摄体图像以产生多个光谱图像; 以及颜色分离特性确定部分,被配置为基于由光谱测量部分测量的被摄体的光谱特性来确定用于光谱图像捕获部分的图像拍摄的颜色分离特性。 颜色分离特性确定部分确定光谱图像捕获部分的图像拍摄中的分色数和与每个分色相对应的光谱带。

    Fourier transform infrared spectrophotometer
    23.
    发明授权
    Fourier transform infrared spectrophotometer 有权
    傅里叶变换红外分光光度计

    公开(公告)号:US09459150B2

    公开(公告)日:2016-10-04

    申请号:US14770849

    申请日:2013-02-28

    Inventor: Hisato Fukuda

    Abstract: A Fourier transform infrared spectrophotometer that is free from an effect of interference condition change resulting from an accessory being mounted and has a high measurement accuracy is provided. A Fourier transform infrared spectrophotometer according to the present invention is a Fourier transform infrared spectrophotometer including a common base on which a sample chamber 2 and an interference optical system are mounted, where an accessory 20 can be detachably in the sample chamber, the Fourier transform infrared spectrophotometer including: accessory information reading means 22 for reading accessory information provided to the accessory 20 when the accessory 20 is mounted in the sample chamber 2; and setting condition changing means (controller 30) for changing a setting condition for the interference optical system based on the accessory information read by the accessory information reading means 22, the setting condition varying depending on, e.g., a difference in weight between respective accessories 20.

    Abstract translation: 提供了一种傅立叶变换红外分光光度计,其不受由安装的附件引起的干扰条件变化的影响并具有高测量精度。 根据本发明的傅里叶变换红外分光光度计是一种傅里叶变换红外分光光度计,其包括:共用基底,其上安装有样品室2和干涉光学系统,其中附件20可拆卸地在样品室中,傅里叶变换红外 分光光度计包括:附件信息读取装置22,用于当附件20安装在样品室2中时,读取附件信息; 以及用于根据由附件信息读取装置22读取的附件信息来改变干涉光学系统的设置条件的设置条件改变装置(控制器30),该设置条件根据例如各个附件20之间的重量差异而变化 。

    EXTENDED CAVITY LASER ABSORPTION SPECTROSCOPY
    24.
    发明申请
    EXTENDED CAVITY LASER ABSORPTION SPECTROSCOPY 审中-公开
    扩展空间激光吸收光谱

    公开(公告)号:US20160265973A1

    公开(公告)日:2016-09-15

    申请号:US15014852

    申请日:2016-02-03

    Inventor: Mark W. Smith

    CPC classification number: G01J3/42 G01J3/0208 G01J3/0216 G01J3/0264 G01J3/12

    Abstract: Technologies for detecting absorption of electromagnetic radiation traveling through a measurement volume of interest are described herein. In a general embodiment, a laser is used to emit electromagnetic radiation through the measurement volume where absorption is desirably detected. An optical collector receives a portion of the radiation and directs a first fraction of the portion back to a gain medium of the laser, where the radiation is amplified and emitted again, and directs a second fraction to an optical sensor that can detect absorption in the measurement volume based upon attenuation of energy of the radiation. As the radiation feeds back to the gain medium and is emitted again, energy at attenuated wavelengths is amplified less than at other wavelengths. Thus, attenuation of energy of the radiation due to absorption in the measurement volume is cumulative, and relatively small absorptions are amplified, allowing smaller absorptions to be detected more easily.

    Abstract translation: 本文描述了用于检测通过感兴趣的测量体积传播的电磁辐射的吸收的技术。 在一般实施例中,使用激光器通过测量体积发射电磁辐射,其中期望检测吸收。 光收发器接收辐射的一部分并且将该部分的第一部分引导回激光器的增益介质,其中辐射被再次放大并发射,并且将第二部分引导到光学传感器,该光学传感器可以检测在 基于辐射能量衰减的测量体积。 随着辐射反馈到增益介质并再次发射,衰减波长的能量被放大得比其他波长小。 因此,由于测量体积中的吸收引起的辐射能量的衰减是累积的,并且相对较小的吸收被放大,允许更容易地检测到更小的吸收。

    INTEGRATED CIRCUIT FOR SPECTRAL IMAGING SYSTEM

    公开(公告)号:US20160252396A1

    公开(公告)日:2016-09-01

    申请号:US15059621

    申请日:2016-03-03

    Applicant: IMEC

    Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non-monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.

    HIGH SPEED SPECTROSCOPIC SENSOR ASSEMBLY AND SYSTEM
    27.
    发明申请
    HIGH SPEED SPECTROSCOPIC SENSOR ASSEMBLY AND SYSTEM 有权
    高速光谱传感器组件和系统

    公开(公告)号:US20160178434A1

    公开(公告)日:2016-06-23

    申请号:US14909213

    申请日:2014-07-31

    Applicant: TSI, INC.

    Abstract: A laser-based spectroscopy system that combines a distance/proximity standoff sensor, a high-repetition rate laser spectroscopy system, and software with a decision-making algorithm embedded in a processing unit which in combination performs selective firing of the laser when the target object is within an interrogation zone. In a related embodiment, the system provides selective sorting of spectroscopic signals based on information from the standoff signal and from information contained in the spectral signals themselves. The laser emission can be actively controlled while keeping the laser firing, thereby preserving the thermal stability and hence the power of the laser; and the standoff sensor information and the spectral information can be combined to determine the proper relative weighting or importance of each piece of spectral information.

    Abstract translation: 一种基于激光的光谱系统,其将距离/接近距离传感器,高重复率激光光谱系统和软件与嵌入在处理单元中的决策算法组合,所述处理单元在目标物体上组合执行激光的选择性点火 在询问区内。 在相关实施例中,系统基于来自间隔信号的信息和从包含在频谱信号本身中的信息提供对光谱信号的选择性分类。 可以在保持激光烧制的同时主动地控制激光发射,从而保持激光的热稳定性和因此的功率; 并且可以组合对立传感器信息和光谱信息以确定每条光谱信息的适当的相对权重或重要性。

    X-ray apparatus, method of using the same and X-ray irradiation method
    28.
    发明授权
    X-ray apparatus, method of using the same and X-ray irradiation method 有权
    X射线装置,使用该方法和X射线照射方法

    公开(公告)号:US09336917B2

    公开(公告)日:2016-05-10

    申请号:US13142787

    申请日:2010-06-30

    Abstract: An X-ray apparatus that creates a virtual source having a narrow energy bandwidth and enables a high-resolution X-ray diffraction measurement; a method of using the same; and an X-ray irradiation method are provided. An X-ray apparatus 100 includes a monochromator 105 that focuses a divergent X-ray beam while dispersing it and a selection part 107 that is installed in a condensing position of the condensed X-ray beam for selecting an X-ray beam having a wavelength in a specific range, allowing it to pass through, and creating a virtual source. With this arrangement, it is possible to create a virtual source having a narrow energy bandwidth at a focal point 110 and by means of the virtual source a high-resolution X-ray diffraction measurement is available. By using the X-ray apparatus 100, it is possible to sufficiently separate an X-ray beam having such an extremely narrow energy bandwidth as, for example, Kα1 ray from Kα2 ray. In addition, it is also possible to cut out part of continuous X-ray beams to create a virtual source.

    Abstract translation: 一种X射线装置,其产生具有窄能带宽的虚拟光源,并能进行高分辨率X射线衍射测量; 使用该方法的方法; 并提供X射线照射方法。 X射线装置100包括:单色器105,其分散发散的X射线束;以及选择部107,其安装在聚光的X射线束的聚光位置,用于选择具有波长的X射线 在一个特定的范围内,允许它通过,并创建一个虚拟源。 利用这种布置,可以在焦点110处创建具有窄能带宽的虚拟源,并且借助于虚拟源,可以获得高分辨率X射线衍射测量。 通过使用X射线装置100,能够从Kα2射线充分地分离具有例如Kα1射线的极窄能量带宽的X射线束。 此外,还可以切出部分连续X射线束以创建虚拟源。

    Integrated circuit for spectral imaging system
    30.
    发明授权
    Integrated circuit for spectral imaging system 有权
    光谱成像系统集成电路

    公开(公告)号:US09304039B2

    公开(公告)日:2016-04-05

    申请号:US13482860

    申请日:2012-05-29

    Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.

    Abstract translation: 公开了一种用于成像系统的集成电路。 在一个方面,集成电路具有光学传感器阵列,与传感器集成的光学滤波器阵列,并被配置为将波长带传递到一个或多个传感器上,并且读出电路以从 传感器来表示图像。 不同的滤光器被配置为具有不同的厚度,以通过干涉传递不同波长的波段,并且允许检测波长谱。 读出电路可以使一个光学滤波器下的多个像素平行读出。 厚度可以在整个阵列上单调变化。 读出或稍后的图像处理可能涉及波长之间的选择或插值,以进行频谱采样或移位,以补偿厚度误差。

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