公开(公告)号：US20150235806A1

公开(公告)日：2015-08-20

申请号：US14687890

申请日：2015-04-15

Applicant: Dov SHACHAL

Inventor： Dov SHACHAL

IPC: H01J37/28 ,  H01J37/06

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US09025018B2

公开(公告)日：2015-05-05

申请号：US12303717

申请日：2007-06-07

Applicant: Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W.G. Persoon

Inventor： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W.G. Persoon

IPC: H04N5/253 ,  H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract translation: 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。

公开(公告)号：US08729497B2

公开(公告)日：2014-05-20

申请号：US13877947

申请日：2011-10-05

Applicant: Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

Inventor： Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J2237/2006 ,  H01J2237/204 ,  H01J2237/208

Abstract: Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.

Abstract translation: 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。

公开(公告)号：US08530857B2

公开(公告)日：2013-09-10

申请号：US12932246

申请日：2011-02-22

Applicant: Yoshihisa Ooae ,  Youichi Shimizu

Inventor： Yoshihisa Ooae ,  Youichi Shimizu

IPC: G21K5/08

CPC classification number: F16C29/025 ,  F16C32/0614 ,  F16C2300/62 ,  F16C2360/45 ,  G03F7/70716 ,  G03F7/70816 ,  H01J37/20 ,  H01J2237/2006 ,  H01J2237/202 ,  H01J2237/3175

Abstract: A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to guide the gas from an inlet port to an outlet port for supplying the gas to the air chamber of the slider.

Abstract translation: 在真空中使用的平台装置包括：用于产生气体的气体供应单元; 具有上，下，右和左表面的基部构件; 滑块，其形成为围绕所述基座构件且具有面向所述基座构件的各个表面的表面并且被设置为可移动的框架形状; 以及空气轴承，其构造成通过将气体供给到基部构件和滑块之间的空间来浮动滑块。 该滑块包括：设置在面向基座部件的表面上的用于积聚空气的空气室，底座部件包括滑块移动空气流动通道，该滑动件移动空气流动通道构造成将气体从入口引导到出口以将气体供应到 滑块的气室。

公开(公告)号：US20130193343A1

公开(公告)日：2013-08-01

申请号：US13877947

申请日：2011-10-05

Applicant: Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

Inventor： Yasuhira Nagakubo ,  Toshiaki Tanigaki ,  Hideki Hirota ,  Katsuji Ito ,  Takayuki Asakawa

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J2237/2006 ,  H01J2237/204 ,  H01J2237/208

Abstract: Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.

Abstract translation: 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。

公开(公告)号：US07906762B2

公开(公告)日：2011-03-15

申请号：US12303611

申请日：2007-06-07

Applicant: Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

Inventor： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

IPC: H01J37/08 ,  H01J37/18 ,  H01J5/02

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract translation: 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

公开(公告)号：US20100276592A1

公开(公告)日：2010-11-04

申请号：US12303715

申请日：2007-04-26

Applicant: Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

Inventor： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

IPC: F16C29/02 ,  H01J37/28 ,  H01J37/08 ,  H01J37/18 ,  H01J5/02 ,  H01J27/02

CPC classification number: H01J37/28 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/166 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/204

Abstract: A slider bearing for use with an apparatus comprising a vacuum chamber (11). The slider bearing comprises: a base plate (20) in contact with the vacuum chamber (11) at one side, said base plate showing a first through-hole (21) in contact with the vacuum chamber (11), a second plate (30), one side of the second plate in contact with the base plate (20), said second plate showing a second through-hole (31), the faces of the base plate and the second plate facing each other being sufficiently smooth to form a non-elastomeric vacuum seal, said base plate (20) and said second plate (30) slidable between a first relative position in which the first through-hole (21) and the second through-hole (31) do not overlap and a second relative position in which the first through-hole and the second through-hole overlap, characterised in that the second plate (30) is a flexible plate, the face of the flexible plate opposite to the base plate is equipped to seal against a cup (50), the cup equipped to hold a sample (1), the first through-hole (21) in the base plate shows a rim facing the flexible plate (30) with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimise particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, the particle generation is minimized.

Abstract translation: 一种用于与包括真空室（11）的设备一起使用的滑块轴承。 滑动轴承包括：在一侧与真空室（11）接触的基板（20），所述基板显示与真空室（11）接触的第一通孔（21），第二板 30），与所述基板（20）接触的所述第二板的一侧，所述第二板表示第二通孔（31），所述基板和所述第二板的面彼此相对平滑以形成 非弹性真空密封件，所述基板（20）和所述第二板（30）可在其中第一通孔（21）和第二通孔（31）不重叠的第一相对位置和第二通孔 第二相对位置，其中第一通孔和第二通孔重叠，其特征在于，第二板（30）是柔性板，与基板相对的柔性板的表面被装备以密封杯 （50），装备有样品（1）的杯子，底板中的第一通孔（21） 面对具有受控曲率的柔性板（30），边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且赫兹接触压力小于预定值， 定义的最大接触压力，所选择的预定最大接触压力以最小化颗粒产生。 通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。 通过以受控的半径形成轮辋，使颗粒的产生最小化。

公开(公告)号：US20100140470A1

公开(公告)日：2010-06-10

申请号：US12446757

申请日：2007-10-23

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/225 ,  F16J15/02

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US07550743B1

公开(公告)日：2009-06-23

申请号：US11690176

申请日：2007-03-23

Applicant: Douglas K. Masnaghetti

Inventor： Douglas K. Masnaghetti

IPC: H01J33/02 ,  H01J37/18

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/162 ,  H01J2237/2006 ,  H01J2237/2605

Abstract: A particle beam system having a beam source for generating a particle beam and a vacuum air bearing. The beam source is mounted to a first side of the vacuum air bearing, with an active side of the vacuum air bearing disposed on an opposing second side of the vacuum air bearing. The active side is adapted to receive and retain a substrate. A beam port is formed completely through the vacuum air bearing from the first side to the second side. Means are provided for moving the substrate across the second side of the vacuum air bearing and positioning the substrate under the beam port. Means are also provided for sealing an interior of the beam source from exposure to atmosphere through the beam port.

Abstract translation: 一种具有用于产生粒子束的束源和真空空气轴承的粒子束系统。 梁源被安装到真空空气轴承的第一侧，真空空气轴承的活动侧设置在真空空气轴承的相对的第二侧上。 活性侧适于接收和保持基底。 梁端口从第一侧到第二侧完全穿过真空空气轴承。 提供了用于使基板移动穿过真空空气轴承的第二侧并将基板定位在波束端口下方的装置。 还提供了用于将束源的内部密封通过射束端口暴露于大气的装置。

公开(公告)号：US20090066031A1

公开(公告)日：2009-03-12

申请号：US12283183

申请日：2008-11-10

Applicant: Richard F. McRay ,  Nicholas R. White

Inventor： Richard F. McRay ,  Nicholas R. White

IPC: F16J15/32

CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J2237/2006 ,  H01J2237/20228 ,  Y10S277/911 ,  Y10S277/913

Abstract: The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system.The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus. The compound unit also allows the user to maintain a high vacuum within the vacuum environment despite the fact that the height of the feed-through member can be raised and lowered repeatedly at will. Its compact size frees space which can be used to extend the vacuum chamber for purposes such as a deep Faraday cup for beam measurement.

Abstract translation: 本发明是一种具有明显减小的尺寸和高度尺寸的复合滑动密封单元，其被用作用于从大气环境部分延伸到安装的可旋转轴的通过横跨和即将高度调节的离散组件， 离子注入机装置的真空环境部分。 延伸的可旋转轴通常被形成为可旋转的中空管或导管（适于电气部件的通过）和/或作为适于安装枢转扫描径向臂翻转系统的可旋转支撑件。 复合滑动密封单元的构造方式和大体上减小的高度尺寸允许从大气环境延伸并延伸穿过复合单元的安装的可旋转轴的高度的按需改变变为有限的空间体积 常规离子注入装置内的真空环境。 复合单元还允许用户在真空环境内保持高真空，尽管馈送构件的高度可以随意重复升高和降低。 其紧凑的尺寸释放了可用于延伸真空室的空间，用于例如用于光束测量的深法拉第杯。