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    Fast pressure sensing system
    22.
    发明授权
    Fast pressure sensing system 有权

    公开(公告)号：US11101120B2

    公开(公告)日：2021-08-24

    申请号：US16664389

    申请日：2019-10-25

    Applicant: SRI International

    Inventor： Ashish Chaudhary ,  Robert Timothy Short

    IPC: G01L21/30 ,  H01J41/02 ,  G01N27/64 ,  G01L21/34 ,  G01L21/32 ,  G01L21/12 ,  G01L9/00 ,  G01L19/00 ,  H01J41/06 ,  H01J41/04

    Abstract: The disclosure includes an ionization chamber, a first electron multiplier, and a second electron multiplier. The ionization chamber is configured to receive gas molecules from an environment at a pressure. The first electron multiplier is configured to receive a plurality of photons from a photon source, generate a first plurality of electrons from the plurality of photons, and discharge the first plurality of electrons into the ionization chamber to generate a plurality of gas ions from at least a portion of the gas molecules. The second electron multiplier is configured to receive the plurality of gas ions from the ionization chamber and generate a second plurality of electrons from the plurality of gas ions that is proportional to a quantity of the plurality of gas ions. A quantity of electrons of the second plurality of electrons is indicative of the pressure.

    Ionization gauge for high pressure operation
    24.
    发明授权
    Ionization gauge for high pressure operation 有权
    用于高压操作的电离计

    公开(公告)号：US09593996B2

    公开(公告)日：2017-03-14

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: H01J27/02 ,  B01D59/44 ,  G01L19/06 ,  G01L21/32 ,  H01J41/04 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    Miniature ionization gauge utilizing multiple ion collectors
    26.
    发明授权
    Miniature ionization gauge utilizing multiple ion collectors 失效
    使用多个离子收集器的微型电离计

    公开(公告)号：US6025723A

    公开(公告)日：2000-02-15

    申请号：US917932

    申请日：1997-08-27

    Applicant: Daniel Granville Bills

    Inventor： Daniel Granville Bills

    IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32 ,  H05B31/26 ,  H05H15/00

    CPC classification number: H01J41/04

    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

    Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

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