公开(公告)号：US20070200069A1

公开(公告)日：2007-08-30

申请号：US10571347

申请日：2004-09-02

Applicant: Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

Inventor： Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

IPC: G21K1/08

CPC classification number: H01J37/26 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/05 ,  H01J37/153 ,  H01J37/3174 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

Abstract: The present invention relates to e.g. a charged particle beam energy width reduction system for a charged particle beam with a z-axis along the optical axis and a first and a second plane, comprising, a first element (110) acting in a focusing and dispersive manner, a second element (112) acting in a focusing and dispersive manner, a first quadrupole element (410) being positioned such that, in operation, a field of the first quadrupole element overlaps with a field of the first element acting in a focusing and dispersive manner, a second quadrupole element (412) being positioned such that, in operation, a field of the second quadrupole element overlaps with a field of the second element acting in a focusing and dispersive manner, a first charged particle selection element (618) being positioned, in beam direction, before the first element acting in a focusing and dispersive manner, and a second charged particle selection element (616;716) being positioned, in beam direction, after the first element acting in a focusing and dispersive manner. Thereby, a virtually dispersive source-like location without an inherent dispersion limitation can be realized.

Abstract translation: 本发明涉及例如 用于沿着光轴具有z轴的带电粒子束的带电粒子束能量宽度减小系统以及包括以聚焦和分散方式起作用的第一元件（110）的第一和第二平面，第二元件（ 112），第一四极元件（410）被定位成使得在操作中，第一四极元件的场与以聚焦和分散方式作用的第一元件的场重叠，第二四极元件 四极元件（412）被定位成使得在操作中，第二四极元件的场与以聚焦和分散方式作用的第二元件的场重叠，第一带电粒子选择元件（618）被定位成束 方向，在第一元件以聚焦和分散方式作用之前，第二带电粒子选择元件（616; 716）在光束方向上位于第一元件作用于第一元件 聚焦和分散的方式。 因此，可以实现没有固有分散限制的虚拟色散源状位置。

公开(公告)号：US06627890B2

公开(公告)日：2003-09-30

申请号：US09535030

申请日：2000-03-24

Applicant: Stefan Lanio

Inventor： Stefan Lanio

IPC: H01J3700

CPC classification number: H01J37/26 ,  H01J37/153 ,  H01J2237/1506

Abstract: A particle beam apparatus for tilted observation of a specimen is capable of producing magnification images of the specimen under tilted observation with high accuracy. The particle beam apparatus includes a source for generating a particle beam, deflection means for tilting the particle beam and a lens for focussing the tilted particle beam onto the specimen. Furthermore, multipole correction means are provided for correcting the lens aberrations occurring due to off-axial intersection of the lens by the tilted particle beam. The lens is an electrostatic, magnetic or combined electrostatic-magnetic objective lens.

Abstract translation: 用于倾斜观察样品的粒子束装置能够以高精度在倾斜观察下产生样本的放大图像。 粒子束装置包括用于产生粒子束的源，用于使粒子束倾斜的偏转装置和用于将倾斜的粒子束聚焦到样本上的透镜。 此外，提供多极校正装置，用于校正由于倾斜的粒子束而导致的透镜的非轴向交叉产生的透镜像差。 透镜是静电，磁性或组合静电磁物镜。

公开(公告)号：US6107633A

公开(公告)日：2000-08-22

申请号：US113048

申请日：1998-07-09

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/244 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26

CPC classification number: H01J37/145 ,  H01J37/141

Abstract: An electron beam lens has a magnetic lens provided with first and second pole pieces for influencing an electron beam and forming a magnetic field between the two pole pieces. A third pole piece is provided, but is not in magnetic contact with the two other pole pieces. The third pole piece is immersed in the magnetic field formed between the first and second pole pieces and extracts a part of such magnetic field. Also disclosed is a cathode lens and an electron beam device for use with such an electron beam lens.

Abstract translation: 电子束透镜具有设置有用于影响电子束并在两个极片之间形成磁场的第一和第二极片的磁性透镜。 提供第三极靴，但不与另外两个极片磁接触。 第三极片浸入形成在第一和第二极片之间的磁场中，并提取这种磁场的一部分。 还公开了一种用于这种电子束透镜的阴极透镜和电子束装置。

公开(公告)号：US4760261A

公开(公告)日：1988-07-26

申请号：US907043

申请日：1986-09-12

Applicant: Harald Rose ,  Stefan Lanio

Inventor： Harald Rose ,  Stefan Lanio

IPC: H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H05B31/26 ,  G21K1/08

CPC classification number: H01J37/05

Abstract: An image forming alpha filter having pole pieces with straight edges is disclosed which has good local resolution and very good energy resolution. It includes three deflection regions, which are separated from one another by relatively large interspaces.

Abstract translation: 公开了具有良好的局部分辨率和非常好的能量分辨率的具有直边缘极片的图像形成α滤光器。 它包括三个偏转区域，它们通过相对较大的间隙彼此分开。

公开(公告)号：US20150021474A1

公开(公告)日：2015-01-22

申请号：US13960393

申请日：2013-08-06

Applicant: Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

Inventor： Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

IPC: H01J37/21 ,  H01J37/147 ,  H01J37/10

CPC classification number: H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

Abstract translation: 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。

公开(公告)号：US20140103201A1

公开(公告)日：2014-04-17

申请号：US13663692

申请日：2012-10-30

Applicant: Aleksandra Kramer ,  Stefan Lanio

Inventor： Aleksandra Kramer ,  Stefan Lanio

IPC: H01J3/18 ,  H01J3/20

CPC classification number: G21K1/093 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/28

Abstract: A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 μm and coaxially aligned with at least the element having at least the 8-pole compensation capability.

Abstract translation: 描述了在扫描带电粒子束装置中补偿机械，磁性和/或静电不准确性的方法。 该方法包括对准过程，其中进行以下步骤：用具有至少8极补偿能力的元件补偿4折像散，其中对准过程的对准和补偿步骤作用于具有束尺寸的带电粒子束 在至少50μm的两个正交方向上，并且至少与具有至少8极补偿能力的元件同轴对准。

公开(公告)号：US20130270438A1

公开(公告)日：2013-10-17

申请号：US13543593

申请日：2012-07-06

Applicant: Stefan LANIO ,  Gerald Schönecker ,  Dieter Winkler

Inventor： Stefan LANIO ,  Gerald Schönecker ,  Dieter Winkler

IPC: H01J37/244 ,  H01J37/21

CPC classification number: H01J37/09 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

Abstract translation: 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。

公开(公告)号：US08373136B2

公开(公告)日：2013-02-12

申请号：US12579869

申请日：2009-10-15

Applicant: Gerald Schoenecker ,  Stefan Lanio

Inventor： Gerald Schoenecker ,  Stefan Lanio

IPC: H01J3/18 ,  H01J3/20

CPC classification number: H01J37/1472 ,  H01J2237/1508 ,  H01J2237/153

Abstract: An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

Abstract translation: 提供了一种消色差束分离器装置，用于将初级带电粒子束与另一带电粒子束分离并在光轴（142）上提供初级带电粒子束，包括初级带电粒子束入口（134），初级带电粒子束 包括光轴的出口（132），适于产生磁场的磁偏转元件（163）和适于产生与磁场重叠的电场的静电偏转元件（165），其中，从 静电偏转元件和磁偏转元件被定位和/或定位以补偿八极杆的影响。

公开(公告)号：US20110272577A1

公开(公告)日：2011-11-10

申请号：US12776980

申请日：2010-05-10

Applicant: Stefan LANIO ,  Gerald SCHOENECKER

Inventor： Stefan LANIO ,  Gerald SCHOENECKER

IPC: H01J37/147 ,  H01J3/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/1523 ,  H01J2237/1534 ,  H01J2237/244

Abstract: An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.

Abstract translation: 电子束装置包括：用于发射一次电子束的射束发射器; 用于将一次电子束聚焦到样本上的目标电子透镜，物镜限定光轴; 具有用于从一次电子束分离信号电子束的第一色散的光束分离器; 和色散补偿元件。 色散补偿元件具有第二色散，色散补偿元件适用于独立于色散补偿元件下游的主光束的倾斜角而调节第二色散，使得第二色散基本上补偿第一色散。 色散补偿元件沿着一级电子束布置在分束器的上游。

公开(公告)号：US07679054B2

公开(公告)日：2010-03-16

申请号：US10571347

申请日：2004-09-02

Applicant: Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

Inventor： Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio

IPC: H01J49/00

CPC classification number: H01J37/26 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/05 ,  H01J37/153 ,  H01J37/3174 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

Abstract: The present invention relates to e.g. a charged particle beam energy width reduction system for a charged particle beam with a z-axis along the optical axis and a first and a second plane, comprising, a first element acting in a focusing and dispersive manner, a second element acting in a focusing and dispersive manner, a first quadrupole element being positioned such that, in operation, a field of the first quadrupole element overlaps with a field of the first element acting in a focusing and dispersive manner, a second quadrupole element being positioned such that, in operation, a field of the second quadrupole element overlaps with a field of the second element acting in a focusing and dispersive manner, a first charged particle selection element being positioned, in beam direction, before the first element acting in a focusing and dispersive manner, and a second charged particle selection element being positioned, in beam direction, after the first element acting in a focusing and dispersive manner. Thereby, a virtually dispersive source-like location without an inherent dispersion limitation can be realized.

Abstract translation: 本发明涉及例如 用于带有沿着光轴的z轴的带电粒子束的带电粒子束能量宽度减小系统以及包括以聚焦和分散方式起作用的第一元件的第一和第二平面， 第一四极元件被定位成使得在操作中，第一四极元件的场与以聚焦和分散方式作用的第一元件的场重叠，第二四极元件被定位成使得在操作中 第二四极元件的场与以聚焦和分散方式作用的第二元件的场重叠，第一带电粒子选择元件沿光束方向定位在第一元件以聚焦和分散方式作用之前，以及 第二带电粒子选择元件在光束方向上位于第一元件以聚焦和分散方式作用之后。 因此，可以实现没有固有分散限制的虚拟色散源状位置。